JPS622081A - Module type gas treater - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) This invention relates to a modular gas handling device, and more specifically to a modular block having many flow paths therein, such as a semiconductor block. This relates to products that handle harmful or expensive gases used in manufacturing, etc.

In this specification, the term "module 1" is used, which refers to an assembly that is made up of a large number of standard parts and that is easy to assemble and partially change.

(Prior Art) Various systems for handling fluids such as gases and liquids have been known for many years. In particular, the technique of mounting a large number of fluid handling valves on a block made of a material such as iron is well known. In such systems, valves are interposed in the various flow paths to open and close the flow paths. In addition, it is also well known to modularize these systems and to connect such modules to each other.

Such modular systems are being investigated not only for handling gases, but also for handling gases under special conditions, for example under high vacuum conditions. Research is also underway to develop highly flexible systems and to removably connect such systems to each other without the need for too many connections between flow paths. Research is also being conducted on techniques that can handle more expensive gas and minimize gas loss within the flow path. Such systems are particularly useful in processes that promote crystal growth in semiconductor manufacturing, but typically involve very expensive gases that must be very carefully controlled and monitored.

(Summary of the Invention) The device of the present invention has a modular flow path block, and a plurality of gas flow paths extend through the flow path block to form a plurality of port bodies on the surface of the flow path block. are doing. Further, a plurality of valves extend within the flow path block to interrupt the flow path at predetermined positions, and have inlets opened on the surface of the flow path block. Multiple valve flanges are also used to bridge and seal high vacuum valves to the flow path block without the need to apply rotational forces at the inlet location.

Each of the ports described above has a port body construction mechanism, whereby the flow path is sealed to the port body.

(Embodiment) The modular flow path block 1 shown in FIG. 1 is made of corrosion-resistant, inert stainless steel, has no cavities, and is resistant to internal cracks. Its dimensions are, for example, 4" violet 4172"! It is made by adding mechanical processing such as milling and poling to a raw material of about 11/2".

In this example, the modular channel block l has a rectangular shape and has a top surface 2 with a protrusion 2a on its side, a bottom surface 11, a left side surface with walls 3 and 5, and walls 7 and 9.
, a front side with walls 4, 6 and 8, and a rear side with wall 1o. Furthermore, as will be described later, various surfaces thereof have construction mechanisms for installing ultra-high vacuum valves. A large number of gas passages are formed in the modular passage block 1, and these passages communicate with gas ports 17a to 17f, respectively. gas port 17b formed on the top surface 2 and gas port formed on the bottom surface 11)
17d through channels 70 and 72, and these channels are connected to each other as appropriate by valves to be described later.

Furthermore, there is a gas po formed on the top surface 2)! 7c is the gas flow path 6
Gas port 17e formed on the bottom surface 11 by 6 and 68
A gas port 17 formed on the top surface 2 is connected to
a is connected to a gas port 17f formed on the bottom surface 11 through gas channels 74 and 76.

In addition, several valve seats are formed through the modular flow path block 1. That is, the valve seats 13a to 13c are formed on the upper surface 2, the rear wall IG, and the left wall 3, respectively. Also, valve seats 15a-15c are formed on the front walls 6, 4, and 8, respectively. These valves are ultra-high vacuum resistant, and have a leak-tightness of about 4 x 10-9 std, cm3 under a pressure of, for example, 1.0-'tart. These are bellows valves, and the interior is made entirely of corrosion-resistant stainless steel by edge arc welding. The internal seal may be made of soft stainless steel or a low vapor pressure elastomer such as KEL-F manufactured by Minnesota Mining Company, an example of such a valve being manufactured by Nupro Corporation of Ohio. A system using a modular gas handling device such as the present invention is very useful in, for example, semiconductor manufacturing. This means that such systems can handle small amounts of gas with great precision, and the device of the invention can also be advantageously applied to systems that handle toxic and/or expensive gases such as histrode, phosphorus, hydrogen chloride, etc. It can be done. Systems such as these require extreme leakage prevention. According to the present invention, it is not only possible to fully meet such demands, but it is also very simple, and unlike the case of welding, it is also possible to freely change the connection of the flow paths.

