JPS63252489A - Metal vapor laser device - Google Patents
Metal vapor laser deviceInfo
- Publication number
- JPS63252489A JPS63252489A JP8566187A JP8566187A JPS63252489A JP S63252489 A JPS63252489 A JP S63252489A JP 8566187 A JP8566187 A JP 8566187A JP 8566187 A JP8566187 A JP 8566187A JP S63252489 A JPS63252489 A JP S63252489A
- Authority
- JP
- Japan
- Prior art keywords
- heat
- insulating material
- discharge
- tube
- discharge tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 20
- 239000002184 metal Substances 0.000 title claims description 20
- 239000011810 insulating material Substances 0.000 claims abstract description 34
- 239000000919 ceramic Substances 0.000 claims abstract description 9
- 239000000835 fiber Substances 0.000 claims abstract description 9
- 239000012774 insulation material Substances 0.000 claims description 11
- 230000010355 oscillation Effects 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 abstract description 10
- 239000010949 copper Substances 0.000 abstract description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 10
- 238000009413 insulation Methods 0.000 description 9
- 230000002159 abnormal effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000012141 concentrate Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 150000001879 copper Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005372 isotope separation Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/031—Metal vapour lasers, e.g. metal vapour generation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は金属蒸気をレーザ媒質とする金属蒸気レーザ装
置に係り、特に、レーザ発振管の断熱材を改良した金属
蒸気レーザ装置に関する。[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a metal vapor laser device using metal vapor as a laser medium, and particularly relates to a metal vapor laser device with an improved heat insulating material of a laser oscillation tube. Regarding equipment.
（従来の技術）
一般に、金属蒸気をレーザ媒質とする金属蒸気レーザ装
置は発振波長が５１０ｍ＋と５７８ｍ５の２波長を有し
、高出力、ｎ効率のレーザ装置として、例えばウランの
同位体分離装置等に応用されている。(Prior Art) In general, a metal vapor laser device that uses metal vapor as a laser medium has two oscillation wavelengths, 510 m+ and 578 m5, and is used as a high-output, n-efficiency laser device, for example, in a uranium isotope separation device. It is applied to.
従来、この種の金属蒸気レーザ装置は第２図に示すよう
に構成され、レーザ発振管１は真空排気される真空外管
２内に放電管３を同軸状に収容している。Conventionally, this type of metal vapor laser device is constructed as shown in FIG. 2, in which a laser oscillation tube 1 has a discharge tube 3 coaxially housed within an evacuated outer tube 2 which is evacuated.
放電管３内には銅粒４が内蔵され、放電管３の左右両端
部には陽＄４５と陰極６とが対向して配設され、各電極
５，６には駆動型ｌ１１７が接続されでおり、両電極５
．６間で放電させることにより放電管３内で銅粒４を加
熱蒸発せしめて銅蒸気を発生させるようになっている。Copper grains 4 are built into the discharge tube 3, and an anode 45 and a cathode 6 are disposed facing each other at both left and right ends of the discharge tube 3, and a driving type l117 is connected to each electrode 5, 6. and both electrodes 5
．． The copper grains 4 are heated and evaporated within the discharge tube 3 by discharging for 6 hours, thereby generating copper vapor.
各電極５．６の後方に位置する真空外管２の各端部には
、ブリュースタ窓８，９がそれぞれ配設され、これらブ
リュースタ窓８，９に対向してレーザ共振器ミラー１０
．１１が真空外管２の外部にてそれぞれ配置されている
。At each end of the evacuated tube 2 located behind each electrode 5.6, a Brewster window 8, 9 is provided, and a laser resonator mirror 10 faces the Brewster window 8, 9.
．． 11 are arranged outside the vacuum outer tube 2, respectively.
