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JPS6169151A - Soldering device of cap for hermetic seal - Google Patents

Soldering device of cap for hermetic seal

Info

Publication number
JPS6169151A
JPS6169151A JP10027184A JP10027184A JPS6169151A JP S6169151 A JPS6169151 A JP S6169151A JP 10027184 A JP10027184 A JP 10027184A JP 10027184 A JP10027184 A JP 10027184A JP S6169151 A JPS6169151 A JP S6169151A
Authority
JP
Japan
Prior art keywords
cap
ceramic substrate
soldering
solder
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10027184A
Other languages
Japanese (ja)
Inventor
Akira Ogawa
明 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP10027184A priority Critical patent/JPS6169151A/en
Publication of JPS6169151A publication Critical patent/JPS6169151A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Products (AREA)

Abstract

PURPOSE:To shorten the time required for soldering, and to reduce production cost by holding and fixing a laminate, in which a thermal conductive adapter, a ceramic substrate and a cap made of a metal are superposed through solder, while exposing the greater part of the lower surface of the ceramic substrate. CONSTITUTION:A ceramic substrate 26 to be soldered is placed on a heat transfer surface in a heater 18, and fastened by a guide 19, and heated up to a temperature required for soldering through the conduction of a heating wire in the heater 18. A cap 25 made of a metal is superposed at the predetermined position of the ceramic substrate 26 while holding solder 27, and two cap temporary fixing jigs 21 are attached pinchingly at the facing positions of a unit. When the temperature of a thermal conductive adapter 20 reaches the temperature necessary for soldering, the unit to which the cap temporary fixing jigs 21 are set is placed at a prescribed position, and solder 27 is melted to fasten the cap 25 made of the metal. Accordingly, heat from the heater 18 is transmitted rapidly over solder 27, thus shortening the time required for soldering.

Description

【発明の詳細な説明】 [発明の技術分野1 本発明はハイブリッドICの気密封止のために、ハイブ
リッドtC基板上に金ff製キャップを半田付けにより
固定する際に使用する気密封止用キャップ半田付装置に
関する。
Detailed Description of the Invention [Technical Field of the Invention 1] The present invention relates to a hermetic sealing cap used when a gold FF cap is fixed by soldering onto a hybrid TC substrate for hermetically sealing a hybrid IC. This invention relates to a soldering device.

[発明の技術的背景] 一般に、ハイブリッドtC製造の最終工程においては、
透孔を有する金属製キャップをセラミック基板上に半田
付けにより固定し、高温でエージングを行なって揮発成
分を除去し、前記金属製キャップ内を不活性ガスで隨き
換えた後、前記透孔を半田で塞ぐことによりハーメチッ
クシールを施すことが行なわれている。
[Technical background of the invention] Generally, in the final step of hybrid TC production,
A metal cap with a through hole is fixed on a ceramic substrate by soldering, aged at high temperature to remove volatile components, and after replacing the inside of the metal cap with an inert gas, the through hole is removed. A hermetic seal is applied by sealing with solder.

このようなハーメチックシール作業において金属製キャ
ップをセラミック基板上に半田付けするには、従来から
第2図で示すように、電熱線を内蔵し上面が平坦な伝熱
面とされた加熱器1と、金属製キャップ2を半田3を介
してセラミック基板4上に仮固定するためのキャップ仮
同定装e15とからなる気密封止用キャップ半田付装!
!6が使用されていた。
In order to solder a metal cap onto a ceramic substrate in such a hermetic sealing work, conventionally, as shown in FIG. , a cap soldering device for airtight sealing consisting of a temporary cap device e15 for temporarily fixing the metal cap 2 on the ceramic substrate 4 via the solder 3!
! 6 was used.

