JPS63206382A - Crystal pulling equipment - Google Patents
Crystal pulling equipmentInfo
- Publication number
- JPS63206382A JPS63206382A JP3850387A JP3850387A JPS63206382A JP S63206382 A JPS63206382 A JP S63206382A JP 3850387 A JP3850387 A JP 3850387A JP 3850387 A JP3850387 A JP 3850387A JP S63206382 A JPS63206382 A JP S63206382A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- crystal pulling
- ring
- stainless steel
- seed holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔概要〕
シードホルダを引き上げるワイヤの熱膨張率よりも小な
る熱膨張率を有するリングと、このワイヤとをかしめ止
めした結晶引き上げ装置。DETAILED DESCRIPTION OF THE INVENTION [Summary] A crystal pulling device in which a wire is caulked to a ring having a coefficient of thermal expansion smaller than that of a wire for pulling up a seed holder.
本発明は、結晶引き上げ装置に係り、特にシードホルダ
の引き上げ部の改良に関するものである。TECHNICAL FIELD The present invention relates to a crystal pulling device, and particularly to an improvement in a pulling section of a seed holder.
結晶引き上げ装置において、シードを引き上げる部分の
部品の結合状態が高温のために悪くなり、シードホルダ
が引き上げ用のワイヤから離脱する障害が発生している
。In a crystal pulling apparatus, the bonding state of parts in a part where seeds are pulled up deteriorates due to high temperature, and a problem occurs in which a seed holder separates from a pulling wire.
以上のような状況からシードホルダと引き上げ用のワイ
ヤとの結合が高温の場合にも悪くならない結晶引き上げ
装置が要望されている。Under the above circumstances, there is a need for a crystal pulling apparatus in which the bond between the seed holder and the pulling wire does not deteriorate even at high temperatures.
従来の結晶引き上げ装置の引き上げ部は第２図に示すよ
うに、タングステンワイヤ１１に嵌めたステンレスリン
グ１２をかしめて、シードホルダ３を貫通する孔にタン
グステンワイヤ１１を通すとステンレスリング１２がシ
ードホルダ３のテーパ一部に当たり、タングステンワイ
ヤ１１によってシードホルダ３を引き上げ得るようにな
っている。As shown in FIG. 2, in the pulling section of a conventional crystal pulling device, when a stainless steel ring 12 fitted to a tungsten wire 11 is caulked and the tungsten wire 11 is passed through a hole penetrating the seed holder 3, the stainless steel ring 12 is attached to the seed holder. 3, the seed holder 3 can be pulled up by a tungsten wire 11.
シード５に設けた孔とシードホルダ３の孔に嵌合するピ
ン４によりシード５はシードホルダ３と結合されている
。The seed 5 is coupled to the seed holder 3 by a pin 4 that fits into a hole provided in the seed 5 and a hole in the seed holder 3.
結晶引き上げ時には、タングステンリング２とステンレ
スワイヤ１のかしめ部は５００℃程度に加熱される。During crystal pulling, the caulked portion of the tungsten ring 2 and the stainless steel wire 1 is heated to about 500°C.
以上説明の従来の結晶引き上げ装置で問題となるのは、
装置稼動時にタングステンワイヤ１１のステンレスリン
グ１２との結合部が加熱されて５００℃になり、タング
ステンよりステンレス・スチールの熱膨張率が大きいた
めに、ステンレスリング１２がタングステンワイヤ１１
から外れ、シードホルダ３及びシード５が落下してしま
うために、稼動を続けることが不可能になることである
。The problems with the conventional crystal pulling equipment explained above are:
When the device is in operation, the joint between the tungsten wire 11 and the stainless steel ring 12 is heated to 500°C, and since the coefficient of thermal expansion of stainless steel is higher than that of tungsten, the stainless steel ring 12 is heated to 500°C.
Since the seed holder 3 and the seeds 5 come off and fall, it becomes impossible to continue the operation.
本発明は以上のような状況から簡単且つ容易に調達でき
る結晶引き上げ装置の提供を目的としたものである。The present invention aims to provide a crystal pulling apparatus that can be simply and easily procured in view of the above-mentioned circumstances.
上記問題点は、シードホルダを引き上げるワイヤの熱膨
張率よりも小なる熱膨張率を有するリングとこのワイヤ
とをかしめ止めした本発明による結晶引き上げ装置によ
って解決される。The above-mentioned problems are solved by the crystal pulling device according to the present invention, in which the wire is caulked to a ring having a coefficient of thermal expansion smaller than that of the wire that pulls up the seed holder.
〔作用〕
即ち本発明においては、ワイヤに、ワイヤの材料よりも
小なる熱膨張率を有する材料のリングをかしめ止めして
いるので、此の部分が高温になると常温の場合よりも結
合力が強くなり、リングがワイヤから外れて、シードホ
ルダがワイヤから離脱することがなくなる。[Function] That is, in the present invention, since the wire is caulked with a ring made of a material having a coefficient of thermal expansion smaller than that of the material of the wire, when this part becomes high temperature, the bonding force becomes stronger than when it is at room temperature. This will prevent the ring from coming off the wire and the seed holder from coming off the wire.
以下第１図について本発明の一実施例を説明する。 An embodiment of the present invention will be described below with reference to FIG.
第１図においてステンレスワイヤ１とタングステンリン
グ２はかしめ止めされており、シードホルダ３を貫通す
る孔にステンレスワイヤ１を通すとタングステンリング
２がシードホルダ３のテーパ一部に当たり、ステンレス
ワイヤｌによってシードホルダ３を引き上げ得るように
なっている。In Fig. 1, a stainless steel wire 1 and a tungsten ring 2 are caulked together, and when the stainless steel wire 1 is passed through a hole penetrating the seed holder 3, the tungsten ring 2 hits a part of the taper of the seed holder 3, and the stainless steel wire 1 causes the seed to be seeded. The holder 3 can be pulled up.
