JPS62143478A - Junction-type field effect transistor - Google Patents
Junction-type field effect transistorInfo
- Publication number
- JPS62143478A JPS62143478A JP28497185A JP28497185A JPS62143478A JP S62143478 A JPS62143478 A JP S62143478A JP 28497185 A JP28497185 A JP 28497185A JP 28497185 A JP28497185 A JP 28497185A JP S62143478 A JPS62143478 A JP S62143478A
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- gate
- fet
- island
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005669 field effect Effects 0.000 title claims description 4
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000002955 isolation Methods 0.000 claims abstract description 5
- 239000004065 semiconductor Substances 0.000 claims abstract description 5
- 238000000926 separation method Methods 0.000 description 6
- 230000010354 integration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
Description
【発明の詳細な説明】
(イ)産業上の利用分野
本発明は接合型電界効果トランジスタ(以下J−FET
と略す)に関し、特にJ−FETに抵抗体を内蔵したJ
−FETに関する。DETAILED DESCRIPTION OF THE INVENTION (a) Industrial application field The present invention relates to a junction field effect transistor (hereinafter referred to as J-FET).
), especially for J-FETs with built-in resistors.
-Relating to FET.
(ロ)従来の技術
従来より、バイポーラICに共存させたJ−FETが例
えば特開昭59−220962号公報に記載されている
。(b) Prior Art Conventionally, a J-FET coexisting in a bipolar IC has been described, for example, in Japanese Patent Application Laid-Open No. 59-220962.
第4図及び第5図はこのようなJ−FETを示し、P型
半導体基板(11)上に形成したN型エピタキシャル層
(12)をP+型分離領域(13)により島状に分離し
た島領域(14)を形成し、この島領域(14)表面に
その両端を分離領域(13)に重畳するまで延長したP
型ゲート領域(15)を設け、島領域(14)にソース
電極(18)及びドレイン電極(19)を配置した構造
を有する。ゲート領域(15)には分離領域(13)を
介して接地電位が印加され、基板(11)をバンクゲー
ト、島領域(14)をチャンネル領域としてゲート接地
動作をなす。尚ソースを極〈18)及びドレイン電極(
19)は夫々N゛型コンタクト領域(19)(19)を
介して取出されている。Figures 4 and 5 show such a J-FET, in which an N-type epitaxial layer (12) formed on a P-type semiconductor substrate (11) is separated into islands by a P+ type isolation region (13). A region (14) is formed, and P is extended on the surface of this island region (14) until its both ends overlap the separation region (13).
It has a structure in which a type gate region (15) is provided, and a source electrode (18) and a drain electrode (19) are arranged in an island region (14). A ground potential is applied to the gate region (15) via the separation region (13), and a gate grounding operation is performed using the substrate (11) as a bank gate and the island region (14) as a channel region. Note that the source is connected to the pole (18) and the drain electrode (
19) are taken out through N-type contact regions (19) (19), respectively.
斯る構造のJ−FETは、バイポーラIC内では高抵抗
として用いられることが多く、そのためチャンネル長が
チャンネル幅より長くなるように形成されている。A J-FET having such a structure is often used as a high-resistance device in a bipolar IC, and therefore, the J-FET is formed so that the channel length is longer than the channel width.
(ハ)発明が解決しようとする問題点
しかしながら、斯る構造ではチャンネル長を長くするた
めにパターンサイズが大きく、チップ面積が増加すると
いう欠点があった。(c) Problems to be Solved by the Invention However, such a structure has the disadvantage that the pattern size is large in order to increase the channel length, and the chip area increases.
(功問題点を解決するための手段
本発明は斯上した欠点に鑑みてなされ、ゲート領域(5
)表面にN゛型の抵抗領域(6)を設けてJ−FET内
に回路構成上必要な抵抗体を内蔵したことを特徴とする
。(Means for Solving the Problems) The present invention has been made in view of the above-mentioned drawbacks.
) The J-FET is characterized in that an N-type resistance region (6) is provided on the surface, and a resistor necessary for the circuit configuration is built into the J-FET.
(*)作用
本発明によれば、従来のJ−FETと同じパターン面積
の中にJ−FETと抵抗体を形成できるので全体のチッ
プ面積を縮小することができる。(*) Effect According to the present invention, the J-FET and the resistor can be formed in the same pattern area as the conventional J-FET, so the overall chip area can be reduced.
(へ)実施例 以下本発明を図面を参照しながら詳細に説明する。(f) Example The present invention will be described in detail below with reference to the drawings.