Furthermore, since conventional welding is not used, there is no wasted space within the device, and loss and contamination can be avoided. Furthermore, the scale of the system can be freely expanded by assembling a large number of channels in parallel.

Returning now to FIG. 1, valve seats 13a-13c are each defined by a descending wall 14 and a circular transverse wall 16. The inner surface of the transverse wall 16 constitutes a second descending wall 18 , which descends further into a circular transverse construction surface 19 . The inner surface of this construction surface 19 descends through a cylindrical descending wall 21, and as shown in FIG. 6.8.9, the valve seats 46a to 46c
It has reached this point.

How to install the ultra-high vacuum valve into the modular flow path block l. Each bellows valve is a valve rod 21a
It has bellows bodies 23a to 23c which are installed between the bellows bodies 23a to 21c. Seal surfaces 37a to 37C are formed at the lower end of the valve rod to be accommodated in various valve seats. Also, bento 21a~
21c is a bellows body 23a by the construction bodies 24a to 24c.
It is fixed at ~23c. Bellows bodies 23a to 23c
The other end is in a freely floating state and is connected to the front annular surface 30a to 30.
It has c. Here, the annular surfaces 30a to 30c are the valve rods 21a to 21a surrounded by the bellows bodies 23a to 23c.
21c. A cylindrical descending wall ring 25 is fixed on the valve stem 2, and its front end with an outer flange 29 abuts the upper surface of the annular surface 30. The upper end of the valve installation ring 25 surrounds and cooperates with the valve rod 21 /J
% diameter part is formed. Therefore, when the front end of the valve stem 21 is inserted into the valve seat until the annular surface 30 fits snugly into the circular cross section 19, the valve is automatically inserted into the valve seat.

Also, metal gaskets 27a to 27c are previously placed on the annular cross section 19 before the valve is placed thereon.

Finally, attach the valve to the modular flow block 1.
To install and seal, the annular valve flanges 20a-20c are slid over the valve stem 21 and thus over the outer surface of the valve mounting ring 25. The annular valve flange itself has an inner opening 37 that slidably engages the valve mounting ring 25, which abuts the upper surface of the flange 29 of the valve mounting ring 25. In addition, the inner annular surface 39 of the valve 7 flange 20a to 20c
has an annular recess 41 which engages the outer wall of the flange 29 on the erection ring 25 when it is placed in position. Thus, the valve flange 20a
20c and the surface of the two flange 29 on the valve mounting ring 25, a uniform meeting surface is obtained. Valve flange 20
a to 20c have several cylindrical holes 36a to 20c along their circumferences.
36c, and a corresponding number of screw holes 43 are formed in the annular cross section 16. Therefore, when the valve is installed, the valve flanges 20a-20c are connected to the valve seats 13a-13c.
It fits inside with the top side flush. Then screws 38a to 38c
The construction and sealing are completed by inserting the screws into the screw holes 43 from the holes 36a to 36c. By tightening the screws and pressing the valve as close to the valve seat as possible, the valve is not only reliably installed, but also cooperates with the metal gaskets 27a to 27c to provide a strong seal. ! Other valves 23a' to 2 shown in Figure 81
3c' also acts in the same manner in relation to the valve seats 13a-13c, but in this case it is not pressed but is flush with the upper surface. In this case, the valve seat 15a~
158 has a descending wall 44 leading to an annular cross section 45, the inner surface of this cross section passing through a cylindrical descending wall 47 to the valve seat 46.
It reaches a degree ~ 46C'. Furthermore, the construction of the valve itself and of the annular valve flanges 20a'-20C° is similar to that described above. However, in this case, during installation, the annular valve flange 20a to 200' is installed on the surface of the modular flow block l itself. In this case as well, a threaded hole 41b is formed on the circumferential surface of the modular flow path block l, and correspondingly, the annular valve flange has three cylindrical holes. In this case as well, screw 38a'#38
By screwing C' into the screw holes 41a to 41c, the ultra-high vacuum valve can be directly installed on the modular flow path block 1. Further, a metal gasket 27a' to 27C° is used to complete the seal. Regarding the seal, 2.
Explain one thing. First, according to the invention, once the valve has been installed, the valve can be installed by simply moving the annular valve flange linearly relative to the surface of the modular flow path block 1.

