JPS62141620A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPS62141620A JPS62141620A JP28395585A JP28395585A JPS62141620A JP S62141620 A JPS62141620 A JP S62141620A JP 28395585 A JP28395585 A JP 28395585A JP 28395585 A JP28395585 A JP 28395585A JP S62141620 A JPS62141620 A JP S62141620A
- Authority
- JP
- Japan
- Prior art keywords
- head
- yoke
- magnetic
- upper yokes
- yokes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 44
- 239000010409 thin film Substances 0.000 title claims description 14
- 239000004020 conductor Substances 0.000 claims description 6
- 239000000696 magnetic material Substances 0.000 claims description 3
- 230000035699 permeability Effects 0.000 claims description 3
- 230000004907 flux Effects 0.000 abstract description 10
- 229910000889 permalloy Inorganic materials 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 230000009191 jumping Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003962 NiZn Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
(技術分野)
本発明は強磁性薄膜の磁気抵抗効果を応用した磁気抵抗
効果素子(以下Ml?素子と称す)を用いて磁気記録媒
体に記録された信号の検出を行なう薄膜磁気ヘッドに関
する。Detailed Description of the Invention (Technical Field) The present invention detects signals recorded on a magnetic recording medium using a magnetoresistive element (hereinafter referred to as Ml? element) that applies the magnetoresistive effect of a ferromagnetic thin film. This invention relates to thin film magnetic heads.
(従来技術)
強磁性薄膜の磁気抵抗効果を利用した薄膜磁気ヘッドは
、一般に多用されている巻線型磁気へ・ラドと比較して
多くの利点を有することが知られている。即ち、薄膜磁
気ヘッドは磁気記録媒体に記録された磁化パターンから
発生する信号磁界を受け、これをMR素子の抵抗変化に
基く電圧変化として取り出すものであるため、磁気記録
媒体の移送速度に依存せずに信号を再生することができ
、移送速度が低い場合に巻線型の磁気ヘッドよりも高出
力の再生信号が得られる。実際の使用に際してはMR素
子単体で薄膜磁気ヘッドを構成するよりもMR素子部を
ヘッド先端から離し、磁気記録媒体にて発生した磁束を
MR素子部まで導く磁束導入路(ヨーク)を配置した第
2図の如き構造の通常ヨークタイプMlヘッド(以下Y
MRヘッドと称す)と呼ばれる薄膜磁気ヘッドの方が信
号の分解能の向上やMR素子の耐久性の向上に有効であ
り、近年このタイプのヘッドが固定ヘッド・ディジタル
オーディオ用再生ヘッドとして注目されている(第8回
日本応用磁気学会学術講演概要集(1984)I4■)
+3−11rヨ一クタイプMRへノドの再生特性」参照
)。(Prior Art) It is known that a thin film magnetic head that utilizes the magnetoresistive effect of a ferromagnetic thin film has many advantages over the commonly used wire-wound magnetic head. In other words, a thin film magnetic head receives a signal magnetic field generated from a magnetization pattern recorded on a magnetic recording medium and extracts this as a voltage change based on a resistance change of an MR element, so it does not depend on the transfer speed of the magnetic recording medium. It is possible to reproduce a signal without any noise, and when the transfer speed is low, a reproduced signal with higher output can be obtained than with a wire-wound magnetic head. In actual use, rather than constructing a thin-film magnetic head with a single MR element, the MR element part is separated from the head tip, and a magnetic flux introduction path (yoke) is arranged to guide the magnetic flux generated in the magnetic recording medium to the MR element part. 2 Normal yoke type Ml head (hereinafter referred to as Y
A thin-film magnetic head (referred to as an MR head) is more effective in improving signal resolution and durability of the MR element, and in recent years this type of head has been attracting attention as a fixed head digital audio playback head. (Summary of the 8th Japanese Society of Applied Magnetics Academic Lectures (1984) I4■)
+3-11r yoke type MR throat regeneration characteristics").
