JPS6452233U - - Google Patents
Info
- Publication number
- JPS6452233U JPS6452233U JP14795887U JP14795887U JPS6452233U JP S6452233 U JPS6452233 U JP S6452233U JP 14795887 U JP14795887 U JP 14795887U JP 14795887 U JP14795887 U JP 14795887U JP S6452233 U JPS6452233 U JP S6452233U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- window
- quartz glass
- dry etching
- spectroscopic analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の基本的構成を示す集光部の断
面図、第２図は実施例に係るプラズマドライエツ
チング装置の要部断面図と周辺の回路図、第３図
は従来技術における集光部の断面図である。
１……チヤンバ壁部、２……窓、３……チヤン
バ内、４……石英ガラス板、５……オプチカルフ
アイバー、６……光。
Fig. 1 is a sectional view of a condensing section showing the basic configuration of the present invention, Fig. 2 is a sectional view of main parts and a peripheral circuit diagram of a plasma dry etching apparatus according to an embodiment, and Fig. 3 is a concentrator in the prior art. FIG. 3 is a cross-sectional view of the light section. 1... Chamber wall, 2... Window, 3... Inside the chamber, 4... Quartz glass plate, 5... Optical fiber, 6... Light.
Claims (1)
装置において、 ドライエツチング装置のチヤンバ壁部に窓を形
成し、同窓にチヤンバ内へ膨出した石英ガラス板
を設け、同石英ガラス板により集光された光をオ
プチカルフアイバで分光分析部へ導くことを特徴
としたエツチング終了判定装置における分光分析
用集光部。[Scope of Claim for Utility Model Registration] In an apparatus for determining the completion of dry etching using an emission spectrometry method, a window is formed in the wall of a chamber of the dry etching apparatus, a quartz glass plate is provided in the window that bulges into the chamber, and the quartz glass A condensing section for spectroscopic analysis in an etching completion determination device, characterized in that light condensed by a plate is guided to a spectroscopic analysis section by an optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14795887U JPS6452233U (en) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14795887U JPS6452233U (en) | 1987-09-28 | 1987-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6452233U true JPS6452233U (en) | 1989-03-31 |
Family
ID=31418838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14795887U Pending JPS6452233U (en) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6452233U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7254098B2 (en) | 2002-10-25 | 2007-08-07 | Samsung Electronics Co., Ltd. | CD-DVD compatible optical pickup and optical recording and/or reproducing apparatus using the same |
-
1987
- 1987-09-28 JP JP14795887U patent/JPS6452233U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7254098B2 (en) | 2002-10-25 | 2007-08-07 | Samsung Electronics Co., Ltd. | CD-DVD compatible optical pickup and optical recording and/or reproducing apparatus using the same |
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