JPS6226877A - Metal vapor laser oscillation tube - Google Patents
Metal vapor laser oscillation tubeInfo
- Publication number
- JPS6226877A JPS6226877A JP16573185A JP16573185A JPS6226877A JP S6226877 A JPS6226877 A JP S6226877A JP 16573185 A JP16573185 A JP 16573185A JP 16573185 A JP16573185 A JP 16573185A JP S6226877 A JPS6226877 A JP S6226877A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- laser oscillation
- tube
- ring
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/031—Metal vapour lasers, e.g. metal vapour generation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は金属蒸気レーザ発振管に係わり、特にiIt極
先端からの異常数’?11防止する構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a metal vapor laser oscillation tube, and in particular to an abnormal number '?' from an iIt pole tip. 11.Regarding the structure for preventing.
従来の金属蒸気レーザ発振管は、セラミック内管内で金
属蒸気を放電させるための電極にモリブデンなどの金属
が用いられ、その電極は円筒状に形成され、かつ先端部
がエツジ状になっているため、局所的に放電し、正常な
放電プラズマが得られず、また、電極の先端部のみ局所
的に高温となシ、電極の寿命が短いという欠点があった
。Conventional metal vapor laser oscillation tubes use metals such as molybdenum for the electrodes to discharge metal vapor within the ceramic inner tube, and the electrodes are formed in a cylindrical shape with an edge-shaped tip. However, there were drawbacks such as localized discharge, making it impossible to obtain normal discharge plasma, and only the tip of the electrode being locally hot, resulting in a short electrode life.
本発明は上記のような従来技術の欠点を除去し、電極先
端部のみに絶縁性をもたせることにより異状放電を防止
することのできる金属蒸気レーザ発振管を提供すること
を目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a metal vapor laser oscillation tube that eliminates the drawbacks of the prior art as described above and can prevent abnormal discharge by providing insulation only to the tip of the electrode.
本発明は上記目的を達成するために為されたもので、金
属粒子が内部に配置されたセラミック内管内に放電用バ
ッファガスを供給しセラミンク内管の両端に設けられた
陽極と陰極間に高電圧全印加することによ逆放電プラズ
マを形成して金属粒子を蒸気化し、蒸気化された金4粒
子全放電プラズマ中の自由′6子により励起してレーザ
発振を行うレーザ発振管において、前記陽極と前記陰極
の先端部たとえばセラミックなどの絶縁性及び耐熱性の
優れ念材料で作られたリングにより被覆するかあるいは
コーテイング材を塗付するなどして電極の先端部のみ絶
縁性をもたせた金属蒸気レーザ発振管である。The present invention has been made to achieve the above object, and includes supplying a discharge buffer gas into a ceramic inner tube in which metal particles are arranged, and a high voltage between an anode and a cathode provided at both ends of the ceramic inner tube. In the laser oscillation tube, the metal particles are vaporized by forming a reverse discharge plasma by applying a full voltage, and the four vaporized gold particles are excited by the free '6 atoms in the full discharge plasma to perform laser oscillation. The tips of the anode and the cathode are covered with a ring made of a material with excellent insulation and heat resistance, such as ceramic, or are coated with a coating material, so that only the tips of the electrodes have insulation properties. It is a steam laser oscillation tube.
以下、本発明の実施例について詳細に説明する。 Examples of the present invention will be described in detail below.
金属ウランのレーザによる同位体分離技術等に利用され
に適し、本発明の金属蒸気レーザ発振管は、第1図に示
すような構造となっている。第1図においてlは耐熱性
に優れたセラミック内管であり、その内部の放電部2に
ガス供給系3からHe I/CNe等の放電用バッファ
ガスが供給されると共にロータリポンプ4により排気さ
れ、陽極5と陰極6間にパルス高電圧電源7から印加さ
れる電圧が数KV〜10数KV、繰返し周波数が数KH
z〜10数KHzのパルス高電圧によりノくルスニ極放
電全行なってプラズマ全発生する。セラミック内管1内
には金属粒子8が配置され、この金属粒子8が放電プラ
ズマと接触してセラミック内管1が極めて高温状態に加
熱されることで金属粒子8が蒸発することにより、レー
ザ媒質となる金属蒸気が生成される。この金属蒸気はセ
ラミック内管1内に一様に1014〜1015n/c!
