JPS6398930A - Impregnated cathode - Google Patents
Impregnated cathodeInfo
- Publication number
- JPS6398930A JPS6398930A JP61242923A JP24292386A JPS6398930A JP S6398930 A JPS6398930 A JP S6398930A JP 61242923 A JP61242923 A JP 61242923A JP 24292386 A JP24292386 A JP 24292386A JP S6398930 A JPS6398930 A JP S6398930A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- scandium
- impregnated
- present
- impregnated cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 229910052706 scandium Inorganic materials 0.000 claims description 9
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims description 8
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 7
- 229910052788 barium Inorganic materials 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000002131 composite material Substances 0.000 description 19
- 239000010409 thin film Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002052 molecular layer Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 241001125046 Sardina pilchardus Species 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000747 cardiac effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 235000019512 sardine Nutrition 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Solid Thermionic Cathode (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、表示管、ブラウン管、撮像管等に用いられる
高電流密度陰極の含浸形陰極、特に低温動作に必要な、
陰極表面での低仕事関数原子層を安定に形成することに
好適な含浸形陰極に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an impregnated cathode of a high current density cathode used in display tubes, cathode ray tubes, image pickup tubes, etc., which is particularly necessary for low-temperature operation.
The present invention relates to an impregnated cathode suitable for stably forming a low work function atomic layer on the surface of the cathode.
従来の低@動作の含浸形陰極は、特開昭58−1141
31 号に記載のように、タングステンとS C203
からなる焼結体の基体に、電子放出材料分含浸する礪成
になっていた。この陰極は、動作時に陰極長面にBa、
Sc及びOからなる低仕事関数の単〜数分子程度の(B
a、SC,O)覆合層が形成されることが特徴である。The conventional impregnated cathode with low @ operation is disclosed in Japanese Patent Application Laid-Open No. 58-1141.
As described in No. 31, tungsten and SC203
The base material was a sintered body made of aluminum, which was impregnated with an electron-emitting material. During operation, this cathode has Ba on the long surface of the cathode.
Low work function molecules consisting of Sc and O (B
a, SC, O) A covering layer is formed.
しかし、この複合ノーが何らかの理由で一旦消失すると
、再生に艮時間の熱処理を必要とする欠点があり、″ま
た(Ba、SC,O)i合層の形成にばらつきがあった
。However, once this composite layer disappears for some reason, it has the drawback that it requires a long heat treatment for regeneration, and there is also variation in the formation of the (Ba, SC, O)i composite layer.
本発明の目的は、低仕事関数の(Ba、Sc。 The object of the present invention is to obtain low work function (Ba, Sc).
0)′:Oi合、層の形成を容易にし。かつ、電子放出
特性のばらつきの少ない低温動作型の含浸形陰極を提供
することにある。0)': Oi makes it easy to form a layer. Another object of the present invention is to provide an impregnated cathode that operates at low temperatures and has less variation in electron emission characteristics.
上記目的を達成するために1本発明においては耐熱性多
孔質基体として、酸化スカンジウム又はスカンジウムを
含む基体を用い、基体表面に酸化スカンジウム又はスカ
ンジウムもしくはその両者からなる4層を設けた構成と
する。かかる構成の言υ形陰極により、動作温度の低下
と優れた電子放出特性が達成される。In order to achieve the above object, the present invention uses scandium oxide or a substrate containing scandium as a heat-resistant porous substrate, and has a structure in which four layers of scandium oxide, scandium, or both are provided on the surface of the substrate. The υ-shaped cathode having such a configuration achieves a reduction in operating temperature and excellent electron emission characteristics.
下地の言浸形陰極は1 ”# MOあるいはこれらをよ
む合金と酸化スカンジウム又はスカンジウムからなる耐
熱多孔λ基体に電子放出物質としては6Baを含むBa
3ktz Os化合物を基本として、Cab、SrQ、
MgO,Zrαl、Y2O3などの酸化物が添加された
ものを用いる。陰極表面に被着する複合薄膜層は。スパ
ッタ蒸着やCVD(化学蒸層)などてより形成すること
ができる。第1図は1本発明の含浸形陰極の断面模式図
である。1はW、2はse、o、、3は電子放出物質、
4は複合薄膜層、5はrs壁層、6はスリーブ、7は加
熱用ヒータである。含浸形陰極の動作温度を低下させる
目的で6先ずスパッタ蒸着によってWの基体からなる陰
極表面に8C203を薄く被着し、電子放出特性を測定
した。その結果、電子放出能を高めることが分った。次
にWと5CzOsを被層し。The underlying immersion type cathode is a heat-resistant porous λ substrate made of 1'' MO or an alloy thereof and scandium oxide or scandium, and Ba containing 6Ba as an electron emitting substance.
Based on 3ktz Os compounds, Cab, SrQ,
The material to which oxides such as MgO, Zrαl, and Y2O3 are added is used. A composite thin film layer is deposited on the cathode surface. It can be formed by sputter deposition, CVD (chemical vapor deposition), or the like. FIG. 1 is a schematic cross-sectional view of an impregnated cathode of the present invention. 1 is W, 2 is se, o, 3 is electron emitting material,
4 is a composite thin film layer, 5 is an RS wall layer, 6 is a sleeve, and 7 is a heater. In order to lower the operating temperature of the impregnated cathode, 8C203 was first deposited thinly on the surface of the cathode consisting of a W base by sputter deposition, and the electron emission characteristics were measured. As a result, it was found that the electron emission ability was improved. Next, W and 5CzOs are coated.
電子放出特性を測定した結果、m子放出能は大巾に向上
した。動作温度に換算して約200C低丁させることが
出来た。しかし、電子放出能は大巾に向上したが、下地
陽極の#21#全受けて隘・極間に電子放出特性のばら
つきが生じた。下地陰極の影響を取り除くために。基体
中に5CtOsを含有させた陰極を用いた。この陰極表
面にW、 5c2nsを被層させると、電子放出能が
向上するとともに篭子放U」特性のばらつきも少なくな
った。さらに詳しく実験を行った結果t OS−ル11
合金などを被1させた含浸形虐極よりも高い電子放出能
を示した複合薄膜層の組成は+ 8CzOsが0.5〜
20重量%であり、その膜厚は、50〜11000nの
範囲であった。また、下地陰極中の5czOs含有寸は
5多孔質基体重量の0.5〜20チの基体を用いた場合
に顕著な効果が見られた。As a result of measuring the electron emission characteristics, the m-ion emission ability was greatly improved. We were able to reduce the operating temperature by approximately 200C. However, although the electron emission ability was greatly improved, variations in electron emission characteristics occurred between the holes and poles due to the #21# underlying anode. To remove the influence of the underlying cathode. A cathode containing 5CtOs in the substrate was used. When the surface of this cathode was coated with W, 5c2ns, the electron emission ability was improved and the variation in the cage emission characteristics was reduced. After conducting more detailed experiments, the results were as follows: OS-Rule 11
The composition of the composite thin film layer that showed higher electron emission ability than the impregnated layer coated with alloy etc. was 0.5~8CzOs.
20% by weight, and the film thickness was in the range of 50 to 11,000 nm. Further, a remarkable effect was observed when the 5czOs content in the underlying cathode was used with a 5-porous substrate having a weight of 0.5 to 20 inches.
本発明は、下地蹟極の影=Jを取り除くことに二って、
低仕事関数の単〜数分子(Ba−8c−Q)複合層を容
易に形成させることにある。The present invention eliminates the shadow of the base pole = J, and also
The object of the present invention is to easily form a composite layer of one to several molecules (Ba-8c-Q) having a low work function.
本発明の構成の含浸形癲極は、ヒータで加熱することに
よって、下地陰極内で耐熱多孔質体とα子放出物質とが
反応し、BaとScが生成し細孔内を通って表面に達し
、さらに複合薄膜層からはSCとO(酸素)が陰極氏面
に供給されて、陰極表面に単〜数分子層程度の(Ba、
Se、O)複合層が形成される3この形成された単〜数
分子層の(Ba、Se、0)aj合鰯(第1図7)がW
上に形成されることによって仕事1関数が約1.26V
と低下し、高い心子放能が得られたものである。When the impregnated electrode configured according to the present invention is heated with a heater, the heat-resistant porous material and the α-emitting substance react within the base cathode, and Ba and Sc are generated, which pass through the pores and reach the surface. Furthermore, SC and O (oxygen) are supplied from the composite thin film layer to the surface of the cathode, and a single to several molecular layer of (Ba,
Se, O) composite layer is formed.3 This formed single to several molecular layer (Ba, Se, 0) aj combined sardine (Fig. 1 7) is W
The work function is approximately 1.26V due to the formation of
This results in a high cardiac release rate.
(Ba、SC,O)複合層は、オージェ分析によって同
定した。本発明の含浸形陰極は、下地陰極から13aを
供給するだけでなく、(Ba、8c、Q)複合層に必要
43cも供給することによって、さらに安定に(Ba、
sc、0)複合層が形成されるものである。The (Ba, SC, O) composite layer was identified by Auger analysis. The impregnated cathode of the present invention not only supplies 13a from the base cathode, but also supplies the necessary 43c to the (Ba, 8c, Q) composite layer, making it more stable (Ba, 8c, Q).
sc, 0) A composite layer is formed.