ここでキャップ仮固定装置5は、加熱器1の伝熱面とよ
り85着するように平坦な伝熱面を有しかつこの伝熱面
にセラミック基板4のリード7等の突起物を逃がすため
の凹溝8が刻設された金属製伝熱板9と、この金jlK
製伝熱板9の後方隅部に設けられた一対の押え別槽10
とから構成される装る。なお、この押え機構10は金属
製伝熱板9上に立設された支柱11の上端にこの支柱1
1を軸とする回転アーム12を取着し、回転アーム12
の先端の貫通孔に、外側にスプリング13を挿嵌し先端
にクランプ14を取着しだロッド15を挿通しノブ16
で固定した構造とされている。
Here, the cap temporary fixing device 5 has a flat heat transfer surface that is in contact with the heat transfer surface of the heater 1, and is used to allow protrusions such as the leads 7 of the ceramic substrate 4 to escape to this heat transfer surface. A metal heat exchanger plate 9 with grooves 8 carved thereon and this gold jlK
A pair of holding tanks 10 provided at the rear corner of the manufactured heat exchanger plate 9
A guise consisting of. Note that this holding mechanism 10 is attached to the upper end of a support 11 erected on a metal heat exchanger plate 9.
A rotating arm 12 with axis 1 is attached, and the rotating arm 12
Insert the spring 13 on the outside into the through hole at the tip of the knob 16 and attach the clamp 14 to the tip.
It is said to have a fixed structure.

従来セラミック基板の半田付は作業は、このような気密
封止用キャップ半田付装M6を用いて、以下に示す手順
で行われていた。
Conventionally, soldering of ceramic substrates has been carried out using such an airtight sealing cap soldering device M6 according to the procedure shown below.

■ 加熱器1に通電して伝熱面を予め半田付けに必要な
所要温度に加熱しておく。
■ Turn on the heater 1 to heat the heat transfer surface to the required temperature required for soldering in advance.

■ 半田付けに必要なMの半田シート3を介在させて金
属製キャップ2とセラミック基板4とを重ね合せ、これ
らを第3図に示すように、キャップ仮固定装置5の金属
製伝熱板9上に載せて押え機構10で上から押える。
■ Overlap the metal cap 2 and the ceramic substrate 4 with the M solder sheet 3 necessary for soldering interposed, and as shown in FIG. Place it on top and press it from above with the presser mechanism 10.

■ 金属製キャップ2とセラミック基板4とを重I′、
工やッF、、え□ヤツア。7□5−やお。
■ Place the metal cap 2 and ceramic substrate 4 together
It's F..., E□. 7□5- Yao.

の上に載せ、半田3を溶解させることにより金属製キャ
ップ2をセラミック基板4上に固定する。
The metal cap 2 is fixed onto the ceramic substrate 4 by placing it on the ceramic substrate 4 and melting the solder 3.

[背景技術の問題点] しかしながら、このような気密封止用キャップ半田付装
置6を用いる従来の方法では、加熱器1からの熱がキャ
ップ仮固定装置5を介して半田に伝達されることになり
、加熱器1とキャップ仮固定装置5、キャップ仮固定装
置3とセラミック基板4とのそれぞれの熱抵抗と、キャ
ップ仮固定装置5の熱容量に起因する熱吸収およびその
表面からの熱放散等による熱損失のために、半田3まで
十分な熱量が伝達されるまでに時間がかかり、作業能率
が悪いという問題があった。
[Problems with Background Art] However, in the conventional method using such an airtight sealing cap soldering device 6, heat from the heater 1 is transferred to the solder via the cap temporary fixing device 5. This is due to the respective thermal resistances of the heater 1 and the cap temporary fixing device 5, the cap temporary fixing device 3 and the ceramic substrate 4, and the heat absorption caused by the heat capacity of the cap temporary fixing device 5 and the heat dissipation from its surface. Due to heat loss, it takes time for a sufficient amount of heat to be transferred to the solder 3, resulting in a problem of poor work efficiency.

