JPS6415374A - Barrel type vapor growth device - Google Patents

Abstract

PURPOSE:To decrease the amt. of a purging gas to be used and the time for a treatment and to obtain multi-ply thin films having steep boundary faces with high productivity by imposing a flow channel formed to a cylindrical shape on a holding base in a cap-shaped reaction tube and introducing gases from >=2 pieces of gas introducing pipes provided to the positions corresponding to the neighborhood of the top end thereof into the reaction tube. CONSTITUTION:The flow channel 10 which is formed to the cylindrical shape of a proper length and is provided with a collar part 10a and an inverted U-shaped projection 11 for attachment and detachment at the top end is imposed on the holding base 6 in the cap-shaped reaction tube 4 of the titled device. The gases for vapor growth are then introduced and ejected from >=2 pieces of the gas introducing pipes 13 disposed, at equal intervals along the outside circumference, toward the central axial direction of the flow channel 10, on the side face of the reaction tube 4 in the positions corresponding to the neighborhood of the top end of the flow channel 10. These gases are circulated, uniformly diffused and regulated in flow around the barrel part of the flow channel 10 and are preheated in the high-temp. part near the bottom end of the flow channel 10 to form the multi-ply thin films in the adequate thin film forming state; thereafter, the gases are ejected from gas discharge pipes 2.