JPS6464232A - Conveyor - Google Patents
ConveyorInfo
- Publication number
- JPS6464232A JPS6464232A JP21911287A JP21911287A JPS6464232A JP S6464232 A JPS6464232 A JP S6464232A JP 21911287 A JP21911287 A JP 21911287A JP 21911287 A JP21911287 A JP 21911287A JP S6464232 A JPS6464232 A JP S6464232A
- Authority
- JP
- Japan
- Prior art keywords
- locus
- knot
- arm
- link
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 abstract 1
- 238000007493 shaping process Methods 0.000 abstract 1
- 238000004904 shortening Methods 0.000 abstract 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To reduce dust characteristics, to save space and to enable smooth conveyance by arranging a conveying arm consisting of a four-bar link mechanism into a vacuum treater, holding an article to be treated to intermediating knots for the conveying arm and installing a knot-length variable mechanism having elasticity to either knot of the intermediating knots. CONSTITUTION:A conveying arm 5 composed of a four-bar link mechanism conveying a tray 11, on which an article to be treated 10 is placed, into a treating chamber 1 from a pusher 13 is mounted into an anteroom 2. A holding arm 9 is connected integrally to an intermediating knot 7. The article to be treated 10 placed at the center of holding of the holding arm 9 is conveyed along the locus of the central point of the arm 9, a locus A, a locus B and a locus C. A four-bar link forms a dead point at a point PB where the locus transfers from the locus A to the locus B, and the link does not operate from the point PB by extremely weak driving torque. However, since rigidity is weakened by making the thickness of a follower knot 8 thinner than that of a link arm in another knot and shaping a deflection section 8a, the link can be operated while shortening the length of the follower knot 8 after the link passes through the point PB.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21911287A JPS6464232A (en) | 1987-09-03 | 1987-09-03 | Conveyor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21911287A JPS6464232A (en) | 1987-09-03 | 1987-09-03 | Conveyor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6464232A true JPS6464232A (en) | 1989-03-10 |
Family
ID=16730437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21911287A Pending JPS6464232A (en) | 1987-09-03 | 1987-09-03 | Conveyor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6464232A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5588789A (en) * | 1995-07-06 | 1996-12-31 | Brooks Automation | Load arm for load lock |
| US5658123A (en) * | 1995-09-15 | 1997-08-19 | Advanced Micro Devices, Inc. | Container-less transfer of semiconductor wafers through a barrier between fabrication areas |
| US5908281A (en) * | 1996-09-20 | 1999-06-01 | Brooks Automation Inc. | Coaxial drive loader arm |
| US6120229A (en) * | 1999-02-01 | 2000-09-19 | Brooks Automation Inc. | Substrate carrier as batchloader |
| US6663333B2 (en) * | 2001-07-13 | 2003-12-16 | Axcelis Technologies, Inc. | Wafer transport apparatus |
| US7092779B1 (en) | 1997-06-19 | 2006-08-15 | Conboy Michael R | Automated material handling system for a manufacturing facility divided into separate fabrication areas |
| WO2008136292A1 (en) * | 2007-04-27 | 2008-11-13 | Nabtesco Corporation | Robot arm |
| JP2017513036A (en) * | 2014-11-14 | 2017-05-25 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | Cargo fixing system and method for transferring a substrate in a lithography system |
-
1987
- 1987-09-03 JP JP21911287A patent/JPS6464232A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5588789A (en) * | 1995-07-06 | 1996-12-31 | Brooks Automation | Load arm for load lock |
| WO1997002195A1 (en) * | 1995-07-06 | 1997-01-23 | Brooks Automation, Inc. | Load arm for load lock |
| EP0836577A4 (en) * | 1995-07-06 | 2006-07-19 | Brooks Automation Inc | LOADING ARM FOR LOAD LOCKING |
| US5658123A (en) * | 1995-09-15 | 1997-08-19 | Advanced Micro Devices, Inc. | Container-less transfer of semiconductor wafers through a barrier between fabrication areas |
| US5908281A (en) * | 1996-09-20 | 1999-06-01 | Brooks Automation Inc. | Coaxial drive loader arm |
| US7092779B1 (en) | 1997-06-19 | 2006-08-15 | Conboy Michael R | Automated material handling system for a manufacturing facility divided into separate fabrication areas |
| US6120229A (en) * | 1999-02-01 | 2000-09-19 | Brooks Automation Inc. | Substrate carrier as batchloader |
| US6663333B2 (en) * | 2001-07-13 | 2003-12-16 | Axcelis Technologies, Inc. | Wafer transport apparatus |
| WO2008136292A1 (en) * | 2007-04-27 | 2008-11-13 | Nabtesco Corporation | Robot arm |
| US8677853B2 (en) | 2007-04-27 | 2014-03-25 | Nabtesco Corporation | Robot arm with temperature compensation |
| JP2017513036A (en) * | 2014-11-14 | 2017-05-25 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | Cargo fixing system and method for transferring a substrate in a lithography system |
| US10087019B2 (en) | 2014-11-14 | 2018-10-02 | Mapper Lithography Ip B.V. | Load lock system and method for transferring substrates in a lithography system |
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