JPS6241513U - - Google Patents
Info
- Publication number
- JPS6241513U JPS6241513U JP13236685U JP13236685U JPS6241513U JP S6241513 U JPS6241513 U JP S6241513U JP 13236685 U JP13236685 U JP 13236685U JP 13236685 U JP13236685 U JP 13236685U JP S6241513 U JPS6241513 U JP S6241513U
- Authority
- JP
- Japan
- Prior art keywords
- dicing
- blade
- rotary
- cooling means
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000001154 acute effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13236685U JPS6241513U (fr) | 1985-08-28 | 1985-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13236685U JPS6241513U (fr) | 1985-08-28 | 1985-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6241513U true JPS6241513U (fr) | 1987-03-12 |
Family
ID=31031685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13236685U Pending JPS6241513U (fr) | 1985-08-28 | 1985-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6241513U (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1330692A (en) * | 1969-11-12 | 1973-09-19 | Sola Basic Ind | Semiconductor material cutting apparatus and method of making the same |
-
1985
- 1985-08-28 JP JP13236685U patent/JPS6241513U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1330692A (en) * | 1969-11-12 | 1973-09-19 | Sola Basic Ind | Semiconductor material cutting apparatus and method of making the same |