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JPS6242771Y2 - - Google Patents

Info

Publication number
JPS6242771Y2
JPS6242771Y2 JP1982000918U JP91882U JPS6242771Y2 JP S6242771 Y2 JPS6242771 Y2 JP S6242771Y2 JP 1982000918 U JP1982000918 U JP 1982000918U JP 91882 U JP91882 U JP 91882U JP S6242771 Y2 JPS6242771 Y2 JP S6242771Y2
Authority
JP
Japan
Prior art keywords
nozzle
ejection
hole
small
joining member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982000918U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58107158U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP91882U priority Critical patent/JPS58107158U/ja
Publication of JPS58107158U publication Critical patent/JPS58107158U/ja
Application granted granted Critical
Publication of JPS6242771Y2 publication Critical patent/JPS6242771Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Nozzles (AREA)
JP91882U 1982-01-08 1982-01-08 洗浄用ノズル Granted JPS58107158U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP91882U JPS58107158U (ja) 1982-01-08 1982-01-08 洗浄用ノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP91882U JPS58107158U (ja) 1982-01-08 1982-01-08 洗浄用ノズル

Publications (2)

Publication Number Publication Date
JPS58107158U JPS58107158U (ja) 1983-07-21
JPS6242771Y2 true JPS6242771Y2 (ko) 1987-11-02

Family

ID=30013967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP91882U Granted JPS58107158U (ja) 1982-01-08 1982-01-08 洗浄用ノズル

Country Status (1)

Country Link
JP (1) JPS58107158U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006159145A (ja) * 2004-12-10 2006-06-22 Renesas Technology Corp 流体吐出ノズルおよびこれを用いた基板処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3801967B2 (ja) * 2001-08-28 2006-07-26 株式会社いけうち ノズルおよび該ノズルによる導管内周面への流体噴射方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725730Y2 (ko) * 1978-08-30 1982-06-04
JPS6216195Y2 (ko) * 1979-04-11 1987-04-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006159145A (ja) * 2004-12-10 2006-06-22 Renesas Technology Corp 流体吐出ノズルおよびこれを用いた基板処理装置

Also Published As

Publication number Publication date
JPS58107158U (ja) 1983-07-21

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