以下1本発明の実施列を第1図、第2図を参照して説明
する。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
第1図の如く下地のき浸形織極として粒径5μmのW粉
と5C2(h粉末を用いて、プレス成形、水素中仮焼結
、−4空中焼結によって作製した空孔率23%の多孔質
基体1,2に、水素雰囲気中で4Ba −At2 Us
・CaOの組成比からなる辺子放出物頁3を溶融含浸し
た言浸形陰極を用意した。本発明のよ浸形陰極の複合薄
膜層4はスパッタ装置を用いて形成し、ての組成は溶成
発光分析(ICPS法)、蛍光X線分析CFLX法)に
よって求めた。As shown in Fig. 1, the immersion-type woven electrode was made using W powder with a particle size of 5 μm and 5C2 (h powder) with a porosity of 23% by press molding, temporary sintering in hydrogen, and -4 air sintering. 4Ba-At2 Us was applied to the porous substrates 1 and 2 in a hydrogen atmosphere.
- An immersion type cathode was prepared by melting and impregnating it with Henko emission material having a composition ratio of CaO. The composite thin film layer 4 of the immersion type cathode of the present invention was formed using a sputtering device, and its composition was determined by dissolution emission spectroscopy (ICPS method) and fluorescent X-ray analysis (CFLX method).
スパッタ用ターゲットは、Wと5cans粉を種々の組
成比で混合・プレス成形したものと用いた。The sputtering targets used were W and 5cans powder mixed and press-molded at various composition ratios.
複合薄膜層は種々ターゲットを用いて踵々組成の薄膜を
形成した。複合薄膜層の厚ざは、スパッタ時間を調節す
ることによって変えた。以上のように複合薄膜層を形成
した本発明の含浸形陰極9の電子放出能は+10−”t
。11台の真空容器内にアノード・カソードの平行平板
からなる2種型式でパルス′4圧を印加して測定した。The composite thin film layer had a heel-to-heel composition using various targets. The thickness of the composite thin film layer was varied by adjusting the sputtering time. The electron emission ability of the impregnated cathode 9 of the present invention in which the composite thin film layer is formed as described above is +10-"t
. Measurements were made by applying a pulse '4 pressure to 11 vacuum vessels using two types of parallel plates, each consisting of an anode and a cathode.
その結果を第2図に示す。第2図に示した。衾蓮の放出
電流特性は。The results are shown in FIG. It is shown in Figure 2. What are the emission current characteristics of Renren?
従来型の含浸形陰極特性10.Qs−R,L1合金を5
00nm被覆した金属被覆型含浸形陰極特性11及び複
合薄膜層全被着させた本発明の陰極特性12を示す。図
に示した本発明の陰極は複合薄膜の組成が3!i%の5
C203で、下地の基体は5重量%5C203のもので
ある。本発明によって得られた含浸形陰極9の特性(1
2)は従来型陰極(特性10)較べて約300C1従来
のOs −Ru被覆(特性11)K較べて約150C低
温で動作出来る特性が得られ、かつ、ばらつきの少ない
特性が得られた。また、バリウム及び酸化バリウムの蒸
発it貢債分析計で測定し、比較したところ1.5〜3
桁低下出釆ることが分った。さらに動作温度1iso〜
300p低下したことにより消費電力も低下でき、ヒー
タの寿命が塗布型酸化物陰極を加熱した場合と同程度の
教万時間の寿命が得られ、信頼性の高い含浸形陰極とな
った。Characteristics of conventional impregnated cathode 10. Qs-R, L1 alloy 5
11 shows characteristics of a metal-coated impregnated cathode coated with a thickness of 00 nm, and characteristics 12 of a cathode of the present invention in which a composite thin film layer is completely deposited. In the cathode of the present invention shown in the figure, the composition of the composite thin film is 3! i% of 5
C203, and the underlying substrate was 5% by weight 5C203. Characteristics of the impregnated cathode 9 obtained by the present invention (1
In 2), compared to the conventional cathode (characteristic 10), it was about 300C1. Compared to the conventional Os-Ru coating (characteristic 11), it was possible to operate at a low temperature of about 150C, and the characteristics had little variation. In addition, when barium and barium oxide were measured using an evaporation test analyzer and compared, the results were 1.5 to 3.
It was found that the number of orders of magnitude decreased. Furthermore, the operating temperature is 1iso~
The power consumption was reduced by 300p, and the life of the heater was approximately the same as that of heating a coated oxide cathode, resulting in a highly reliable impregnated cathode.