第1乃至第3図は本発明によるJ−FETを示し、P型
半導体基板(1)上に形成したN型エピタキシャル層〈
2)をP2型分離領域(3)により島状に分離した島領
域(4)を形成し、この島領域(4〉表面にその両端を
分離領域(3)に重畳するまで延長したP型ゲ7ト領域
(5)を設け、さらにゲート領域(5〉表面にその長手
方向に平行にN+型低抵抗領域6)を形成し、抵抗体と
して用いられる。またゲート領域(5)で区画された島
領域(4)の一方をソース領域、他方をドレイン領域と
して夫々N“型コンタクト領域(7)(7)を介してソ
ース電極(8)及びドレイン電極(9)を付着した構造
を有する。そしてゲート領域(5)には分離領域(3)
を介して接地電位が印加きれ、基板(1)をバックゲー
ト、ゲート領域(5)と基板〈1)ではさまれた島領域
(4)をチャンネル領域としてゲート接地動作をなす。1 to 3 show a J-FET according to the present invention, in which an N-type epitaxial layer is formed on a P-type semiconductor substrate (1).
An island region (4) is formed by separating 2) into an island shape by a P2 type separation region (3), and a P type gate is formed on the surface of this island region (4) with both ends thereof extending until it overlaps the separation region (3). A gate region (5) is provided, and a gate region (N+ type low resistance region 6) is further formed on the surface of the gate region (5) parallel to its longitudinal direction, and is used as a resistor. It has a structure in which one of the island regions (4) is a source region and the other is a drain region, and a source electrode (8) and a drain electrode (9) are attached via N" type contact regions (7), respectively. Separation region (3) in gate region (5)
A ground potential is applied through the substrate (1), and a gate grounding operation is performed using the substrate (1) as a back gate and the island region (4) sandwiched between the gate region (5) and the substrate (1) as a channel region.
尚抵抗領域(6)の両端にも電極(10)(10)が設
けられている。Note that electrodes (10) (10) are also provided at both ends of the resistance region (6).
本発明の最も特徴とする点は、ゲート領域(5)表面に
抵抗領域(6)を設けた点にある。このようにゲート接
地で用いられるJ−FETはゲート領域(5)が接地電
位でしかも電位を印加するだけの領域であるから、そこ
に抵抗領域(6)を形成して電流を流してもPN接合分
離がなきれてJ−FETの動作に影響を与えることは無
く、さらにチャンネル長がチャンネル幅より長く形成し
であるからスペース的にも十分な余裕をもつ、従って本
構造によれば、従来のJ−FETと同一のパターン面積
にJ−FETと回路構成上必要になる抵抗体とを形成で
きるので、全体の集積度が増し、チップ面積を減少でき
る。The most distinctive feature of the present invention is that a resistance region (6) is provided on the surface of the gate region (5). In this way, in the J-FET used with the gate grounded, the gate region (5) is at the ground potential and is only a region to which a potential is applied, so even if a resistance region (6) is formed there and a current flows, the PN This structure does not affect the operation of the J-FET due to junction separation, and since the channel length is longer than the channel width, there is sufficient space. Since the J-FET and the resistor necessary for the circuit configuration can be formed in the same pattern area as the J-FET, the overall degree of integration can be increased and the chip area can be reduced.
また本発明は、ゲート領域(5)上で互いに異る配線を
交差させたい場合にも用いることができる。即ち、一方
の配線を抵抗領域(6)を介して延在きせ、他方の配線
を抵抗領域(6)の上を延在させることにより、ゲート
領域(5)上で交差させることができるのである。The present invention can also be used when it is desired that different wiring lines intersect with each other on the gate region (5). That is, by extending one wiring through the resistance area (6) and extending the other wiring over the resistance area (6), it is possible to cross over the gate area (5). .
(ト)発明の詳細
な説明した如く、本発明によれば従来のJ−FETと同
一の占有面積の中にJ−FETと抵抗体とを形成できる
ので、集積度が増し、チップ面積を縮小できるという利
点を有する。(g) As described in detail, according to the present invention, a J-FET and a resistor can be formed in the same occupied area as a conventional J-FET, increasing the degree of integration and reducing the chip area. It has the advantage of being able to
またゲート領域(5)上で互いに異る配線を交差きせる
ことができるので、配線の自由度が増し、設計が容易に
なるという利点を有する。Furthermore, since different wiring lines can cross each other on the gate region (5), there is an advantage that the degree of freedom in wiring increases and design becomes easier.
