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JPS63164229A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS63164229A
JPS63164229A JP61315107A JP31510786A JPS63164229A JP S63164229 A JPS63164229 A JP S63164229A JP 61315107 A JP61315107 A JP 61315107A JP 31510786 A JP31510786 A JP 31510786A JP S63164229 A JPS63164229 A JP S63164229A
Authority
JP
Japan
Prior art keywords
chip
electrodes
lines
bump
tape carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61315107A
Other languages
Japanese (ja)
Inventor
Hisao Kato
久雄 加藤
Yoshio Inoue
善雄 井上
Masahiro Takashima
高島 正博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP61315107A priority Critical patent/JPS63164229A/en
Publication of JPS63164229A publication Critical patent/JPS63164229A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/50Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto

Landscapes

  • Wire Bonding (AREA)

Abstract

PURPOSE:To provide many electrodes in the same chip size, by arranging two lines or a plurality of lines of the electrodes of the chip on each side of the chip, insulating and sealing tape carriers, arranging the tape carriers in two stages or a plurality of stages, and connecting the electrodes of the chip in two or more than two lines and external electrodes. CONSTITUTION:Electrodes 5 and 6 on a semiconductor chip 2 are arranged in two lines or more than two lines on each side of the chip 2. Conductor foils 9 and 11 are bonded to sheet shaped insulators 10 and 12 and a tape carrier 13 is formed as an intermediate electrode. The electrodes are insulated and sealed and stacked in two stage or in a plurality of stages. The chip electrodes 5 and 6 in two or more lines are connected to external electrodes 14. For example, a bump 7, which is provided on the inner electrode 5 on the chip, is made higher than a bump 8 by the thickness of the conductor foil 11 and an insulating foil 10 of the tape carrier 13. The bump 8 is connected to the conductor foil 9, and the bump 7 is connected to the conductor foil 11. The tape carrier 13 is divided into two parts before the external electrodes 14, and each conductor part is connected to each external electrode 14.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、半導体装置に関し、特に入出力数の多い大
規模集積回路(VLSI)のチップ上の電極の配置およ
びチップの電極と外部電極との電橋構造に関するもので
ある。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to semiconductor devices, and in particular to the arrangement of electrodes on a chip of a large-scale integrated circuit (VLSI) with a large number of inputs and outputs, and the relationship between the chip electrodes and external electrodes. This is related to the electric bridge structure.

〔従来の技術〕[Conventional technology]

システムの大規模化と高集積化により、チップより取り
出す信号およびチップに入力する信号数が多くなってい
る。その結果、ワイヤボンディング技術では対応しきれ
ない超多ピンポンディング技術としてTAB (Tap
e  AutomatedBonding)技術が誕生
した。
As systems become larger and more highly integrated, the number of signals extracted from a chip and the number of signals input to a chip are increasing. As a result, TAB (Tap
e Automated Bonding) technology was born.

第3図は従来のチップ上の電極配置を示し、第4図は従
来のTAB技術によるチップの電極と外部電極との接続
を示し、以下これを用いて従来の半導体装置を説明する
FIG. 3 shows the arrangement of electrodes on a conventional chip, and FIG. 4 shows the connection between the electrodes of the chip and external electrodes by the conventional TAB technique, and the conventional semiconductor device will be explained below using these diagrams.

まず第3図に示すように、チップ上の電極配置はチップ
の各辺に1列に並んでおり、この4i造はワイヤボンデ
ィング技術を用いた場合でもTAB技術を用いた場合で
も同じである。
First, as shown in FIG. 3, the electrodes on the chip are arranged in a line on each side of the chip, and this 4i structure is the same whether wire bonding technology is used or TAB technology is used.

次に第4図に示すように、チップ上の電極(6)に突起
電極(以下バンプと述べる)(8)を形成してテープキ
ャリアQ3のリードの一方をバンブに接続し、他方を外
部電極に接続するものである。
Next, as shown in FIG. 4, a protruding electrode (hereinafter referred to as bump) (8) is formed on the electrode (6) on the chip, one of the leads of tape carrier Q3 is connected to the bump, and the other is connected to the external electrode. It is connected to.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来の半導体装置は、第3図に示すようにチップの電極
が1列に並ぶ構成であるので、電極の個数がチップサイ
ズにより制限を受け、入出力数が増えるとチップサイズ
を大きくすることが必要で、またそのためチップ1個の
費用が増加するという問題点があった。
Conventional semiconductor devices have a structure in which the electrodes of the chip are lined up in a row, as shown in Figure 3, so the number of electrodes is limited by the chip size, and as the number of inputs and outputs increases, the chip size cannot be increased. However, there was a problem in that the cost of each chip increased.

この発明は上記のような問題点を解消するためになされ
たもので、同一チップサイズで多くの電極がとれる半導
体装置を得ることを目的とする。
The present invention was made to solve the above-mentioned problems, and an object of the present invention is to obtain a semiconductor device that can have many electrodes with the same chip size.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る半導体装置は、チップの電極を千ノブの
各辺に2列もしくは複数列並べ、テープキャリアを絶縁
封止し2段もしくは複数段差べて、2列以上あるチップ
の電極と外部電極とを接続したものである。
In the semiconductor device according to the present invention, two or more rows of chip electrodes are arranged on each side of a thousand knobs, a tape carrier is insulated and sealed, and two or more rows of chip electrodes and external electrodes are separated by two or more rows. This is a connection between

〔作用〕[Effect]

この発明において、チップ上の電極を2列以上に並べる
ことが可能になったことにより、同一チップサイズの中
に従来制限されていた個数以上の電極を配置することが
可能になり、同一電極数ならばチップサイズを小さくす
ることができる。
In this invention, it has become possible to arrange the electrodes on the chip in two or more rows, which makes it possible to arrange more electrodes than the conventional limit on the same chip size, and the number of the same electrodes can be increased. If so, the chip size can be reduced.

〔発明の実施例〕[Embodiments of the invention]

以下、この発明の一実施例を図について説明する。第1
図は本発明の一実施例による半導体装置のh’? aを
示し、第1図falは断面図で、第1 UjI+b+は
平面図である。第1図(alに示すように、チップの内
側にある′電極(5)の上に盛られたハンプ(7)は、
チップの外側にある電極(6)の上に盛られたハンプ(
8)より、テープキャリア03のm電体筒(9)と絶縁
体筒θ値の厚み分だけ高く盛られており、バンプ(8)
が導電体箔(9)に、ハンプ(7)が導電体箔at+に
接続する。
An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure shows h'? of a semiconductor device according to an embodiment of the present invention. a, FIG. 1 fal is a sectional view, and 1st UjI+b+ is a plan view. As shown in Figure 1 (al), the hump (7) placed on the 'electrode (5) inside the chip is
A hump (
8), the m electric cylinder (9) of tape carrier 03 and the insulator cylinder are raised as high as the thickness of the θ value, and the bump (8)
is connected to the conductive foil (9), and the hump (7) is connected to the conductive foil at+.

尚、チップの内側にある電極(5)に接続する導電体7
凸at+および絶縁体筒ωは、チップの外側にある電V
iA(61に接続する導電体箔(9)および絶縁体筒0
ωより長い構造をとる。次に第1図(blで示すように
、テープキャリア01は外部電極Q41の手前で2組に
分離し、各々の導電体部分が外部電極041と接続する
In addition, the conductor 7 connected to the electrode (5) inside the chip
The convex at+ and the insulator cylinder ω are connected to the voltage V outside the chip.
iA (conductor foil (9) connected to 61 and insulator cylinder 0
It has a structure longer than ω. Next, as shown in FIG. 1 (bl), the tape carrier 01 is separated into two groups in front of the external electrode Q41, and each conductive portion is connected to the external electrode 041.

第2図は、チップ(2)上の電極配置を示しており、チ
ップの内側の電極(5)と外側の電極(6)が、チップ
の各辺に2列に並んだ構造である。
FIG. 2 shows the arrangement of electrodes on the chip (2), in which an electrode (5) on the inside of the chip and an electrode (6) on the outside are arranged in two rows on each side of the chip.

尚、上記実施例において、チップの電極を2列に並べた
場合のチップの電極と外部電極の接続にこの発明を適用
したが、n列(n=2.3・・・)に並べた場合に対し
てもこの発明を適用することができる。
In the above embodiment, the present invention was applied to the connection between the chip electrodes and external electrodes when the chip electrodes were arranged in two rows, but when the chip electrodes were arranged in n rows (n = 2.3...) This invention can also be applied to.

また、チップの電極を平行に並べるだけでなく、平行で
ない場合にも同様に通用することができる。
Furthermore, the present invention can be applied not only when the electrodes of the chip are arranged parallel to each other but also when they are not parallel to each other.

また、第5図に示すように、チップの内側のバンプ(7
)の厚みとチップの外側にあるバンプ(8)の厚みを同
じにして、テープキャリアをバンプ(8)とバンプ(7
)の間で曲げて接続しても、この発明を適用することが
できる。この場合、テープキャリアの絶縁体7fJaω
の端面を斜めにカットするとテープキャリアの強度が増
す。
Also, as shown in Figure 5, the bumps (7) on the inside of the chip
) and the thickness of the bumps (8) on the outside of the chip, and then attach the tape carrier to the bumps (8) and (7).
), the present invention can be applied even if the connection is made by bending between the two. In this case, the insulator 7fJaω of the tape carrier
Cutting the end face diagonally increases the strength of the tape carrier.

また、第6図に示すように、テープキャリアと外部電極
の接続に導電体線を用いても同様の効果を得ることがで
きる。
Further, as shown in FIG. 6, the same effect can be obtained by using a conductor wire to connect the tape carrier and the external electrode.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によればチップの電極を各辺2
列に構成したので、同一チップサイズ上んい多くの電極
を配置することができ、また電極数が同じであれば、チ
ップサイズを小さくとることができる効果がある。
As described above, according to the present invention, the electrodes of the chip are
Since they are arranged in rows, more electrodes can be arranged on the same chip size, and if the number of electrodes is the same, the chip size can be made smaller.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図と第2図は、この発明の一実施例による半導体装
置を示し、第1図fatは千ノブの電極とテープキャリ
アの接続を示す断面図、第2図+blはテープキャリア
と外部電極の接続を示すチップ上部から見た図、第2図
は、チップ上の電極の配置を示したものである。第3図
、第4図は従来の半導体装置を示し、第3図はチップ上
の電極の配置を示し、第4図は千ノブの電極とテープキ
ャリアの接続の断面図である。第5図、第6図は、この
発明のその他の実施例による半導体装置を示し、第5図
は、チップの電極と外部電極を接続するその他の実施例
の断面図、第6図は、テープキャリアと外部電極を接続
するその他の実施例の図である。 illはダイパッド、(2)は半導体チップ、(3)は
パッシベーション膜、(4)はレジスト、(5)、(6
)は電極、(7)、(8)はバンプ、(9)、at+は
導電体箔、00)、0υは絶縁体筒、α濁はテープキャ
リア、圓は外部電極、OQは導電体線である。 第1図  (1 1タ゛1パヅド        71g  )(ンプZ
 早導ネチフグ      ?、//ii@木箔3Iで
ランベーン1ンオ臭   10.12 、7色)東1本
諸手 レジスト        U チー7′キヤツア
5、t  @オ函 (b) 74  !) 4p 電41運d 第2図 第3図 第4図 第6図 15゛導電I本I表
1 and 2 show a semiconductor device according to an embodiment of the present invention, FIG. 1 fat is a sectional view showing the connection between the 1,000-knob electrode and the tape carrier, and FIG. 2 +bl is a sectional view showing the connection between the tape carrier and the external electrode. FIG. 2, which is a view from the top of the chip showing the connections, shows the arrangement of the electrodes on the chip. 3 and 4 show a conventional semiconductor device, FIG. 3 shows the arrangement of electrodes on a chip, and FIG. 4 is a cross-sectional view of the connection between a thousand-knob electrode and a tape carrier. 5 and 6 show semiconductor devices according to other embodiments of the present invention, FIG. 5 is a sectional view of another embodiment in which chip electrodes and external electrodes are connected, and FIG. 6 is a tape It is a figure of other examples which connect a carrier and an external electrode. ill is a die pad, (2) is a semiconductor chip, (3) is a passivation film, (4) is a resist, (5), (6)
) are electrodes, (7) and (8) are bumps, (9), at+ are conductive foils, 00), 0υ are insulator cylinders, α is tape carrier, circle is external electrode, OQ is conductive wire be. Figure 1 (1 1 type 1 pad 71g) (Pump Z
Fast guide netifugu? , //ii @ wood foil 3I and Lanbane 1 o odor 10.12 , 7 colors) East 1 moto morote resist U Qi 7' kiyatua 5, t @ o box (b) 74 ! ) 4p Electricity 41 luck d Figure 2 Figure 3 Figure 4 Figure 6 Figure 15゛Conductivity I book I table

Claims (1)

【特許請求の範囲】[Claims] 半導体チップ(以下チップと述べる)上の電極が、チッ
プ各辺に2列もしくはそれ以上の複数列を並べた構造を
有し、シート状の絶縁体に導電体箔を接着したテープキ
ャリア(以下テープキャリアと述べる)を中間電極とし
、絶縁封止して2段もしくは複数段重ねて、2列以上の
チップ電極と外部電極とを接続することを特徴とする半
導体装置。
The electrodes on a semiconductor chip (hereinafter referred to as a chip) have a structure in which two or more rows of electrodes are arranged on each side of the chip. A semiconductor device characterized in that a carrier (referred to as a carrier) is used as an intermediate electrode, and two or more rows of chip electrodes and external electrodes are connected by insulatingly sealing and stacking them in two or more stages.
JP61315107A 1986-12-25 1986-12-25 Semiconductor device Pending JPS63164229A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61315107A JPS63164229A (en) 1986-12-25 1986-12-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61315107A JPS63164229A (en) 1986-12-25 1986-12-25 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS63164229A true JPS63164229A (en) 1988-07-07

Family

ID=18061502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61315107A Pending JPS63164229A (en) 1986-12-25 1986-12-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS63164229A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02235351A (en) * 1989-01-30 1990-09-18 Internatl Business Mach Corp <Ibm> Assembly of semiconductor chip and its assembling method
WO1992000603A1 (en) * 1990-06-26 1992-01-09 Seiko Epson Corporation Semiconductor device and method of manufacturing the same
JPH0448741A (en) * 1990-06-15 1992-02-18 Matsushita Electric Ind Co Ltd Mounting body of semiconductor component
JPH04348048A (en) * 1991-05-24 1992-12-03 Nec Corp Semiconductor device
US5275184A (en) * 1990-10-19 1994-01-04 Dainippon Screen Mfg. Co., Ltd. Apparatus and system for treating surface of a wafer by dipping the same in a treatment solution and a gate device for chemical agent used in the apparatus and the system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02235351A (en) * 1989-01-30 1990-09-18 Internatl Business Mach Corp <Ibm> Assembly of semiconductor chip and its assembling method
JPH0448741A (en) * 1990-06-15 1992-02-18 Matsushita Electric Ind Co Ltd Mounting body of semiconductor component
WO1992000603A1 (en) * 1990-06-26 1992-01-09 Seiko Epson Corporation Semiconductor device and method of manufacturing the same
US5313367A (en) * 1990-06-26 1994-05-17 Seiko Epson Corporation Semiconductor device having a multilayer interconnection structure
US5275184A (en) * 1990-10-19 1994-01-04 Dainippon Screen Mfg. Co., Ltd. Apparatus and system for treating surface of a wafer by dipping the same in a treatment solution and a gate device for chemical agent used in the apparatus and the system
JPH04348048A (en) * 1991-05-24 1992-12-03 Nec Corp Semiconductor device

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