JPS61213652A - Light scattering image information analyzing device - Google Patents

Abstract

PURPOSE:To eliminate a scanning of luminous flux or an object to be tested and enable observation at the spot and direct observation of desired section without image processing by converging luminous flux into slitlike form, and illuminating the object to be tested and transmitting the luminous flux simultane ously over the whole face of desired section. CONSTITUTION:The device is provided with a laser light source 1, a mirror 2, an optical system 3, a sample 4, an observation optical system 5 and a photosensitive material 6. The light beam from the light source 1 is determined the optical path by the mirror 2 and is made incident on the optical system 3. The incident beam is made incident horizontally on the side of the sample 4 by the optical system 3 as a line beam L. Consequently, the beam L transmits the sample 4, and scattered during the process. Out of the scattered light, light nearly perpendicular to the optical axis of the beam L enters the observation optical system 5 and becomes observable. Thus, by making the luminous flux a line beam, the whole of desired section of the sample 4 can be illuminated simultaneously, and scanning of the beam L, sample 4, material 6 etc. becomes unnecessary, and the scattered light can be observed at the spot and directly observed over the whole face simultaneously.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to an apparatus for analyzing minute structures or compositions within an object using light scattering or fluorescence.

[Prior Art] Generally, a microscope is used when attempting to observe, for example, a crystalline object in minute detail. As such a microscope,
There are ordinary optical microscopes, polarizing microscopes, phase contrast microscopes, electron microscopes, and even scanning electron microscopes. The basic operation of such a microscope is to irradiate a sample observation surface with light or an electron beam, and detect the relative hue or difference in brightness of each part of the observation surface as a pattern. That is, the objective is to examine relative differences in light or electron beam transmittance, reflectance, or secondary electron radiation efficiency due to differences in structure and composition on the sample observation surface. Therefore, it can be said to be a simple method for comprehensively understanding the observation aspect.

However, when attempting to observe patterns such as the arrangement of specific elements or lattice defects in a certain cross-section within a crystalline sample, conventional microscopes also overlap information from other elements (e.g. element arrangement, lattice defects, etc.). In addition, due to the effects of the irradiation angle of the light or electron beam, the orientation of the crystal, etc., equal information may not be obtained from the same type of elements, or the same type of information may be obtained from different types of elements. Accurate observation and understanding were difficult.

Furthermore, transmission type microscopes require the specimen to be made into thin sections, and reflection type microscopes require the observation surface to be exposed on the surface, so they are not necessarily the best.

FIG. 3 shows a light scattering image information analysis device (specially WIal
154-10948811 (Fl) (7) Configuration e.

This device irradiates a sample with light that can pass through the sample, and observes scattered light or fluorescent light generated within the sample by the irradiated light.

It is intended as a source of information. In the figure, 11 is a laser light source, 12 is a moving table on which a mirror 13 and an optical system 14 are fixed, 15 is a moving rail, 16 is a sample mounting table, and 17
is the sample. Reference numeral 18 denotes an observation optical system that defines an observation optical axis substantially perpendicular to the beam optical axis. Reference numeral 19 is an information acquisition means for converting the scattered light generated inside the sample 11 into information for observation. It may be a conversion element, an image sensor, or the like.

In the figure, the beam L from the light source 11 is reflected by the mirror 13.
The optical path is determined by the optical system 14, the polarization direction is also determined if necessary, the light is narrowed down by the optical system 14, and the light enters the sample 11 from the side. This incident beam L passes through the sample 17 and is scattered in the process. If the sample 17 is a crystal, this scattered light will be affected by the crystal structure in the beam-transmitting portion. For example, as a result of refractive index fluctuations, the presence of colloidal particles, lattice defects, non-uniform orientation of the crystal, etc., it exhibits scattering that is not observed in homogeneous crystals. therefore,
By observing the scattered light with an observation optical system, sample 1
You can learn about the crystal structure within 7.

As an observation method, the photosensitive material 19 may be exposed to light as shown in the figure, or it may be photoelectrically converted and electrically processed using a photoelectric detector or an image sensor (not shown), and then displayed as a pattern on a display device.

Here, in order to obtain information on the cut plane inside the sample 11 as an image, the beam L must be scanned in the horizontal direction by a movable stage 12 that holds the mirror 13 and the optical system 14 and is movable in the direction of the arrow. Must be. Furthermore, in this case, it is desirable to arrange an elongated slit in the same direction as the beam just in front of the surface of the photosensitive material, and to move the slit in synchronization with the scanning of the beam to record.

Furthermore, even if the beam L itself is not scanned, it is necessary to scan the beam L relative to the sample 17 by moving the sample mounting table 16 in the direction of arrow B in the figure. In this case, the photosensitive material 19 must be moved horizontally, for example in the direction of arrow C in the figure, in synchronization with the movement of the sample stage 16 while taking into account the image magnification.

