JPS6453429A - Device for testing semiconductor chip - Google Patents
Device for testing semiconductor chipInfo
- Publication number
- JPS6453429A JPS6453429A JP62210922A JP21092287A JPS6453429A JP S6453429 A JPS6453429 A JP S6453429A JP 62210922 A JP62210922 A JP 62210922A JP 21092287 A JP21092287 A JP 21092287A JP S6453429 A JPS6453429 A JP S6453429A
- Authority
- JP
- Japan
- Prior art keywords
- rear side
- connectors
- probe card
- performance board
- probes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE:To enable the title test device to be repaired and modified by separately assembling the probe groups of a probe card and the circuit pattern groups of a performance board for use or separating them as a unit in a manner that both groups are separably connected through the intermediary of connectors. CONSTITUTION:Probes are arranged on the rear side of a probe card while circuit patterns 14 corresponding to the probes 13 are formed on the rear side of a performance board 12. Besides, a connector board 15 is fixed on the rear side of the performance board 12 to provide connectors 16 arranged taking regular polygonal shape on the rear side of the connector board 15. The connectors 16 are connected to the circuit patterns 14 of the performance board 12 through the intermediary of a flat cable 17. On the other hand, pogo pins 18 connected to the probes 13 are implanted in the upper surface of the probe card 10 so that the probe card 10 and the performance board 12 may be integrated with each other by inserting the polygonal pins 18 into the corresponding connectors 16.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62210922A JPS6453429A (en) | 1987-08-24 | 1987-08-24 | Device for testing semiconductor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62210922A JPS6453429A (en) | 1987-08-24 | 1987-08-24 | Device for testing semiconductor chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6453429A true JPS6453429A (en) | 1989-03-01 |
Family
ID=16597294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62210922A Pending JPS6453429A (en) | 1987-08-24 | 1987-08-24 | Device for testing semiconductor chip |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6453429A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003506686A (en) * | 1999-07-28 | 2003-02-18 | ナノネクサス インコーポレイテッド | Structure and manufacturing method of integrated circuit wafer probe card assembly |
| JP2004500699A (en) * | 1999-05-27 | 2004-01-08 | ナノネクサス インコーポレイテッド | Structure and manufacturing method of integrated circuit wafer probe card assembly |
| WO2004040325A1 (en) * | 2002-10-31 | 2004-05-13 | Advantest Corporation | Connection unit, board mounting device to be measured, probe card, and device interface unit |
| KR100482733B1 (en) * | 1998-07-07 | 2005-04-14 | 가부시키가이샤 어드밴티스트 | A probe card for ic testing apparatus |
| KR100774035B1 (en) * | 2002-10-31 | 2007-11-06 | 주식회사 아도반테스토 | Board and Probe Card |
| KR100791000B1 (en) * | 2006-10-31 | 2008-01-03 | 삼성전자주식회사 | Electrical inspection device and inspection method for high speed parallel inspection of wafers |
| JP2008506112A (en) * | 2004-07-07 | 2008-02-28 | カスケード マイクロテック インコーポレイテッド | Probe head with membrane suspension probe |
| JP2009052474A (en) * | 2007-08-27 | 2009-03-12 | Hitachi Ltd | Gas turbine equipment and operation method of gas turbine equipment |
| JP2011227059A (en) * | 2010-03-30 | 2011-11-10 | Ngk Spark Plug Co Ltd | Electric inspection jig and wiring board manufacturing method |
-
1987
- 1987-08-24 JP JP62210922A patent/JPS6453429A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100482733B1 (en) * | 1998-07-07 | 2005-04-14 | 가부시키가이샤 어드밴티스트 | A probe card for ic testing apparatus |
| JP2004500699A (en) * | 1999-05-27 | 2004-01-08 | ナノネクサス インコーポレイテッド | Structure and manufacturing method of integrated circuit wafer probe card assembly |
| JP2003506686A (en) * | 1999-07-28 | 2003-02-18 | ナノネクサス インコーポレイテッド | Structure and manufacturing method of integrated circuit wafer probe card assembly |
| CN100344976C (en) * | 2002-10-31 | 2007-10-24 | 株式会社爱德万测试 | Connection unit, board mounting device to be measured, probe card, and device interface unit |
| US7098680B2 (en) | 2002-10-31 | 2006-08-29 | Advantest Corp. | Connection unit, a board for mounting a device under test, a probe card and a device interfacing part |
| KR100717479B1 (en) * | 2002-10-31 | 2007-05-14 | 주식회사 아도반테스토 | Coupling unit for test apparatus |
| WO2004040325A1 (en) * | 2002-10-31 | 2004-05-13 | Advantest Corporation | Connection unit, board mounting device to be measured, probe card, and device interface unit |
| KR100774035B1 (en) * | 2002-10-31 | 2007-11-06 | 주식회사 아도반테스토 | Board and Probe Card |
| JP2008506112A (en) * | 2004-07-07 | 2008-02-28 | カスケード マイクロテック インコーポレイテッド | Probe head with membrane suspension probe |
| JP2012068256A (en) * | 2004-07-07 | 2012-04-05 | Cascade Microtech Inc | Probe head with membrane suspended probe |
| KR100791000B1 (en) * | 2006-10-31 | 2008-01-03 | 삼성전자주식회사 | Electrical inspection device and inspection method for high speed parallel inspection of wafers |
| JP2009052474A (en) * | 2007-08-27 | 2009-03-12 | Hitachi Ltd | Gas turbine equipment and operation method of gas turbine equipment |
| JP2011227059A (en) * | 2010-03-30 | 2011-11-10 | Ngk Spark Plug Co Ltd | Electric inspection jig and wiring board manufacturing method |
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