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JPS62106681A - Gas laser oscillator - Google Patents

Gas laser oscillator

Info

Publication number
JPS62106681A
JPS62106681A JP24641285A JP24641285A JPS62106681A JP S62106681 A JPS62106681 A JP S62106681A JP 24641285 A JP24641285 A JP 24641285A JP 24641285 A JP24641285 A JP 24641285A JP S62106681 A JPS62106681 A JP S62106681A
Authority
JP
Japan
Prior art keywords
tube
discharge
gas laser
discharge tube
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24641285A
Other languages
Japanese (ja)
Inventor
Mitsuhiro Nishio
西尾 光宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24641285A priority Critical patent/JPS62106681A/en
Publication of JPS62106681A publication Critical patent/JPS62106681A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/036Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/07Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • H01S3/073Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To make a laser medium progress as a convolute flow and realize a stable and high-output discharge by a method wherein a supply tube is connected slantly to a discharge tube and the diameter of the supply tube is selected to be smaller than a half of the diameter of the discharge tube. CONSTITUTION:A tube wit a diameter smaller than a half of the diameter of a discharge tube 3 is sued as a supply tube 7 and both ends of the supply tube 7 ate connected to the discharge tube 3 in such a manner that the end of the supply tube 3 is inclined relative to the axis of the discharge tube 3 toward the side of a linking tube 8 and the axis of the tube 3 and the axis of the tube 7 do not coincide with each other. When a gas laser medium, circulated by a blower 9 flows into the tube 3 from the tube 7 while a laser oscillation is induced by a resonance between a total reflection mirror 1 and an output mirror 2, the gas laser medium spouted out from the two ends of the tube 7 hits the upper part of the inside wall of the tube 3 slantly and progresses toward the tube 8 as a convolute flow because the axis of the tube 3 and the axis of the tube are connected together in a twisted relation.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明はいわゆる軸流形ガスレーザ発振装置に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a so-called axial flow type gas laser oscillation device.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

光軸とが一致した構成になるいわゆる軸流形ガスレーザ
発振装置では放電の安定化、大電力の投入などの目的で
ガスレーザ媒質の放電管内における流れを乱流もしくは
旋回流とする工夫がなされていた。乱流についてはたと
えば特開昭59−56782号公報にてフィンやスリッ
トを設けて乱流を起す構成が開示されているものや、あ
るいは特開昭60−22387号公報の二うにファンに
よるものがある。また、旋回流については特開昭60−
28285号公報で放電管の一部を不連続に太きくし、
ここへガスレーザ媒質を接線方向に供給する構成が開示
されている。前者のフィンやファンによる乱流化は、た
とえばスリットの前後に圧力差を生じさせて乱流を起こ
させるものであり、圧損の増加、ひいては循環ポンプの
大形化は避は難いつまた、優者の旋回流の場合、放電管
部に拡大部を形成して行っているので、レーザ発振光軸
に一致する軸方向のガス流速に何ら寄与しない問題があ
ったO〔発明の目的〕 太登明は片雷の′8宇イヒと大電力投入を簡易な傳成罠
よって得るようにしたガスレーザ見損装置の提供を目的
とするものである。
In so-called axial flow gas laser oscillators, which have a configuration in which the optical axes are aligned, devices have been devised to make the flow of the gas laser medium in the discharge tube a turbulent or swirling flow for the purpose of stabilizing the discharge and inputting large amounts of power. . Regarding turbulent flow, for example, Japanese Patent Application Laid-Open No. 59-56782 discloses a configuration in which fins or slits are provided to generate turbulent flow, or Japanese Patent Application Laid-Open No. 60-22387 discloses a configuration using a fan. be. In addition, regarding the swirling flow, JP-A-60-
In Publication No. 28285, a part of the discharge tube is made thicker discontinuously,
A configuration is disclosed in which the gas laser medium is supplied tangentially. The former type of turbulence caused by fins and fans causes turbulence by creating a pressure difference before and after a slit, which inevitably increases pressure loss and increases the size of the circulation pump, but it is also difficult to avoid. In the case of the swirling flow of a person, since an enlarged part is formed in the discharge tube part, there is a problem that it does not contribute in any way to the gas flow velocity in the axial direction that coincides with the laser oscillation optical axis. The object of the present invention is to provide a gas laser blinding device that can obtain a single lightning strike and a large amount of power input by means of a simple construction trap.

〔発明の概要〕[Summary of the invention]

放電管の管壁にガスレーザ媒質を供給する供給管を供給
したガスレーザ媒質が放電管内で旋回流とtって進行す
るように放電管壁に接続し上記目的を達成するようにし
たものである。
A supply tube for supplying a gas laser medium to the wall of the discharge tube is connected to the wall of the discharge tube so that the supplied gas laser medium travels along with a swirling flow within the discharge tube, thereby achieving the above object.

