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JPS6422084A - Wave length control equipment - Google Patents

Wave length control equipment

Info

Publication number
JPS6422084A
JPS6422084A JP17861287A JP17861287A JPS6422084A JP S6422084 A JPS6422084 A JP S6422084A JP 17861287 A JP17861287 A JP 17861287A JP 17861287 A JP17861287 A JP 17861287A JP S6422084 A JPS6422084 A JP S6422084A
Authority
JP
Japan
Prior art keywords
wavelength
output
laser
controls
detection part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17861287A
Other languages
Japanese (ja)
Other versions
JP2572235B2 (en
Inventor
Yasuo Itakura
Osamu Wakabayashi
Masahiko Kowaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP17861287A priority Critical patent/JP2572235B2/en
Publication of JPS6422084A publication Critical patent/JPS6422084A/en
Application granted granted Critical
Publication of JP2572235B2 publication Critical patent/JP2572235B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)

Abstract

PURPOSE:To obtain a highly accurate wavelength control equipment capable of detecting absolute wavelength, by introducing a laser beam generated by a laser oscillator to an LIF detection part, and adjusting the wavelength of the laser beam generated by the laser oscillator by using the output of the LIF detection part. CONSTITUTION:A part of laser beam output from an excimer laser 10 is taken out by a half mirror 11, and introduced to an LIF detection part (laser induced saturation fluorescence detection part) 12, which selectivity absorbs the laser beam having a wavelength being a control target. When the output of the LIF detection part 12 exceeds the threshold level, a detection output is generated. A control part 14 controls a wavelength selection element adjusting equipment 15, according to the detected output delivered from a signal processing part 13, and controls a gas processor 16 which controls the gas flowing in a chamber 3 of the excimer laser. An air gap etalon is applied to a wavelength selection element 2. The wavelength selection element adjusting equipment 15 controls at least one of inclination angle and gap length of the air gap etalon, gas pressure of a gap part, etc.
JP17861287A 1987-07-17 1987-07-17 Wavelength control device Expired - Lifetime JP2572235B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17861287A JP2572235B2 (en) 1987-07-17 1987-07-17 Wavelength control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17861287A JP2572235B2 (en) 1987-07-17 1987-07-17 Wavelength control device

Publications (2)

Publication Number Publication Date
JPS6422084A true JPS6422084A (en) 1989-01-25
JP2572235B2 JP2572235B2 (en) 1997-01-16

Family

ID=16051491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17861287A Expired - Lifetime JP2572235B2 (en) 1987-07-17 1987-07-17 Wavelength control device

Country Status (1)

Country Link
JP (1) JP2572235B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02238685A (en) * 1989-03-13 1990-09-20 Agency Of Ind Science & Technol Excimer laser device
JPH09199780A (en) * 1996-01-16 1997-07-31 Nec Corp Narrow-frequency-band excimer laser device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02238685A (en) * 1989-03-13 1990-09-20 Agency Of Ind Science & Technol Excimer laser device
JPH09199780A (en) * 1996-01-16 1997-07-31 Nec Corp Narrow-frequency-band excimer laser device

Also Published As

Publication number Publication date
JP2572235B2 (en) 1997-01-16

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