JPS63106540A - Apparatus for plane scanning type spectroscope - Google Patents

Abstract

PURPOSE:To measure the spectral characteristic of a plane at an arbitrary position, by moving a manipulator loaded with a light path altering part such as a mirror. CONSTITUTION:The light from a light source 1 for spectral diffraction is altered in its light path to a right angle by a half mirror 2 to enter an optical part housing 3 for altering a light path and further altered in its light path by the housing 3 to irradiate a measuring object 9. The light generated from the measuring object 9 is again altered in its light path by the housing 3 and altered in its light path to a right angle by a total reflection mirror 4. Further, the wavelength distribution thereof is measured by a spectroscope 5 to be detected by a detector 16. A two-dimensional manipulator consists of an X-axis moving distance measuring line sensor 6 and a Y-axis moving distance measuring line sensor 7 and measures the moving distances on an X-axis and a Y-axis. By this method, the spectral characteristic from a measuring point at the arbitrary position of a plane can be measured.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention is a spectrometer, etc., in which when the measurement position is not constant, the detector and light source remain fixed, but can be moved by mounting an optical path changing part such as a mirror. A plane scanning spectrometer device for spectrometers that can measure and manage the direction and movement distance.

[Summary of the invention]

This invention makes it possible to measure the optical characteristics of an object at any arbitrary position on a plane by moving a manipulator equipped with an optical path changing component such as a mirror.

[Conventional technology]

Conventionally, when you want to measure optical properties at any position on a plane,
The material to be measured at that measurement point was cut out and measured.

[Problem that the invention seeks to solve]

However, with conventional spectrometers, it has been impossible to nondestructively measure spectral characteristics from any arbitrary plane.

Therefore, in order to solve these conventional drawbacks, this invention moves a manipulator equipped with an optical path changing component such as a mirror to a measurement point, satisfies the optical conditions at that position, and measures the spectral characteristics. The purpose is

[Means for solving problems]

In order to solve the above problems, the present invention has a degree of freedom for driving in the X direction and a degree of freedom for driving in the Y direction, and is equipped with a sensor on each axis that can measure the moving distance. By mounting a drive motor on each axis, we were able to position the optical path changing component at the measurement point and obtain spectral characteristics by satisfying the optical conditions.

[Effect]

When a plane scanning device configured as described above is used, spectral characteristics can be obtained from any position on a plane.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

FIG. 1 shows a conceptual diagram of a plane scanning spectrometer device. The light emitted from a light source 1 for spectroscopy is changed to a right angle by a half mirror 2 mounted on a support rod 10 for moving the half mirror. Enter the optical component housing 3. The optical path changing optical component housing 3 is mounted on a two-dimensional manipulator support rod 8. FIG. 2 shows the arrangement of optical components mounted in the optical path changing optical component housing 3. The light incident on the housing 3 changes its optical path to a right angle again by the total reflection mirror 15, passes through the half mirror 12 by the total reflection mirror 13, and is irradiated onto the object 9 to be measured.

The concerns from the measurement object 9 are the fluorescence and the absorption rate by the measurement object, but 1. The light generated from the π constant 9 is bent at a right angle by a half mirror 12, changed again at a right angle by a total reflection mirror 14, and reaches the total reflection mirror. The light that has been changed to a right angle by the total reflection mirror 4 is sent to a detector 16 whose wavelength distribution is detected by a spectrometer 5.
Measured by. In this case, the two-dimensional manipulator is
The line sensor for measuring the axis movement distance measures the movement distance of the X axis, and the line sensor for measuring the Y axis movement distance measures the movement distance of the Y axis.

〔Effect of the invention〕

As explained above, the present invention has the effect of being able to measure spectral characteristics from a measurement point at any position on a plane.

[Brief explanation of the drawing]

FIG. 1 is a conceptual diagram of a plane scanning spectrometer device according to the present invention, and FIG. 2 is a diagram showing components mounted on an optical component housing for changing the optical path. Applicant: Seiko Electronic Industries Co., Ltd. Agent Patent Attorney Mogami f! (1 other person) Senmen Sara 4
Kotaka 1j of the equipment for Mitsuyo's mold; 1st figure of light; 1st figure of light; 1st part housing 7°; 2nd figure of stone parts

Claims (1)

[Claims] a fixed light source and an optical detector; a group of irradiation optical mirrors for irradiating light from the light source to one point on a flat measurement object;
A detection optical mirror group for inputting optical information from the object to be measured into the detector, a driving means for scanning the irradiation and detection optical mirror group in a plane, and a driving means for acquiring information on movement by the driving means. Plane scanning spectrometer equipment.