また、真空外管２の左右端部にはバッファガス供給装置
１２と、真空排気ポンプ１３とがそれぞれ接続され、真
空外管２の一端部より放電管３内へ例えばヘリウム（Ｈ
ｅ ）やネオン（Ｎｅ＞等のバッファガスが供給される
一方、真空外管２の他端部より真空外管２および放電管
３の内部を真空排気するようになっている。In addition, a buffer gas supply device 12 and a vacuum pump 13 are connected to the left and right ends of the vacuum outer tube 2, respectively, so that, for example, helium (H
While a buffer gas such as e) or neon (Ne>) is supplied, the insides of the vacuum outer tube 2 and the discharge tube 3 are evacuated from the other end of the vacuum outer tube 2.
放電管３の外周面と真空外管２の内周面とで画成される
真空断熱室１４には熱遮蔽板１５が収容され、しかも、
真空排気ポンプ１６により真空排気され、放電管３から
の熱を熱遮蔽板１５と真空断熱室１４により断熱するよ
うになっている。A heat shielding plate 15 is accommodated in the vacuum insulation chamber 14 defined by the outer peripheral surface of the discharge tube 3 and the inner peripheral surface of the vacuum outer tube 2, and furthermore,
It is evacuated by an evacuation pump 16, and heat from the discharge tube 3 is insulated by a heat shield plate 15 and a vacuum insulation chamber 14.
なお、第２図中符号１７は真空断熱室１４を気密に仕切
るベローズであり、１８は絶縁体である。In addition, the reference numeral 17 in FIG. 2 is a bellows that airtightly partitions the vacuum insulation chamber 14, and 18 is an insulator.
そして、このように構成された金属蒸気レーザ装置の駆
動電源７より電圧が数ＫＶ〜十数Ｋ Ｖで、繰り返し周
波数が数ＫＨｚ〜十数ＫＨ２のパルス電圧がレーザ発振
管１の陽極５と電極６とに加えられると、雨雪１ｆ！５
．６間でパルス放電が発生し、この放電プラズマの熱に
より放電管３内の銅粒４が加熱蒸気化される。Then, from the drive power source 7 of the metal vapor laser device configured in this way, a pulse voltage of several KV to more than ten KV and a repetition frequency of several KHz to more than ten KH2 is applied to the anode 5 of the laser oscillator tube 1 and the electrodes. When added to 6, rain and snow 1f! 5
．． 6, a pulse discharge occurs, and the heat of this discharge plasma heats and vaporizes the copper grains 4 in the discharge tube 3.
この銅蒸気は放電管３内に例えば１０１４〜１０１６ｎ
／ｃｉの密度で一様に分布し、放電プラズマの電子によ
り励起され、励起光を発光させる。This copper vapor is, for example, 1014 to 1016n in the discharge tube 3.
/ci and is excited by the electrons of the discharge plasma to emit excitation light.
励起光はレーザ共振器ミラー８．９間で共振増幅されて
からレーザ光として出力される。The excitation light is resonantly amplified between the laser resonator mirrors 8 and 9 and then output as laser light.
（発明が解決しようとする問題点）
しかしながら、このような従来の金属蒸気レーザ装置で
は両Ｎ極５，６の放電時に真空断熱室１４が昇温して熱
遮蔽板１５の表面よりアウトガスが放出されて真空度が
低下し、また、熱遮蔽板１５の材質が高融点金属（モリ
ブデン、タンタル等）よりなるために、この熱遮蔽板１
５に放電が飛んで異常放電が発生し、放電管内の放電が
拡散して、レーザ光出力と効率が低下するという問題が
ある。(Problem to be Solved by the Invention) However, in such a conventional metal vapor laser device, the temperature of the vacuum insulation chamber 14 rises during discharge of both N poles 5 and 6, and outgas is released from the surface of the heat shield plate 15. In addition, since the material of the heat shield plate 15 is made of a high melting point metal (molybdenum, tantalum, etc.), the heat shield plate 1
No. 5, there is a problem in that the discharge jumps, abnormal discharge occurs, and the discharge inside the discharge tube is diffused, resulting in a decrease in laser light output and efficiency.
