JPS61230605A - Production of magnetic head - Google Patents
Production of magnetic headInfo
- Publication number
- JPS61230605A JPS61230605A JP7086585A JP7086585A JPS61230605A JP S61230605 A JPS61230605 A JP S61230605A JP 7086585 A JP7086585 A JP 7086585A JP 7086585 A JP7086585 A JP 7086585A JP S61230605 A JPS61230605 A JP S61230605A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- track width
- magnetic head
- substrate
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000758 substrate Substances 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 6
- 230000004907 flux Effects 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 238000000034 method Methods 0.000 description 11
- 239000000696 magnetic material Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910000859 α-Fe Inorganic materials 0.000 description 4
- 238000000992 sputter etching Methods 0.000 description 3
- 238000003079 width control Methods 0.000 description 3
- 239000011162 core material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/1875—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers
- G11B5/1877—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers including at least one magnetic thin film
- G11B5/1878—"Composite" pole pieces, i.e. poles composed in some parts of magnetic particles and in some other parts of magnetic metal layers including at least one magnetic thin film disposed immediately adjacent to the transducing gap, e.g. "Metal-In-Gap" structure
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は磁気ヘッドに係り、特にＶＴＲに好適な磁気ヘ
ッド及びその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a magnetic head, and particularly to a magnetic head suitable for a VTR and a method for manufacturing the same.
近年高密度磁気記録に対応するため、高飽和磁束密度を
有する金属材料を磁気ヘッドのコア材に用いるものがあ
る。In recent years, in order to cope with high-density magnetic recording, some magnetic heads have used a metal material having a high saturation magnetic flux density as a core material.
金属材料をコア材に用いた磁気ヘッドの従来例として特
開昭５８−１５５５１３号公報の記載を用い、以下に説
明する。A conventional example of a magnetic head using a metal material as a core material will be described below using the description in Japanese Patent Application Laid-open No. 155513/1983.
１）第２図において工程（イ）に示す様に高透磁率フェ
ライト等の基板１上にトラック幅より狭い突起を残して
トラック幅規制用の溝加工２を行なう。1) As shown in step (a) in FIG. 2, a groove 2 for regulating the track width is formed on a substrate 1 made of high magnetic permeability ferrite or the like, leaving a protrusion narrower than the track width.
Ｉ）工程（ロ）は前記工程げ）で示した基板上にフェラ
イトより飽和磁束密度の高い金属磁性膜３を被着させる
工程である。金属磁性体膜としてハＣｏ −Ｆｅ −Ｂ
等のメタル−メタロイド合金や、Ｃｏ −Ｍｏ −Ｚ
ｒ等のメタル−メタル合金が用いられ、通常スパッタリ
ング法を用いて形成される。I) Step (b) is a step of depositing a metal magnetic film 3 having a higher saturation magnetic flux density than ferrite on the substrate shown in step (g) above. Co-Fe-B as a metal magnetic film
metal-metalloid alloys such as Co-Mo-Z
A metal-metal alloy such as R is used and is usually formed using a sputtering method.
１１１）工程（ハ）は残った溝部をガラス等の非磁性材
料４で充填する工程である。111) Step (c) is a step of filling the remaining groove portion with a non-magnetic material 4 such as glass.
ｌｖ） 工程に）は、前工程（ハ）の不要な非磁性材４
を取り除き、作動ギヤツブ面となる金属磁性膜面を研摩
する工程である。lv) In the process), unnecessary non-magnetic material 4 of the previous process (c)
In this process, the metal magnetic film surface, which will become the working gear surface, is polished.
■）工程（ホ）は、前工程までのブロックを一対用意し
少なくとも一方に巻線用溝加工を施こしギャップスペー
サ材をギャップ面に形成する工程である。(2) Step (e) is a step in which a pair of blocks from the previous step are prepared, at least one of them is processed with a groove for winding, and a gap spacer material is formed on the gap surface.
ｖｌ） 工程（へ）は一対のブロックを接着し一体化
する工程である。この工程の後チップカット工程を行な
い磁気ヘッドを形成する。vl) Process (f) is a process of gluing and integrating a pair of blocks. After this step, a chip cutting step is performed to form a magnetic head.
従来のヘッド構造及び製造方法では、工程（ハ）の研摩
工程においてトラック幅が決定されていた。即ち、工程
（ハ）に於て研摩される金属磁性膜面がギヤノブ面を形
成し、この幅がトラック幅相当となる。In the conventional head structure and manufacturing method, the track width was determined in the polishing step (c). That is, the metal magnetic film surface polished in step (c) forms the gear knob surface, and the width thereof corresponds to the track width.
しかしこの方法では、基板のそりがあること、トラック
幅をモニターしながら研摩できない、等研摩の制御をす
るのが難しく、高精度のトラック幅制御が難しいという
問題点がある。However, this method has problems such as warpage of the substrate, difficulty in controlling polishing such as the inability to polish while monitoring the track width, and difficulty in highly accurate track width control.
特に記録密度の高密度化に伴ない、トラック幅が縮小さ
れるほど、この点が大きな問題点となっている。In particular, as the track width becomes smaller as the recording density becomes higher, this point becomes a bigger problem.
〔発明の目的〕
本発明は、従来の磁気ヘッドのトラック幅制御が蝋かし
いという欠点を解決し、高精度のトランク幅制御を可能
とし、トランク１嘔の安定したヘッドを歩留りよく製造
するヘッド構造及び製造方法を稈供するものである。[Object of the Invention] The present invention solves the drawback that the track width control of conventional magnetic heads is slow, and provides a head structure that enables highly accurate trunk width control and that produces stable heads with a single trunk at a high yield. and the manufacturing method.
〔発明の概要１
上記目的を達成するために本発明では、金属磁性膜面を
ギャップ面研摩した後、最終的なトラック幅加工として
イオンミリングによる加工を用いトラック幅を精度よく
形成しようとするものである。[Summary of the Invention 1 In order to achieve the above object, the present invention attempts to accurately form the track width by polishing the gap surface of the metal magnetic film surface and then using ion milling as the final track width processing. It is.
以下本発明の実施例を第１図により説明する。 Embodiments of the present invention will be described below with reference to FIG.
１）第１図の工程（イ）に示す様に高透磁率フェライト
基板１上にＷ型の溝加工２を行なう。更にフェライトよ
り飽和磁束密度の高いＣｏ系非晶質磁性膜３をスパッタ
リング法により形成する。1) As shown in step (a) of FIG. 1, a W-shaped groove 2 is formed on a high magnetic permeability ferrite substrate 1. Furthermore, a Co-based amorphous magnetic film 3 having a higher saturation magnetic flux density than ferrite is formed by sputtering.
ｉ） 工程（→では、ギャップ面を形成すべき凸部に
トラック幅相当のパターン材５を被着させる。i) Step (→) A pattern material 5 corresponding to the track width is applied to the convex portion where the gap surface is to be formed.
１１１）前工程（ロ）でパターン材を形成した部分を除
、 ３ 。111) Excluding the part where the pattern material was formed in the previous step (b), 3.
（イオンミリング等により）、磁性膜の一部を除去する
。（工程）Ａ）
１ｖ）°パターン材を除去し、溝部をガラス等の非磁性
材４を用い充填する。（工程二）
■）不要な非磁性材４を除去し、作動ギャップ面となる
金属磁性膜面６を研摩する。（工程ホ）
ｖｌ） 前工程までの一対のブ屹ツクを接着し一体化
し、チップカットを行ない、磁気ヘッドを形成する。図
ハは摺動面から見た図である。A portion of the magnetic film is removed (by ion milling, etc.). (Step) A) 1v)° The pattern material is removed and the groove is filled with a non-magnetic material 4 such as glass. (Step 2) (2) Remove the unnecessary non-magnetic material 4 and polish the metal magnetic film surface 6 which will become the working gap surface. (Process E) vl) A pair of blocks up to the previous process are glued and integrated, and a chip is cut to form a magnetic head. Figure C is a view seen from the sliding surface.
本実施例によれば、ギャップ面形成のための研摩工程以
前に、トラック幅を□規制すべくイオンミリングにより
トラック幅加工が行なわれている。このための基板のそ
りや、研摩の程度によらず一様のトラック幅が得られる
。According to this embodiment, before the polishing step for forming the gap surface, track width processing is performed by ion milling to regulate the track width. For this purpose, a uniform track width can be obtained regardless of the warpage of the substrate or the degree of polishing.
本発明によれば、トラック幅の制御を精度よくしかも容
易に行な、うことかできるため、トラック幅精度の向上
を図ることができる。更に、製造された磁気ヘッドのト
ラック幅はほぼ一様・ ４ ・
となるため歩留り向上の効果がある。According to the present invention, since the track width can be controlled accurately and easily, it is possible to improve the track width accuracy. Furthermore, since the track width of the manufactured magnetic head is approximately uniform, the yield is improved.
第１図は本発明の一実施例による工程図、第２図は従来
の工程図である。
１・・・基板１
２・・・トラック幅規制用溝
３・・・磁性膜FIG. 1 is a process diagram according to an embodiment of the present invention, and FIG. 2 is a conventional process diagram. 1...Substrate 1 2...Track width regulating groove 3...Magnetic film
Claims (1)
該基板上に高飽和磁束密度を有する金属磁性膜を形成し
該凸部の頂上部を研摩しギャップ面を形成した一対のコ
アブロックをギャップスペーサを介し接合してなる磁気
ヘッドにおいて、該磁性膜の凸部の先端部分をあらかじ
めトラック幅相当に加工しておくことを特徴とする磁気
ヘッドの製造方法。1. Forming an inverted V-shaped convex shape on a non-magnetic or magnetic substrate,
In a magnetic head formed by joining a pair of core blocks with a gap spacer formed by forming a metal magnetic film having a high saturation magnetic flux density on the substrate and polishing the tops of the convex portions through a gap spacer, the magnetic film A method of manufacturing a magnetic head, characterized in that the tip of the convex portion is processed in advance to have a width equivalent to the track width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7086585A JPS61230605A (en) | 1985-04-05 | 1985-04-05 | Production of magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7086585A JPS61230605A (en) | 1985-04-05 | 1985-04-05 | Production of magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61230605A true JPS61230605A (en) | 1986-10-14 |
Family
ID=13443878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7086585A Pending JPS61230605A (en) | 1985-04-05 | 1985-04-05 | Production of magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61230605A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0448033A2 (en) * | 1990-03-19 | 1991-09-25 | Sharp Kabushiki Kaisha | Method of manufacturing a magnetic head |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54103334A (en) * | 1978-01-31 | 1979-08-14 | Sanyo Electric Co Ltd | Effective track width specifying method of magnetic head |
| JPS59207415A (en) * | 1983-05-11 | 1984-11-24 | Hitachi Ltd | Compound magnetic head and its preparation |
-
1985
- 1985-04-05 JP JP7086585A patent/JPS61230605A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54103334A (en) * | 1978-01-31 | 1979-08-14 | Sanyo Electric Co Ltd | Effective track width specifying method of magnetic head |
| JPS59207415A (en) * | 1983-05-11 | 1984-11-24 | Hitachi Ltd | Compound magnetic head and its preparation |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0448033A2 (en) * | 1990-03-19 | 1991-09-25 | Sharp Kabushiki Kaisha | Method of manufacturing a magnetic head |
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