シード５に設けた孔とシードホルダ３の孔に嵌合するピ
ン４によりシード５はシードホルダ３と結合されている
。The seed 5 is coupled to the seed holder 3 by a pin 4 that fits into a hole provided in the seed 5 and a hole in the seed holder 3.
結晶引き上げ作業が始まると、タングステンリング２と
ステンレスワイヤ１のかしめ部は５００ ”Ｃ程度に加
熱されるが、タングステンの熱膨張率は４．６ Ｘｌ０
−’／にであるが、ステンレス・スチールの熱膨張率は
１８．４ Ｘ １０−’／ Ｋのために、ステンレスワ
イヤ１とタングステンリング２とは常温の場合よりも更
に強く結合され、タングステンリング２がステンレスワ
イヤ１から離脱することを防止することが可能となる。When the crystal pulling operation begins, the caulked part of the tungsten ring 2 and the stainless steel wire 1 is heated to about 500"C, but the coefficient of thermal expansion of tungsten is 4.6Xl0
However, since the coefficient of thermal expansion of stainless steel is 18.4 x 10-'/K, the stainless steel wire 1 and tungsten ring 2 are bonded more strongly than at room temperature, and the tungsten ring 2 can be prevented from coming off from the stainless steel wire 1.
以上説明したように本発明によれば極めて簡単な材質の
変更により、高温時のワイヤとリングの結合力を強める
ことが可能となり、結晶引き上げ装置の円滑な稼動を可
能にする利点があり、著しい経済的及び、信顛性向上の
効果が期待でき工業的には極めて有用なものである。As explained above, according to the present invention, it is possible to strengthen the bonding force between the wire and the ring at high temperatures by making a very simple change in the material, which has the advantage of enabling smooth operation of the crystal pulling device, which is remarkable. It is expected to have economical and reliability-improving effects and is extremely useful industrially.
第１図は本発明による一実施例を示す側断面図、第２図
は従来の結晶引き上げ装置の要部を示す側断面図、
である。
図において、
１はステンレスワイヤ、
２はタングステンリング、
３はシードホルダ、
４はピン、
５はシード、FIG. 1 is a side sectional view showing one embodiment of the present invention, and FIG. 2 is a side sectional view showing main parts of a conventional crystal pulling apparatus. In the figure, 1 is a stainless steel wire, 2 is a tungsten ring, 3 is a seed holder, 4 is a pin, 5 is a seed,
Claims (1)
率よりも小なる熱膨張率を有するリング（２）と前記ワ
イヤ（１）とをかしめ止めしたことを特徴とする結晶引
き上げ装置。A crystal pulling device characterized in that the wire (1) is caulked to a ring (2) having a coefficient of thermal expansion smaller than that of the wire (1) for pulling up the seed holder (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3850387A JPS63206382A (en) | 1987-02-20 | 1987-02-20 | Crystal pulling equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3850387A JPS63206382A (en) | 1987-02-20 | 1987-02-20 | Crystal pulling equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63206382A true JPS63206382A (en) | 1988-08-25 |
| JPH0542396B2 JPH0542396B2 (en) | 1993-06-28 |
Family
ID=12527074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3850387A Granted JPS63206382A (en) | 1987-02-20 | 1987-02-20 | Crystal pulling equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63206382A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09175894A (en) * | 1995-12-25 | 1997-07-08 | Shin Etsu Handotai Co Ltd | Apparatus for pulling up single crystal |
| JPH11292686A (en) * | 1998-04-07 | 1999-10-26 | Mitsubishi Materials Corp | Seed chuck |
| WO2000040786A1 (en) * | 1998-12-28 | 2000-07-13 | Shin-Etsu Handotai Co., Ltd. | Method for producing single crystal and pulling device |
| JP2006169034A (en) * | 2004-12-15 | 2006-06-29 | Shin Etsu Handotai Co Ltd | Single crystal pulling apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140106240A (en) * | 2013-02-26 | 2014-09-03 | 삼성에스디에스 주식회사 | System and method for measuring efficiency of voltage/current in power module |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117547U (en) * | 1976-03-02 | 1977-09-06 |
-
1987
- 1987-02-20 JP JP3850387A patent/JPS63206382A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117547U (en) * | 1976-03-02 | 1977-09-06 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09175894A (en) * | 1995-12-25 | 1997-07-08 | Shin Etsu Handotai Co Ltd | Apparatus for pulling up single crystal |
| EP0783047A1 (en) * | 1995-12-25 | 1997-07-09 | Shin-Etsu Handotai Company Limited | Crystal Pulling Apparatus |
| US5833750A (en) * | 1995-12-25 | 1998-11-10 | Shin-Etsu Handotai Co. Ltd. | Crystal pulling apparatus |
| JPH11292686A (en) * | 1998-04-07 | 1999-10-26 | Mitsubishi Materials Corp | Seed chuck |
| WO2000040786A1 (en) * | 1998-12-28 | 2000-07-13 | Shin-Etsu Handotai Co., Ltd. | Method for producing single crystal and pulling device |
| US6340391B1 (en) | 1998-12-28 | 2002-01-22 | Shin-Etsu Handotai Co. | Method for producing single crystal and pulling device |
| JP3750525B2 (en) * | 1998-12-28 | 2006-03-01 | 信越半導体株式会社 | Single crystal manufacturing method and pulling apparatus |
| JP2006169034A (en) * | 2004-12-15 | 2006-06-29 | Shin Etsu Handotai Co Ltd | Single crystal pulling apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542396B2 (en) | 1993-06-28 |
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