R3の密度で分布し、放電プラズマ中の自由電子により
励起されることによって、その金属特有の波長の光を発
光レプリュースタ窓9全通してセラミック内管1の両端
に置かれた出力ミラー10と全反射ミラー11で樗成さ
れる光共振器で増幅され、出力ミラー10側よりレーザ
光となって出力される。The metal vapor laser oscillation tube of the present invention, which is suitable for use in isotope separation technology using a laser for metallic uranium, has a structure as shown in FIG. In FIG. 1, l is a ceramic inner tube with excellent heat resistance, and a discharge buffer gas such as He I/CNe is supplied from a gas supply system 3 to a discharge section 2 inside the tube, and is exhausted by a rotary pump 4. , the voltage applied from the pulse high voltage power supply 7 between the anode 5 and the cathode 6 is several KV to 10-odd KV, and the repetition frequency is several KH.
By applying a pulsed high voltage of 100 kHz to 10-odd KHz, a complete Norsunipolar discharge is carried out and plasma is entirely generated. Metal particles 8 are placed inside the ceramic inner tube 1, and the metal particles 8 contact the discharge plasma and heat the ceramic inner tube 1 to an extremely high temperature, which evaporates the metal particles 8, thereby creating a laser medium. Metal vapor is generated. This metal vapor is uniformly distributed in the ceramic inner tube 1 at 1014 to 1015 n/c!
R3 density and excited by free electrons in the discharge plasma, the light with a wavelength specific to the metal is passed through the entire light emitting replenisher window 9 and connected to the output mirrors 10 placed at both ends of the ceramic inner tube 1. The light is amplified by an optical resonator formed by the reflecting mirror 11, and is output as a laser beam from the output mirror 10 side.
セラミック内管1は両端側においてOリング12および
ベローズ13を介して外管14に支持されており、外管
14と内管1との間はロータリポンプ15によシ排気さ
れて真空断熱室16となっている。この真空断熱室16
内には熱遮蔽板17が設けられている。また、外管14
の周囲には冷却用配管18が設けられている。さらに、
外管14の途中には陽極5側と陰極6側とを電気的に分
離するための絶縁管19が挿入されている。このように
セラミック内管1内を高温状態に安定に維持する念めに
、真空断熱構造を採用している。The ceramic inner tube 1 is supported at both ends by an outer tube 14 via an O-ring 12 and a bellows 13, and the space between the outer tube 14 and the inner tube 1 is evacuated by a rotary pump 15 to form a vacuum insulation chamber 16. It becomes. This vacuum insulation chamber 16
A heat shield plate 17 is provided inside. In addition, the outer tube 14
A cooling pipe 18 is provided around the . moreover,
An insulating tube 19 is inserted in the middle of the outer tube 14 to electrically isolate the anode 5 side and the cathode 6 side. In order to stably maintain the inside of the ceramic inner tube 1 at a high temperature, a vacuum insulation structure is adopted.
セラミック内管1は約1500℃程度にまで昇温するた
め、熱により線膨張を起こす。ベローズ13はセラミッ
ク内管1の管軸方向の動きに自由度を持たせて、この線
膨張全吸収する念めのものである。The temperature of the ceramic inner tube 1 rises to about 1500° C., so that linear expansion occurs due to the heat. The bellows 13 is intended to provide a degree of freedom in the movement of the ceramic inner tube 1 in the tube axis direction and absorb all of this linear expansion.
次に5本発明の一実施例に係る金属蒸気レーザ発振管の
要部である電極部23の詳細な構造t−第2図に示す。Next, the detailed structure of the electrode section 23, which is the main part of the metal vapor laser oscillation tube according to one embodiment of the present invention, is shown in FIG.
第2図において陽極5及び陰極6の先端部に一端がセラ
ミック内管1の内径よりもわずかに小さな外径をもち他
端が電極5,6の内径よりもわずかに小さな外径をもつ
段付のリング22が配置されている。このリング22は
例えばセラミック、石英ガラス等の絶縁性及び耐熱性の
良い材料で形成されている。リング22をこのように配
置することにより電極5,6の先端部は絶縁物で被覆さ
れ、そこからの局所放電は起らず、正常な放電が発生す
る。又局部過熱が避けられ、電極の損傷は少なくなる。In Figure 2, the tips of the anode 5 and cathode 6 are stepped with one end having an outer diameter slightly smaller than the inner diameter of the ceramic inner tube 1 and the other end having an outer diameter slightly smaller than the inner diameter of the electrodes 5 and 6. A ring 22 is arranged. This ring 22 is made of a material with good insulation and heat resistance, such as ceramic or quartz glass. By arranging the ring 22 in this manner, the tips of the electrodes 5 and 6 are coated with an insulating material, and no local discharge occurs therefrom, and normal discharge occurs. Also, local overheating is avoided and damage to the electrodes is reduced.
