JPS6336444B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a temperature measuring device, and in particular, facilitates the measurement of accurate temperature distribution in the cross-sectional direction inside an electric furnace, and also helps improve yield during heat treatment of semiconductor samples, etc. The purpose is to do something.

Generally, the temperature distribution inside the electric furnace is measured by inserting a thermocouple 3 corresponding to the length of the electric furnace 1 into the core tube 2, as shown in FIG. are being measured. In this case, temperature measurement within the cross section at any point inside the electric furnace (inside the furnace core tube) is almost never done because it is difficult to set a thermocouple at a specific point within the plane, and actual temperature distribution measurement is difficult. At the point shown by the dotted line in Figure 1, the temperature at only one point within the A-A' plane was known, and it was extremely difficult to measure the temperature at any point within the A-A' plane.

On the other hand, as seen in the recent semiconductor industry, samples such as wafers to be temperature-treated are becoming increasingly larger in diameter, and along with this, the diameter of the electric furnace itself is also gradually increasing. Merely knowing the temperature distribution in the cross section is insufficient, and it is necessary to accurately understand and control the temperature distribution within the cross section.

The present invention provides a device that allows thermocouples to be easily installed at any point within the cross section of an electric furnace (furnace core tube).Basically, as shown in FIG. It consists of a disk for specifying an in-plane axial direction, and position specifying disks 9 and 10, each of which is provided with S-shaped or spiral grooves 7 and 8, as shown in FIG.

Axial direction designation disc 4, position designation disc 9, 10
Both are made of a material that can withstand high temperatures and do not cause contamination inside the furnace tube, such as quartz plate, and have the configuration shown in Figure 3, which is a perspective view, and Figure 4, which is a cross-sectional view of the furnace. It is installed together with a thermocouple 3 in a core tube 2 of an electric furnace. The thermocouple 3 is inserted into the protection tube.

FIG. 3 shows an example using an in-plane axial direction designating disc 4 and an S-shaped position designating disc 10, which are opposed to each other.
A pair of discs 10 are connected by a support rod 11, and a pair of discs 4 are connected by a support rod 12. The thermocouple is then inserted into the linear groove 6 of the disc 4 and the S-shaped groove 7 of the disc 10, and the entire thermocouple is inserted, for example, into the core tube 2 of the electric furnace 1 in the state shown in FIG. That is, the thermocouple 3 is configured to be able to move freely within the grooves 6 and 7.

First, the point to be measured in the electric furnace 1, for example, the first
The tip of the thermocouple 3 is installed at the center of the cross section of the plane A-A' in FIG. Next, the in-plane axial direction specifying disk 4 is rotated to align with the direction in the cross section that is desired to be measured. For example, when measuring the temperature distribution in the in-plane horizontal direction, the in-plane axial direction specifying disk 4 and the position specifying disk 10 are respectively installed as shown in FIG. In this case, thermocouple 3
is located at the center of the plane.

Next, after slightly shifting the thermocouple in the direction of C-A or C-A' in FIG. Therefore, the thermocouple 3 moves within the furnace 2 according to the S-shaped groove 7, and the temperature distribution at any point in the horizontal direction within the plane can be easily measured.
Also for other directions within the plane, the axial direction designating disk 4,
10 in an appropriate direction, measurement can be easily performed.

Note that even if a disk 9 having a spiral groove 8 is used instead of the disk 10, the temperature distribution within the furnace 2 can be measured over a wider range.

As described above, according to the present invention, it is possible to accurately grasp not only the temperature distribution state in the longitudinal direction of an electric furnace, but also the in-plane temperature distribution during heat treatment of samples such as semiconductors, which have become increasingly large in diameter in recent years. can do. Measuring and understanding the temperature distribution in the furnace over a wide range is extremely important for investigating the causes of variations in the characteristics of manufacturing devices and improving yields. Settings etc. can be easily made. Note that the present invention can be used not only for semiconductor manufacturing but also for a wide variety of heat treatment devices.

[Brief explanation of the drawing]

Figure 1 is a structural diagram when measuring the temperature distribution in the furnace using the conventional method; Figures 2a, b, and c are schematic diagrams of the in-plane axial direction designation disk and the position designation disk;
The figure is a schematic diagram of a temperature measuring device according to an embodiment of the present invention, FIG. 4 is a structural diagram of a furnace into which the device of FIG. 3 is inserted, and FIG. 5 is a horizontal direction measurement when measuring in-plane temperature distribution. It is a figure which shows the position of each disk in case. 1... Electric furnace, 2... Furnace tube, 3... Thermocouple,
4... Disk for specifying in-plane axial direction, 6, 7, 8...
Groove, 9, 10... Disc for position designation.

Claims (1)

[Claims] 1. First and second plate-shaped bodies having first and second grooves in different shapes, respectively, are installed in a heat treatment apparatus, and the positions in the heat treatment apparatus are determined by the first and second grooves. a thermocouple to be controlled, the plate-like bodies are arranged in pairs with a predetermined interval between each other, and one of the plate-like bodies is rotatable with respect to the other; Temperature measuring device inserted through each groove.