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JPS5971124A - Magneto-resistance effect magnetic head - Google Patents

Magneto-resistance effect magnetic head

Info

Publication number
JPS5971124A
JPS5971124A JP18118482A JP18118482A JPS5971124A JP S5971124 A JPS5971124 A JP S5971124A JP 18118482 A JP18118482 A JP 18118482A JP 18118482 A JP18118482 A JP 18118482A JP S5971124 A JPS5971124 A JP S5971124A
Authority
JP
Japan
Prior art keywords
magnetic
film
track width
head
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18118482A
Other languages
Japanese (ja)
Inventor
Hitoshi Takagi
均 高木
Toshio Tanaka
敏雄 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18118482A priority Critical patent/JPS5971124A/en
Publication of JPS5971124A publication Critical patent/JPS5971124A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/398Specially shaped layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To attain easily uniaxial anisotropy, even if the track width of a magnetic head is narrowered, by forming a ferromagnetic thin film wider than the track width of the head and forming that the ferromagnetic thin film of a part other than the part forming the track width has a larger distance from the recording medium than the track width to improve the recording density. CONSTITUTION:The ferromagnetic film 11 is formed by being stretched left and right so as to have a size W2 wider than the width W1 of a track part 14 of a magnetic head opposing to the recording medium. The ferromagnetic film 11 is formed in opposite direction to the side where the magnetic recording medium is arranged, and its end 12 is connected to a terminal 13 made of A or Cu formed on the ferromagnetic film 11. In forming the film 11 in this way, since no magnetic charge stored at the side end C of the conventional rectangular magnetic head 3 is not generated, the diamagnetism in the direction of track width W1 is small and excellent shaped magnetic anisotropy is obtained, the magnetic induced anisotropy given at film forming is operated effectively, and any distortion is hardly generated in the reproducing waveform of the head.

Description

【発明の詳細な説明】 (a)  発明の技術分野 本発明は磁気抵抗効果型磁気ヘッドの改良に関し、特に
磁気ヘッドのトラック幅が狭い場合においても良好な一
軸異方性が実現できる磁気抵抗効果型磁気ヘッドに関す
る。
DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to improvements in magnetoresistive magnetic heads, and in particular to improvements in magnetoresistive magnetic heads, and particularly to improvements in magnetoresistive magnetic heads that can achieve good uniaxial anisotropy even when the track width of the magnetic head is narrow. This invention relates to a type magnetic head.

パーマロイ等の強磁性膜の抵抗変化を利用して情報の読
み出しを行う磁気抵抗効果型磁気ヘッドは、従来の強磁
性体部材にコイルを巻いて形成した磁気ヘッドに比し、
蒸着、スパッタなどの薄膜作成技術およびフォトリソグ
ラフィ技術により、容易に微少な形状のものが得られる
ので最近磁気ディスク装置等への応用をめざして、研究
開発が盛んである。
Magnetoresistive magnetic heads, which read information using changes in the resistance of a ferromagnetic film such as permalloy, have a higher
Since thin film formation techniques such as evaporation and sputtering and photolithography techniques can easily produce microscopic shapes, research and development has recently been active with the aim of applying them to magnetic disk drives and the like.

(c)従来技術と問題点 第1図および第2図に従来の磁気抵抗効果型磁気ヘッド
の断面図およびその断面図のA−A’線に沿った平面図
を示す。
(c) Prior Art and Problems FIGS. 1 and 2 show a cross-sectional view of a conventional magnetoresistive magnetic head and a plan view taken along line AA' of the cross-sectional view.

第1図および第2図に示すようにガラス基板1上には二
酸化硅素(SiO2)のような絶縁膜2を介してパーマ
ロイよりなる強磁性体膜3およびアルミニウム(At)
l金(Au)などよりなる接続用端子4が蒸着およびフ
ォトリソグラフィ等の技術を用いて所定のパターンに形
成され、その上に更にSIO□膜5を介して前記磁性体
膜3を磁化せしめるたフォトリソグラフィ忙より形成さ
れ、その上に5t02膜7が形成されて磁気ヘッドが形
成されている。
As shown in FIGS. 1 and 2, a ferromagnetic film 3 made of permalloy and aluminum (At) are deposited on a glass substrate 1 via an insulating film 2 such as silicon dioxide (SiO2).
A connecting terminal 4 made of gold (Au) or the like is formed into a predetermined pattern using techniques such as vapor deposition and photolithography, and is further layered with an SIO□ film 5 to magnetize the magnetic film 3. It is formed by photolithography, and a 5t02 film 7 is formed thereon to form a magnetic head.

ここで8は磁気ディスクまたは磁気テープ等の記録媒体
である。
Here, 8 is a recording medium such as a magnetic disk or a magnetic tape.

このような磁気抵抗効果型の磁性膜3はよく知られてい
るように第2図の矢印Bに示すようにトラック幅方向に
磁化容易軸が向くように一軸異方性を付与することが必
要である。このため通常第2図に示すように、トラック
幅Wを素子@1よりも十分大きくして形状異方性を利用
する方法や、あるいは素子の成膜時にトラック幅方向に
磁界を印加することKより磁気誘導異方性を与えること
が行なわれる。
As is well known, such a magnetoresistive magnetic film 3 needs to be given uniaxial anisotropy so that the axis of easy magnetization is directed in the track width direction, as shown by arrow B in FIG. It is. For this reason, as shown in FIG. 2, there is usually a method of making the track width W sufficiently larger than that of the element @1 to take advantage of shape anisotropy, or applying a magnetic field in the track width direction during film formation of the element. It is attempted to provide more magnetic induction anisotropy.

しかし、第2図の磁性体膜3の形状において、トラック
幅Wを小さくしていくと、トラ、り幅方向の形状反磁界
が大きくなるため、形状異方性の効果が望めなくなり、
磁気誘導異方性を付与し難くなり、良好な一軸異方性を
実現することが困難となる。
However, in the shape of the magnetic film 3 shown in FIG. 2, if the track width W is made smaller, the shape demagnetizing field in the track width direction becomes larger, so that the effect of shape anisotropy cannot be expected.
It becomes difficult to impart magnetic induction anisotropy, and it becomes difficult to realize good uniaxial anisotropy.

このように−軸異方性が乱れると、ヘッドの再生波形に
ひずみが発生し易くなり、またBarkhausen雑
音と呼ばれる電気抵抗の不連続な変化が起り、磁気ヘッ
ドとしての特性を劣化させる欠点を生じる。
When the -axis anisotropy is disturbed in this way, distortion is likely to occur in the reproduced waveform of the head, and discontinuous changes in electrical resistance called Barkhausen noise occur, resulting in defects that deteriorate the characteristics of the magnetic head. .

(由 発明の目的 本発明は上述した欠点を除去し、記録密度を向上させる
ため、磁気ヘッドのトラック幅を狭めた場合においても
、トラック幅方向の形状反磁界が生じず、磁気誘導異方
性を付与し易く、−軸異方性が容易に実現できうるよう
な磁気抵抗効果型磁気ヘッドの提供を目的とするもので
ある。
(Object of the Invention) In order to eliminate the above-mentioned drawbacks and improve the recording density, the present invention aims to eliminate the above-mentioned drawbacks and improve the recording density. It is an object of the present invention to provide a magnetoresistive magnetic head which can easily impart anisotropy and can easily realize -axis anisotropy.

(eン 発明の構成 かかる目的を達成するための本発明の磁気抵抗効果型磁
気ヘッドは、基板上に絶縁膜を介して強磁性薄膜および
接続用導体層を形成し、前記強磁性薄膜および導体層を
所定パターンに形成した後その上に絶縁膜を形成してな
る磁気効果型磁気ヘッドにおいて、前記強磁性薄膜をへ
、ドのトラック幅より広く形成し、トラック幅を形成す
る部分以外の強磁性薄膜は記録媒体との距離がトラ、り
幅部分よりも大きくなるように形成されることを特徴と
するものである。
(e) Structure of the Invention In order to achieve the above object, the magnetoresistive magnetic head of the present invention comprises forming a ferromagnetic thin film and a connecting conductor layer on a substrate via an insulating film, and In a magnetic effect magnetic head in which a layer is formed in a predetermined pattern and then an insulating film is formed thereon, the ferromagnetic thin film is formed to be wider than the track width of the ferromagnetic thin film and the ferromagnetic thin film is formed to be wider than the track width of the track width. The magnetic thin film is characterized in that it is formed such that the distance from the recording medium is greater than the width of the groove.

(f)  発明の実施例 以下、本発明の一実施例につき図面を用いながら詳細に
説明する。
(f) Embodiment of the Invention Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

第3図は本発明の磁気抵抗効果型磁気ヘッドの第1の実
施例を示す平面図で、第5図は他の実施例を示す平面図
である。また第4図は第1の実施例の磁気ヘッドを形成
する場合の途中の工程における磁気ヘッドの平面図であ
る。
FIG. 3 is a plan view showing a first embodiment of the magnetoresistive magnetic head of the present invention, and FIG. 5 is a plan view showing another embodiment. FIG. 4 is a plan view of the magnetic head at an intermediate step in forming the magnetic head of the first embodiment.

