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JPS5539134A - No-electrode fluorescent lamp device - Google Patents

No-electrode fluorescent lamp device

Info

Publication number
JPS5539134A
JPS5539134A JP11206278A JP11206278A JPS5539134A JP S5539134 A JPS5539134 A JP S5539134A JP 11206278 A JP11206278 A JP 11206278A JP 11206278 A JP11206278 A JP 11206278A JP S5539134 A JPS5539134 A JP S5539134A
Authority
JP
Japan
Prior art keywords
high frequency
frequency power
plasma
primary coil
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11206278A
Other languages
Japanese (ja)
Inventor
Michio Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11206278A priority Critical patent/JPS5539134A/en
Publication of JPS5539134A publication Critical patent/JPS5539134A/en
Pending legal-status Critical Current

Links

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)

Abstract

PURPOSE: To make a high frequency power effectively feedable to plasma, by providing a good impedance matching between the primary coil and plasma.
CONSTITUTION: The constitution of a coil, for transmitting a high frequency power from a high frequency power source 4 to plasma, comprises a primary coil 3a, wound on a support rod 6 with a less high frequency power loss and connected to the high frequency power source 4, and a secondary coil 2b, wound on this support rod 6 being separated from the primary coil 3a, having a mutual induction with the primary coil 3a and supplying a high frequency power to the plasma. In addition, in series to the secondary coil 2b is inserted a reactance element 5. In this way, an impedance with the high frequency power source side as viewed from the plasma side can be made matching with an equivalent impedance of the plasma.
COPYRIGHT: (C)1980,JPO&Japio
JP11206278A 1978-09-11 1978-09-11 No-electrode fluorescent lamp device Pending JPS5539134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11206278A JPS5539134A (en) 1978-09-11 1978-09-11 No-electrode fluorescent lamp device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11206278A JPS5539134A (en) 1978-09-11 1978-09-11 No-electrode fluorescent lamp device

Publications (1)

Publication Number Publication Date
JPS5539134A true JPS5539134A (en) 1980-03-18

Family

ID=14577083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11206278A Pending JPS5539134A (en) 1978-09-11 1978-09-11 No-electrode fluorescent lamp device

Country Status (1)

Country Link
JP (1) JPS5539134A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4710678A (en) * 1984-04-24 1987-12-01 U.S. Philips Corporation Electrodeless low-pressure discharge lamp
EP0594245A1 (en) * 1992-10-21 1994-04-27 Koninklijke Philips Electronics N.V. Illumination unit, and electrodeless low-pressure discharge lamp and coil suitable for use therein
EP0594247A1 (en) * 1992-10-21 1994-04-27 Koninklijke Philips Electronics N.V. Illumination unit, and electrodeless low-pressure discharge lamp and coil suitable for use therein

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4710678A (en) * 1984-04-24 1987-12-01 U.S. Philips Corporation Electrodeless low-pressure discharge lamp
EP0594245A1 (en) * 1992-10-21 1994-04-27 Koninklijke Philips Electronics N.V. Illumination unit, and electrodeless low-pressure discharge lamp and coil suitable for use therein
EP0594247A1 (en) * 1992-10-21 1994-04-27 Koninklijke Philips Electronics N.V. Illumination unit, and electrodeless low-pressure discharge lamp and coil suitable for use therein

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