JPS62112223A - Drying method for disk member - Google Patents

Abstract

PURPOSE:To quickly and thoroughly remove water from a disk member and to quickly dry said member by supplying hot water to the surface of the disk member during the low-speed rotation thereof and rotating the disk member at a high speed after the warming. CONSTITUTION:A spindle 12 of a motor 13 for a rotating device 2 is rotated, by which the disk member 1 is rotationally driven at a low speed of about 100-500rpm. The hot pure water heated to >=40 deg.C is supplied from nozzles 33 of a hot pure water supply device 3 to the front and rear surfaces of the disk member 1 at the same instant. The supply of the hot pure water from the hot pure water supply device 3 is stopped when the front and rear surfaces of the disk member 1 are thoroughly heated. The disk member 1 is then rotated at a high speed of 2,000-5,000rpm and the water sticking to the surface of the disk member 1 is removed by the effect of centrifugal force. Since the disk member 1 is kept heated by the hot pure water in the above-mentioned manner, the draining on the surface thereof is improved and the water in molecular order is thoroughly removed. The drying of the disk member 1 is thus accelerated.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is applicable to cleaning of disk members in the manufacturing process of magnetic disks, optical disks, etc. The present invention relates to a method of drying a disk member after drying after 4+.

2. Description of the Related Art Magnetic disks and optical disks require a recording layer to be formed on their surface, and when manufacturing them, it is necessary to wash the disk member on the surface on which the recording layer is formed and then dry it.

Here, for drying after cleaning, it has been known to perform high-speed spin drying of the disk member, but even with this high-speed spin drying, it was not always possible to completely remove moisture. In particular, with regard to magnetic disks, recent advances in recording density, writing of recorded information,
For reasons such as faster readout, thinning of the recording layer is required, but when forming such a thin recording layer, it is necessary to thoroughly clean the disk member and also to dry it completely. It is necessary to do this, even if the molecule is
Even if a certain amount of moisture adheres to the surface of the disk member, it will interfere with the formation of the thin film recording layer as described above.

Problems to be Solved by the Invention The present invention has been made in view of the above points, and its purpose is to quickly and completely remove moisture from the surface of a disk member. It's about doing.

Means for Solving the Problems In order to achieve the above-mentioned object, the method of the present invention supplies hot water to the surface of the disk member while rotating the disk member at low speed, and stops the supply of hot water. 1- After the disk member is washed, the disk member is rotated at high speed to remove moisture attached to the surface of the disk member.

After cleaning and rinsing the surface of the disk member with the cleaning liquid in the cleaning process, the disk member is transferred to the drying section by an appropriate transfer means, and the disk member is placed on a rotating mounting installed in the drying section. Attach. Therefore, the disk member is rotated at a low speed by this rotating device, and during this period, hot water, preferably warm pure water, is supplied to the disk member to heat the surface of the disk member. Then, after the hot water supply is stopped LL, the disk member is rotated at high speed to perform alpine spin drying. Due to the high-speed rotation of the disk member, moisture adhering to the surface of the disk member is separated from the surface of the disk member and scattered by the action of centrifugal force. At this time, since the surface of the disk member is in a heated state, separation of moisture from the surface of the disk member is promoted, and complete dehydration is quickly performed. Therefore, since no moisture in molecular units remains in the disk member, subsequent steps such as forming a recording film can be carried out smoothly.

EXAMPLE An example of the present invention will be described in detail below with reference to the drawings.

First, as shown in Figures 1 and 2, in the drying section,
A rotating device that rotates the disk member 1! A warm pure water supply device 3 is installed to supply warm pure water to δ2 and the disk member 1.
Moreover, an openable/closable cover 4 is provided for holding the disk member 1 so that water droplets do not scatter around when the disk member 1 is spin-dried.

Here, the rotating device 2 has a configuration as shown in FIGS. 3 to 5. That is, on the wall 10 that partitions the drying section, the h11 receiving bush 11 is fixedly provided.
A spindle X2 is rotatably supported by the bearing bushing. The ends of this spindle 12 are connected to a motor 13 outside the drying section.The tip end of the spindle 12 is connected to a rotating block 14 installed inside the drying section. It is designed to be rotationally driven by.

Rotation pro, ri 14 has 3 supports, kl + 15 swing, v
) possible to be removed, each support +1115",
4.5;
As shown in Fig. 3, the ri f'b material 16 is attached with lrQ. The inner peripheral edge of the rR material 1 is in contact with the inner circumferential edge of the material 1 to support it in a chunked state, and as shown in FIG. It is now possible to move between the two. In order to displace the shaft member 16, an operating rod 17 is provided passing through the spindle 12, and the tip of the operating port 17 is connected to the rotating block 14.
It is connected to the receiving part 18 inside. The receiving portion 18 is formed with four inclined parts 19, and these four parts I! A roller 20 attached to a support shaft
At the same time, the roller 20 is displaced in the recess 19 by displacing it in its axial direction, and the support shaft 1 connected to the roller 20 is moved.
By moving 5 (1f), the chunk member 1G can be displaced between the chuck position and the chunk release position.
Warm pure water 11 that supplies warm pure water to
A hose 32 for supplying warming water is connected to the disk member 1, and nozzles 33 are attached for spraying hot pure water supplied from the hose 32 toward each of the front and back surfaces of the disk member l.