この従来の薄膜磁気ヘッドは第2図に示すように下部ヨ
ーク(6)と、磁気抵抗効果(MR)素子(4)と導体
(5)を埋設してなる絶縁体(8)と、磁気抵抗効果(
MR)素子(4)上部に開口部(11)を何する前、後
の上部ヨーク(2,3)とから構成される。As shown in Figure 2, this conventional thin film magnetic head consists of a lower yoke (6), an insulator (8) in which a magnetoresistive (MR) element (4) and a conductor (5) are embedded, and a magnetoresistive effect(
The MR) element (4) is composed of an opening (11) at the top and upper yokes (2, 3) at the front and rear.
このような、従来のMR素子を具備した薄膜磁気ヘッド
はMR素子(4)上部に開口部(11)がおいており、
このため、磁気記録媒体上の長波長の信号より生じる磁
束は、直接MR素子へ飛び込むことが知られている。こ
の上うなMfl素子への信号磁束の飛び込みは、YMR
ヘッドから得られる出力信号の処理、特に波形等化を極
めて複雑にするという欠点を有している。Such a conventional thin film magnetic head equipped with an MR element has an opening (11) above the MR element (4).
For this reason, it is known that magnetic flux generated by long wavelength signals on the magnetic recording medium jumps directly into the MR element. Furthermore, the signal magnetic flux jumps into the Mfl element due to the YMR
This has the disadvantage that processing of the output signal obtained from the head, especially waveform equalization, becomes extremely complicated.
(発明の目的)
本発明は、上述の問題点を解消するためになされたもの
であり、YMRヘッドの出力信号処理を容易に行なうこ
とを目的とするもので弗る。(Object of the Invention) The present invention has been made to solve the above-mentioned problems, and its object is to facilitate output signal processing of a YMR head.
即ち、本発明はノールド用高透磁率磁性体から成る下側
ヨーク(6)上に、磁気抵抗効果素子(・1)と導体(
5)とを略平行に埋設してなる絶縁層(8)を形成し、
次いで該磁気抵抗効果素子(4)上に開口部(11)を
有して前記絶縁層(8)を被覆ずろノールド用高透磁率
磁性体からなる前、後の上部ヨーク(2,3)から成る
薄膜磁気ヘッドにおいて、前記前の上部ヨーク(2)か
らのびて上部ヨーク(2゜3)を覆うように構成された
別のシールドヨーク(7)を具備することを特徴とする
薄膜磁気ヘッドを提供する。That is, in the present invention, a magnetoresistive element (1) and a conductor (
5) is buried substantially parallel to form an insulating layer (8);
Next, the magnetoresistive element (4) has an opening (11) and the insulating layer (8) is covered with the front and rear upper yokes (2, 3) made of a high magnetic permeability magnetic material for the nodal. A thin film magnetic head comprising: another shield yoke (7) extending from the previous upper yoke (2) and configured to cover the upper yoke (2°3). provide.
本発明を実施例に基づいて詳細に説明ずろ。The present invention will be explained in detail based on examples.
(実施例)
第1図は本発明に係る薄膜磁気ヘッドの一態様を示し、
トラック幅方向に垂直な方向の断面図である。(Example) FIG. 1 shows an embodiment of a thin film magnetic head according to the present invention,
FIG. 3 is a cross-sectional view in a direction perpendicular to the track width direction.
上側ヨーク(2,3)は通常0.5〜1.0μm程度の
膜厚のパーマロイ膜等で作製されており磁気記録媒体(
9)で発生した信号磁界をMR素子(4)に導く磁路と
なる。Mrt素子(4)はパーマロイから成り、蒸着ま
たはスパッタリング等の方法により作製され膜厚は30
0〜500人、長さはトラック幅の約50μmに設定さ
れている。またMR素子(4)にバイアス磁界を印加す
るためにA、1−Cu、 Au、 Ag、 A12−S
i合金等から成る導体(5)か配設されている。The upper yokes (2, 3) are usually made of permalloy film or the like with a thickness of about 0.5 to 1.0 μm, and are used for magnetic recording media (
It becomes a magnetic path that guides the signal magnetic field generated in step 9) to the MR element (4). The Mrt element (4) is made of permalloy and is manufactured by a method such as vapor deposition or sputtering, and has a film thickness of 30 mm.
