JPH02112326U - - Google Patents
Info
- Publication number
- JPH02112326U JPH02112326U JP1918789U JP1918789U JPH02112326U JP H02112326 U JPH02112326 U JP H02112326U JP 1918789 U JP1918789 U JP 1918789U JP 1918789 U JP1918789 U JP 1918789U JP H02112326 U JPH02112326 U JP H02112326U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- sealed chamber
- liquid
- extended
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例の構成図、第２図
および第３図は従来例の構成図である。
１０……原料タンク、１３……原料取出用配管
、１５……密封室、１６……循環路、１７……フ
イン部、１８……加熱ヒータ、１９，２５……配
管、２０……気液分離器、２６……処理室、２８
……送戻用配管。
FIG. 1 is a block diagram of one embodiment of this invention, and FIGS. 2 and 3 are block diagrams of a conventional example. 10... Raw material tank, 13... Piping for extracting raw material, 15... Sealed chamber, 16... Circulation path, 17... Fin section, 18... Heater, 19, 25... Piping, 20... Gas liquid Separator, 26...processing chamber, 28
...Return piping.
Claims (1)
してその先端を密封室の下端に連結し、液状加熱
媒体が循環する循環路を上記密封室の外部から密
封室内へ延ばし、この循環路における上記外部の
部分に加熱手段を設けるとともに、上記密封室内
の部分に一定間隔でフイン部を形成し、上記密封
室の上端から気化原料搬送用配管を延設してその
先端を気液分離器に連結し、この気液分離器から
気体原料取出用配管および液体原料送戻用配管を
延設し、上記液体原料送戻用配管の先端を上記液
体原料タンクに連結したことを特徴とする蒸発器
。 A liquid raw material supply pipe is extended from the liquid raw material tank and its tip is connected to the lower end of the sealed chamber, and a circulation path in which the liquid heating medium circulates is extended from outside the sealed chamber into the sealed chamber, and the above-mentioned A heating means is provided in the external part, fin parts are formed at regular intervals in the part inside the sealed chamber, and a pipe for conveying the vaporized raw material is extended from the upper end of the sealed chamber, and its tip is connected to the gas-liquid separator. An evaporator characterized in that a gas raw material extraction pipe and a liquid raw material return pipe are extended from the gas-liquid separator, and the tip of the liquid raw material return pipe is connected to the liquid raw material tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989019187U JPH0725224Y2 (en) | 1989-02-20 | 1989-02-20 | Evaporative gas quantitative extraction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989019187U JPH0725224Y2 (en) | 1989-02-20 | 1989-02-20 | Evaporative gas quantitative extraction device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02112326U true JPH02112326U (en) | 1990-09-07 |
| JPH0725224Y2 JPH0725224Y2 (en) | 1995-06-07 |
Family
ID=31234479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989019187U Expired - Lifetime JPH0725224Y2 (en) | 1989-02-20 | 1989-02-20 | Evaporative gas quantitative extraction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725224Y2 (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264047A (en) * | 1975-11-21 | 1977-05-27 | Hitachi Zosen Corp | Method of heat exchange |
| JPS5645748U (en) * | 1979-09-18 | 1981-04-24 | ||
| JPS6044702A (en) * | 1983-08-19 | 1985-03-09 | 新菱冷熱工業株式会社 | Method and device for generating steam by surface evaporation |
| JPS61254286A (en) * | 1985-05-01 | 1986-11-12 | Seiichi Tan | Small-sized apparatus for generating pure steam or high purity distilled water |
-
1989
- 1989-02-20 JP JP1989019187U patent/JPH0725224Y2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264047A (en) * | 1975-11-21 | 1977-05-27 | Hitachi Zosen Corp | Method of heat exchange |
| JPS5645748U (en) * | 1979-09-18 | 1981-04-24 | ||
| JPS6044702A (en) * | 1983-08-19 | 1985-03-09 | 新菱冷熱工業株式会社 | Method and device for generating steam by surface evaporation |
| JPS61254286A (en) * | 1985-05-01 | 1986-11-12 | Seiichi Tan | Small-sized apparatus for generating pure steam or high purity distilled water |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0725224Y2 (en) | 1995-06-07 |
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