JPS61204547A - Defect detecting device - Google Patents

Abstract

PURPOSE:To easily classify defects by arranging a detecting means which detects flank scattered light leaking out from a flank of a body to be detects by directions as to light scattered by a defect in the body to be inspected. CONSTITUTION:A laser light source 11, a condenser lens 12 for obtaining a specific beam diameter, laser light 13, and a laser scanning mirror 14 for scanning a specific range of the body 18 to be inspected are provided, and an oscillating mirror or rotary polygon mirror is used as the mirror 14. Many photosensors 15 are arranged as photodetectors around the body 18 to be inspected to detect flank scattered light 17 from the defect 16 in the object body 18 by directions, and processes respective signals together with data on a place where the laser light 13 strikes to classify the kind of the defect. For example, when there is a thin and long defect 20 as shown in a figure, the light laser 13 striking on it tends to be large in directions of light beams 21 and 22 and small in directions of flank scattered light beams 23 and 24. Thus, the kind of the defect is discriminated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a defect detection device for an object, and more particularly to a defect detection device for classifying the types of defects.

Transparent glass objects generally have defects such as scratches, bubbles, and foreign matter during manufacture. This defect weakens the strength and impairs the aesthetic appearance, so all products must be inspected during manufacturing to remove those that are judged to be defective.

This type of inspection was generally done by visual inspection, but
Improving inspection efficiency.

Automation of inspection is required for uniformity, improvement of n degree, etc. Therefore, a defect detection device as shown in FIG. 3 has conventionally been used.

In the figure, 1 is a laser light source, 2 is a condenser lens, 3 is a laser beam,
4 is a laser scanning mirror, and 5 is an optical sensor.

6 is an optical fiber as a light concentrator, and 7 is a defect.

8 indicates an output signal. First, a laser beam 3 from a laser light source 1 is scanned over a transparent object 9 by a laser scanning mirror 4, and the side scattered light generated when it hits a defect 7 is collected by an optical fiber 6, and converted into an electrical signal by an optical sensor 5. The presence or absence of the defect 7 was inspected using this electrical signal.

[Problems to be solved]

In the above-mentioned conventional defect detection apparatus, the side-scattered light generated by the defect 7 is collected by the optical fiber 6 and converted into an electrical signal by the optical sensor 5, and this electrical signal is sometimes inaccurate.

[Means for solving problems]

SUMMARY OF THE INVENTION The present invention aims to provide a defect detection device that can receive scattered light in different directions, detect the scattering pattern, and classify defects more finely.

To this end, the present invention provides a defect detection device Kf? which irradiates a transparent object to be inspected with a beam of light and detects and classifies defects from the scattered light. means for holding a transparent object to be inspected in a predetermined position; means for irradiating the object with a beam of light; The present invention provides a defect detection device characterized in that it includes a detection means arranged to detect side-scattered light exiting from a side surface of an object in each direction.

【Example〕

Embodiments of the present invention will be described below with reference to FIGS. 1 and 2.

In FIG. 1, 11 is a laser light source, 12 is a condensing lens for obtaining a predetermined beam diameter, 13 is a laser beam, and 14 is a laser scanning mirror for scanning a predetermined range of the object to be inspected, and is a vibrating mirror or a rotating mirror. Use a multi-tiii mirror. Reference numeral 15 denotes optical sensors as photodetectors, which are arranged in large numbers around the object to be inspected 18, and receive the side scattered light 17 from the defect 16 in the object to be inspected in different directions, and receive each signal separately. The type of the defect is classified by KM processing along with the data of the location where the optical laser 13 hit when the defect occurred. Note that 19 is its output signal. As an example of defect classification, in the case of a long and narrow defect 20 as shown in FIG.
There is a slight tendency in the direction of . Therefore, the type of defect can be determined.

〔Effect of the invention〕

As explained above, the present invention provides a defect detection device that irradiates a transparent object to be inspected with a beam of light and detects and classifies defects from the scattered light, which holds the transparent object to be inspected at a predetermined position. a means for irradiating the object to be inspected with a beam-shaped light beam; and a means for irradiating the object to be inspected with a beam-like light beam; and a means for irradiating the object to be inspected with a beam of light; Since the defect detection apparatus is characterized in that it is equipped with a detection means arranged to detect defects, there is an effect that quality control on an inspection line or the like is improved since defects can be easily classified.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram showing a defect detection device according to an embodiment of the present invention, FIG. 3112 is an explanatory diagram showing an example of side scattering of defects, and FIG. 3 is an explanatory diagram showing a conventional defect detection device. It is. 11... Ray f light source 12... Converging lens 1
3... Laser beam 14 River laser scanning mirror 15...
Optical sensor 16... Defect 17... Side scattered light 18... Inspected object 19... Output signal

Claims (1)

[Claims] A defect detection device that irradiates a beam of light onto a transparent object to be inspected and detects and classifies defects from the scattered light. a means for irradiating a light beam of a shape, and a detection means arranged to detect side scattered light exiting from the side surface of the object to be inspected in each direction among the light scattered by defects existing in the object to be inspected. A defect detection device characterized by comprising: