JPS6417368A - Surface analyzer - Google Patents
Surface analyzerInfo
- Publication number
- JPS6417368A JPS6417368A JP62171781A JP17178187A JPS6417368A JP S6417368 A JPS6417368 A JP S6417368A JP 62171781 A JP62171781 A JP 62171781A JP 17178187 A JP17178187 A JP 17178187A JP S6417368 A JPS6417368 A JP S6417368A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- diffracted
- sample
- pattern
- crystal structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 abstract 5
- 239000013078 crystal Substances 0.000 abstract 3
- 238000001228 spectrum Methods 0.000 abstract 2
- 230000001678 irradiating effect Effects 0.000 abstract 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To make the crystallizability of a sample surface monitorable by installing an electron beam diffractor in an ultra-high vacuum chamber, and checking up on the pattern of a diffracted electron beam. CONSTITUTION:In an ultra-high vacuum chamber 4, there are provided with an electron gun, irradiating an electron beam OMEGA to the surface of a sample SIGMA, and a diffracted electron beam observer, observing a pattern of the electron beam OMEGA diffracted on the surface of the sample SIGMA. With this constitution, crystallizability of the sample SIGMA surface is observable at that spot all the time and, what is more, a crystal structure of the surface and an element abundance or the like are still more clearly findable. Moreover, if a time variation in the diffracted pattern and turbulence of the crystal structure are made into a data base, the obtained spectrum is compensated, thus such a spectrum that shows a true crystal structure is securable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62171781A JPS6417368A (en) | 1987-07-09 | 1987-07-09 | Surface analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62171781A JPS6417368A (en) | 1987-07-09 | 1987-07-09 | Surface analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417368A true JPS6417368A (en) | 1989-01-20 |
Family
ID=15929563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62171781A Pending JPS6417368A (en) | 1987-07-09 | 1987-07-09 | Surface analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417368A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002518808A (en) * | 1998-06-18 | 2002-06-25 | ザ リージェンツ オブ ザ ユニヴァーシティー オブ カリフォルニア | CCD camera for transmission electron microscope |
| JP2007178445A (en) * | 2007-03-05 | 2007-07-12 | Jeol Ltd | Quantitative analysis method in sample analyzer |
-
1987
- 1987-07-09 JP JP62171781A patent/JPS6417368A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002518808A (en) * | 1998-06-18 | 2002-06-25 | ザ リージェンツ オブ ザ ユニヴァーシティー オブ カリフォルニア | CCD camera for transmission electron microscope |
| JP4757383B2 (en) * | 1998-06-18 | 2011-08-24 | ザ リージェンツ オブ ザ ユニヴァーシティ オブ カリフォルニア | CCD camera for transmission electron microscope |
| JP2007178445A (en) * | 2007-03-05 | 2007-07-12 | Jeol Ltd | Quantitative analysis method in sample analyzer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Young et al. | A Preliminary Study of the Dynamic Spectra of Solar Radio Bursts in the Frequency Range 500-950 Mc/s. | |
| Tsertos et al. | Multiple positron structures observed from UU collisions at 5.6 MeV/u and 5.9 MeV/u | |
| JPS57147858A (en) | Electron beam probe fine analyzer | |
| MY102775A (en) | Multi-well screening assembly for immunoassay proceduros | |
| ATE164635T1 (en) | DEVICE AND METHOD FOR PARTIAL COATING OF COMPONENT GROUPS | |
| Klein et al. | A survey of the distribution of lambda 2.8 CM radio continuum in nearby galaxies. IV-NGC 253 | |
| EP0772223A3 (en) | Device for coating a substrate from an electrically conductive target | |
| ATE158077T1 (en) | METHOD FOR MEASURING THE THICKNESS OF A COATING ON A SUBSTRATE | |
| Troxler et al. | Isomer-specific spectra and ionization potentials of van der Waals clusters | |
| JPS6417368A (en) | Surface analyzer | |
| GB8508268D0 (en) | Structural bearing assembly | |
| JPS51147386A (en) | Clearance corrosion test method | |
| Barton et al. | Source-wave angular-momentum effects on electron-diffraction patterns | |
| Asch et al. | Line shape analysis of the 60 keV Mössbauer resonance in 237 Np: Interference effects | |
| US2834888A (en) | Data analyzing equipment | |
| Kakiuti et al. | A simplified C H out-of-plane force field for benzene, methylbenzenes, and chlorobenzenes | |
| Kovalev et al. | Multifrequency Study of VLBI—Compact Sources: 1–22 GHZ Spectra Observations and Model Fits | |
| JPS57115841A (en) | Probing method | |
| SU382031A1 (en) | METHOD OF CONTROL OF INTEGRAL SCHEMES | |
| JAKOSKY | Mars volatile evolution: Implications of the recent measurement of O-17 in water from the SNC meteorites(Abstract Only) | |
| Möhl | Stochastic Cooling: Invited talk given at the Workshop on Accelerator and Detector Possibilities and Limitations, FERMILAB, October 15-21, 1978 | |
| MALINA | Stellar extreme ultraviolet spectroscopy[Ph. D. Thesis] | |
| Humphrey et al. | Applications of SIMS for the analysis of advanced materials | |
| Parkinson et al. | The isochronous cyclotron and high-resolution nuclear spectroscopy | |
| Read et al. | Surface Barrier Bound State Energies from Elastic Electron Scattering |