[go: up one dir, main page]

JPS6467984A - Superconducting device - Google Patents

Superconducting device

Info

Publication number
JPS6467984A
JPS6467984A JP62223946A JP22394687A JPS6467984A JP S6467984 A JPS6467984 A JP S6467984A JP 62223946 A JP62223946 A JP 62223946A JP 22394687 A JP22394687 A JP 22394687A JP S6467984 A JPS6467984 A JP S6467984A
Authority
JP
Japan
Prior art keywords
insulator
ion implanting
superconductor
resistor
superconducting material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62223946A
Other languages
Japanese (ja)
Inventor
Masataka Minami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62223946A priority Critical patent/JPS6467984A/en
Publication of JPS6467984A publication Critical patent/JPS6467984A/en
Pending legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To provide a superconducting device which is fine, has high integration and can be laminated by uniformly depositing an oxide superconducting material on a semiconductor or insulator substrate, modifying a section except a section to be used as a superconductor as a resistor or an insulator, and simultaneously forming the superconductor, the resistor and the insulator. CONSTITUTION:An oxide series superconducting material 20 and an insulating layer 30 which is modified by ion implanting to the material are formed in the same plane on an insulator substrate 10. The material can be deposited by sputtering or the like. The layer 30 is formed by covering a conductor pattern with a resist and then ion implanting vanadium or oxygen or the like with the pattern as a mask. Similarly, an oxide series superconducting material 21 and an insulating layer 31 are formed thereon. Since the layers 20, 30 are formed by ion implanting, they can be formed in the same plane flatly, and easily laminated in case of laminating them.
JP62223946A 1987-09-09 1987-09-09 Superconducting device Pending JPS6467984A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62223946A JPS6467984A (en) 1987-09-09 1987-09-09 Superconducting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62223946A JPS6467984A (en) 1987-09-09 1987-09-09 Superconducting device

Publications (1)

Publication Number Publication Date
JPS6467984A true JPS6467984A (en) 1989-03-14

Family

ID=16806177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62223946A Pending JPS6467984A (en) 1987-09-09 1987-09-09 Superconducting device

Country Status (1)

Country Link
JP (1) JPS6467984A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263767A (en) * 1994-01-14 1995-10-13 Trw Inc Planer type high-temperature superconducting integrated circuit using ion implantation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263767A (en) * 1994-01-14 1995-10-13 Trw Inc Planer type high-temperature superconducting integrated circuit using ion implantation

Similar Documents

Publication Publication Date Title
CA2033137A1 (en) Microwave component and method for fabricating substrate for use in microwave component
CA2052508A1 (en) Method for manufacturing superconducting device having a reduced thickness of oxide superconducting layer and superconducting device manufactured thereby
JPS5720486A (en) Superconductive integrated circuit and preparation thereof
EP0352201A3 (en) Conductive articles made from mixed metal oxides, and processes for their preparation
JPS6467984A (en) Superconducting device
JPS6451680A (en) Oxide ceramics laminated layer structure and its manufacture
CA2051778A1 (en) Method for manufacturing superconducting device having a reduced thickness of oxide superconducting layer and superconducting device manufactured thereby
JPS6428844A (en) Superconducting wiring
JPS6446990A (en) Josephson element and manufacture thereof
JPS5350986A (en) Josephson integrated circuit by multilayer structure
JPS6421905A (en) Manufacture of small-sized superconducting solenoid
JPS648682A (en) Manufacture of ceramic superconductor device
JPS6411380A (en) Manufacture of josephson element
JPS6489342A (en) Manufacture of semiconductor device
JPS643908A (en) Composite conductor
JPS5629383A (en) Manufacture of tunnel-junction type josephson element
JPS6463216A (en) Oxide superconductor
JPS6465718A (en) Manufacture of ceramic superconductive wire
CA2065625A1 (en) Process for patterning layered thin films including a superconductor layer
JPS5693113A (en) Thin-film magnetic head
JPS6463215A (en) High temperature superconductive material
JPS6473780A (en) Manufacture of superconducting device
JPS5688384A (en) Manufacture of josephson junction element
JPS6412550A (en) Superconducting wiring
JPS6433907A (en) Manufacture of superconductive coil