〔発明の実施例〕[Embodiments of the invention]

以下、実施例を示す図面に基いて本発明を説明する。 EMBODIMENT OF THE INVENTION Hereinafter, this invention will be explained based on drawing which shows an Example.

第1図は本発明の一実施例で、両端に光共振器を構成す
る全反射鏡(1)および出力鏡(2)を密着した放電管
(3)を有し、この放電管(1)の内部には陰極(4)
および陽極(5)から放電電極が一対所定の間隔をおい
て設けられている。上記放電′1極にはそれぞれ放電用
電yi、+61が接続てれ、放電管(3)内で2箇所の
放電部が形成されるようになっている。また、放電管(
3)の両端側における管壁にはコの字状の供給管(7)
の両端部分が接続され、さらに供給管c力は上記放電電
極間になる放電管(3)の中央部分に接続した連通管(
8)に接続され、二方向の循環流路が形成されている。
FIG. 1 shows an embodiment of the present invention, which has a discharge tube (3) with a total reflection mirror (1) and an output mirror (2) that form an optical resonator attached to both ends of the discharge tube (1). There is a cathode (4) inside the
A pair of discharge electrodes are provided at a predetermined distance from the anode (5). Discharge voltages yi and +61 are connected to the discharge '1 pole, respectively, so that two discharge portions are formed within the discharge tube (3). In addition, discharge tubes (
3) U-shaped supply pipes (7) are installed on the pipe walls at both ends.
Both ends of the supply tube (3) are connected, and the supply tube (c) is connected to the communication tube (3) connected to the center of the discharge tube (3) between the discharge electrodes.
8) to form a two-way circulation flow path.

連通管(8)Kは放電管(3)等て封入されたガスレー
ザ媒質用の送風機(9)およびこの送風機(9)を間に
してガスレーザ媒質を冷却する熱交換器(10が一対設
けられている。
The communication tube (8) K is provided with a blower (9) for the gas laser medium enclosed in the discharge tube (3), etc., and a pair of heat exchangers (10) for cooling the gas laser medium with this blower (9) in between. There is.

ところで、供給管(7)は放電管(3)の直径の半分以
下の直径をもつ管体で、その両端部は放電管(3)の軸
に対して同図および′jf、2図に示すように、それぞ
れ連通管+8) @に向けて斜めになるとともに1両者
の軸線がずれた状態になって接続されているう以上の構
成において、放電管(3)内において二方向に循環する
ガスレーザ媒質は三箇所の放電部で励起され、全反射鏡
(1)と出力鏡(2)間の共振作用によりレーザ発根し
、出力鏡(2)より放電管(3)の軸方向にレーザ尤(
L)が出力される。上記のレーザ発振中、送風機(9)
によって循環されるガスレーザ媒質は供給管(7)より
放電管(3)内に流入するとき、放電管(3)と供給−
e (7)の軸とがねじれの関係例なって接続されてい
るので、供給管(力の両端から噴出したガスレーザ媒質
は図中放電管(3)の内壁面の上部側へ斜めになって当
シ、図中破線で示すように連通管(8)へ向ってそれぞ
れ旋回しながら進行するようになる。このだうにして形
成された旋回流は放よ 電管(3)の管端から同軸方向に直進させた場合に比べ
て当然流速は若干低下するものの、供給管と放電管とが
直接に接続されているので、流速の低下は小さく、ガス
レーザ媒質の流速は高速に保たれる。
By the way, the supply tube (7) is a tube body with a diameter less than half the diameter of the discharge tube (3), and its both ends are shown in the same figure and 'jf, 2, with respect to the axis of the discharge tube (3). As shown in FIG. The medium is excited at three discharge parts, and the laser beam is emitted by the resonance action between the total reflection mirror (1) and the output mirror (2), and the laser beam is emitted from the output mirror (2) in the axial direction of the discharge tube (3). (
L) is output. During the above laser oscillation, the blower (9)
When the gas laser medium circulated by flows into the discharge tube (3) from the supply tube (7), the gas laser medium circulates between the discharge tube (3) and the supply tube (3).
Since the axis of e (7) is connected in a twisted relationship, the gas laser medium ejected from both ends of the supply tube (force) is inclined toward the upper side of the inner wall surface of the discharge tube (3) in the figure. As shown by the broken lines in the figure, the current flows toward the communication tube (8) while rotating.The swirling flow thus formed flows from the tube end of the discharge tube (3). Naturally, the flow velocity is slightly lower than when the gas laser medium travels straight in the coaxial direction, but since the supply tube and the discharge tube are directly connected, the decrease in flow velocity is small and the flow velocity of the gas laser medium is maintained at a high speed.