又セラミック内管1の内部は1500℃程度まで昇温す
る念め、電極5,6は熱により膨張を起す。Furthermore, since the temperature inside the ceramic inner tube 1 is raised to about 1500° C., the electrodes 5 and 6 expand due to the heat.
その時リング22は電極5,6に押されてセラミック内
管1の中央方向に移動する。その後装置の稼動を停止し
た場合電樺5,6は収縮するがリング22はその場から
は移動しない。そのため電極5,6の先端部分がりング
22より外れて露出する可能性があるが、リング22の
’i葎5,6の内径にはめあっている部分の長さ金、あ
らかじめ゛鷹極5,6の膨張を見込んだ長さにしておく
か、第3図のようにリング状絶縁物のかわシに例えばセ
ラミックなどの絶縁物のコーテイング材24全塗布して
もよい。At this time, the ring 22 is pushed by the electrodes 5 and 6 and moves toward the center of the ceramic inner tube 1. When the apparatus is subsequently stopped, the electric poles 5 and 6 will contract, but the ring 22 will not move from its position. Therefore, the tips of the electrodes 5 and 6 may come off the ring 22 and be exposed. Alternatively, the length may be set to allow for the expansion of 6, or the coating material 24 of an insulating material such as ceramic may be entirely applied to the ring-shaped insulating material as shown in FIG.
〔発明の効果〕
以上述べたように、本発明によ几ば陽極5と陰極6の先
端部での異常放%−2防止し正常な放′ぼプラズマが形
成されかつ電極の損傷金小さくする金属蒸気レーザ発振
管を提供することができる。[Effects of the Invention] As described above, according to the present invention, abnormal discharge at the tips of the anode 5 and cathode 6 is prevented, normal discharge plasma is formed, and damage to the electrodes is reduced. A metal vapor laser tube can be provided.
第1図は本発明の一実施例に係る金属蒸気レーザ発振管
の断面構成図、第2図は同実施例の要部の詳細金示す要
部断面図、第3図は電極にコーテインク材を塗付した場
合の要部断面図である。Fig. 1 is a cross-sectional configuration diagram of a metal vapor laser oscillation tube according to an embodiment of the present invention, Fig. 2 is a sectional view of the main part showing details of the main part of the same embodiment, and Fig. 3 is a cross-sectional view showing the details of the main part of the same embodiment. FIG. 3 is a cross-sectional view of main parts when applied.
Claims (1)
バッファガスを供給し、セラミック内管の両端に設けら
れた陽極と陰極間に高電圧を印加することにより放電プ
ラズマを形成して金属粒子を蒸気化し、蒸気化された金
属粒子を放電プラズマ中の自由電子により励起してレー
ザ発振を行なうレーザ発振管において、前記陽極と前記
陰極の先端を絶縁性及び耐熱性に優れた材料で作られた
リングにより電極の先端部のみ絶縁性をもたせたことを
特徴とする金属蒸気レーザ発振管。A discharge buffer gas is supplied into the ceramic inner tube in which metal particles are placed, and a high voltage is applied between the anode and cathode provided at both ends of the ceramic inner tube to form discharge plasma and release the metal particles. In a laser oscillation tube that performs laser oscillation by exciting vaporized metal particles with free electrons in discharge plasma, the tips of the anode and the cathode are made of a material with excellent insulation and heat resistance. A metal vapor laser oscillation tube characterized in that only the tip of the electrode is insulated by a ring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16573185A JPS6226877A (en) | 1985-07-29 | 1985-07-29 | Metal vapor laser oscillation tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16573185A JPS6226877A (en) | 1985-07-29 | 1985-07-29 | Metal vapor laser oscillation tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6226877A true JPS6226877A (en) | 1987-02-04 |
Family
ID=15817999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16573185A Pending JPS6226877A (en) | 1985-07-29 | 1985-07-29 | Metal vapor laser oscillation tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6226877A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63253680A (en) * | 1987-04-10 | 1988-10-20 | Toshiba Corp | Metal vapor laser device |
-
1985
- 1985-07-29 JP JP16573185A patent/JPS6226877A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63253680A (en) * | 1987-04-10 | 1988-10-20 | Toshiba Corp | Metal vapor laser device |
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