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JPS6433834A - Electron beam device - Google Patents

Electron beam device

Info

Publication number
JPS6433834A
JPS6433834A JP62189374A JP18937487A JPS6433834A JP S6433834 A JPS6433834 A JP S6433834A JP 62189374 A JP62189374 A JP 62189374A JP 18937487 A JP18937487 A JP 18937487A JP S6433834 A JPS6433834 A JP S6433834A
Authority
JP
Japan
Prior art keywords
electron beam
metal cylinder
passage
magnetic flux
lens system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62189374A
Other languages
Japanese (ja)
Other versions
JP3099069B2 (en
Inventor
Eishin Murakami
Taizo Iwami
Masashi Yasunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62189374A priority Critical patent/JP3099069B2/en
Publication of JPS6433834A publication Critical patent/JPS6433834A/en
Application granted granted Critical
Publication of JP3099069B2 publication Critical patent/JP3099069B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To correctly control the electron beam irradiation position at a low cost by arranging a metal cylinder along the passage of an electron beam. CONSTITUTION:A thin metal cylinder 6 is arranged along the periphery of the passage of an electron beam 2 at the inside surrounded by the electromagnet of a deflecting lens system 4. A nonmagnetic material such as nonmagnetic stainless steel, Cu, or Al is used for the material of the metal cylinder 6 not to affect the deflection magnetic field or the like, the diameter of the metal cylinder 6 is set so that a sufficient space is formed inside not to impair the passage of the electron beam 2, and the longitudinal length is set so that the action of the magnetic field generated by the eddy current formed in a peripheral metal structure can be reduced by the deflection magnetic flux and leakage magnetic flux formed by the excitation of the coil 4b of the deflecting lens system 4. The action of the magnetic flux due to the eddy current on the orbit of the electron beam is thereby reduced, and the electron beam irradiation position can be precisely controlled at a high speed.
JP62189374A 1987-07-28 1987-07-28 Electron beam equipment Expired - Fee Related JP3099069B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62189374A JP3099069B2 (en) 1987-07-28 1987-07-28 Electron beam equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62189374A JP3099069B2 (en) 1987-07-28 1987-07-28 Electron beam equipment

Publications (2)

Publication Number Publication Date
JPS6433834A true JPS6433834A (en) 1989-02-03
JP3099069B2 JP3099069B2 (en) 2000-10-16

Family

ID=16240247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62189374A Expired - Fee Related JP3099069B2 (en) 1987-07-28 1987-07-28 Electron beam equipment

Country Status (1)

Country Link
JP (1) JP3099069B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103406657A (en) * 2013-08-09 2013-11-27 南京理工大学 Electromagnetic deflection scanning coil for machining electron beam
KR20180125608A (en) * 2016-04-11 2018-11-23 케이엘에이-텐코 코포레이션 Permanent Magnet Particle Beam Device and Method for Integrating Nonmagnetic Metal Portion for Regulation
CN111673259A (en) * 2020-07-13 2020-09-18 广东省焊接技术研究所（广东省中乌研究院） Split type electron beam deflection coil and electron beam equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147208A (en) * 1975-06-13 1976-12-17 Hitachi Ltd Deflector of charged particle
JPS5792745A (en) * 1980-11-29 1982-06-09 Toshiba Corp Electron beam deflecting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147208A (en) * 1975-06-13 1976-12-17 Hitachi Ltd Deflector of charged particle
JPS5792745A (en) * 1980-11-29 1982-06-09 Toshiba Corp Electron beam deflecting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103406657A (en) * 2013-08-09 2013-11-27 南京理工大学 Electromagnetic deflection scanning coil for machining electron beam
KR20180125608A (en) * 2016-04-11 2018-11-23 케이엘에이-텐코 코포레이션 Permanent Magnet Particle Beam Device and Method for Integrating Nonmagnetic Metal Portion for Regulation
CN111673259A (en) * 2020-07-13 2020-09-18 广东省焊接技术研究所（广东省中乌研究院） Split type electron beam deflection coil and electron beam equipment
CN111673259B (en) * 2020-07-13 2023-10-31 广东省焊接技术研究所（广东省中乌研究院） Split type electron beam deflection yoke and electron beam apparatus

Also Published As

Publication number Publication date
JP3099069B2 (en) 2000-10-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees