JPS6247285B2 - - Google Patents
Info
- Publication number
- JPS6247285B2 JPS6247285B2 JP56150725A JP15072581A JPS6247285B2 JP S6247285 B2 JPS6247285 B2 JP S6247285B2 JP 56150725 A JP56150725 A JP 56150725A JP 15072581 A JP15072581 A JP 15072581A JP S6247285 B2 JPS6247285 B2 JP S6247285B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- optical
- electrodes
- ferroelectric material
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/05—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect with ferro-electric properties
- G02F1/0516—Operation of the cell; Circuit arrangements
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Description
【発明の詳細な説明】
本発明は強誘電体材料の光学軸に相当するｚ軸
に垂直な分極面の一方にプレナ電極または櫛形電
極を１対形成した光変調器、光スイツチ等におい
て、その動作を安定化する光素子用電極の構成に
関するものである。Detailed Description of the Invention The present invention provides an optical modulator, an optical switch, etc. in which a pair of planar electrodes or comb-shaped electrodes are formed on one side of a polarization plane perpendicular to the z-axis corresponding to the optical axis of a ferroelectric material. This invention relates to the structure of an electrode for an optical element that stabilizes its operation.
従来、強誘電体材料の分極面に拡散、エピタキ
シヤル成長等の光導波路を形成し、光変調器また
は光スイツチ用として導波路の直上または近傍
に、直接またはバツフア層を介してプレナ電極ま
たは櫛形電極を形成していた。通常は、前記電極
が形成された強誘電体材料の分極面とその反対の
分極面とは電気的には導通していない。 Conventionally, an optical waveguide is formed by diffusion or epitaxial growth on the polarization plane of a ferroelectric material, and a planar electrode or comb-shaped electrode is formed directly above or near the waveguide for use in an optical modulator or optical switch, either directly or through a buffer layer. It formed an electrode. Usually, the polarized plane of the ferroelectric material on which the electrode is formed and the opposite polarized plane are not electrically connected.
この場合、50Ωの終端抵抗が接続された１対の
プレナ電極または櫛形電極に高周波信号が印加さ
れると、電極にはその電極の導体抵抗によるジユ
ール熱がわずかに発生し、電極直下の強誘電体材
料基板の温度が上昇する。この温度上昇によつて
二つの分極面には温度差が生じ、このため焦電効
果による電荷が蓄積する。 In this case, when a high frequency signal is applied to a pair of planar or comb-shaped electrodes to which a 50Ω termination resistor is connected, a small amount of Joule heat is generated in the electrodes due to the conductor resistance of the electrodes, and the ferroelectric The temperature of the body material substrate increases. This temperature increase creates a temperature difference between the two polarization planes, which causes charge to accumulate due to the pyroelectric effect.
したがつてこの蓄積電荷は１対の電極にバイア
ス電圧を印加したことになり、光変調器や光スイ
ツチの動作に極めて悪い影響を与え、変調度や光
スイツチの消光比の劣化をもたらす。 Therefore, this accumulated charge results in the application of a bias voltage to the pair of electrodes, which has an extremely adverse effect on the operation of the optical modulator or optical switch, resulting in deterioration of the modulation degree and extinction ratio of the optical switch.
本発明はこの蓄積電荷を解放し、動作特性を劣
化させないことを目的としたものであり、その構
成は、一方の接地用電極と電極形成面の反対側の
分極面とを、電気的に導通させた光素子用電極で
ある。 The purpose of the present invention is to release this accumulated charge and prevent deterioration of the operating characteristics, and its structure is such that one grounding electrode and the polarized surface on the opposite side of the electrode formation surface are electrically connected. This is an electrode for an optical device.
図は本発明の一実施例の電極の構成図であつ
て、１は強誘電体材料、２は光導波路、３は分極
の方向を示す矢印、４は給電用電極、５は接地用
電極、６は金属ケース、７は導電性ペースト、８
は終端抵抗、９は信号源である。この実施例では
図に示すように、結電用電極４および接地用電極
５を形成した強誘電体材料１の分極面の反対側の
分極面は導電性ペースト７を介して金属ケース６
に電気的に導通されており、さらにこの金属ケー
ス６と接地用電極５とは電気的に導通されてい
る。高周波信号が印加されて、接地用電極５およ
び給電用電極４に発生したジユール熱によつて誘
起された電荷は、接地用電極５の近傍では導電性
ペースト７と金属ケース６を介してただちに解放
される。一方、給電用電極４側に蓄積された電荷
も終端抵抗８を介して解放される。 The figure is a configuration diagram of an electrode according to an embodiment of the present invention, in which 1 is a ferroelectric material, 2 is an optical waveguide, 3 is an arrow indicating the direction of polarization, 4 is a power feeding electrode, 5 is a grounding electrode, 6 is a metal case, 7 is a conductive paste, 8
is a terminating resistor, and 9 is a signal source. In this embodiment, as shown in the figure, the polarization surface of the ferroelectric material 1 opposite to the polarization surface of the ferroelectric material 1 on which the electrically conductive electrode 4 and the grounding electrode 5 are formed is connected to a metal case 6 through a conductive paste 7.
