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JPS6422081A - High frequency discharge excitation laser equipment - Google Patents

High frequency discharge excitation laser equipment

Info

Publication number
JPS6422081A
JPS6422081A JP17857187A JP17857187A JPS6422081A JP S6422081 A JPS6422081 A JP S6422081A JP 17857187 A JP17857187 A JP 17857187A JP 17857187 A JP17857187 A JP 17857187A JP S6422081 A JPS6422081 A JP S6422081A
Authority
JP
Japan
Prior art keywords
high frequency
matching circuit
circuit
middle point
discharge tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17857187A
Other languages
Japanese (ja)
Inventor
Akira Egawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Priority to JP17857187A priority Critical patent/JPS6422081A/en
Priority to PCT/JP1988/000710 priority patent/WO1989000776A1/en
Priority to DE88906098T priority patent/DE3884790T2/en
Priority to US07/329,790 priority patent/US4937834A/en
Priority to EP88906098A priority patent/EP0331734B1/en
Publication of JPS6422081A publication Critical patent/JPS6422081A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To enable the stable high frequency discharge excitation, by providing a matching circuit for impedance matching between a high frequency power supply and a laser tube, and grounding a middle point of reactance elements arranged in parallel with the output end of the matching circuit, to the earth point of a high frequency circuit. CONSTITUTION:A matching circuit 16 to match a high frequency power source 12 with a discharge tube 1 is constituted of an inductance L, and capacitors C1, C2, C3. The middle point between the capacitors C2 and C3 is grounded. Thereby the interference between discharge tube segments can be prevented. Since the middle point of the reactance circuit of the matching circuit output end is earthed in this constitution, the interference between the discharge tube segments is avoided, and the fluctuation of laser output is remarkably decreased.
JP17857187A 1987-07-17 1987-07-17 High frequency discharge excitation laser equipment Pending JPS6422081A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP17857187A JPS6422081A (en) 1987-07-17 1987-07-17 High frequency discharge excitation laser equipment
PCT/JP1988/000710 WO1989000776A1 (en) 1987-07-17 1988-07-15 R-f discharge-excited laser
DE88906098T DE3884790T2 (en) 1987-07-17 1988-07-15 LASER EXTENDED BY HF DISCHARGE.
US07/329,790 US4937834A (en) 1987-07-17 1988-07-15 High-frequency discharge pumping laser device
EP88906098A EP0331734B1 (en) 1987-07-17 1988-07-15 R-f discharge-excited laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17857187A JPS6422081A (en) 1987-07-17 1987-07-17 High frequency discharge excitation laser equipment

Publications (1)

Publication Number Publication Date
JPS6422081A true JPS6422081A (en) 1989-01-25

Family

ID=16050807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17857187A Pending JPS6422081A (en) 1987-07-17 1987-07-17 High frequency discharge excitation laser equipment

Country Status (1)

Country Link
JP (1) JPS6422081A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03250677A (en) * 1990-02-28 1991-11-08 Toshiba Corp Laser device
US5453557A (en) * 1992-10-01 1995-09-26 The Dow Chemical Company Processes for converting chlorinated byproducts and waste products to useful materials
US5764431A (en) * 1994-05-16 1998-06-09 Storage Technology Corporation Media velocity detection for a capstanless tape transport
JP2007134336A (en) * 2005-11-12 2007-05-31 Huettinger Elektronik Gmbh & Co Kg Method of operating vacuum plasma process apparatus and vacuum plasma process apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918699U (en) * 1982-07-29 1984-02-04 藤倉航装株式会社 Water immersion prevention device for the face of life jackets
JPS60177692A (en) * 1984-02-24 1985-09-11 Mitsubishi Electric Corp Laser oscillator
JPS6163073A (en) * 1984-06-19 1986-04-01 サツト（ソシエテ・アノニム・ド・テレコミユニカシヨン） Frequency stabilizer of rf exciting laser

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918699U (en) * 1982-07-29 1984-02-04 藤倉航装株式会社 Water immersion prevention device for the face of life jackets
JPS60177692A (en) * 1984-02-24 1985-09-11 Mitsubishi Electric Corp Laser oscillator
JPS6163073A (en) * 1984-06-19 1986-04-01 サツト（ソシエテ・アノニム・ド・テレコミユニカシヨン） Frequency stabilizer of rf exciting laser

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03250677A (en) * 1990-02-28 1991-11-08 Toshiba Corp Laser device
US5453557A (en) * 1992-10-01 1995-09-26 The Dow Chemical Company Processes for converting chlorinated byproducts and waste products to useful materials
US5764431A (en) * 1994-05-16 1998-06-09 Storage Technology Corporation Media velocity detection for a capstanless tape transport
US6441985B1 (en) * 1994-05-16 2002-08-27 Storage Technology Corporation Media velocity detection for a capstanless tape transport system
JP2007134336A (en) * 2005-11-12 2007-05-31 Huettinger Elektronik Gmbh & Co Kg Method of operating vacuum plasma process apparatus and vacuum plasma process apparatus
US8653405B2 (en) 2005-11-12 2014-02-18 Huettinger Elektronik Gmbh + Co. Kg Method for operating a vacuum plasma process system

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