In this regard, a typical prior art technique for mounting ultra-high vacuum valves of a similar type is shown in FIG. A screw 112 is formed on the outer surface of the circular wall 92.

A concave annular surface 94 is formed on the upper surface to form a cylindrical chamber 96.
It extends to A valve seat 104 is formed at the bottom of this chamber.

When the valve is installed on the annular installation surface 93, the valve rod 108 is attached to the valve seat 10.
Insert into 4. A slip ring 110 fitted onto the valve itself is then used.

The descending wall 122 has internal threads 114 that mate with threads 112 on the exterior surface of the rising wall 92. The upper end of this slip ring 110 is fixed to the valve by an inwardly projecting annular wall 117. This annular wall also slidably engages the outer surface of the valve mounting ring 25.

Once the valve is in position for installation, slip ring 110 moves downward until screw 114 engages screw 112, screwing the valve into cube 90. However, in this case, the final installation is performed by the circular part of the slip ring 110, and over-threading may occur, making it difficult to achieve a high degree of accuracy. Since it is moved in a straight line, a much more accurate erection condition can be obtained than this.

Returning to Figures 1-9, each valve port communicates with a valve seat. As shown in FIG. 2, the valve seat 13a on the upper surface z of the modular flow path block l extends downward and communicates with the valve seat 46a. However, in this example, the inner wall of the descending cylindrical portion 21 has two holes, the front hole communicating with the other valve seat via the channel 64, and the second side channel 62 communicating with the other valve seat. gas po) 1
It is connected to 7J. The valve seat 13h located on the left side 3 of the modular flow path block l has an open valve seat 46b, which communicates with the gas port 171 from the flow path 56. The descending cylindrical portion 21 in the valve seat 13b has a pair of holes, the rear hole communicates with the gas port 17g via a flow path 50, and the front hole communicates with another valve via a flow path 52. are doing. Regarding the valve seat 13c, the valve seat 46c is connected to the flow path 58.
It communicates with another valve seat on the lower side via. Descending cylindrical wall.

21 has two flow paths, these are gas ports) 1
7i and the valve seat 13b, respectively. Each of the front valve seats 15a-15c similarly communicates with the flow path.

The valve seat 15a has an open valve seat 46a°, which communicates via a channel 64 with the descending cylindrical wall 21 above the valve seat 46 of the valve seat 13a. The descending circular wall 21 in the valve seat 15 has an upper opening communicating with the flow passage 66 and the gas port 17c.

The valve seat 15b has a valve seat 46b°, which is connected to the flow path 5.
2 to the descending cylindrical wall 21 in the valve seat 13b.

The valve seat 15c has a valve seat 46C, which is connected to the flow path 5.
The cylindrical descending wall 21, which communicates with the open valve seat 46c in the valve seat 13 through the hole 8, has a hole, and the left channel 62
connects this wall to the descending circular wall 21, and the flow path 60 on the right side communicates with the gas port 17h.

Thus, for example, when the valve in the valve seat 13 is closed, the flow path 54.5
6, the flow path 58.74.76 can be blocked.

