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JPS6431008A - Measuring apparatus for length by electron beam - Google Patents

Measuring apparatus for length by electron beam

Info

Publication number
JPS6431008A
JPS6431008A JP62188175A JP18817587A JPS6431008A JP S6431008 A JPS6431008 A JP S6431008A JP 62188175 A JP62188175 A JP 62188175A JP 18817587 A JP18817587 A JP 18817587A JP S6431008 A JPS6431008 A JP S6431008A
Authority
JP
Japan
Prior art keywords
rectangular
variable
electron beam
length
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62188175A
Other languages
Japanese (ja)
Inventor
Hiroshi Nozue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62188175A priority Critical patent/JPS6431008A/en
Publication of JPS6431008A publication Critical patent/JPS6431008A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PURPOSE:To sharply reduce a time required for measuring a length and thus to obtain a semiconductor of high quality, by a construction wherein an electrooptic system for forming, focusing and projecting a variable rectangular electron beam is set in a vacuum specular body. CONSTITUTION:The way of overlapping of an image formed by a rectangular aperture (KA) 102 with a rectangular aperture (KA) 105 is varied by a deflection electrode 120 provided between KA 102 and KA 105, and the shape of a beam is made variable successively. A variable rectangular electron beam 117 passing through KA 105 is reduced by a reducing lens 104, passes through a restricting aperture 118 and is projected on a wafer 109 by a projecting lens 119. The projected variable rectangular beam 117 is made to scan on the wafer 109 by a scanning deflection electrode 107. Secondary electrons generated thereby from an irradiated part are caught by a scintillator 121, secondary electron signals thus obtained are processed by a control unit 115, and the sizes can be determined. Since the beam extending to be long in the direction of a pattern for length measurement is used, a signal being excellent in S/N and highly reliable can be obtained by scanning several times for one spot.
JP62188175A 1987-07-27 1987-07-27 Measuring apparatus for length by electron beam Pending JPS6431008A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62188175A JPS6431008A (en) 1987-07-27 1987-07-27 Measuring apparatus for length by electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62188175A JPS6431008A (en) 1987-07-27 1987-07-27 Measuring apparatus for length by electron beam

Publications (1)

Publication Number Publication Date
JPS6431008A true JPS6431008A (en) 1989-02-01

Family

ID=16219074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62188175A Pending JPS6431008A (en) 1987-07-27 1987-07-27 Measuring apparatus for length by electron beam

Country Status (1)

Country Link
JP (1) JPS6431008A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041456A (en) * 1983-08-12 1985-03-05 Takai Seisakusho:Kk Preparation of silk-strained bean curd filled in cup
JPS6222010A (en) * 1985-07-23 1987-01-30 Mitsubishi Electric Corp Detecting method for pattern defect

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041456A (en) * 1983-08-12 1985-03-05 Takai Seisakusho:Kk Preparation of silk-strained bean curd filled in cup
JPS6222010A (en) * 1985-07-23 1987-01-30 Mitsubishi Electric Corp Detecting method for pattern defect

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