The number of people is 0 to 500, and the length is set to about 50 μm of the track width. In addition, in order to apply a bias magnetic field to the MR element (4), A, 1-Cu, Au, Ag, A12-S
A conductor (5) made of i-alloy or the like is provided.
ヘッドギャップ(10)は実際に使用される記録波長が
最小0.5μm程度であるので0.2〜0.3μm程度
に設定されるのが好ましい。The head gap (10) is preferably set to about 0.2 to 0.3 μm since the minimum recording wavelength actually used is about 0.5 μm.
下部ヨーク(6)は高透磁率磁性体から成り一般には、
多結晶NiZnフェライト基板や単結晶又は多結晶M
n Z nフェライト基板が用いられる。トラック幅は
通常YMIIヘッドが多トラツク構成となるため50μ
m程度に設定されろが、これに限定されるわけではなく
、種々の幅を用いる事ができる。The lower yoke (6) is made of a high permeability magnetic material and is generally made of
Polycrystalline NiZn ferrite substrate, single crystal or polycrystalline M
An nZn ferrite substrate is used. The track width is usually 50μ since YMII heads have a multi-track configuration.
Although the width is set to about m, the width is not limited to this, and various widths can be used.
MR素子(4)と導体(5)を埋設する絶縁体(8)は
S iOt、A児、03、Si3N4等から形成され、
その一端は上下のヨークにより閉じられているが、他端
はヘッドギャップ(10)を形成し、閉じられていない
。このヘッドギャップ(10)は磁気記録媒体からの帰
洩磁束を拾うために形成されている。The insulator (8) embedding the MR element (4) and the conductor (5) is made of SiOt, A-03, Si3N4, etc.
Its one end is closed by the upper and lower yokes, but the other end forms a head gap (10) and is not closed. This head gap (10) is formed to pick up leakage magnetic flux from the magnetic recording medium.
本発明の磁気ヘッドは特に前の上部ヨーク(2)からの
びて上部ヨーク全体(2,3)を覆うように構成された
別のシールドヨーク(7)を具備ずろ。In particular, the magnetic head of the present invention includes another shield yoke (7) extending from the previous upper yoke (2) to cover the entire upper yoke (2, 3).
このシールドヨーク(7)は上部ヨーク(2,3)と同
様の材質で構成され、上部ヨーク(2,3)と一定間隔
を保って形成される。The shield yoke (7) is made of the same material as the upper yokes (2, 3), and is formed at a constant distance from the upper yokes (2, 3).
このシールドヨーク(7)のために、上部ヨーク(2,
3)の開口部(11)があっても磁気記録媒体上の長波
長信号から発生した磁束は、MR素子に直接飛び込むこ
とはない。それは、長波長信号よりの磁束は、シールド
用ヨーク(7)を通って上部ヨークへラドギャップ部分
(1)からヘッドギャップを経て下部ヨーク(6)に抜
けるためである。For this shield yoke (7), the upper yoke (2,
Even with the opening (11) in 3), the magnetic flux generated from the long wavelength signal on the magnetic recording medium does not directly jump into the MR element. This is because the magnetic flux from the long wavelength signal passes through the shielding yoke (7) to the upper yoke, from the rad gap portion (1), through the head gap to the lower yoke (6).