Channel 1 extending from face 3 of modular channel block l
6 passes through the modular flow path block l and communicates with the intermediate flow path 72 from the gas port 17b, and then connects to the flow path 80.
The valve seat 46 and the bottom of the valve seat 13a are reached through the valve seat 46 and the bottom of the valve seat 13a. Thus, for example, closing the valve in valve seat 13a will cut off flow path 80 from flow path 62.64. Now, in FIG.
A metal gasket 27 is placed on a transverse annular surface 1B surrounding the modular flow path block 1. Detachably and sealingly fixed to the modular flow path block 1 are a valve 23b' and a valve mounting ring 25b'.
That is. Then, the valve 23b' is inserted into the valve seat 15d through the metal gasket. The construction ring 25b' is then passed over the valve 23b'.

Thus, by applying the valve flange 20b° to the valve and the valve mounting ring, the valve is fixedly mounted to the modular flow path block, and by threading the screw 38b' into the threaded hole 41b, the valve is hermetically sealed to the valve seat 15b. Also, by screwing in the screw 38b', the metal gasket 27b' expands.
It completely fills the space between the annular surfaces. This gasket is made of the same corrosion-resistant metal as the modular flow block, such as nickel or annealed stainless steel.
0. No cavities or pores. It is manufactured by punching out a thick metal plate with a top surface of about 5 inches. Compared to the prior art shown in FIG. 10.11, this is very advantageous because the valve can be fastened directly to the surface by the screw 38b' without applying any rotational force to the flange 20b' or other elements. An airtight seal can be easily obtained without the screw engagement loosening as in the conventional case.

FIG. 15 shows the structure of the attachment of the flow paths to the gas ports, where the modular flow path block a includes a gas port 170 and the modular flow path block b includes a gas port 171. Connecting channels 173 are used to connect these gas ports to each other. This channel 17
3 has enlarged end portions 175 at both ends. An annular edge 178 is provided on the end surface 176, which is an annular surface surrounding the inlet port 177, and has a substantially triangular cross section. A pair of annular flanges 180 are provided slidably along the connecting channel 173, and these seven flanges have an inner diameter sufficient for the above-mentioned sliding movement. Also, its inner diameter is the enlarged end of the connecting flow path 173) 75
It is designed to closely match the outer diameter 182 of.

Further, an annular flange portion 183 is formed on the inner surface, so that the flange is separated from the end of the flow path to the enlarged end 17.
This prevents the number from exceeding 5 and escaping. As these flanges 180 move further toward their end faces 177, they provide a flat surface that abuts the face of the modular flow block. When this surface comes into contact with one of the gas ports, first the connecting channel 18
4 is inserted between the ports. The diameter of metal gasket 184 corresponds to the diameter of annular edge 178 of end face 177.

The gas port 170 also has an annular edge 174 surrounding its central channel, which forms the end surface 17 of the channel 173.
7 annular edge 178. Thus, when the end face 177 of the flow passage 173 is pressed against the gas port between the metal gaskets, the metal gasket is clamped between the annular edges 178 and 174. Slide the ring 180 to the end face and screw the screw 186 into the gas port 1790.17
1, an airtight seal is obtained. Here too, the metal gasket expands due to pressure.
Figure 6 shows a modular flow path block with two connecting blocks constituting the flow path block of the present invention. Gas ports 270 are formed on various surfaces of the module, and these are connected by flow paths passing through the flow path block. Connected to other gas ports. Such flow path blocks can be widely used for various connections. FIG. 12 shows a cooling coil 110 that is interposed between a pair of gas ports on a flow path block. The ends of the coil are formed with enlarged ends 112, and a pair of rings are used to connect these to the gas ports. FIG. 13 shows a membrane chamber 120 connected to the gas port. This chamber is divided into two by an internal chamber 1122, and gas enters the flow path block from the flow path 124 and enters the first chamber. 12
6 and purified by passing through this membrane to the second chamber 1.
28 and is sent out via channel 130. A valve 132 with a valve 133 is provided for venting.