〔発明の効果〕〔Effect of the invention〕

従来技術の説明で述べた特開昭60−28285号公報
で開示された技術では、供給管と放電管との間に旋回流
を形成するための拡大部が設けられているため、供給管
から出たガスレーザ媒質の流速はこの拡大部で圧力降下
に伴なって著しく弱まるため、放電管内を流れるガスレ
ーザ媒質の旋回流の流速の低下は大きなものとなる。こ
れに対し、本願では上述したように流速の低下は僅かな
ため。
In the technology disclosed in Japanese Patent Application Laid-Open No. 60-28285 mentioned in the explanation of the prior art, since an enlarged part for forming a swirling flow is provided between the supply tube and the discharge tube, there is no flow from the supply tube. Since the flow velocity of the exiting gas laser medium is significantly weakened by the pressure drop in this enlarged portion, the flow velocity of the swirling flow of the gas laser medium flowing inside the discharge tube is significantly reduced. On the other hand, in the present application, as described above, the decrease in flow velocity is slight.

旋回流によるガスレーザ媒質の放電励起体積向上による
放電の7定化の効果の他に、ガスレーザ媒安 きな電力を投入できるので、レーザ発振の高出力を達成
することができた。
In addition to the effect of making the discharge 7 constant by increasing the discharge excitation volume of the gas laser medium due to the swirling flow, we were able to achieve high laser oscillation output because inexpensive power could be input to the gas laser medium.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す概要図、第2図は第1
図におけるA−A線にて切断した断面図である。 (3)・・・放電管、(4)・・・陰極、  (5)・
−・陽極。 (6)・・・放電用!l!!、 (7)・・・供給管っ
代理人 弁理士  則 近 L 佑 同     竹 花 廖久男
Fig. 1 is a schematic diagram showing one embodiment of the present invention, and Fig. 2 is a schematic diagram showing an embodiment of the present invention.
It is a sectional view cut along the AA line in the figure. (3)...discharge tube, (4)...cathode, (5)...
-・Anode. (6)...For discharge! l! ! (7)...Supply management agent Patent attorney Nori Chika L Yudo Takehana Hirohisa

Claims (2)

【特許請求の範囲】[Claims] (1)放電管およびこの放電管にガスレーザ媒質を供給
する供給管とを備え上記放電管内におけるガスレーザ媒
質の流れとレーザ発振光軸とが一致した構成になるガス
レーザ発振装置において、上記供給管はその延長軸を放
電管の軸と交点を有さないで放電管の管壁に斜めに接続
されていることを特徴とするガスレーザ発振装置。
(1) In a gas laser oscillation device comprising a discharge tube and a supply tube for supplying a gas laser medium to the discharge tube, the flow of the gas laser medium in the discharge tube and the laser oscillation optical axis are aligned, and the supply tube is the supply tube. A gas laser oscillation device characterized in that an extension axis is obliquely connected to a tube wall of a discharge tube without having an intersection with the axis of the discharge tube.
(2)供給管は少なくとも放電管との接続部を放電管の
直径の1/2以下の管径としたことを特徴とする特許請
求の範囲第1項記載のガスレーザ発振装置。
(2) The gas laser oscillation device according to claim 1, wherein the supply tube has a diameter that is at least 1/2 of the diameter of the discharge tube at least at the connection portion with the discharge tube.
JP24641285A 1985-11-05 1985-11-05 Gas laser oscillator Pending JPS62106681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24641285A JPS62106681A (en) 1985-11-05 1985-11-05 Gas laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24641285A JPS62106681A (en) 1985-11-05 1985-11-05 Gas laser oscillator

Publications (1)

Publication Number Publication Date
JPS62106681A true JPS62106681A (en) 1987-05-18

Family

ID=17148100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24641285A Pending JPS62106681A (en) 1985-11-05 1985-11-05 Gas laser oscillator

Country Status (1)

Country Link
JP (1) JPS62106681A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63272106A (en) * 1987-04-30 1988-11-09 Matsushita Electric Ind Co Ltd Fm demodulating circuit
JPS63279464A (en) * 1987-05-12 1988-11-16 Matsushita Electric Ind Co Ltd Fm demodulation circuit
JPS6410706A (en) * 1987-07-02 1989-01-13 Matsushita Electric Ind Co Ltd Fm demodulating circuit
JPS6410705A (en) * 1987-07-02 1989-01-13 Matsushita Electric Ind Co Ltd Fm demodulating circuit
JPH0458578A (en) * 1990-06-28 1992-02-25 Kawasaki Steel Corp Method and device for lasing in gas laser using autogenous revolving gas flow

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63272106A (en) * 1987-04-30 1988-11-09 Matsushita Electric Ind Co Ltd Fm demodulating circuit
JPS63279464A (en) * 1987-05-12 1988-11-16 Matsushita Electric Ind Co Ltd Fm demodulation circuit
JPS6410706A (en) * 1987-07-02 1989-01-13 Matsushita Electric Ind Co Ltd Fm demodulating circuit
JPS6410705A (en) * 1987-07-02 1989-01-13 Matsushita Electric Ind Co Ltd Fm demodulating circuit
JPH0458578A (en) * 1990-06-28 1992-02-25 Kawasaki Steel Corp Method and device for lasing in gas laser using autogenous revolving gas flow

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