従って、このような構造のYMrlヘットにおいては、
第2図に示されるような構造を持つ従来タイプのYMR
ヘッドに比べて出カー周波敗特性が収得される。すなわ
ち、ある高い周波数fI■における出力をVll、「I
+より低い周波数rLにおける出力をVLとし、その比
V [−(/ V Lをとるとき、本発明によるYMR
ヘッドの方が従来タイプのYMRヘッドよりも大きな値
を取る事ができる。第3図中aは従来タイプのYMrt
ヘッドの出力−周波数特性、bは本発明によるYMRヘ
ッドの出力−周波数特性を示したものである。これはM
R水素子対する長波長信号による磁束の飛び込みの低減
化により出力−周波数特性が改善される事を示している
。Therefore, in a YMrl head with such a structure,
Conventional type YMR with the structure shown in Figure 2
Compared to the head, the output car frequency loss characteristics are obtained. That is, the output at a certain high frequency fI■ is Vll, "I
When the output at a frequency rL lower than + is VL and the ratio V [-(/V L), YMR according to the present invention
The head can take a larger value than the conventional type YMR head. In Fig. 3, a is the conventional type YMrt.
Output-frequency characteristics of the head, b shows the output-frequency characteristics of the YMR head according to the present invention. This is M
It is shown that the output-frequency characteristics are improved by reducing the intrusion of magnetic flux due to the long wavelength signal to R hydrogen atoms.
一方、YMRヘッドを実際に使用する場合の所望の周波
数帯域fmin−fmaxにおいては、YMRヘッドの
再生出力の平坦化を行なわなければならないわけである
が、第3図に示されるような出力−周波数特性を有する
本発明にもとづ< YMRヘッドと従来タイプのYMR
ヘッドについて、波形等化器の周波数特性を第4図に示
す。「min−rmaxが所望の周波数帯域であるので
この帯域内のYMRヘッドの再生出力は、一点鎖線Cの
ようになるよう波形等化を行なわなくてはならない。従
来タイプのYMRヘッドの増幅器出力後の特性を示すの
が実線eであり、これを平坦化するためには、波形等化
器の周波数特性は、実線「のようになっていなければな
らない。−力木発明にもとづ<YMRヘッドの増幅器出
力後の特性を示すのは実線dてあり、これを平坦化する
には、波形等化器の周波数特性は、実線gになるように
すればよい。第4図から明らかに見て取れるように、本
発明にらとづ(YMRヘッドの波形等化器の方が、従来
タイプのYMRヘッドの波形等化器に比べて回路の負担
が少なくてすむ。On the other hand, in the desired frequency band fmin-fmax when the YMR head is actually used, the reproduction output of the YMR head must be flattened, but the output-frequency difference as shown in Figure 3 Based on the present invention having the characteristics < YMR head and conventional type YMR
FIG. 4 shows the frequency characteristics of the waveform equalizer for the head. "Since min-rmax is the desired frequency band, the reproduction output of the YMR head within this band must be waveform equalized so that it becomes like the dashed line C. After the amplifier output of the conventional type YMR head, The solid line e indicates the characteristic of . In order to flatten this, the frequency characteristic of the waveform equalizer must be as shown by the solid line ``. The characteristic after the head amplifier output is shown by the solid line d. To flatten this, the frequency characteristic of the waveform equalizer should be made to be the solid line g. This can be clearly seen from Figure 4. As a result of the present invention, the waveform equalizer for a YMR head requires less circuit load than the waveform equalizer for a conventional YMR head.
(発明の効果)
本発明によれば、MRX子部の開口部から飛び込む長波
長信号による磁束が遮断され、再生信号処理の容易なY
MItヘッドが得られる。(Effects of the Invention) According to the present invention, the magnetic flux due to the long wavelength signal that enters from the opening of the MRX element is blocked, and the Y
A MIt head is obtained.