本発明によれば、加熱することによって陰極表面に単〜
数分子程度の(Ba、Sc、0)a片層8が形成され、
これにより陰極表面の仕事関数が下がり、電子放出能と
高められるので、従来型に比べて150〜300C低温
動作出来る。動作温度の低下により、バリウム(酸化バ
リウム)の蒸発油を1.5〜3@小さく出来、さらに加
熱用ヒータへの負担を経くすることが出来るなど、信頼
性も高める効果もある。According to the present invention, by heating the cathode surface,
A layer 8 of (Ba, Sc, 0) a of about several molecules is formed,
This lowers the work function of the cathode surface and increases the electron emission ability, allowing operation at a lower temperature of 150 to 300 C compared to conventional types. By lowering the operating temperature, the evaporated oil of barium (barium oxide) can be reduced by 1.5 to 3@3, and there is also the effect of increasing reliability, such as reducing the burden on the heater.
第1図は1本発明の一実施例になる沈浸形陰極の断面図
、第2図は1本発明の実施例および従来例の陰極の放出
電流特性を比較して示したグラフである。
1・・・W、2・・・SCの酸化物、3・・・′シ子放
出物質、4・・・複合薄膜層、5・・・障壁層、6・・
・スリーブ、7・・・加熱ヒータ、8・・・(Ba、s
c、O)の単〜数分子程度の複合層、9・・・本発明の
宮浸形陰極。
】0・・・従来型陰極の放出電流特性、11・・・Qs
−Ru破損型陰極の放出電流特性、12・・・本発明の
含浸形陰極の放出電流特性。
代理人 弁理士 小川時1男′−“−
第 l 口FIG. 1 is a sectional view of a submerged cathode according to an embodiment of the present invention, and FIG. 2 is a graph comparing emission current characteristics of cathodes according to an embodiment of the present invention and a conventional example. DESCRIPTION OF SYMBOLS 1...W, 2...SC oxide, 3...'shiton-releasing substance, 4...composite thin film layer, 5...barrier layer, 6...
・Sleeve, 7... Heater, 8... (Ba, s
c, composite layer of about one to several molecules of O), 9...Miya immersion type cathode of the present invention. ]0...Emission current characteristics of conventional cathode, 11...Qs
- Emission current characteristics of Ru damaged cathode, 12...Emission current characteristics of impregnated cathode of the present invention. Agent Patent attorney Toki Ogawa 1st son'-“- Part 1
Claims (1)
物粒子若しくはその両者を含有する耐熱多孔質体との多
孔質基体内の空孔部にバリウムを含む電子放出物質を含
浸した構造を採る含浸形陰極において、4極表面に、高
融点金属と、スカンジウム又は酸化スカンジウムもしく
はその両者とからなる薄層を有することを特徴とする含
浸形陽極。 2、上記多孔質基体の酸化スカンジウム粒子又はスカン
ジウムを含む酸化物粒子のうちの酸化スカンジウムの量
が多孔質基体重量の0.5〜20%であることを特徴と
する特許請求の範囲第1項記載の含浸形陰極。 3、上記薄層中のスカンジウム及びスカンジウムの酸化
物の量が0.5〜20重量%であることを特徴とする特
許請求の範囲第1項又は第2項記載の含浸形陰極。 4、上記薄層の厚みが10nm〜1μmであることを特
徴とする特許請求の範囲第1項〜第3項記載の含浸形陰
極。[Claims] 1. A heat-resistant porous body containing scandium oxide particles, scandium-containing oxide particles, or both, and a structure in which the pores in the porous substrate are impregnated with an electron-emitting substance containing barium. An impregnated anode characterized in that the impregnated cathode has a thin layer consisting of a high melting point metal and scandium or scandium oxide or both on the surface of the four poles. 2. Claim 1, characterized in that the amount of scandium oxide among the scandium oxide particles or scandium-containing oxide particles of the porous substrate is 0.5 to 20% of the weight of the porous substrate. The impregnated cathode described. 3. The impregnated cathode according to claim 1 or 2, wherein the amount of scandium and scandium oxide in the thin layer is 0.5 to 20% by weight. 4. The impregnated cathode according to claims 1 to 3, wherein the thin layer has a thickness of 10 nm to 1 μm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61242923A JPS6398930A (en) | 1986-10-15 | 1986-10-15 | Impregnated cathode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61242923A JPS6398930A (en) | 1986-10-15 | 1986-10-15 | Impregnated cathode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6398930A true JPS6398930A (en) | 1988-04-30 |
Family
ID=17096219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61242923A Pending JPS6398930A (en) | 1986-10-15 | 1986-10-15 | Impregnated cathode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6398930A (en) |
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1986
- 1986-10-15 JP JP61242923A patent/JPS6398930A/en active Pending
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