さらに本発明は何ら付加的工程を必要せず、現状ノバイ
ボーラプロセスに即組み込めるという利点をも有する。Furthermore, the present invention has the advantage that it does not require any additional steps and can be immediately incorporated into the current Novibora process.
第1乃至第3図は各々本発明を説明するための平面図、
I−I、II断面図、n−m線断面図、第4図及び第5
図は従来のJ−FETを示す平面図及び■−■線断面図
である。
(1)はP型半導体基板、(3)はP0型分離領域、(
5)はP型ゲート領域、(6)はN3型抵抗領域である
。
出願人 三洋電機株式会社 外1名
代理人 弁理士 佐 野 静 夫
第1図
第2図
第3図
第4図1 to 3 are plan views for explaining the present invention, respectively;
II, II sectional view, nm line sectional view, Figures 4 and 5
The figures are a plan view and a sectional view taken along the line ■-■ showing a conventional J-FET. (1) is a P-type semiconductor substrate, (3) is a P0-type isolation region, (
5) is a P-type gate region, and (6) is an N3-type resistance region. Applicant: Sanyo Electric Co., Ltd., and 1 other representative: Shizuo Sano, patent attorney Figure 1 Figure 2 Figure 3 Figure 4
Claims (1)
タキシャル層を一導電型分離領域により分離した島領域
とその両端を前記分離領域に重畳するまで延長した一導
電型のゲート領域とを備え、前記島領域をチャンネル領
域としてゲート接地動作をする接合型電界効果トランジ
スタにおいて、前記ゲート領域表面に逆導電型の抵抗領
域を形成し、これを抵抗体として用いたことを特徴とす
る接合型電界効果トランジスタ。(1) An island region formed by separating an epitaxial layer of an opposite conductivity type formed on a semiconductor substrate of one conductivity type by an isolation region of one conductivity type, and a gate region of one conductivity type whose both ends are extended until they overlap with the isolation region. A junction field effect transistor which operates with a gate grounded using the island region as a channel region, characterized in that a resistance region of an opposite conductivity type is formed on the surface of the gate region, and this is used as a resistor. Field effect transistor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28497185A JPS62143478A (en) | 1985-12-18 | 1985-12-18 | Junction-type field effect transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28497185A JPS62143478A (en) | 1985-12-18 | 1985-12-18 | Junction-type field effect transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62143478A true JPS62143478A (en) | 1987-06-26 |
Family
ID=17685450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28497185A Pending JPS62143478A (en) | 1985-12-18 | 1985-12-18 | Junction-type field effect transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62143478A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6667538B2 (en) * | 2000-05-24 | 2003-12-23 | Sony Corporation | Semiconductor device having semiconductor resistance element and fabrication method thereof |
-
1985
- 1985-12-18 JP JP28497185A patent/JPS62143478A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6667538B2 (en) * | 2000-05-24 | 2003-12-23 | Sony Corporation | Semiconductor device having semiconductor resistance element and fabrication method thereof |
US6902992B2 (en) | 2000-05-24 | 2005-06-07 | Sony Corporation | Method of fabricating semiconductor device having semiconductor resistance element |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100398164B1 (en) | Insulated Gate Semiconductor Device | |
JPS5984542A (en) | High-frequency semiconductor integrated circuit | |
JPH03211771A (en) | Conductivity modulation type MOSFET | |
JP3185441B2 (en) | High frequency high power field effect transistor | |
JPS62143478A (en) | Junction-type field effect transistor | |
KR100225944B1 (en) | Semiconductor device having variable drain current type transistor | |
JP3038722B2 (en) | Junction type field effect transistor | |
JP2608976B2 (en) | Semiconductor device | |
JPS61251162A (en) | Structure of semiconductor resistance element | |
JPH0590579A (en) | Power field effect transistor | |
JP2911345B2 (en) | Semiconductor integrated circuit device | |
US4015283A (en) | High speed element of an integrated circuit with a majority carrier junction having a large current capability | |
JPH0122736B2 (en) | ||
JPH0255953B2 (en) | ||
JP2881907B2 (en) | Power semiconductor device | |
JPS6129559B2 (en) | ||
JPH01290265A (en) | Mos type semiconductor device | |
JPH02192170A (en) | Semiconductor element | |
JP2547870B2 (en) | Semiconductor device | |
JP3006795B2 (en) | Semiconductor device | |
JP3594725B2 (en) | Semiconductor device protection circuit | |
JPH046091B2 (en) | ||
JPH04208517A (en) | Semiconductor device | |
JPH0362565A (en) | semiconductor equipment | |
JPS61256665A (en) | Input protection device for semiconductor integrated circuits |