また、金属蒸気レーザ装置のレーザ光発振運転中は熱遮
蔽板１５の内側が例えば１４００〜１５００℃程度に加
熱される一方、レーザ光発振運転中でないときには熱遮
蔽板１５が室温にまで低下するので、このようなヒート
サイクルと高温運転との繰り返しにより熱遮蔽板１５に
割れ等を生じ、断熱性能を著しく劣化させ、レーザ発振
管１の寿命を短かくするという問題もある。Furthermore, during the laser beam oscillation operation of the metal vapor laser device, the inside of the heat shield plate 15 is heated to, for example, about 1,400 to 1,500°C, whereas when the laser beam oscillation is not in operation, the heat shield plate 15 cools to room temperature. There is also a problem in that the repetition of such heat cycles and high-temperature operation causes cracks in the heat shield plate 15, significantly deteriorating the heat insulation performance, and shortening the life of the laser oscillation tube 1.
そこで本発明の目的は、レーザ光出力および効率の向上
を図ることができる金属蒸気レーザ装置を提供すること
にある。SUMMARY OF THE INVENTION An object of the present invention is to provide a metal vapor laser device that can improve laser light output and efficiency.
（問題点を解決するための手段）
本発明は、セラミックファイバ製断熱材の優れた断熱特
性と電気特性とに着目しでなされたものであり、金属蒸
気源を内蔵する放電管を、真空排気される真空外管内に
収容するレーザ発振管を有する金属蒸気レーザ装置にお
いて、上記放１！管の外周をセラミックファイバ製の断
熱材により被覆すると共に、この断熱材の設置空間を真
空ｖ１気し、この断熱材の密度を内周部で高くする一方
、外周部で低くしたことを特徴とする。(Means for Solving the Problems) The present invention was made by focusing on the excellent heat insulating properties and electrical properties of ceramic fiber heat insulating materials, and the present invention was developed by focusing on the excellent heat insulating properties and electrical properties of ceramic fiber heat insulating materials. In a metal vapor laser device having a laser oscillation tube housed in a vacuum outer tube, the above emission 1! The outer circumference of the tube is covered with a ceramic fiber heat insulating material, and the space in which this heat insulating material is installed is evacuated to a vacuum v1, making the density of this heat insulating material higher at the inner periphery and lower at the outer periphery. do.
（作用）
金属蒸気レーザ装置のレーザ光出力運転時にｔ４温昇渇
する放電管はセラミックファイバ製断熱材により断熱さ
れる。(Function) The discharge tube whose temperature rises and cools at t4 during laser light output operation of the metal vapor laser device is insulated by a ceramic fiber heat insulating material.
この断熱材の内周部は高密度で断熱材中の気泡が少ない
ために、断熱効果が若干低下するが、断熱材の気泡中に
含まれるバッフ７ガスが少ないので、このバッファガス
が電離されて放電パスを形成して異常ｆｉｍが発生する
のを防止することができる。The inner periphery of this insulation material has a high density and there are few bubbles in the insulation material, so the insulation effect is slightly reduced, but since there is little buffer 7 gas contained in the bubbles of the insulation material, this buffer gas is ionized. It is possible to prevent abnormal fim from occurring by forming a discharge path.
したがって、放電管内の放電の拡散を防止して放電管内
に放電エネルギを集中させることができるので、レーザ
光出力および効率の向上を図ることができる。Therefore, it is possible to prevent the dispersion of the discharge within the discharge tube and concentrate the discharge energy within the discharge tube, so that the laser light output and efficiency can be improved.
また、断熱材の外周部の密度が内周部のものよりも低い
ので、断熱効果が高く、放電管の熱を断熱することがで
きる。Furthermore, since the density of the outer circumferential portion of the heat insulating material is lower than that of the inner circumferential portion, the heat insulating effect is high and the heat of the discharge tube can be insulated.
〈実施例） 以下、本発明の一実施例を第１図（Ａ）。<Example) An embodiment of the present invention is shown in FIG. 1(A) below.
（Ｂ）に基づいて説明する。なお、第１図（Ａ）。The explanation will be based on (B). In addition, FIG. 1(A).