The metal case 6 and the grounding electrode 5 are electrically connected to each other. When a high frequency signal is applied, charges induced by Joule heat generated in the grounding electrode 5 and the power supply electrode 4 are immediately released through the conductive paste 7 and the metal case 6 in the vicinity of the grounding electrode 5. be done. On the other hand, the charges accumulated on the power feeding electrode 4 side are also released via the terminating resistor 8.
この実施例では導電性ペースト７が示されてい
るが、電極形成の反対側の分極面に蒸着またはス
パツタによつて金属膜が形成されていても同じ効
果がある。また、電極形成の反対側の分極面と金
属ケースの両者が密着されていてもよい。 Although a conductive paste 7 is shown in this embodiment, the same effect can be obtained even if a metal film is formed by vapor deposition or sputtering on the polarized surface opposite to the electrode formation. Further, both the polarization surface on the opposite side of the electrode formation and the metal case may be in close contact with each other.
以上説明したように、本発明の光素子用電極
は、簡単な電極構造によつて、強誘電体材料の分
極面に形成された電極に蓄積する電荷が、ただち
に解放されるので、光変調器や光スイツチの電極
間に不要なバイアス電圧が印加されることなく、
安定な光変調や光スイツチの動作が得られる。 As explained above, the electrode for an optical device of the present invention has a simple electrode structure, and the charges accumulated in the electrode formed on the polarization plane of the ferroelectric material are immediately released, so that the electrode for an optical device can be used as an optical modulator. without applying unnecessary bias voltage between the electrodes of the switch or the optical switch.
Stable optical modulation and optical switch operation can be obtained.
図は本発明の一実施例の電極の構成図である。
１……強誘電体材料、２……光導波路、３……
分極を示す方向、４……給電用電極、５……接地
用電極、６……金属ケース、７……導通性ペース
ト、８……終端抵抗、９……信号源。
The figure is a configuration diagram of an electrode according to an embodiment of the present invention. 1... Ferroelectric material, 2... Optical waveguide, 3...
Direction showing polarization, 4... Power feeding electrode, 5... Grounding electrode, 6... Metal case, 7... Conductive paste, 8... Terminating resistor, 9... Signal source.
Claims (1)
に、１対のプレナ電極または櫛形電極を形成した
光変調器、光スイツチ等の光素子において、前記
１対の電極の一方と、前記電極が形成された分極
面の反対側の分極面が電気的に導通していること
を特徴とする光素子用電極。1. In an optical element such as an optical modulator or an optical switch in which a pair of planar electrodes or comb-shaped electrodes are formed on one of the polarization planes perpendicular to the z-axis of a ferroelectric material, one of the pair of electrodes and the An electrode for an optical device, characterized in that a polarized surface opposite to a polarized surface on which the electrode is formed is electrically conductive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15072581A JPS5852617A (en) | 1981-09-25 | 1981-09-25 | Electrode for optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15072581A JPS5852617A (en) | 1981-09-25 | 1981-09-25 | Electrode for optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5852617A JPS5852617A (en) | 1983-03-28 |
| JPS6247285B2 true JPS6247285B2 (en) | 1987-10-07 |
Family
ID=15503039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15072581A Granted JPS5852617A (en) | 1981-09-25 | 1981-09-25 | Electrode for optical element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5852617A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0593892A (en) * | 1991-10-01 | 1993-04-16 | Nec Corp | Two-layered type optical modulator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1137293A1 (en) * | 1978-04-27 | 1985-01-30 | Предприятие П/Я Г-4903 | Displacement converter |
-
1981
- 1981-09-25 JP JP15072581A patent/JPS5852617A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5852617A (en) | 1983-03-28 |
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