第3図に示すように本発明の磁気ヘッドは、記録媒体と
対向する磁気ヘッドのトラック巾蹟より巾の広い寸法W
2を有するように強磁性体膜11が左右に張り出して形
成されている。
As shown in FIG. 3, the magnetic head of the present invention has a dimension W wider than the track width of the magnetic head facing the recording medium.
The ferromagnetic film 11 is formed so as to protrude from side to side so as to have a diameter of 2.

この強磁性体膜11は磁気記録媒体が設置される側より
も反対方向に形成され、その端部には該強磁性体膜ll
上に形成されているAtやCu等の端子13と接続され
ている。
This ferromagnetic film 11 is formed in the opposite direction to the side where the magnetic recording medium is installed, and the ferromagnetic film 11 is formed at the end thereof.
It is connected to a terminal 13 formed above, such as At or Cu.

このような形状の強磁性膜11を形成すると、従Cにお
いて蓄積される磁荷は発生しないため、トラック幅方向
の形状反磁界は小さく、良好な形状磁気異方性が実現す
ることになり、成膜時に付与する磁気誘導異方性も有効
に働らき、ヘッドの再生波形にひずみが発生し難くなる
When the ferromagnetic film 11 having such a shape is formed, the magnetic charge accumulated in the secondary C is not generated, so the shape demagnetizing field in the track width direction is small, and good shape magnetic anisotropy is realized. The magnetic induction anisotropy imparted during film formation also works effectively, making it difficult for distortion to occur in the reproduction waveform of the head.

なあ、本実施例においてはコア巾W1以外の強磁性体膜
11も磁気抵抗効果膜として働くが、この部分は記録媒
体との距離がコア幅部よりdだけさらに隔っているので
、この部分で感じる媒体磁界は十分小さくヘッド全体の
抵抗値変化には寄与しない。
Incidentally, in this embodiment, the ferromagnetic film 11 other than the core width W1 also functions as a magnetoresistive film, but since this part is further away from the recording medium by d than the core width part, this part The medium magnetic field felt by the head is sufficiently small that it does not contribute to changes in the resistance value of the entire head.

またこのようにして形成される磁気ヘッドの磁気異方性
を更に改善するために、第4図に示すようにトラック幅
W□より更に大きい寸法の幅異を有する部分を端子13
何より反対側に形成することが考えられる。このように
すれば幅W3の部分16は形状異方性、誘導異方性によ
り十分良好な一軸異方性を有し、これにより所望のトラ
ック部分17の異方性も改善されることが期待できる。
In addition, in order to further improve the magnetic anisotropy of the magnetic head formed in this way, as shown in FIG.
Above all, it is conceivable to form it on the opposite side. In this way, the portion 16 having the width W3 will have sufficiently good uniaxial anisotropy due to shape anisotropy and induced anisotropy, and it is expected that this will also improve the anisotropy of the desired track portion 17. can.

ここで18はまたこの他の実施例として、第5図に示す
ように磁気テープ装置用ヘッドのようにマルチトラ。
Here, the reference numeral 18 is also a multi-track head such as a head for a magnetic tape device, as shown in FIG. 5, as another embodiment.

クヘッドにおいても、第3図に示した本発明の磁気ヘッ
ドの形状に形成した強磁性膜11を多数組み合せること
が可能である。前述したのと同様に15はヘッドの最終
仕上げ面を示す。
Also in the magnetic head, it is possible to combine a large number of ferromagnetic films 11 formed in the shape of the magnetic head of the present invention shown in FIG. As mentioned above, 15 indicates the final finished surface of the head.

(ロ)発明の効果 以上述べたように本発明の方法によれば、トラック幅を
狭めて磁気抵抗効果型磁気ヘッドを形成した場合におい
ても、トラック幅方向の形状反磁界は小さく、磁気誘導
異方性を付与し易く、−軸異方性が容易に実現できるよ
うな磁気抵抗効果磁気ヘッドが得られる。
(B) Effects of the Invention As described above, according to the method of the present invention, even when a magnetoresistive magnetic head is formed by narrowing the track width, the geometric demagnetizing field in the track width direction is small and the magnetic induction A magnetoresistive magnetic head can be obtained which can easily impart anisotropy and can easily realize -axis anisotropy.

