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JPS6417368A - Surface analyzer - Google Patents

Surface analyzer

Info

Publication number
JPS6417368A
JPS6417368A JP62171781A JP17178187A JPS6417368A JP S6417368 A JPS6417368 A JP S6417368A JP 62171781 A JP62171781 A JP 62171781A JP 17178187 A JP17178187 A JP 17178187A JP S6417368 A JPS6417368 A JP S6417368A
Authority
JP
Japan
Prior art keywords
electron beam
diffracted
sample
pattern
crystal structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62171781A
Other languages
English (en)
Inventor
Masahiko Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62171781A priority Critical patent/JPS6417368A/ja
Publication of JPS6417368A publication Critical patent/JPS6417368A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP62171781A 1987-07-09 1987-07-09 Surface analyzer Pending JPS6417368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62171781A JPS6417368A (en) 1987-07-09 1987-07-09 Surface analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62171781A JPS6417368A (en) 1987-07-09 1987-07-09 Surface analyzer

Publications (1)

Publication Number Publication Date
JPS6417368A true JPS6417368A (en) 1989-01-20

Family

ID=15929563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62171781A Pending JPS6417368A (en) 1987-07-09 1987-07-09 Surface analyzer

Country Status (1)

Country Link
JP (1) JPS6417368A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002518808A (ja) * 1998-06-18 2002-06-25 ザ リージェンツ オブ ザ ユニヴァーシティー オブ カリフォルニア 透過型電子顕微鏡のｃｃｄカメラ
JP2007178445A (ja) * 2007-03-05 2007-07-12 Jeol Ltd 試料分析装置における定量分析方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002518808A (ja) * 1998-06-18 2002-06-25 ザ リージェンツ オブ ザ ユニヴァーシティー オブ カリフォルニア 透過型電子顕微鏡のｃｃｄカメラ
JP4757383B2 (ja) * 1998-06-18 2011-08-24 ザ リージェンツ オブ ザ ユニヴァーシティ オブ カリフォルニア 透過型電子顕微鏡のｃｃｄカメラ
JP2007178445A (ja) * 2007-03-05 2007-07-12 Jeol Ltd 試料分析装置における定量分析方法

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