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JPS61254286A - Small-sized apparatus for generating pure steam or high purity distilled water - Google Patents

Small-sized apparatus for generating pure steam or high purity distilled water

Info

Publication number
JPS61254286A
JPS61254286A JP9474685A JP9474685A JPS61254286A JP S61254286 A JPS61254286 A JP S61254286A JP 9474685 A JP9474685 A JP 9474685A JP 9474685 A JP9474685 A JP 9474685A JP S61254286 A JPS61254286 A JP S61254286A
Authority
JP
Japan
Prior art keywords
pure steam
water
steam
high purity
distilled water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9474685A
Other languages
Japanese (ja)
Other versions
JPS6354435B2 (en
Inventor
Seiichi Tan
誠一 丹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP9474685A priority Critical patent/JPS61254286A/en
Publication of JPS61254286A publication Critical patent/JPS61254286A/en
Publication of JPS6354435B2 publication Critical patent/JPS6354435B2/ja
Granted legal-status Critical Current

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  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

PURPOSE:To supply high purity distilled water wtihin a short time, by providing two stages or more of cylindrical evaporation boilers each having a vertical heater housed therein and storing high purity water in a connected state. CONSTITUTION:The deionized water 18 supplied from a water feed pipe 10 is heated by the electric heater 16a of a first state evaporation boiler 12 to be flowed into a second stage evaporation boiler 14 and further heated by the electric heater 16b of the second stage evaporation boiler 14 and evaporated to generate pure steam 32. This pure steam 32 enters a gas-liquid separator 34 to remove liquid droplets and passes through a steam outlet pipe 36 to be supplied to facilities using the pure steam 32. The pressure of the pure steam 32 is held to predetermined value by indivisually performing the ON/OFF or proportional control of the electric heaters 16a, 16b by a pressure regulator 35a. By this method, a container can be miniaturized and it is unnecessary to undergo inspection for strength as a pressure vessel.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は研究所等の比較的小規模な施設に好適な純粋蒸
気又は高純度蒸溜水の小型製造装置に関するものである
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a small-sized production apparatus for pure steam or high-purity distilled water suitable for relatively small-scale facilities such as research institutes.

(従来技術及びその問題点) 従来のこの種の装置では、比較的大型の蒸発缶に例えば
脱イオン水を貯留してヒーターで加熱し、脱イオン水を
蒸発させるようになっている。
(Prior art and its problems) In this type of conventional apparatus, for example, deionized water is stored in a relatively large evaporator and heated with a heater to evaporate the deionized water.

しかしながら、斯かる従来の装置では大型の蒸発缶内に
人足の高圧蒸気(2Kg/ cd程度)を貯留する必要
があり、蒸発缶の安全性を維持するために蒸発缶を頑丈
に形成し、更に圧力容器としての検定を受けなければな
らない。
However, in such conventional equipment, it is necessary to store high-pressure steam (approximately 2 kg/cd) in a large evaporator, and in order to maintain the safety of the evaporator, the evaporator must be made sturdy. Furthermore, it must be certified as a pressure vessel.

また大量の脱イオン水をヒーターで加熱して蒸発させる
のに長時間を要し、比較的少量の純粋蒸気又はBI11
1度蒸溜水を短時間の間に必要とする例えば研究所等の
小規模施設には不向きであるという問題もある。
Also, it takes a long time to evaporate a large amount of deionized water by heating it with a heater, and a relatively small amount of pure steam or BI11
Another problem is that it is unsuitable for small-scale facilities such as research institutes that require once-distilled water for a short period of time.

(発明の目的) 本発明は、比較的少量の純粋蒸気または高純度蒸溜水を
短時間で供給することができる純粋蒸気又は高純度蒸溜
水の小型製造装置を提供することを目的としている。
(Objective of the Invention) An object of the present invention is to provide a small-sized production apparatus for pure steam or high-purity distilled water that can supply a relatively small amount of pure steam or high-purity distilled water in a short time.

(発明の構成) (1)技術的手段 本発明は、内部に縦形のヒーターを収容し高純度水を貯
留する筒状の蒸発缶を、少なくとも2段以上連結して設
け、発生する純粋蒸気の状態を一定に維持するように前
記ヒーターを個別に制御する制御手段を設けたことを特
徴とする純粋蒸気又は高純度蒸溜水の小型製造装置であ
る。
(Structure of the Invention) (1) Technical Means The present invention provides at least two or more connected cylindrical evaporators that house vertical heaters and store high-purity water, and generate pure steam. This is a small-sized apparatus for producing pure steam or high-purity distilled water, characterized in that a control means is provided for individually controlling the heaters so as to maintain a constant state.

(2)作用 複数の比較的小型の蒸発缶を連結して設けたので、短時
間で蒸気が発生する。また制御手段で複数のヒーターを
個別に制御する。
(2) Function Since a plurality of relatively small evaporators are connected and provided, steam is generated in a short time. Further, the plurality of heaters are individually controlled by the control means.

(実施例) 第1図を参照して本発明の第1実施例、すなわち純粋蒸
気の小型製造装置を説明する。
(Example) A first example of the present invention, that is, a small-sized pure steam production apparatus will be described with reference to FIG.

10は給水管であり、給水管10から原料水すなわち例
えば脱イオン水等の高純度水が供給されるようになって
いる。給水管10の途中には電動弁11a1調整弁11
b1逆止弁11Cが順次に介装されている。
Reference numeral 10 denotes a water supply pipe, through which raw water, ie, high purity water such as deionized water, is supplied. An electric valve 11a1 adjustment valve 11 is installed in the middle of the water supply pipe 10.
b1 check valves 11C are sequentially installed.

給水管10は第1段蒸発缶12の下端部に接続されてい
る。第1段蒸発缶12は上端部が屈曲した略円筒状をな
し、第2段蒸発缶14の側面に連続している。第1段蒸
発缶12の下端から縦型の電気ヒーター16aが挿入さ
れ、この第1段蒸発缶12は電気ヒーター16aの周囲
に比較的少量の脱イオン水18を貯留づる容積に設定さ
れている。
The water supply pipe 10 is connected to the lower end of the first stage evaporator 12 . The first stage evaporator 12 has a substantially cylindrical shape with a bent upper end, and is continuous with the side surface of the second stage evaporator 14 . A vertical electric heater 16a is inserted from the lower end of the first stage evaporator 12, and the first stage evaporator 12 is set to have a volume that stores a relatively small amount of deionized water 18 around the electric heater 16a. .

第2段蒸発缶14も同様に下端から電気ヒーター16b
が挿入され、比較的少量の脱イオン水18を貯留する容
積に設定されている。なお電気ヒーター16a、16b
は例えば6KW程度の容徂である。
Similarly, the electric heater 16b of the second stage evaporator 14 is heated from the lower end.
is inserted, and the volume is set to store a relatively small amount of deionized water 18. In addition, electric heaters 16a and 16b
For example, the capacity is about 6KW.

第2段蒸発缶14の上部と第1段蒸発缶12の中間部の
間はバイパス管20で連通されており、脱イオン水18
の温度差による自然対流で脱イオン水18を矢印へ方向
に流通させるようになっている。バイパス管20の途中
には枝管21aが設けられている。また第2段蒸発缶1
4の底部と第1段蒸発缶12の中間部との間はバイパス
管22で連通されており、バイパス管22の自然対流作
用で部分Xに液溜りが発生しないように配慮されている
A bypass pipe 20 communicates between the upper part of the second stage evaporator 14 and the middle part of the first stage evaporator 12.
Natural convection due to the temperature difference causes deionized water 18 to flow in the direction of the arrow. A branch pipe 21a is provided in the middle of the bypass pipe 20. In addition, the second stage evaporator 1
A bypass pipe 22 communicates between the bottom of the evaporator 4 and the middle part of the first stage evaporator 12, and the natural convection of the bypass pipe 22 is designed to prevent liquid pooling from occurring in the portion X.

第1段蒸発缶12の底部にはブロー配管24の一端が接
続されており、ブロー配管24の他端は開口して滞留し
ている脱イオン水18の一部を外部にブローするように
なっている。ブロー配管24の途中にはブロー弁25a
、逆止弁25bが順次に介装されている。逆止弁25b
より下流のブロー配管24とバイパス管20の間には補
助ブ【]−配管26が設けられており、補助ブロー配管
26には逆止弁27a1調整弁27b1ブロー弁27C
が順次に介装されている。
One end of a blow piping 24 is connected to the bottom of the first stage evaporator 12, and the other end of the blow piping 24 is opened to blow a part of the accumulated deionized water 18 to the outside. ing. A blow valve 25a is installed in the middle of the blow pipe 24.
, check valves 25b are successively installed. Check valve 25b
An auxiliary blow pipe 26 is provided between the downstream blow pipe 24 and the bypass pipe 20, and the auxiliary blow pipe 26 includes a check valve 27a1, an adjustment valve 27b1, a blow valve 27C
are interposed in sequence.

バイパス管2oの途中には第2段蒸発缶14の水位をハ
イレベルHとローレベルLの闇に調整するレベルスイッ
チ28(制御手段)が設けられている。レベルスイッチ
28の出力部29aからは、電動弁11aに開閉制御信
号29bが伝達され、またブロー弁27Cに開閉制御信
号29cが伝達されており、電動弁11aが開弁してい
る時にはブロー弁27cを開弁じて給水管10から供給
される脱イオン水18の給水管10%程度を補助ブロー
配管26からブローして脱イオン水18の不純物が濃縮
されることを防止する構造である。
A level switch 28 (control means) for adjusting the water level of the second stage evaporator 14 between a high level H and a low level L is provided in the middle of the bypass pipe 2o. From the output part 29a of the level switch 28, an opening/closing control signal 29b is transmitted to the electric valve 11a, and an opening/closing control signal 29c is transmitted to the blow valve 27C. When the electric valve 11a is open, the blow valve 27c is transmitted. This structure prevents impurities in the deionized water 18 from concentrating by opening the valve and blowing about 10% of the deionized water 18 supplied from the water supply pipe 10 from the auxiliary blow pipe 26.

また出力部29aからはヒーター制御信号29dが伝達
され、出力部29aで電気ヒーター16a、16bを制
御している。
Further, a heater control signal 29d is transmitted from the output section 29a, and the output section 29a controls the electric heaters 16a and 16b.

第2段蒸発缶14の頂部には蒸気管30の一端が接続さ
れており、蒸気管30の他端は気液分離器34に連通し
ている。第2段蒸発缶14で発生した純粋蒸気32は蒸
気管30を通って気液分離器34に供給されるようにな
っている。気液分離器34で液滴が除去された純粋蒸気
は蒸気出口管36から純粋蒸気を使用する施設に供給さ
れる構造である。
One end of a steam pipe 30 is connected to the top of the second stage evaporator 14 , and the other end of the steam pipe 30 communicates with a gas-liquid separator 34 . Pure steam 32 generated in the second stage evaporator 14 is supplied to a gas-liquid separator 34 through a steam pipe 30. The pure steam from which liquid droplets have been removed in the gas-liquid separator 34 is supplied from a steam outlet pipe 36 to facilities that use the pure steam.

気液分離器34には圧力調整器35a(制御手段)、温
度計35bが設けられており、圧力調整器35aからの
ヒーター・制御信号35cで電気ヒーター16a、16
bを個別にON、OFF又は比例制御して蒸気出口管3
6の純粋蒸気32の圧力を例えば1.5Kf/−に制御
するようになっている。
The gas-liquid separator 34 is equipped with a pressure regulator 35a (control means) and a thermometer 35b, and the electric heaters 16a, 16 are controlled by a heater/control signal 35c from the pressure regulator 35a.
b individually ON, OFF or proportionally controlled to control the steam outlet pipe 3.
The pressure of the pure steam 32 of No. 6 is controlled to, for example, 1.5 Kf/-.

次に作用を説明する。給水管10から供給される脱イオ
ン水18は、まず第1段蒸発缶12の電気ヒーター16
aで加熱された後に第2段蒸発缶14に流入し、第2段
蒸発缶14の電気ヒーター16bで更に加熱されて蒸発
し、純粋蒸気32になる。この純粋蒸気32は気液分離
器34で液滴が除去されてから蒸気出口管36を通って
純粋蒸気32を使用する施設に供給される。第1段蒸発
缶12、第2段蒸発缶14に貯留されている脱イオン水
18は比較的少量であるので、低温の脱イオン水18を
供給した場合にも短時間で脱イオン水18を沸騰させて
純粋蒸気32を発生させる。
Next, the effect will be explained. Deionized water 18 supplied from the water supply pipe 10 is first supplied to the electric heater 16 of the first stage evaporator 12.
After being heated by a, it flows into the second stage evaporator 14, is further heated by the electric heater 16b of the second stage evaporator 14, and evaporates, becoming pure steam 32. This pure steam 32 is subjected to droplet removal in a gas-liquid separator 34 and is then supplied through a steam outlet pipe 36 to a facility that uses the pure steam 32. Since the deionized water 18 stored in the first-stage evaporator 12 and the second-stage evaporator 14 is relatively small, even when low-temperature deionized water 18 is supplied, the deionized water 18 can be regenerated in a short time. Boil to generate pure steam 32.

このとき、純粋蒸気32の圧力は圧力調整器35aで電
気ヒーター16a、16bを個別にON。
At this time, the pressure of the pure steam 32 is adjusted by turning on the electric heaters 16a and 16b individually using the pressure regulator 35a.

OFF又は比例制御することにより、所定の圧力すなわ
ち1.5Kjl/7程度に維持される。
By turning it off or proportionally controlling it, it is maintained at a predetermined pressure, that is, about 1.5 Kjl/7.

また第2段蒸発缶14の水位はレベルスイッチ28でハ
イレベルHとローレベルLの間に維持され、しかも出力
部29aによる給水管10の電動弁11aおよび補助ブ
ロー配管26のブロー弁27Gの開閉制御で、第2段蒸
発缶14、第1段蒸発缶12に貯留されている脱イオン
水18の不純物が濃縮されることが防止される。
The water level in the second stage evaporator 14 is maintained between high level H and low level L by the level switch 28, and the output section 29a opens and closes the electric valve 11a of the water supply pipe 10 and the blow valve 27G of the auxiliary blow pipe 26. The control prevents impurities in the deionized water 18 stored in the second-stage evaporator 14 and the first-stage evaporator 12 from concentrating.

更にバイパス管20、バイパス管22等の自然対流作用
により、第1段蒸発缶12、第2段蒸発缶14の内部、
特に部分X等に液溜りが発生する恐れがなくなり、脱イ
オン水18の温度が均一になる。
Furthermore, due to the natural convection action of the bypass pipe 20, bypass pipe 22, etc., the inside of the first stage evaporator 12, the second stage evaporator 14,
In particular, there is no possibility of liquid pooling occurring in the portion X, etc., and the temperature of the deionized water 18 becomes uniform.

次に第2図を参照して本発明の第2実施例である高純度
蒸溜水の製造装置を説明する。なお、第2図において、
グ1図と同一符号を付した部分は同一あるいは相当部分
を示す。
Next, referring to FIG. 2, an apparatus for producing high-purity distilled water, which is a second embodiment of the present invention, will be described. In addition, in Figure 2,
Parts with the same reference numerals as in Figure 1 indicate the same or equivalent parts.

第2図中で蒸気出口管36の下流側端部はコンデンサー
40に接続されている。コンデンサー40には冷却管4
2が収容されており、冷却水人口43aから冷却し出口
43bに冷却水を流通させるようになっている。
In FIG. 2, the downstream end of the steam outlet pipe 36 is connected to a condenser 40. The condenser 40 has a cooling pipe 4
2 is accommodated, and the cooling water is cooled from a cooling water intake 43a and is made to flow through an outlet 43b.

コンデンサー40の下端には蒸溜水出口管44が設けら
れており、蒸溜水出口管44の端部から^純度蒸溜水が
外部に供給される構造である。
A distilled water outlet pipe 44 is provided at the lower end of the condenser 40, and pure distilled water is supplied to the outside from the end of the distilled water outlet pipe 44.

更に第3図〜第5図は、第2図の装置を実際に製品化し
た場合の外観を示している。50は計器類、52は操作
盤、54は流量計である。
Further, FIGS. 3 to 5 show the external appearance of the device shown in FIG. 2 when it is actually manufactured into a product. 50 is instruments, 52 is an operation panel, and 54 is a flow meter.

(発明の効果) 以上説明したように本発明による純粋蒸気又は高純度蒸
溜水の小型製造装置は、内部に縦形のヒーターを収容し
高純度水を貯留する筒状の蒸発缶を、少なくとも2段以
上連結して設け、発生する純粋蒸気の状態を一定に維持
するように前記ヒーターを個別に制御する制御手段を設
けたので、次の効果を奏する。
(Effects of the Invention) As explained above, the small-sized production apparatus for pure steam or high-purity distilled water according to the present invention has at least two stages of a cylindrical evaporator that houses a vertical heater and stores high-purity water. Since the heaters are connected and provided with a control means for individually controlling the heaters so as to maintain a constant state of the generated pure steam, the following effects are achieved.

まず、第1段蒸発缶12、第2段蒸発缶14が比較的小
型であるので、同じ板厚の鋼板を使用した大型の蒸発缶
と比較して第1段蒸発缶12、第2段蒸発缶14の強度
が向上し、容積が小さいため圧力容器としての強度検定
を受ける必要もなくなる。
First, since the first stage evaporator 12 and the second stage evaporator 14 are relatively small, the first stage evaporator 12 and the second stage evaporator The strength of the can 14 is improved, and since the volume is small, there is no need to undergo strength verification as a pressure vessel.

しかも第1段蒸発缶12、第2段蒸発缶14に貯留され
ている脱イオン水18は比較的少量であるので、低温の
脱イオン水18を供給した場合にも短時間で脱イオン水
18を沸騰させて純粋蒸気32を発生させることができ
、短時間で少社の純粋蒸気32を必要とする研究所等の
小規模施設に好適である。
Moreover, since the amount of deionized water 18 stored in the first stage evaporator 12 and the second stage evaporator 14 is relatively small, even when low-temperature deionized water 18 is supplied, the deionized water 18 can be used in a short time. can be boiled to generate pure steam 32, and is suitable for small-scale facilities such as research institutes that require pure steam 32 in a short time.

また圧力調整器35aからの蒸気出口管36Cで電気ヒ
ーター 16a、16bを個別に制御するので、蒸気出
口管36から供給される純粋蒸気32の圧力を例えば1
.5Nff/ci程度の適正な圧力に維持することがで
きる。
Furthermore, since the electric heaters 16a and 16b are individually controlled by the steam outlet pipe 36C from the pressure regulator 35a, the pressure of the pure steam 32 supplied from the steam outlet pipe 36 can be adjusted to 1, for example.
.. It is possible to maintain an appropriate pressure of about 5 Nff/ci.

(別の実施例) (1) 本発明は以上の両実施例に限らず、例えば蒸気
管30の途中に多重効用缶のように熱交換器を設け、効
用缶方式として装置全体の熱効率を大幅に向上させるこ
ともできる。
(Another embodiment) (1) The present invention is not limited to the above-mentioned embodiments. For example, a heat exchanger such as a multi-effect can is provided in the middle of the steam pipe 30, and the thermal efficiency of the entire device is greatly increased as an effect can system. It can also be improved.

(2)蒸発缶は第1段蒸発缶12、第2段蒸発缶14の
ように2段の場合に限らず、少なくとも2段以上の複数
段であればよい。
(2) The evaporator is not limited to two stages, such as the first stage evaporator 12 and the second stage evaporator 14, but may be any number of stages, including at least two or more stages.

【図面の簡単な説明】[Brief explanation of the drawing]

Claims (1)

【特許請求の範囲】[Claims] 内部に縦形のヒーターを収容し高純度水を貯留する筒状
の蒸発缶を、少なくとも2段以上連結して設け、発生す
る純粋蒸気の状態を一定に維持するように前記ヒーター
を個別に制御する制御手段を設けたことを特徴とする純
粋蒸気又は高純度蒸溜水の小型製造装置。
At least two or more stages of cylindrical evaporators containing vertical heaters and storing high-purity water are provided in a connected manner, and the heaters are individually controlled to maintain a constant state of the pure steam generated. A small-sized production device for pure steam or high-purity distilled water, characterized in that it is equipped with a control means.
JP9474685A 1985-05-01 1985-05-01 Small-sized apparatus for generating pure steam or high purity distilled water Granted JPS61254286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9474685A JPS61254286A (en) 1985-05-01 1985-05-01 Small-sized apparatus for generating pure steam or high purity distilled water

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9474685A JPS61254286A (en) 1985-05-01 1985-05-01 Small-sized apparatus for generating pure steam or high purity distilled water

Publications (2)

Publication Number Publication Date
JPS61254286A true JPS61254286A (en) 1986-11-12
JPS6354435B2 JPS6354435B2 (en) 1988-10-27

Family

ID=14118687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9474685A Granted JPS61254286A (en) 1985-05-01 1985-05-01 Small-sized apparatus for generating pure steam or high purity distilled water

Country Status (1)

Country Link
JP (1) JPS61254286A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02112326U (en) * 1989-02-20 1990-09-07
FR2714958A1 (en) * 1994-01-11 1995-07-13 Reic Sterile steam generator to produce ultra-pure water

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5731922U (en) * 1980-07-31 1982-02-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5731922U (en) * 1980-07-31 1982-02-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02112326U (en) * 1989-02-20 1990-09-07
FR2714958A1 (en) * 1994-01-11 1995-07-13 Reic Sterile steam generator to produce ultra-pure water

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JPS6354435B2 (en) 1988-10-27

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