（Ｂ）中、第２図と共通する部分には同一符号を付して
いる。In (B), parts common to those in FIG. 2 are given the same reference numerals.
第１図（Ａ）は本発明の一実施例の全体構成図であり、
図において、放電管３の外周面にはセラミックファイバ
製の断熱材２１がほぼ全長に亘って被覆されている。FIG. 1(A) is an overall configuration diagram of an embodiment of the present invention,
In the figure, the outer peripheral surface of the discharge tube 3 is covered with a heat insulating material 21 made of ceramic fiber over almost its entire length.
断熱材２１は第１図（Ｂ）に示すように放電管３の外周
面を直接被覆する内層（内周部）２１Ａと、この内層２
１Ａの外周部をほぼ全長に亘って被覆する外層（外周部
）２１Ｂとの２層構造よりなり、内層２１Ａの断熱材密
度は例えば０．６〜０．７！７／ｃｃであり、外１ｉ１
２１Ｂの断熱材密度０゜４〜０．５ｇ／ｃｃよりも高密
度になっている。As shown in FIG. 1(B), the heat insulating material 21 includes an inner layer (inner circumferential portion) 21A that directly covers the outer circumferential surface of the discharge tube 3, and this inner layer 2.
It has a two-layer structure with an outer layer (outer periphery) 21B that covers the outer periphery of 1A over almost the entire length, and the insulation density of the inner layer 21A is, for example, 0.6 to 0.7!7/cc, and the outer 1i1
The density of the insulation material is higher than that of 21B, which is 0.4 to 0.5 g/cc.
このように断熱材２１の密度を高くするのは断熱材２１
での異常放電の発生を防止するためである。The insulation material 21 increases the density of the insulation material 21 in this way.
This is to prevent abnormal discharge from occurring.
すなわち、断熱材２１の断熱効果は断熱材密度を高める
と、その分、断熱材中の気泡が減少して ′低下するの
であるが、気泡中にはバッファガス供給装置１２から真
空外管２および放電管３供給されたバッフ７ガスが包含
され、しかも、このバッファガスが放電管３の１１ｉ電
時に電Ｉｌｌされて異常放電を発生させる原因となるの
で、断熱材密億を高くすることにより気泡数を減少させ
て、気泡中に包含されるバッフ７ガス伍を減少させて、
異常放電の発生の防止を図ったのである。In other words, when the density of the insulation material 21 is increased, the number of air bubbles in the insulation material decreases and the insulation effect of the insulation material 21 decreases. The buffer gas supplied to the discharge tube 3 is included, and this buffer gas is electrified during the 11th discharge of the discharge tube 3, causing abnormal discharge. By reducing the number of buff 7 gases contained in the bubbles,
The aim was to prevent abnormal discharge from occurring.
一方、断熱材２１の密度を低くするのは、断熱材中の気
泡数を増加させることにより、断熱効果を高めるためで
ある。On the other hand, the reason for lowering the density of the heat insulating material 21 is to increase the number of bubbles in the heat insulating material, thereby increasing the heat insulating effect.
断熱材２１の外層２１Ｂの外周には第１図（Δ）に示す
ように例えばガラス製で円管状の保護管２２が外嵌され
、外層２１Ｂの外周面より’１Ｊｔｔｌ物が剥離するの
を防止し、割れの防止と長寿命化を図っている。As shown in FIG. 1 (Δ), a cylindrical protective tube 22 made of, for example, glass is fitted around the outer periphery of the outer layer 21B of the heat insulating material 21 to prevent '1Jttl objects from peeling off from the outer circumferential surface of the outer layer 21B. The aim is to prevent cracking and extend life.
また、保護管２２の両端部は真空外管２内の両端部によ
り支持されている。Further, both ends of the protection tube 22 are supported by both ends inside the vacuum outer tube 2.
次に、本実施例の作用について述べる。Next, the operation of this embodiment will be described.
駆動電源７より所要のパルス電圧がレーザ発振管の陽極
５と陰極６とに加えられると、両電極管５．６間でパル
ス放電が発生し、この放電プラズマの熱により放電管３
が高温に加熱されると共に、その内部の銅粒４が加熱蒸
気化される。When a required pulse voltage is applied from the driving power source 7 to the anode 5 and cathode 6 of the laser oscillation tube, a pulse discharge occurs between the two electrode tubes 5 and 6, and the heat of this discharge plasma causes the discharge tube 3 to
is heated to a high temperature, and the copper grains 4 inside are heated and vaporized.
この銅蒸気が放電プラズマによって励起されて、励起光
を発光し、励起光はレーザ共振器ミラー１０．１１によ
り共振増幅されてからレーザ光として出力される。This copper vapor is excited by the discharge plasma to emit excitation light, which is resonantly amplified by the laser resonator mirror 10.11 and then output as laser light.
このようなレーザ光出力運転中には放電管３が高温に加
熱されるが、その熱は放電管３の外周を覆う断熱材２１
により断熱され、断熱材２１を収容する真空断熱室１４
は真空排気ポンプ１６により真空（Ｉ気されて断熱する
。During such laser light output operation, the discharge tube 3 is heated to a high temperature, and the heat is absorbed by the heat insulating material 21 that covers the outer periphery of the discharge tube 3.
A vacuum insulation chamber 14 that is insulated by and houses a heat insulating material 21.
is evacuated by the vacuum pump 16 and insulated.
また、ｆＩｉ電が行なわれる放電管３に近接する断熱材
２１の内層２１Ａは断熱材密度が高く、気泡数が少ない
ので、この気泡中に包含されるバッファガス供給装置１
２からのバッファガスの包含量が減少し、このバッファ
ガスの ｍにより内層２１Ａに異常放電が発生して放電
管３内の放電が拡散するのを防止することができ、放電
管３内に放電エネルギを集中させることができる。In addition, since the inner layer 21A of the heat insulating material 21 adjacent to the discharge tube 3 where the fIi electricity is performed has a high heat insulating material density and a small number of bubbles, the buffer gas supply device 1 contained in the bubbles
The amount of buffer gas contained in the discharge tube 3 is reduced, and this buffer gas can prevent abnormal discharge from occurring in the inner layer 21A and dispersing the discharge in the discharge tube 3. You can concentrate your energy.
このために、レーザ光出力と効率の向上を図ることがで
きる。Therefore, it is possible to improve laser light output and efficiency.
また、断熱材２１の外１ｔ！１２１Ｂはその内ｗ！１２
１へからの熱をさらに断熱し、この外１１２１Ｂからの
断熱材特有の剥離物の剥離は保護管２２により防止する
ことができる。Also, 1 ton of insulation material 21! 121B is one of them lol! 12
The protective tube 22 can further insulate the heat from the outside 1121B, and prevent peeling of the peeling material peculiar to the heat insulating material from the outside 1121B.
なお、上記実施例では断熱材２１を内層２１△と外層２
１Ｂとの２層構造にした場合について述べたが、本発明
はこれに限定されるものではなく、例えば３層以上でも
よい。In addition, in the above embodiment, the heat insulating material 21 has an inner layer 21Δ and an outer layer 2.
Although a case has been described in which a two-layer structure with 1B is used, the present invention is not limited to this, and may have three or more layers, for example.
以上説明したように本発明は、放電管の熱を断熱する断
熱材をセラミックファイバにより形成すると共に、この
断熱材の設置空間を真空排気し、この断熱材の密度を内
周部で高くする一方、外周部で低くした。As explained above, the present invention forms a heat insulating material that insulates the discharge tube from heat by using ceramic fibers, evacuates the installation space of this heat insulating material, and increases the density of this heat insulating material in the inner circumference. , lowered at the outer periphery.