また、以上の実施例においては基板上に1枚の磁気抵抗
効果型素子を形成した場合に例を用いて述べたが、その
他に磁気抵抗効果型素子を絶縁膜を介して2枚平行に形
成し、それぞれの素子に流す電流で互いにバイアス磁界
を印加し合う形の磁気ヘッドや、あるいはシャントバイ
アス型の磁気へ、ドにも利用できる。さらに、磁気抵抗
効果型素子の両側にシーシト用磁性体を配置するシーl
レド形磁気抵抗効果型ヘッドにも応用できることは明ら
かである。
In addition, although the above embodiment has been described using an example in which one magnetoresistive element is formed on a substrate, it is also possible to form two magnetoresistive elements in parallel with each other with an insulating film interposed therebetween. However, it can also be used in a magnetic head in which a bias magnetic field is applied to each element using a current flowing through each element, or in a shunt bias type magnetism. Furthermore, a seal is provided in which the magnetic material for the sheet is placed on both sides of the magnetoresistive element.
It is clear that the present invention can also be applied to lead-type magnetoresistive heads.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第2図は従来の磁気抵抗効果型磁気へ、ドの断
面図およびその平面図、第3図、第5図は本発明の磁気
抵抗効果型磁気ヘッドの実施例を示す平面図、第4図は
本発明の磁気ヘッドの形成3、11.16.17は強磁
性膜、12は端部、13は端子、示す。
1 and 2 are cross-sectional views and a plan view thereof of a conventional magnetoresistive magnetic head, and FIGS. 3 and 5 are plan views showing an embodiment of the magnetoresistive magnetic head of the present invention. , FIG. 4 shows the formation 3 of the magnetic head of the present invention, 11, 16, and 17 are ferromagnetic films, 12 is an end portion, and 13 is a terminal.

Claims (1)

【特許請求の範囲】[Claims] 基板上に絶縁膜を介して強磁性薄膜および接続用導体層
を形成し、前記強磁性薄膜および導体層を所定パターン
に形成した後、その上に絶縁膜を形成してなる磁気抵抗
効果型磁気ヘッドKhいて、前記強磁性薄膜をヘッドの
トラック幅より広く形成し、トラック幅を形成する部分
以外の強磁性薄膜は記録媒体との距離がトラック幅部分
よりも大きくなるように形成することを特徴とする磁気
抵抗効果型磁気ヘッド。
A magnetoresistive magnet, which is formed by forming a ferromagnetic thin film and a connecting conductor layer on a substrate via an insulating film, forming the ferromagnetic thin film and conductor layer in a predetermined pattern, and then forming an insulating film thereon. In the head Kh, the ferromagnetic thin film is formed to be wider than the track width of the head, and the ferromagnetic thin film other than the part forming the track width is formed so that the distance from the recording medium is larger than the track width part. A magnetoresistive magnetic head.
JP18118482A 1982-10-14 1982-10-14 Magneto-resistance effect magnetic head Pending JPS5971124A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18118482A JPS5971124A (en) 1982-10-14 1982-10-14 Magneto-resistance effect magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18118482A JPS5971124A (en) 1982-10-14 1982-10-14 Magneto-resistance effect magnetic head

Publications (1)

Publication Number Publication Date
JPS5971124A true JPS5971124A (en) 1984-04-21

Family

ID=16096329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18118482A Pending JPS5971124A (en) 1982-10-14 1982-10-14 Magneto-resistance effect magnetic head

Country Status (1)

Country Link
JP (1) JPS5971124A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184906A (en) * 1987-01-28 1988-07-30 Sony Corp Magneto-resistance effect type magnetic head
JPH01277313A (en) * 1988-04-25 1989-11-07 Magnetic Peripherals Inc Magnetoresistance detector having protrusion for improving data reading
US6111723A (en) * 1990-04-16 2000-08-29 Hitachi, Ltd. Narrow track thin film magnetic head suitable for high density recording and reproducing operations and fabrication method thereof wherein an air bearing surface has at least one groove containing a non-magnetic electrically conductive layer

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184906A (en) * 1987-01-28 1988-07-30 Sony Corp Magneto-resistance effect type magnetic head
JPH01277313A (en) * 1988-04-25 1989-11-07 Magnetic Peripherals Inc Magnetoresistance detector having protrusion for improving data reading
US6111723A (en) * 1990-04-16 2000-08-29 Hitachi, Ltd. Narrow track thin film magnetic head suitable for high density recording and reproducing operations and fabrication method thereof wherein an air bearing surface has at least one groove containing a non-magnetic electrically conductive layer
US6278578B1 (en) 1990-04-16 2001-08-21 Hitachi, Ltd. Narrow track thin film head having a focused ion beam etched air bearing surface
US6307707B1 (en) 1990-04-16 2001-10-23 Hitachi, Ltd. Narrow track thin film head including magnetic poles machined by focused ion beam etching
US6538844B2 (en) 1990-04-16 2003-03-25 Hitachi, Ltd. Method of fabricating a magnetic head by focused ion beam etching
US6665141B2 (en) 1990-04-16 2003-12-16 Hitachi, Ltd. Magnetic head having track width defined by trench portions filled with magnetic shield material
US6839200B2 (en) 1990-04-16 2005-01-04 Hitachi, Ltd. Combination perpendicular magnetic head having shield material formed at both ends of an upper pole of a write element

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