JPS6347141A - ポリイミド前駆体を部分的に閉環させた薄膜を含む複合物品 - Google Patents
ポリイミド前駆体を部分的に閉環させた薄膜を含む複合物品Info
- Publication number
- JPS6347141A JPS6347141A JP19128786A JP19128786A JPS6347141A JP S6347141 A JPS6347141 A JP S6347141A JP 19128786 A JP19128786 A JP 19128786A JP 19128786 A JP19128786 A JP 19128786A JP S6347141 A JPS6347141 A JP S6347141A
- Authority
- JP
- Japan
- Prior art keywords
- group
- film
- thin film
- groups
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laminated Bodies (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Formation Of Insulating Films (AREA)
- Organic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19128786A JPS6347141A (ja) | 1986-08-14 | 1986-08-14 | ポリイミド前駆体を部分的に閉環させた薄膜を含む複合物品 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19128786A JPS6347141A (ja) | 1986-08-14 | 1986-08-14 | ポリイミド前駆体を部分的に閉環させた薄膜を含む複合物品 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6347141A true JPS6347141A (ja) | 1988-02-27 |
| JPH058094B2 JPH058094B2 (fr) | 1993-02-01 |
Family
ID=16272051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19128786A Granted JPS6347141A (ja) | 1986-08-14 | 1986-08-14 | ポリイミド前駆体を部分的に閉環させた薄膜を含む複合物品 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347141A (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6418760U (fr) * | 1987-07-25 | 1989-01-30 | ||
| US6461692B2 (en) | 1996-02-23 | 2002-10-08 | Ebara Corporation | Chemical vapor deposition method and chemical vapor deposition apparatus |
-
1986
- 1986-08-14 JP JP19128786A patent/JPS6347141A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6418760U (fr) * | 1987-07-25 | 1989-01-30 | ||
| US6461692B2 (en) | 1996-02-23 | 2002-10-08 | Ebara Corporation | Chemical vapor deposition method and chemical vapor deposition apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058094B2 (fr) | 1993-02-01 |
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