As mentioned above, in conventional light scattering image information analysis devices, when observing a predetermined surface of a test object, it is necessary to scan the light beam or scan the test object, and the device is not equipped with a scanning mechanism for this purpose. I had to use a GJ. When observing scattered light using a photoelectric detector, it is essential to perform image processing in synchronization with these scans, and in-situ or direct observation is not possible.

[Object of the invention] In view of the problems in the conventional system described above, the object of the present invention is to
In a light scattering image information analysis device that transmits a beam of light to a desired cross section of a test object and observes the desired cross section based on scattered light or fluorescence inside the test object caused by this light beam, the light beam is formed into a slit shape. Based on the concept of irradiating the object to be inspected as a focused line beam and simultaneously transmitting the beam to the entire surface of the desired cross section, there is no need to scan the beam or the object to be inspected, and furthermore, the desired cross section can be illuminated on the spot without image processing. The purpose is to enable observation and direct observation.

[Example] Hereinafter, the present invention will be described in detail based on Examples.

FIG. 1 shows a light scattering image information analysis device according to an embodiment of the present invention. 1 is a laser light source, 2 is a mirror, 3 is an optical system, and 4 is a sample to be observed. 5 is an observation optical system, and 6 is a photosensitive material.

FIG. 2 shows the internal structure of the optical system 3. 31 is a cylindrical lens, and 32 is a spherical lens.

The present invention will be explained in detail with reference to FIGS. 1 and 2. FIG. In FIG. 1, a beam from a light source 1 enters an optical system 3 with an optical path determined by a mirror 2 and a polarization direction determined as necessary. As shown in Fig. 2, the optical system 3 is composed of a cylindrical lens and a spherical lens, and the incident beam is focused by these lenses into a slit shape in a direction parallel to the cross section to be observed, and is sent to the sample 4 as a line beam L. incident horizontally from the left side of the drawing. As a result, the line beam L passes through the sample 4, but is scattered in the process, and among the scattered light, light that is approximately perpendicular to the optical axis of the beam L in the upper part of the drawing enters the observation optical system 5 and can be observed. . In this way, by using a line beam as the light beam, it becomes possible to simultaneously irradiate the entire desired cross section of the sample 4 with one light beam, and there is no need to scan the sample 4, photosensitive material 6, etc. with a laser beam. , it is possible to simultaneously observe the scattered light from the sample over the entire surface, and perform in-situ observation and direct W*.

Further, in the above embodiment, only 90° scattering has been described, but scattering images can be obtained at other angles as well. The scattering intensity of light is larger in forward scattering than in 90° scattering, except for scatterers whose particle size is sufficiently smaller than the wavelength. therefore,
A light scattering image information analysis device using forward scattering is also considered. FIG. 4 is a layout diagram when observing a plate-like defect by forward scattering. 41 is a cylindrical lens, and 42 is a spherical lens.

The present invention attempts to obtain information inside an object by observing scattered light. Visible light is effective for observing defects in living organisms and transparent crystal bodies, but it can also be used as infrared light to observe the inside of semiconductor crystals. In this case, there are problems in that semiconductor crystals absorb a large amount of light due to conduction electrons, and infrared light reduces the sensitivity of the image pickup tube. If carried out, defects within the semiconductor crystal can be observed. In the above description, we have described the case where scattered light having the same wavelength as the irradiated light is observed, but according to the apparatus of the present invention, the crystal alignment, lattice defects, etc. of the object can be detected based on the fluorescence generated from the object. Of course, it is also possible to observe.

[Effects of the Invention] As described above, according to the present invention, since the light beam irradiating the sample is focused in a slit shape, there is no need to scan the light beam or the object to be examined, or to perform rough image processing. It is possible to conduct in-situ and direct observations.

[Brief explanation of the drawing]

Fig. 1 is a block diagram of a light scattering image information analysis device according to an embodiment of the present invention, Fig. 2 is a block diagram of an optical system that focuses light from a light source into a line, and Fig. 3 is a block diagram of a conventional light scattering image information analysis device. FIG. 4 is a configuration diagram of the image information analysis device, and is a layout diagram when observing a plate-like defect by forward scattering. 1.11: Laser light source, 3, 14: Optical system, L Niline beam, 31.41 Nijilintric lens, 32.42: Spherical lens, 4.17: Sample, 5.18:
[1 Sensor optical system, 6.19: Information acquisition means (photosensitive material or imaging tube).

Claims (1)

[Scope of Claims] 1. An irradiation optical system that irradiates a test object with a slit-shaped light beam that passes through the test object; A light scattering image information analysis device comprising an observation optical system for observing from a direction intersecting a plane including an optical axis of a light beam and a longitudinal axis of the slit. 2. The light scattering image information analysis device according to claim 1, wherein the irradiation optical system includes a focusing optical system constituted by a cylindrical lens and a spherical lens.