JPS6031651U

JPS6031651U - Micro displacement cutting device

Info

Publication number: JPS6031651U
Application number: JP1983122236U
Authority: JP
Inventors: 也寸志新山; 渡辺　寔
Original assignee: 株式会社日立製作所
Priority date: 1983-08-08
Filing date: 1983-08-08
Publication date: 1985-03-04

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は従来技術のうち機械的な微動送り機構を示す概
略図、第２図は熱膨張を利用した微動送り機構を示す概
略図、第３図は熱膨張微動送り機構における加熱時間と
熱膨張による伸長の関係図、第４図は圧電素子の基本動
作を示す概略図、第５図は圧電素子を応用したアクチュ
エータの作動原理を示した概略図、第６図は圧電素子応
用微動送り機構を示した概略図、第７図は切削時のカン
チレバーアームの動作を示した概略図、第８図は切削機
器の任意方向への移動が可能な切削装置を構成する変位
機構の概略図である。１・・・試料、２・・・切削機器、３・・・カンチレバ
ーアーム、４・・・シツクネスコントロール、５・・・
軸アーム、６・・・ピボットＡ、７・・・ピボツｔ−Ｂ
、８・・・フレーム、９・・・リードスクリュー、１０
・・・ヒーター、１１・・・アクチュエータ、１２・・
・ガイド、２０・・・電磁石、２１・・・圧電素子。メＹ２０Figure 1 is a schematic diagram showing a mechanical fine-feeding mechanism of the prior art, Figure 2 is a schematic diagram showing a fine-feeding mechanism using thermal expansion, and Figure 3 is a schematic diagram showing heating time and heat in the thermal expansion fine-feeding mechanism. A diagram showing the relationship between elongation due to expansion, Figure 4 is a schematic diagram showing the basic operation of a piezoelectric element, Figure 5 is a schematic diagram showing the operating principle of an actuator using a piezoelectric element, and Figure 6 is a fine movement mechanism using a piezoelectric element. FIG. 7 is a schematic diagram showing the operation of the cantilever arm during cutting, and FIG. 8 is a schematic diagram of a displacement mechanism that constitutes a cutting device that can move the cutting device in any direction. . 1... Sample, 2... Cutting equipment, 3... Cantilever arm, 4... Thickness control, 5...
Axis arm, 6... Pivot A, 7... Pivot t-B
, 8... Frame, 9... Lead screw, 10
...Heater, 11...Actuator, 12...
- Guide, 20...electromagnet, 21...piezoelectric element. Main Y20

Claims

[Claims for Utility Model Registration] 1. A thin plate-shaped piezoelectric element that exhibits a certain amount of minute displacement in one direction when a certain voltage is applied is mounted one or more pieces in a stacked manner using a certain support as a guide. Electromagnets are fixed to both ends of the piezoelectric element in a movable state within a range that allows them to easily attract and release the support that serves as a guide, and by applying voltage to each electromagnet and piezoelectric element in a fixed order, the electromagnets can be moved in the guiding direction. In an actuator configured to be able to move minutely relative to the object, the actuator is incorporated into the displacement mechanism of a cantilever arm with a cutting device attached to the tip, and the arm is moved to cut a fixed sample, or vice versa. A micro-displacement cutting device that is capable of cutting micro-specimens at arbitrary positions and thicknesses by incorporating an actuator into the feed mechanism of a cantilever arm to which a cutting device is fixed and a sample is attached. 2. In claim 1 of the utility model registration, the guide of the actuator is defined as X? 'It A micro-displacement cutting device characterized in that the cutting device or the cantilever arm on which the sample is attached can be moved in any direction by combining them in the Z-axis direction or in a curved shape. 3. The micro-displacement cutting device according to claim 1 of the utility model registration, characterized in that the piezoelectric element is made of an inorganic material and a functional polymer material. 4. A micro-displacement cutting device as set forth in claim 1 of the utility model registration claim, characterized in that the cutting device is a device applying a laser or an electron beam. 5. A micro-displacement cutting device as set forth in claim 1 of the utility model registration, characterized in that a structure incorporating a piezoelectric element is used instead of an electromagnet to attract and release the device.