JPS6411379A - Superconducting film structure - Google Patents
Superconducting film structureInfo
- Publication number
- JPS6411379A JPS6411379A JP62167043A JP16704387A JPS6411379A JP S6411379 A JPS6411379 A JP S6411379A JP 62167043 A JP62167043 A JP 62167043A JP 16704387 A JP16704387 A JP 16704387A JP S6411379 A JPS6411379 A JP S6411379A
- Authority
- JP
- Japan
- Prior art keywords
- film
- protective layer
- covered
- pattern
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011241 protective layer Substances 0.000 abstract 5
- 239000010410 layer Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 239000007772 electrode material Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To prevent a structure generated by a temperature difference of a superconducting film from being destroyed by forming the film interposed between an upper protective layer and a lower protective layer. CONSTITUTION:A lower protective layer 15 made of other insulating material, such as SiO2 is pattern-formed in a desired shape on the upper surface of a substrate 1 as a base made of glass. Then, it is covered as a superconducting film 13 with a superconducting material. Thereafter, it is so pattern-formed that the lower surface of the film 12 is brought into contact with the layer 15. Subsequently, the film 15 is covered, for example, with platinum, copper or other electrode material, and electrodes 17a, 17b are pattern-formed. Then, it is so covered with an upper protective layer 19 similarly to the layer 15 as to cover the upper surface of the film 13. The thicker the layers 19, 13 are, the better the result is obtained. Both the protective layers are not necessarily formed of the same material, but if they have relatively near thermal expansion coefficients, similar effect can be obtained by altering the ratio of the thicknesses of the layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62167043A JPS6411379A (en) | 1987-07-06 | 1987-07-06 | Superconducting film structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62167043A JPS6411379A (en) | 1987-07-06 | 1987-07-06 | Superconducting film structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6411379A true JPS6411379A (en) | 1989-01-13 |
Family
ID=15842326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62167043A Pending JPS6411379A (en) | 1987-07-06 | 1987-07-06 | Superconducting film structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6411379A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5274249A (en) * | 1991-12-20 | 1993-12-28 | University Of Maryland | Superconducting field effect devices with thin channel layer |
| CN113614274A (en) * | 2019-03-22 | 2021-11-05 | 应用材料公司 | Method and apparatus for depositing multilayer device with superconducting film |
| US11739418B2 (en) | 2019-03-22 | 2023-08-29 | Applied Materials, Inc. | Method and apparatus for deposition of metal nitrides |
-
1987
- 1987-07-06 JP JP62167043A patent/JPS6411379A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5274249A (en) * | 1991-12-20 | 1993-12-28 | University Of Maryland | Superconducting field effect devices with thin channel layer |
| CN113614274A (en) * | 2019-03-22 | 2021-11-05 | 应用材料公司 | Method and apparatus for depositing multilayer device with superconducting film |
| JP2022525617A (en) * | 2019-03-22 | 2022-05-18 | アプライド マテリアルズ インコーポレイテッド | Methods and equipment for depositing multi-layer devices with superconducting membranes |
| US11739418B2 (en) | 2019-03-22 | 2023-08-29 | Applied Materials, Inc. | Method and apparatus for deposition of metal nitrides |
| US11778926B2 (en) | 2019-03-22 | 2023-10-03 | Applied Materials, Inc. | Method and apparatus for deposition of multilayer device with superconductive film |
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