また量産品の半田付は作業においては、通常1台の加熱
器1台に対して20〜30台のキャップ仮固定装置を準
備しなければならず、気密封止用キャップ半田付装置全
体のコストが高くなるという問題があった。
In addition, when soldering mass-produced products, it is usually necessary to prepare 20 to 30 temporary cap fixing devices for each heater, which costs the entire cap soldering device for airtight sealing. There was a problem that the amount of

[発明の目的] 本発明はこのような従来の問題を解決するためになされ
たもので、前述の半田付けに要する時間を短縮し、生産
コストの低減を図ることのできる気密封止用キャップ半
田付装置を提供することを目的とする。
[Object of the Invention] The present invention has been made to solve these conventional problems, and provides an airtight sealing cap solder that can shorten the time required for the soldering described above and reduce production costs. The purpose is to provide an attached device.

[発明の概要] すなわち本発明の気密封止用キャップ半田材装置は、熱
源を内蔵し上面に伝熱面を有する加熱器と、上面に加熱
すべきセラミック基板を当接可能な伝熱面を有し前記加
熱器上に載置された熱伝導アダプタと、セラミック基板
と金i製キャップとを半田を介して重ね合せた積属体を
前記セラミック基板の下面の大部分を露出させたまま挟
持して固定するキャップ仮固定治具とを有することを特
徴とする。
[Summary of the Invention] That is, the hermetic sealing cap solder material device of the present invention includes a heater having a built-in heat source and a heat transfer surface on the top surface, and a heat transfer surface on the top surface of which a ceramic substrate to be heated can be brought into contact. A stack of a thermally conductive adapter placed on the heater, a ceramic substrate, and a cap made of gold I laminated together via solder is sandwiched with most of the lower surface of the ceramic substrate exposed. and a temporary cap fixing jig for fixing the cap.

[発明の実施例] 以下本発明を図面に示す実施例について説明する。[Embodiments of the invention] The present invention will be described below with reference to embodiments shown in the drawings.

第1図は本発明の一実施例の分解斜視図である。FIG. 1 is an exploded perspective view of one embodiment of the present invention.

同図に示すように、この実施例の気密封止用キャップ半
田付装置a17は、電気ヒータのような加熱手段を内蔵
し上面に平坦な伝熱面を有する加熱器18と゛、加熱器
18の伝熱面上に固定されたガイド19により水平方向
にずれないように係止された熱伝導アダプタ20と、複
数個のキャップ仮固定治具21とから構成されている。
As shown in the figure, the hermetic sealing cap soldering device a17 of this embodiment includes a heater 18 which has a built-in heating means such as an electric heater and has a flat heat transfer surface on the upper surface. It consists of a heat conduction adapter 20 that is locked so as not to shift in the horizontal direction by a guide 19 fixed on a heat transfer surface, and a plurality of cap temporary fixing jigs 21.

キャップ仮固定治具21は、第4図に示すように、口字
状の腕部と反対方向に突出部を形成した形状の弾性金属
製薄板22の前記腕部および突出部を図の点線部分から
90”同じ側に折曲げた形状を有しており、その先端の
対向する面にはそれぞれ対向する側に突出する支持ポイ
ント23.24が形成されている。
As shown in FIG. 4, the cap temporary fixing jig 21 is a thin elastic metal plate 22 having a shape in which a protrusion is formed in the opposite direction to the arms of the mouth shape. The support points 23 and 24 are formed on opposing surfaces of the tips thereof, respectively, so as to protrude toward the opposing sides.

また、両支持ポイント23.24間の垂直方向の面間距
離は、金属製キャップ25をセラミック基板26上の所
定の位置に半田27を介して重ね合せた時のセラミツク
基板26下面から金属製キャップ251面間での寸法よ
りも若干小さくされている。
In addition, the distance between the two support points 23 and 24 in the vertical direction is as follows: The size is slightly smaller than the dimension between 251 planes.

この寸法差により、セラミック基板26上に金属製キャ
ップ25を重ねたものを上下方向からキャップ仮固定治
具21で挾んだ時に適当な押圧力が生じ、金属製キャッ
プ25の固定保持がなされる。
Due to this dimensional difference, when the metal cap 25 stacked on the ceramic substrate 26 is sandwiched from above and below by the cap temporary fixing jig 21, an appropriate pressing force is generated, and the metal cap 25 is fixedly held. .

