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JPS6414977A - Superconducting device and manufacture thereof - Google Patents

Superconducting device and manufacture thereof

Info

Publication number
JPS6414977A
JPS6414977A JP62171405A JP17140587A JPS6414977A JP S6414977 A JPS6414977 A JP S6414977A JP 62171405 A JP62171405 A JP 62171405A JP 17140587 A JP17140587 A JP 17140587A JP S6414977 A JPS6414977 A JP S6414977A
Authority
JP
Japan
Prior art keywords
thin film
substrate
film
pattern
superconductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62171405A
Other languages
Japanese (ja)
Inventor
Kumiko Hirochi
Osamu Yamazaki
Kiyotaka Wasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62171405A priority Critical patent/JPS6414977A/en
Publication of JPS6414977A publication Critical patent/JPS6414977A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To manufacture a superconducting device with extremely high precision and higher homogeneity than that of a sintered body and homogeneous fine structure parts by a method wherein a part covered with a diamond thin layer is formed on a main surface of a substrate to form a superconductive thin film. CONSTITUTION:A substrate 11 using Si (100) substrate to be made of any material is formed after photoresist pattern of a ring with two constrictions and arms as through holes. A diamond thin film in thickness of 30nm is grown on overall surface of the substrate 11 while the photoresist pattern is removed to form the pattern 2 out of the diamond thin layer. A superconductive thin film 13 is formed by sputtering and evaporation as a target of sintered YBa2Cu3 O7-delta(0<=delta <=7) to be heat treated in the air and slowly cooled down forming a DC squid 10. In such a constitution, the constrictions 20, 21 of the squid 10 fill the role of Josephson junction; the superconductive thin film 13 is formed of perovskite crystal; the film on the diamond thin film pattern 12 is a single crystal thin film 14; and the film on the Si substrate 11 is a polycrystalline thin film 15.
JP62171405A 1987-07-09 1987-07-09 Superconducting device and manufacture thereof Pending JPS6414977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62171405A JPS6414977A (en) 1987-07-09 1987-07-09 Superconducting device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62171405A JPS6414977A (en) 1987-07-09 1987-07-09 Superconducting device and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS6414977A true JPS6414977A (en) 1989-01-19

Family

ID=15922540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62171405A Pending JPS6414977A (en) 1987-07-09 1987-07-09 Superconducting device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS6414977A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02208981A (en) * 1989-02-09 1990-08-20 Canon Inc Formation of josephson junction device
JPH02234481A (en) * 1989-03-08 1990-09-17 Nippon Cement Co Ltd Manufacture of bridge type intergranular josephson device
JPH02260475A (en) * 1989-03-31 1990-10-23 Canon Inc Formation method of Josephson junction device
JPH031583A (en) * 1989-05-29 1991-01-08 Canon Inc Method for forming josephson junction element
JPH03263883A (en) * 1990-03-14 1991-11-25 Canon Inc Josephson junction element

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02208981A (en) * 1989-02-09 1990-08-20 Canon Inc Formation of josephson junction device
JPH02234481A (en) * 1989-03-08 1990-09-17 Nippon Cement Co Ltd Manufacture of bridge type intergranular josephson device
JPH02260475A (en) * 1989-03-31 1990-10-23 Canon Inc Formation method of Josephson junction device
JPH031583A (en) * 1989-05-29 1991-01-08 Canon Inc Method for forming josephson junction element
JPH03263883A (en) * 1990-03-14 1991-11-25 Canon Inc Josephson junction element

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