In the example shown in FIG. 14, a bubble chamber 135 is fixed to a pair of gas ports. Channel 137 includes valve 138 and channel 140 includes valve 142. Both channels extend into the closed chamber 144, with channel 137 opening below the fluid level 150 to release gas from the channel block in the form of bubbles. Gas is liquid level 1
It passes through the channel 140 that opens above 50 and is collected again into the channel block. Next, as an example, the case where a thin layer of semiconductor gallium arsenide is grown using the apparatus shown in FIG. 13 will be described. First, a metal-organic compound such as dimethyl gallium is introduced into the chamber 120, and this chamber is connected to the flow channels 124, 13.
0 to the gas port 17i as shown in FIG.
, 17j with an airtight seal. As shown in #, a metal gasket is interposed between the enlarged end and the gas port.

For this purpose, the aforementioned screw 186, screw hole 190, flange 180, etc. are used.

Next, a channel for introducing a carrier gas such as hydrogen is connected to the gas port 17c of the channel block. In this case flow path 66.68
becomes part of the growth line.

Then, another carrier gas flow path is connected to the gas port 17b. In this case, channel 70.72 becomes part of the discharge line.

These gas carrier streams are fairly thick and have sufficient capacity to convey the growth gas mixture from the channel block to the crystal growth chamber or exhaust.

Furthermore, a third carrier gas flow path is connected to the gas port 17g. This carrier gas is routed through various channels in the channel block to form a growth gas mixture as described below. A vacuum pump is also sealed connected to port 17a.

Next, the valves in the valve seats 13c and 15c are opened, and the valves in the other valve seats are closed. When the vacuum pump is activated via the valve seat 17a, all the air and water vapor in the valve seat 46b are drained into the line 54.
．． 56 to the inlet of the container fixed to the port 17i, and also to the valve seat 46a', the line 58.62.64.60
air and water vapor are completely removed from these lines. This prevents contamination of high purity gas streams and pure compounds.

Then close the valves in valve seats 13c, 15c and open the valve in valve seat 15b to direct a precisely measured amount of input gas flow to port 17.
When fed into the flow path 52.50 from g, the valve seats 13b, 15
It sweeps out the bellows of the valve in b and is discharged through port 17d.

When the above processing is completed, the valves in the valve seats 13a and 13b are opened, and the valves in the valve seat 13b are simultaneously closed. Hydrogen carrier gas then enters flow path 54 and passes through flow path 56 and metal-organic compound reservoir 120 . The carrier gas is thus saturated with the metal-organic compound and passes through the flow path 60. -62.80 and into channel 70.72.

Once the period during which the metal-organic compound is required in the crystal growth process has elapsed, the valve in valve seat 13a is closed and the valve in valve seat 15a is opened, allowing the mixture of carrier gas and compound to enter flow path 66.
．． 68.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an example of a flow path block used in the device of the present invention. FIG. 2 is a plan view of the same flow path block. FIG. Figure 4 Rear view of the flow path block Figure 5 Left side view of the flow path block Figure 6 Right side view of the flow path block Figure 7 Front view of the flow path block Figure 8 Rear view of the flow path block Fig. 9]g Bottom view of the same flow path block Fig. 10 Plan view of the conventional valve installation structure Fig. 11 A side view of the same part Fig. 12 Side view of the cooling coil used in the flow path block Fig. 13 Flow path Perspective view of the membrane chamber used for blow 2 No. 1
Figure 4: Partial cross-sectional side view of the bubble chamber used in the channel block. Figure 15: Perspective view of the structure connecting the channel blocks. Figure 16:
Figure: Perspective view of the connecting block. l...Modular flow path block 2...Top surface 11...Bottom surface 13.
15... Benza patent application agent Patent attorney Parti Sugawara FIG, 2 FIG, 3 FIG, 6 FIG, 8 FIG, 13 ←toa: -to-<-<v>0 ~

Claims (1)