前述のユニットをキャップ仮固定治具21で挟持するに
際し、上側の支持ポイント23が金属製キャップ25の
上面に下側の支持ポイント24がセラミック基板26の
下面にそれぞれ当接して、金属製キャップ25とセラミ
ック基板26とが挟持されるが、セラミック基板26の
下面に当接するキャップ仮固定冶具21の腕部の面積は
熱効率の点から全体に対してできるだけ小さくすること
が望ましい。
When the aforementioned unit is held between the cap temporary fixing jig 21, the upper support point 23 is in contact with the upper surface of the metal cap 25, and the lower support point 24 is in contact with the lower surface of the ceramic substrate 26, so that the metal cap 25 and the ceramic substrate 26 are sandwiched, but it is desirable that the area of the arm portion of the cap temporary fixing jig 21 that comes into contact with the lower surface of the ceramic substrate 26 be as small as possible with respect to the whole from the viewpoint of thermal efficiency.

熱伝導アダプタ20は加熱器18の伝熱面上に載せられ
、加熱器18の上面に取管されたガイド19で係止され
ているが、これは加熱器18の上面と充分密接するよう
に平らな下面を有している。
The heat conduction adapter 20 is placed on the heat transfer surface of the heater 18 and is secured by a guide 19 that is piped onto the top surface of the heater 18, but this is held in place so as to be in sufficient contact with the top surface of the heater 18. It has a flat underside.

また、熱伝導アダプタ20の上部の伝熱面は、この上に
航記ユニットをキャップ仮固定治具21で挾んで固定し
たものを載ぜたときに、セラミック〆   基板26の
リード28やキャップ仮固定治具21が接触しないよう
に、中央部より両側が低い段部とされ、全体として階段
状を呈している。
In addition, the heat transfer surface of the upper part of the heat conduction adapter 20 is connected to the lead 28 of the ceramic board 26 and the cap temporary when the navigation unit is placed thereon with the cap temporary fixing jig 21 clamped thereon. In order to prevent the fixing jig 21 from coming into contact with it, both sides are stepped lower than the central part, and the whole has a step-like shape.

このように構成された実施例の気密封止用キャップ半田
付装置17は、次のように使用される。
The hermetic sealing cap soldering device 17 of the embodiment configured as described above is used as follows.

■ 半田付けずべきセラミック基板26にあった形状の
熱伝導アダプタ20を準備し、これを加熱器18の伝熱
面上に載せガイド19で係止した後、加熱器18内の電
熱線に通電して半田付けに必要な温度まで加熱しておく
■ Prepare a heat conduction adapter 20 with a shape that matches the ceramic substrate 26 to be soldered, place it on the heat transfer surface of the heater 18 and lock it with the guide 19, and then energize the heating wire inside the heater 18. Heat it to the temperature required for soldering.

■ 半田27を間に挾んで金属製キャップ25をセラミ
ック基板26の所定の位置に重ね合せ、このユニットの
対向する位置に2個のキャップ仮固定治具21を挟着す
る。
(2) Overlap the metal cap 25 at a predetermined position on the ceramic substrate 26 with the solder 27 in between, and sandwich the two cap temporary fixing jigs 21 at opposing positions of this unit.

■熱伝導アダプタ20の温度が半田付けの所要温度に達
したところで、この上にキャップ仮固定冶具21をセッ
トしたユニットをセラミック基板26を下側にして所定
の位置に載せ、半田27を溶融させて金属製キャップ2
5上に固定する。
■When the temperature of the thermally conductive adapter 20 reaches the required temperature for soldering, place the unit with the cap temporary fixing jig 21 set thereon in a predetermined position with the ceramic substrate 26 facing down, and melt the solder 27. metal cap 2
5. Fix it on top.

このように実施例の気密封止用キャップ半田寸装置17
によれば、加熱器18からの熱が速やかに半田27に伝
達されるので、従来からの気密封止用キャップ半田付装
置を用いた方法に比べて金属製キャップ25の半田付け
に要する時間は約1/10に短縮され、約10倍の能率
で作業を行なうことができる。
In this way, the hermetic sealing cap solder size device 17 of the embodiment
According to , since the heat from the heater 18 is quickly transferred to the solder 27, the time required to solder the metal cap 25 is shorter than that using a conventional hermetic sealing cap soldering device. The time is reduced to about 1/10, and the work can be done about 10 times more efficiently.

また、1台の加熱器18について熱伝導アダプタ201
台とキャップ仮固定冶具21を20〜30紺用意するこ
とになるが簡単な構造のキャップ仮固定冶具21のコス
トは極めて安価であるので、従来の気密封止用キャップ
半田付装置に比べて約1/20〜1/30に装置コスト
をダウンすることができる。
In addition, for one heater 18, a heat conduction adapter 201
Although 20 to 30 bases and cap temporary fixing jigs 21 are prepared, the simple structure of the cap temporary fixing jigs 21 is extremely low cost, so compared to conventional cap soldering equipment for airtight sealing, the cost is about 20 to 30. The device cost can be reduced by 1/20 to 1/30.

なお、本発明の気密封止用キャップ半田付装置における
キャップ仮固定治具21は、以上に示した構造のものに
限定されない。
Note that the cap temporary fixing jig 21 in the hermetic sealing cap soldering device of the present invention is not limited to the structure shown above.

すなわち、第4図に示すように、長矩形の金属製薄板の
両端部を同一方向に折曲げて2個の支持ポイントを形成
した形状のものや、弾性金属線を第5図に示すような形
状に屈曲さけたものを用いても同様な効果を上げること
ができる。
In other words, as shown in Fig. 4, there is a rectangular thin metal plate with both ends bent in the same direction to form two support points, or an elastic metal wire as shown in Fig. 5. A similar effect can be achieved by using a curved shape.

更に以上の実施例では半田シートを用いた例について説
明したが、セラミック暴板上の金属製キャップの接合部
に予め予備半田を形成しておくようにしてもよい。
Further, in the above embodiments, an example using a solder sheet has been described, but preliminary solder may be formed in advance at the joint portion of the metal cap on the ceramic plate.

[発明の効果1 以上の実施例から明らかなように本発明の気密封止用キ
ャップ半田付装置によれば、気密封止用金属製キャップ
のセラミック基板への半11付けを極めて短時間に行な
うことができ、ざらに装置コストも非常に安くなるとい
う利点がある。
[Effect of the invention 1] As is clear from the above embodiments, according to the hermetic sealing cap soldering device of the present invention, half-bonding of the hermetic sealing metal cap to the ceramic substrate can be carried out in an extremely short time. This has the advantage that the equipment cost is also very low.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の分解斜視図、第2図は従来
の気密封止用ギヤツブ半田付装置の分解斜視図、第3図
は従来の気密封止用キャップ半1日付装置に金属製キャ
ップおよびセラミック基板を装着した状態を示す斜視図
、第4図および第5図はそれぞれ本発明の他の実施例に
使用するキャップ仮固定治具の別の例を示す斜視図であ
る。 1.18・・・加熱器 2.25・・・金属製キャップ 3.27・・・半 田 4.26・・・セラミック基板 5・・・・・・・・・・・・キャップ仮固定装置6.1
7・・・気密封止用キャップ 半田付装置 9・・・・・・・・・・・・金属製平板10・・・・・
・・・・・・・押え機構代理人弁理士   須 山 佐
 − 第1図 第2図 第3図 第5図    第6図 手 続 補 正 書(方式) 昭和60年10月7日 特許庁長官 殿             ■へ1、事
件の表示  特願昭59〜100271号2、発明の名
称 気密封止用キャップ半田付装置 3、補正をする者 事件との関係・特許出願人 神奈川県用崎市幸区塩用町72番地 (307)株式会社 東芝 4、代  理  人     〒 101東京都千代田
区神田多町2丁目1番地 10頁14行の「第4図および第5図」を「第4図は本
発明の一実施例のキャップ仮固定冶具を形成するのに用
いられる弾性金属製薄板の平面図、第5図および第6図
」と補正する。 以   上
Fig. 1 is an exploded perspective view of an embodiment of the present invention, Fig. 2 is an exploded perspective view of a conventional hermetic sealing gear knob soldering device, and Fig. 3 is a conventional hermetic sealing cap half-day soldering device. A perspective view showing a state in which a metal cap and a ceramic substrate are attached, and FIGS. 4 and 5 are perspective views showing other examples of temporary cap fixing jigs used in other embodiments of the present invention, respectively. 1.18... Heater 2.25... Metal cap 3.27... Solder 4.26... Ceramic board 5... Cap temporary fixing device 6.1
7... Airtight sealing cap soldering device 9... Metal flat plate 10...
・・・・・・Patent attorney for presser mechanism Satoshi Suyama - Figure 1 Figure 2 Figure 3 Figure 5 Figure 6 Proceedings Amendment (Method) October 7, 1985 Commissioner of the Patent Office 1. Indication of the case: Japanese Patent Application No. 59-100271 2. Title of the invention: Air-tight sealing cap soldering device 3. Person making the amendment: Relationship with the case. Patent applicant: Shio, Saiwai-ku, Yozaki City, Kanagawa Prefecture. 72 Yomachi (307) Toshiba Corporation 4, Agent Address: 2-1 Kanda Tamachi, Chiyoda-ku, Tokyo 101, page 10, line 14, ``Figure 4 and Figure 5'' has been replaced with ``Figure 4 represents the present invention.'' 5 and 6 are plan views of a thin elastic metal plate used to form a temporary cap fixing jig according to an embodiment of the present invention. that's all

Claims (1)

【特許請求の範囲】[Claims] (1)熱源を内蔵し上面に伝熱面を有する加熱器と、上
面に加熱すべきセラミック基板を当接可能な伝熱面を有
し前記加熱器上に載置された熱伝導アダプタと、セラミ
ック基板と金属製キャップとを半田を介して重ね合せた
積層体を前記セラミック基板の下面の大部分を露出させ
たまま挟持して固定するキャップ仮固定治具とを有する
ことを特徴とする気密封止用キャップ半田付装置。
(1) a heater having a built-in heat source and a heat transfer surface on the top surface; a heat conduction adapter placed on the heater and having a heat transfer surface on the top surface to which a ceramic substrate to be heated can be brought into contact; A cap temporary fixing jig for clamping and fixing a laminate in which a ceramic substrate and a metal cap are laminated via solder while leaving most of the lower surface of the ceramic substrate exposed. Sealing cap soldering device.
JP10027184A 1984-05-18 1984-05-18 Soldering device of cap for hermetic seal Pending JPS6169151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10027184A JPS6169151A (en) 1984-05-18 1984-05-18 Soldering device of cap for hermetic seal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10027184A JPS6169151A (en) 1984-05-18 1984-05-18 Soldering device of cap for hermetic seal

Publications (1)

Publication Number Publication Date
JPS6169151A true JPS6169151A (en) 1986-04-09

Family

ID=14269539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10027184A Pending JPS6169151A (en) 1984-05-18 1984-05-18 Soldering device of cap for hermetic seal

Country Status (1)

Country Link
JP (1) JPS6169151A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0454190A2 (en) * 1986-09-22 1991-10-30 Nippondenso Co., Ltd. Semiconductor accelerometer
JP2011077182A (en) * 2009-09-29 2011-04-14 Citizen Electronics Co Ltd Method for manufacturing light-emitting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0454190A2 (en) * 1986-09-22 1991-10-30 Nippondenso Co., Ltd. Semiconductor accelerometer
EP0454190A3 (en) * 1986-09-22 1992-01-08 Nippondenso Co., Ltd. Semiconductor accelerometer
JP2011077182A (en) * 2009-09-29 2011-04-14 Citizen Electronics Co Ltd Method for manufacturing light-emitting device

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