したがって、本発明によれば、断熱材の内周部での異常
放電を防止して放電管内の１１１電の拡散を防止し、放
電管内に放電エネルギを集中させることができるので、
レーザ光出力と効率の向上とを図ることができる。Therefore, according to the present invention, it is possible to prevent abnormal discharge at the inner circumference of the heat insulating material, prevent the diffusion of 111 electrons within the discharge tube, and concentrate discharge energy within the discharge tube.
It is possible to improve laser light output and efficiency.
しかも、断熱材内周部の熱はその外周部で断熱すること
ができる。Moreover, the heat in the inner circumference of the heat insulating material can be insulated at its outer circumference.
第１図（Ａ＞は本発明に係る金属蒸気レーザ装置の一実
施例の全体構成図、第１図（Ｂ）は第１図（Ａ）の８−
Ｂ ｌ！所面図、第２図は従来の金属蒸気レーザ装置
の全体構成図である。
１・・・レーザ発振管、２・・・真空外管、３・・・放
電管、４・・・銅粒、１４・・・真空所熱室、２１・・
・断熱材（セラミックファイバ製）、２１Ａ・・・内層
（内周部）、２１Ｂ・・・外層（外周部）、２２・・・
保ｒ！！菅。FIG. 1(A) is an overall configuration diagram of an embodiment of a metal vapor laser device according to the present invention, and FIG. 1(B) is an 8-8 diagram of FIG. 1(A).
Bl! The top view and FIG. 2 are overall configuration diagrams of a conventional metal vapor laser device. DESCRIPTION OF SYMBOLS 1... Laser oscillation tube, 2... Vacuum outer tube, 3... Discharge tube, 4... Copper grains, 14... Vacuum heating chamber, 21...
・Insulating material (made of ceramic fiber), 21A...inner layer (inner periphery), 21B...outer layer (outer periphery), 22...
Protect! ! Suga.
Claims (1)
空外管内に収容するレーザ発振管を有する金属蒸気レー
ザ装置において、上記放電管の外周をセラミックファイ
バ製の断熱材により被覆すると共に、この断熱材の設置
空間を真空排気し、この断熱材の密度を内周部で高くす
る一方、外周部で低くしたことを特徴とする金属蒸気レ
ーザ装置。 ２、断熱材の密度が内周部で０．６〜０．７ｇ／ｃｃ、
外周部で０．４〜０．５ｇ／ｃｃである特許請求の範囲
第１項に記載の金属蒸気レーザ装置。[Claims] 1. In a metal vapor laser device having a laser oscillation tube in which a discharge tube containing a built-in metal vapor source is housed in a vacuum outer tube that is evacuated, the outer periphery of the discharge tube is covered with a heat insulating material made of ceramic fiber. 1. A metal vapor laser device characterized in that the space in which the heat insulating material is installed is evacuated, and the density of the heat insulating material is increased at the inner circumference and lowered at the outer circumference. 2. The density of the insulation material is 0.6 to 0.7 g/cc at the inner circumference,
2. The metal vapor laser device according to claim 1, wherein the outer circumference has a density of 0.4 to 0.5 g/cc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8566187A JP2538590B2 (en) | 1987-04-09 | 1987-04-09 | Metal vapor laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8566187A JP2538590B2 (en) | 1987-04-09 | 1987-04-09 | Metal vapor laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63252489A true JPS63252489A (en) | 1988-10-19 |
| JP2538590B2 JP2538590B2 (en) | 1996-09-25 |
Family
ID=13865009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8566187A Expired - Fee Related JP2538590B2 (en) | 1987-04-09 | 1987-04-09 | Metal vapor laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2538590B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01161350U (en) * | 1988-04-27 | 1989-11-09 | ||
| JPH0289381A (en) * | 1988-09-27 | 1990-03-29 | Osaka Prefecture | Metal vapor laser oscillation device |
-
1987
- 1987-04-09 JP JP8566187A patent/JP2538590B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01161350U (en) * | 1988-04-27 | 1989-11-09 | ||
| JPH0289381A (en) * | 1988-09-27 | 1990-03-29 | Osaka Prefecture | Metal vapor laser oscillation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2538590B2 (en) | 1996-09-25 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |