JPS61213653A - Device for analyzing information of transmitted and scattered light image by simultaneous observation - Google Patents

Abstract

PURPOSE:To enable to observe a sample as a whole by higher grade information by obtaining scattered light and transmitted light as an image, comparing the different information on the same place in the sample and observing them simultaneously. CONSTITUTION:The second illuminating optical system consisting of a light source 10, a lens 11, a BPF 12 and a mirror 13 etc. is added to enable to irradiate light that transmits a sample 7 from below the sample 7. Light emitted from the light source 10 of transmitted light irradiated on the sample 7 is irradiated on the sample 7 through the lens 11, BPF 12 and mirror 13. The transmitted light, similar to scattered light, passes through an image forming optical system 8 and forms an image on a photosensitive material 9. Accordingly, as information by transmitted light and information by scattered light can be obtained simply on the same place of the sample 7, higher grade information on the sample 7 can be obtained by comparing them or observing them simultaneously.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to an apparatus for analyzing minute structures or compositions within an object using light scattering and light transmitted through the object.

[Prior Art] Generally, a microscope is used when attempting to observe, for example, a crystalline object in minute detail. As such a microscope,
There are ordinary optical microscopes, polarizing microscopes, phase contrast microscopes, electron microscopes, and even scanning electron microscopes. The basic operation of such a microscope is to irradiate a sample observation surface with light or an electron beam, and detect the relative hue or difference in brightness of each part of the observation surface as a pattern. That is, the objective is to examine relative differences in light or electron beam transmittance, reflectance, or secondary electron radiation efficiency due to differences in structure and composition on the sample observation surface. Therefore, it can be said to be a simple method for comprehensively understanding the observation aspect.

On the other hand, when attempting to observe patterns such as the arrangement of specific elements or lattice defects in a certain cross-section within a crystal sample, conventional microscopes are used to observe other elements (for example, the arrangement of elements or lattice defects at other positions in the thickness direction). etc.) is also observed as a superimposed image, and due to the influence of the irradiation angle of the light or electron beam, the orientation of the crystal, etc., equal information may not be obtained from the same type of elements, or the same type of information may not be obtained from different types of elements. This also made accurate observation and understanding difficult.

Figure 2 shows a light scattering image information analysis device (Japanese Patent Application Laid-Open No. 54-1979) that was previously proposed by the present inventors in order to eliminate such drawbacks.
-109488)) is shown.

This apparatus irradiates a sample with light that can pass through the sample, and uses scattered light generated within the sample by the irradiated light as an information source for observation. In the figure, 1 is a laser light source, 2 is a mirror 3 and an optical system 4.
5 is a moving rail, 6 is a sample mounting table, and 7 is a sample. Reference numeral 8 denotes an observation imaging optical system that defines an observation optical axis substantially perpendicular to the beam optical axis. Reference numeral 9 denotes an information acquisition means for converting the scattered light generated inside the sample 7 into information for observation. It may be a conversion element, an image sensor, or the like.

In the figure, a beam L from a light source 1 has its optical path determined by a mirror 3, the polarization direction is also determined if necessary, is narrowed down by an optical system 4, and enters a sample 7 from the side.

This incident beam L is the first test! It passes through I7 and is scattered in the process. If the sample 7 is a crystalline material, this scattered light will be affected by the effects of the crystal structure in the beam-transmitting portion. For example, as a result of refractive index fluctuations, the presence of colloidal particles, lattice defects, non-uniform orientation of the crystal, etc., it exhibits scattering that is not observed in homogeneous crystals. Therefore, by observing the scattered light using the observation optical system, the crystal structure within the sample 7 can be known.

As an observation method, the photosensitive material 9 may be exposed to light as shown in the figure, or it may be photoelectrically converted and electrically processed using a photoelectric detector or an image sensor (not shown), and then displayed as a pattern on a display device.

In other words, with this light scattering image information analysis device, it is possible to observe a cross section of the crystal structure of a sample that cannot be observed with a transmission microscope or the like. However, since this light scattering image information analysis device observes the cross section of the sample using a dark field image, the field of view is dark and furthermore, only a portion (a certain cross section) of the sample can be observed. In other words, it is not suitable for comprehensively understanding the entire sample.

In addition, it is easy to use a normal optical microscope to understand the whole picture, but by observing the whole thing with these microscopes,
Furthermore, the method of observing a certain cross section of the sample with a light scattering image information analyzer and later superimposing the information is
This method has the drawbacks of being troublesome and having poor overlay accuracy.

[Object of the Invention] In view of the above-mentioned problems with the conventional type, the present invention provides a light scattering image information analysis device that obtains scattered light as image information and also obtains transmitted light as image information. The aim is to be able to comprehensively observe a sample with more advanced information by comparing these different pieces of information or observing them simultaneously.

[Summary of the Invention 1 In order to achieve the above object, the light scattering uniformity information analysis device according to the present invention irradiates the sample with light that passes through the sample on the observation optical axis of the sample on the side opposite to the observation system. have the means to do so.

[Example] The present invention will be explained below based on Examples.

FIG. 1 shows the configuration of a transmitted image simultaneous observation light scattering image information analysis device according to an embodiment of the present invention. This apparatus includes a light source 10, a lens 11, a bandpass filter 12, and a mirror so that the light scattering image information analysis apparatus shown in FIG. A second irradiation optical system consisting of 13 etc. is added. In Figure 1, the transmitted light irradiating the sample 1
The light emitted from 11G passes through lens 11, bandpass filter 12, and mirror 13, and is irradiated onto sample 7.

The transmitted light, like the scattered light, passes through the imaging optical system 8 and forms an image on the photosensitive material 9. As described above, transmitted light can be observed. Instead of the photosensitive material 9, a photoelectric detector, an imaging device, or the like may be used to electrically observe the scattered light and transmitted light.

Scattered light may be observed as described for the apparatus shown in FIG. 2 above.

In this device, by simultaneously irradiating lights m1 and 10,
The transmission image and scattering image of the sample can be superimposed and observed.

In addition, if you change the wavelength (color) of the light irradiated onto the sample for scattering image observation and the light irradiated onto the sample for transmission image observation, you can observe the transmitted image and scattering image separately while superimposing them. can do.

Furthermore, by irradiating only the light source 10 for transmitted light observation, it can be used in the same way as a normal transmission type microscope.

Further, by irradiating only the light WA1 for scattering light observation, it can be used as a light scattering image information analysis device.

In other words, it is possible to easily obtain information from transmitted light and information from scattered light for the same location on the sample, so by comparing them or observing them at the same time, more information about the sample can be obtained. .

[Effects of the Invention] Like the foundation, according to the present invention, the light scattering image information analysis device is equipped with a transmitted light irradiation means for observing the transmitted light of the sample. Image information based on scattered light and image information based on transmitted light can be obtained and can be superimposed to create i*. Furthermore, by comparing these two types of information for the same location within the sample or observing them simultaneously, the sample can be observed comprehensively.

[Brief explanation of drawings]

FIG. 1 is a configuration diagram of a light scattering image information analysis device for simultaneous observation of transmitted images according to an embodiment of the present invention, and FIG. 2 is a configuration diagram of a conventional light scattering image information analysis device. 1.10: light source, 7: sample, 8: observation optical system, 9: information acquisition means (photosensitive material).

Claims (1)

[Claims] It has means for irradiating the object to be tested with a light beam that passes through the object, and means for observing scattered light or fluorescence within the object by the light beam from a direction intersecting the optical axis of the light beam. A light scattering image information analysis device, characterized in that a means for irradiating the object to be inspected with light that passes through the object to be inspected is provided on the observation optical axis on the opposite side of the observation system. Scattered image information analysis device.