第1図は本発明の実施例を示ずYMRヘッドの断面図で
ある。第2図は従来のYIVIRヘッドの断面図である
。第3図は、本発明にもとづ<YMRヘッド及び従来タ
イプのYMRヘッド再生再生−カー周波数特性わす図で
あり、第4図は、第3図に示されるような再生出力特性
を有するYMRヘッドにおける波形等化器の周波数特性
を示す図である。
図中の番号は以下の通りである:
(1)・・・上部ヨークへラドギャップ部、(2)・・
・前の上部ヨーク、(3)・・・後の上部ヨーク、(4
)・・・MR水素子 (5)・・・導体、(6)・
・・下部ヨーク、 (7)・・・シールドヨーク、
(8)・・・絶縁体、 (9)・・・磁気記録媒
体、(10)・・・ヘッドギャップ、(11)用開口部
。
第3図
第4図FIG. 1 is a sectional view of a YMR head, not showing an embodiment of the present invention. FIG. 2 is a cross-sectional view of a conventional YIVIR head. FIG. 3 is a diagram showing the Kerr frequency characteristics of a YMR head according to the present invention and a conventional YMR head, and FIG. FIG. 3 is a diagram showing frequency characteristics of a waveform equalizer in the head. The numbers in the diagram are as follows: (1)...Rad gap to upper yoke, (2)...
・Front upper yoke, (3) ... Rear upper yoke, (4
)...MR hydrogen element (5)...Conductor, (6)...
... lower yoke, (7) ... shield yoke,
(8)...Insulator, (9)...Magnetic recording medium, (10)...Head gap, (11) opening. Figure 3 Figure 4
Claims (1)
)上に、磁気抵抗効果素子(4)と導体(5)とを略平
行に埋設してなる絶縁層(8)を形成し、次いで該磁気
抵抗効果素子(4)上に開口部(11)を有して前記絶
縁層(8)を被覆するシールド用高透磁率磁性体からな
る前、後の上部ヨーク(2、3)から成る薄膜磁気ヘッ
ドにおいて、前記前の上部ヨーク(2)からのびて上部
ヨーク(2、3)を覆うように構成された別のシールド
ヨーク(7)を具備することを特徴とする薄膜磁気ヘッ
ド。1. Lower yoke (6
), an insulating layer (8) is formed by embedding a magnetoresistive element (4) and a conductor (5) approximately in parallel, and then an opening (11) is formed on the magnetoresistive element (4). In the thin-film magnetic head, the front and rear upper yokes (2, 3) are made of a high permeability magnetic material for shielding and cover the insulating layer (8). A thin film magnetic head characterized in that it comprises another shield yoke (7) configured to cover the upper yokes (2, 3).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28395585A JPS62141620A (en) | 1985-12-16 | 1985-12-16 | Thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28395585A JPS62141620A (en) | 1985-12-16 | 1985-12-16 | Thin film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62141620A true JPS62141620A (en) | 1987-06-25 |
Family
ID=17672386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28395585A Pending JPS62141620A (en) | 1985-12-16 | 1985-12-16 | Thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62141620A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0411915A2 (en) * | 1989-08-04 | 1991-02-06 | Matsushita Electric Industrial Co., Ltd. | Thin film magnetic head |
EP0521564A2 (en) * | 1991-07-05 | 1993-01-07 | Koninklijke Philips Electronics N.V. | Thin-film magnetic head |
EP0521563A2 (en) * | 1991-07-05 | 1993-01-07 | Koninklijke Philips Electronics N.V. | Thin-film magnetic head |
-
1985
- 1985-12-16 JP JP28395585A patent/JPS62141620A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0411915A2 (en) * | 1989-08-04 | 1991-02-06 | Matsushita Electric Industrial Co., Ltd. | Thin film magnetic head |
EP0521564A2 (en) * | 1991-07-05 | 1993-01-07 | Koninklijke Philips Electronics N.V. | Thin-film magnetic head |
EP0521563A2 (en) * | 1991-07-05 | 1993-01-07 | Koninklijke Philips Electronics N.V. | Thin-film magnetic head |
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