JPS6228673A - Multiprober - Google Patents

Abstract

PURPOSE:To make a multiprober contactable with an electrode at the optional position of an object to be measured and, at the same time, removable through an one-touch operation, by providing the alignment mechanism of position and installing a connecting terminal to the main body of the prober. CONSTITUTION:An object 2 to be measured is aligned on an elevating table 7 and the electrode of the object 2 is allowed to contact with a spring-contact type probe 1 by lifting up the table 7. After the alignment of the position, a coaxial cable unit is connected and this prober is put in an extra-low temperature tank and fixed. When high-frequency signals are impressed upon connecting terminals 5c under this condition, the signals are inputted to the object 2 to be measured through coaxial cables 4b and 4a and the probe 1 and output signals from the object 2 are measured by means of a measuring instrument through the probe 1 and cables 4a and 4b without disturbing the waveform.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention is a multi-prober consisting of a plurality of spring contact type probes, and is particularly useful for measuring electrical characteristics, especially high frequency voltage characteristics, of various circuit boards at extremely low temperatures, such as 4"K. The present invention relates to a multi-prober suitable for.

[Conventional technology]

In recent years, rapid technological advances have been made in new media, OA, optical communications, semiconductors, etc., and with this, so-called [contact technology related to contacts between parts] and [connection technology that connects contacts] Technology (connection/
There is a strong demand for higher precision and higher performance of ``technology'' as a basic technology common to various new technologies. As a specific example, contact type probes, which constitute the main part of the inspection equipment, are used in semi-IC/LSI inspection systems, especially in the inspection process that measures the electrical characteristics of various circuit boards such as printed circuit boards and ceramic multilayer boards, such as high frequency voltage. In particular, spring contact type probes are related to so-called contact technology and connection technology to meet the conventional problem of measuring the above-mentioned electrical characteristics without destroying them, but the required usage conditions, such as usage conditions in a high frequency region They cannot sufficiently withstand a wide range of temperature conditions, from extremely low temperatures to high temperatures, and they pick up noise from outside the circuit and generate noise from within, so their measurement results tend to lack the required accuracy and reliability. However, there was a problem in that these usage conditions and environmental conditions could not be fully satisfied technically.

[Problem that the invention seeks to solve]

The present invention has been made by focusing on the problems of the conventional methods described above, and its purpose is to perform highly accurate and reliable measurements at ultra-low temperatures, for example, 4°K, without destroying the electrical characteristics of various circuit boards and other objects to be tested. It is an object of the present invention to provide a spring contact type multi-prober that is ultra-precise and has an alignment mechanism that makes it possible to perform this, and that can be used even in a small dewar device.

More specifically, an object of the present invention is to be able to accurately measure electrical characteristics by suppressing the reflection of measurement signals that occur when a probe comes into contact with a test piece, to have an alignment mechanism, and to have a prober body and a To provide the above-mentioned spring contact type multi-prober in which positioning adjustment can be easily performed by separating the contact 17 into a coaxial cable unit having a terminal that can be connected to a measuring device with one touch. be.

[Means for Solving the Problems and Their Effects] In order to achieve the above object, the present invention provides a connection terminal at the other end of the coaxial cable connected to a plurality of spring contact type probes, and Contact type probes are commonly grounded by an integrated panel near the object to be measured, thereby suppressing reflection of the input signal that occurs when the probe and the object to be measured come into contact, and achieving the desired impedance matching. The coaxial cable unit that connects the prober body and the measuring device is equipped with multi-pole connection terminals that can be connected and disconnected with a single touch. It has noise resistance because it is grounded through the panel, and the positioning table for the object to be measured has been made compact so that it can be inserted into a cryogenic chamber, such as a small dewar device, together with the probe, making it easy to adjust measurements. The main points are as follows.

[Embodiments of the invention]

Hereinafter, the present invention will be explained in detail using the drawings.

The drawing is a perspective view showing an embodiment of the present invention. First, to explain the configuration (11 is a spring contact type probe that contacts the electrode of the object to be measured (2),
) are commonly grounded at the probe panel (3).
, the other end of the probe (1) is a coaxial cable (4a)
electrically connected to. The above coaxial cable (4a)
A connecting terminal (5a) is attached to the other end, and all these terminals are commonly grounded by a connector panel (6a). The object to be measured (2) is the lifting table (7).
), which is moved up and down by rotating the lift knob (8). (9) is a vibrator that protects the blower body, and one end of the vibrator is provided with a flange 00) for connection to a coaxial cable unit. In addition, the coaxial cable unit connected to the prober body has connection terminals (5b) and (5) at both ends of the coaxial cable (4b).
c) and these are the connector panels (6b)
, (6c) are commonly grounded, and the connecting terminal (5c)
In b), multiple connection terminals can be connected and disconnected simultaneously with one touch. The coaxial cable unit is protected by a reinforcing pipe (11) and has a rubber seal (12) for sealing a cryogenic chamber (not shown), such as a dewar device.

Next, the operation of this embodiment will be explained.

Align the object to be measured (2) on the lifting table (7),
By raising this, the spring contact type probe (11) and the electrode of the object to be measured (2) are brought into contact. After alignment, the coaxial cable unit is connected and inserted into a cryogenic chamber (not shown), such as a dewar device, and fixed. Now, when a high frequency signal is applied to the connection terminal (5c), the coaxial cable (4b).

(4a) and the spring contact type probe (11), the signal is input to the object to be measured (2).
The output signal is measured by a measuring device (not shown) through the spring contact type probe (1) and the coaxial cables (4a) and (4b) without disturbing the waveform.

〔Effect of the invention〕

As explained above, according to the present invention, by combining the positioning mechanism, it is possible to contact the electrode at any position on the object to be measured, and the connecting terminal is provided on the main body of the blower.
Moreover, since it can be attached and detached with a single touch, it has the effect of being compact and easy to adjust measurements, and has the practical effect of being able to be used in small cryogenic chambers. In addition to impedance matching, the use of non-magnetic material prevents signal disturbance, and the provision of a commonly grounded connector panel and probe panel improves noise resistance and provides highly precise electrical characteristics. It has the great effect of being able to perform measurements.

[Brief explanation of the drawing]

The drawing is a partially broken perspective view of a multi-prober showing an embodiment of the present invention. (1) Spring contact type probe (2)
...Object to be measured (3)...Probe panel (4a), (4b)...Coaxial cable (5a)
, (5b), (5c)-connection terminal (6a),
(6b), (6c)-Connector panel (7)...
Lifting table patent author Hikaru Yoshida

Claims (5)

[Claims] (1) A coaxial cable unit that has a main body that has a plurality of spring contact type probes, a connection terminal to a measuring device, a mechanism for positioning the object to be measured, and a plurality of connection terminals that connect the main body and the measuring device. A multi-prober comprising: (2) The plurality of connection terminals of the coaxial cable unit that connects the main body and the measurement device are such that the respective center conductors and outer conductors can be attached and detached at the same time in a one-touch manner. The multi-prober described in item 1. (3) The multi-prober according to claim 1 or 2, wherein the spring contact type probes are commonly grounded by a probe panel. (4) The multi-prober according to any one of claims 1 to 3, wherein the connection terminals are commonly grounded by a connector panel. (5) The multi-prober according to any one of claims 1 to 4, wherein the multi-prober is entirely made of non-magnetic material.