[Scope of Claims] [1] A structure having a plurality of gas flow paths extending through the flow path block and forming a plurality of ports on each surface thereof, the flow path block comprising: A plurality of valve passages (46) extend through and interrupt the gas passage at predetermined positions, each valve passage having an inlet hole formed on each side of the passage block and a plurality of valves. flange body (20), each valve flange body can be operated without the need to apply rotational force to it.
Ultra-high vacuum valve (34) in either inlet hole (13)
can be removably attached to the flow path block and installed in a sealed manner.
A modular gas handling device characterized in that each port (17) has a port construction body (40), and the flow path is removably sealed to the port. [2] The apparatus according to claim 1, wherein the ultra-high vacuum valve has a bellows valve. [3] A plurality of flow path flange bodies (180) are further provided, and each flow path flange body connects the flow path (173) to any one of the ports without the need to apply a rotational force thereto. 2. The device according to claim 1, which can be removably installed on a block with a seal. [4] The device according to any one of claims 1 to 3, wherein each inlet hole has an annular recess (13) for accommodating a valve flange body (20). [5] The annular recess (13) has a plurality of screw holes (43), and each flange body has a considerable number of screw holes (36),
5. The apparatus according to claim 4, wherein the valve flange body is installed on the flow path block by fixing a plurality of screws (38) to both screw holes. [6] A plurality of flow path blocks (2) are used, and a flow path flange body (18
Claims 1 to 3, wherein a port of one flow path block is hermetically sealed to a port of the other flow path block by a flow path (173) constructed through a flow path (173).
A device described in any of the following. [7] A device according to any one of claims 1 to 6, wherein the inlet hole has an annular recess (13) for receiving a flange on the ultra-high vacuum valve (134). [8] The device according to claim 7, wherein a metal gasket (184) is provided within the annular recess for sealingly mounting the ultra-high vacuum valve (34) to the flow path block. [9] Claim 1, wherein the port (17) has an annular protrusion (174) and a metal gasket (184) provided thereon in order to seal the flow passage in the flow passage block. 3. The device according to any one of items 3 to 3. [10] A structure in which the flow path block has a plurality of gas flow paths extending through the flow path block and forming a plurality of ports on each surface of the flow path block, wherein the port (17) is connected to the port construction body (40 ), the at least one channel body (173) having first and second ends, the first end having an end surface (177) that meets and engages the port. The end face has an annular edge (178), and the channel body is connected to the port with a metal gasket (184) in an airtight manner, so that the channel can be opened without the need to apply rotational force to the channel flange body. A modular gas flow path device, characterized in that a flange body (180) bridges the end of the flow path body to a flow path block at a port. [11] A second flow path block is further provided, and the flow path block has a plurality of gas flow paths extending through the second flow path block to form a port on each side thereof, each port being a second flow path block. It has a port body construction body (40), and the second end of the channel body has an end face (17) that meets and engages with the port.
7). [12] A patent claim in which a second channel flange body (180) is provided, and the flange body bridges the channel body to the channel block at the port without the need to apply a rotational force to the flange body. The apparatus according to range 10 or 11. [13] The flow path block has at least one valve flow path (46) extending through the flow path block and interrupting the gas flow path at a predetermined position, and the valve flow path is connected to the flow path block. The valve flange body (20) has an inlet hole (13) on the surface of the valve flange body (20), and the ultra-high vacuum valve (34) can be freely attached to and detached from the flow path block at the inlet hole without the need to apply rotational force to the valve flange body (20). Claim 1 such that the
The device described in item 0. [14] The flow path block has at least one valve flow path (46) extending through the flow path block and interrupting the gas flow path at a predetermined location, and each valve flow path is connected to the flow path block. The valve flange body (20) has an inlet hole (13) on the surface of the valve flange body (20), and the ultra-high vacuum valve (134) can be freely attached to and detached from the flow path block at the inlet hole without the need to apply rotational force to the valve flange body (20). 13. A device according to any one of claims 10 to 12, wherein the device is sealingly connected to the device.