Furthermore, the cover 4 is composed of a top plate part 4a and a side plate part 4b with one side open, and the cover 4 allows the rotating device to
The disk member 1 attached to the hot pure water supply device 3 can be covered. And cover 4
is equipped with an opening/closing mechanism for opening and closing it. The opening/closing mechanism of the cover 4 includes a shaft 41 attached to the side plate 4b of the cover 4, a lever 42 attached to the shaft 41,
It consists of a cylinder 43 connected to the lever 42, and by operating the cylinder 43, the shaft 41 is rotated together with the lever 42, and the cover 4 connected to the shaft 41 is rotated to open and close it. The structure is such that it can be done.

The drying device is constructed as described above. Next, a method of drying the disk member 1 using this drying device η will be explained.

First, in a cleaning process that precedes this drying process, the disk member 1 is cleaned with a cleaning liquid on each of its front and back sides and its inner and outer peripheral edges, and after the cleaning liquid has been rinsed off, a transfer device that chucks, for example, the outer peripheral edge of the disk member 1 is rinsed. (not shown) to the drying section. At this time,
The cover 4 connects the shaft 41 to the cylinder 43 as shown in FIG.
Rotate it to keep it open. Then, when the disk member l is transported to the drying section by the transport device,
The inner peripheral edge of the disk member 1 is chucked by the chuck member 1B of the rotating device 2, and when the transfer of the disk member 1 is completed, the transfer device is removed from the drying section.

Then, the cylinder 43 is operated to cause the cover 4 to cover the disk member l supported by the rotating device 2. Then, by driving the motor 13 of the rotating device 2 to rotate the spindle 12, the disk member l is rotated by lOO~5.
It is rotated at a low speed of about 00 rpm. At the same time, warm pure water heated to 40 degrees or higher is supplied from the nozzle 33 of the warm pure water supply device 3 to each of the front and back surfaces of the disk member 1.

By supplying warm pure water to the surface of the disk member 1 while rotating it at a low speed, the disk member l
The whole area is heated evenly. At this time, water droplets attached to the surface of the disk member 1 due to rotation of the disk member 1 and warm pure water supplied thereto are scattered from the disk member 1 by centrifugal force, but the disk member 1 is covered with the cover 4. Therefore, it will not be scattered outside the cover 4.

When the front and back surfaces of the disk member 1 are sufficiently heated as described above, the supply of warm pure water from the warm pure water supply device 3 is stopped, and the disk member 1 is rotated at a high speed of 2000 to 5 QQ Orpm to reduce the centrifugal force. This action removes moisture adhering to the surface of the disk member l. Since the disk member 1 is heated by the warm pure water, the surface of the disk member 1 is well drained, and even molecular units of water are completely removed, promoting the drying of the disk member 1.

Then, while the disk member 1 continues to rotate at high speed, the cover 4 is opened when the removal of moisture from the surface of the disk member 1 is almost completed. This eliminates the problem of water droplets adhering to the cover 4 dripping onto the surface of the disk member 1.

Moreover, in this state, there is almost no moisture scattering from the disk member 1, so there is no need to cover it with the cover 4, so even if this cover 4 is removed, other parts will not be contaminated. Never.

When the drying of the disk member 1 is completed in this manner, the disk member 1 is transported to the next step by an appropriate transport device.

In addition to the effects of the invention, as explained, the uninvented method adds hot water to the surface of the disk member while rotating the disk member at a low speed, and the hot water is supplied to the disk member. Since the disk member is rotated at high speed after the disk is stopped, moisture can be quickly and completely removed from the surface of the disk member, and the disk member can be quickly dried.

4. [Multi-sided cylinder 1 Etsumei drawings show an apparatus for carrying out the method of the present invention, Fig. 1 is an explanatory diagram of the overall structure of the drying apparatus, Fig. 2 is a diagram showing 3 is a cross-sectional view of the rotating device for the disk member, FIG. 4 is a sectional view of a main part showing the apparent operating state compared to FIG. 3, and FIG. 5 is a left side view of FIG. 3. FIG. 6 is a configuration explanatory diagram showing an operating state different from that in FIG. 1.

1: Disk member, 2: Rotating device, 3. Warm pure water supply device, 12 spindles, 13: motor, 33:/slip.

Claims (1)

[Claims] Hot water is supplied to the surface of the disk member while the disk member is rotating at a low speed, and after the supply of hot water is stopped, the moisture attached to the surface of the disk member is removed by rotating the disk member at a high speed. A method for drying a disk member, characterized in that: