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JPS6313446Y2 - - Google Patents

Info

Publication number
JPS6313446Y2
JPS6313446Y2 JP1981021775U JP2177581U JPS6313446Y2 JP S6313446 Y2 JPS6313446 Y2 JP S6313446Y2 JP 1981021775 U JP1981021775 U JP 1981021775U JP 2177581 U JP2177581 U JP 2177581U JP S6313446 Y2 JPS6313446 Y2 JP S6313446Y2
Authority
JP
Japan
Prior art keywords
light
mirror
receiving surface
light source
observed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981021775U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57134612U (ru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981021775U priority Critical patent/JPS6313446Y2/ja
Priority to US06/348,086 priority patent/US4547073A/en
Publication of JPS57134612U publication Critical patent/JPS57134612U/ja
Application granted granted Critical
Publication of JPS6313446Y2 publication Critical patent/JPS6313446Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP1981021775U 1981-02-17 1981-02-17 Expired JPS6313446Y2 (ru)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1981021775U JPS6313446Y2 (ru) 1981-02-17 1981-02-17
US06/348,086 US4547073A (en) 1981-02-17 1982-02-11 Surface examining apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981021775U JPS6313446Y2 (ru) 1981-02-17 1981-02-17

Publications (2)

Publication Number Publication Date
JPS57134612U JPS57134612U (ru) 1982-08-21
JPS6313446Y2 true JPS6313446Y2 (ru) 1988-04-16

Family

ID=29819619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981021775U Expired JPS6313446Y2 (ru) 1981-02-17 1981-02-17

Country Status (1)

Country Link
JP (1) JPS6313446Y2 (ru)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4105256B2 (ja) * 1997-07-29 2008-06-25 株式会社ナノシステムソリューションズ 光照射装置及び表面検査装置
JP6697285B2 (ja) * 2015-02-25 2020-05-20 株式会社昭和電気研究所 ウェハ欠陥検査装置
JP6595951B2 (ja) * 2016-05-19 2019-10-23 株式会社神戸製鋼所 金属板の粗さ推定方法及び粗さ推定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3815998A (en) * 1972-10-30 1974-06-11 Ibm Surface contrast system and method
JPS55101002A (en) * 1979-01-26 1980-08-01 Hitachi Ltd Inspecting method for mirror face body

Also Published As

Publication number Publication date
JPS57134612U (ru) 1982-08-21

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