CN117914179A - Flexible amplifying mechanism and parallel micro-nano positioning platform - Google Patents
Flexible amplifying mechanism and parallel micro-nano positioning platform Download PDFInfo
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- CN117914179A CN117914179A CN202410035787.9A CN202410035787A CN117914179A CN 117914179 A CN117914179 A CN 117914179A CN 202410035787 A CN202410035787 A CN 202410035787A CN 117914179 A CN117914179 A CN 117914179A
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- 238000003199 nucleic acid amplification method Methods 0.000 claims description 37
- 230000003071 parasitic effect Effects 0.000 description 13
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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Abstract
The invention relates to a flexible amplifying mechanism and a parallel micro-nano positioning platform, which comprises an input beam, wherein the middle part of the input beam is connected with the output end of piezoelectric ceramics, the two ends of the input beam are connected with connecting rods through flexible hinges, the two connecting rods are symmetrically arranged relative to the piezoelectric ceramics, the connecting rods are connected with output blocks through flexible hinges to form a triangular displacement amplifying mechanism, a curved beam is arranged between the two output blocks, the piezoelectric ceramics passes through the curved beam and then is fixed with a base, the output blocks are connected with the input end of a lever amplifying mechanism, the output end of the lever amplifying mechanism is connected with the input end of a half-bridge amplifying mechanism, the two lever amplifying mechanisms and the two half-bridge amplifying mechanisms are symmetrically arranged relative to the piezoelectric ceramics, and the output beam is connected between the two bridge amplifying mechanisms.
Description
Technical Field
The invention relates to the technical field of micro-nano precision manufacturing, in particular to a flexible amplifying mechanism and a parallel micro-nano positioning platform.
Background
The statements herein merely provide background information related to the present disclosure and may not necessarily constitute prior art.
In recent years, micro-nano positioning technology plays an increasingly important role in the fields of semiconductor manufacturing, micro-electromechanical systems, nano lithography, biomedical and measurement and other precise engineering.
The current micro-nano positioner adopts an actuator comprising a voice coil motor, an electrostatic actuator, a shape memory actuator, a piezoelectric ceramic actuator and the like. The piezoelectric material has the advantages of large driving force, quick response, high resolution, small volume, electromagnetic interference resistance and the like, and is widely applied to flexible mechanisms. But the piezoelectric material has smaller output displacement and can not meet the requirement of large-area wiener manufacturing. The design of a compact micro-nano positioning mechanism with a large amplification ratio is one of the important researches at present.
Because the serial multi-degree-of-freedom micro-nano positioning platform has the defects of large volume occupation, serial assembly error and the like, the multi-degree-of-freedom parallel micro-nano positioning system becomes one of the important directions of current research. The parallel micro-nano positioning system realizes system positioning by means of deformation of materials, parasitic displacement in a vertical movement direction can be generated in the process, and the positioning precision of the system is affected. At present, most structures use more flexible hinges for decoupling treatment, and the flexible hinges are connected with a driving mechanism in series, so that the whole size of the mechanism is increased. Secondly, because the traditional flexible mechanism generates larger motion inertia when moving in parallel, the driving mechanism generates serious heat, the service life of the positioning system is shortened, and the driving mechanism has poorer stability and other problems
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide a flexible amplifying mechanism and a parallel micro-nano positioning platform, which are used for eliminating parasitic flexible hinges, reducing the overall volume of the platform and prolonging the service life.
In order to achieve the above object, the present invention is realized by the following technical scheme:
in a first aspect, an embodiment of the present invention provides a flexible amplifying mechanism, including an input beam, where a middle portion of the input beam is connected with an output end of a piezoelectric ceramic, two ends of the input beam are connected with connecting rods through flexible hinges, the two connecting rods are symmetrically disposed with respect to the piezoelectric ceramic, the connecting rods are connected with an output block through flexible hinges to form a triangle displacement amplifying mechanism, a curved beam is disposed between the two output blocks, the piezoelectric ceramic passes through the curved beam and is fixed with a base, the output block is connected with an input end of a lever amplifying mechanism, an output end of the lever amplifying mechanism is connected with an input end of a half-bridge amplifying mechanism, the two lever amplifying mechanisms and the two half-bridge amplifying mechanisms are symmetrically disposed with respect to the piezoelectric ceramic, and the output beam is connected between the two bridge amplifying mechanisms.
Optionally, a conical groove is formed in the center of the input beam, a ball head is arranged at the output end of the piezoelectric ceramic, and the ball head is matched with the conical groove to realize connection between the input beam and the output end of the piezoelectric ceramic.
Optionally, the lever amplification mechanism includes the body of rod, and the input of body of rod is connected with the output piece through flexible hinge, and the output of body of rod is connected with half bridge type amplification mechanism, and the fulcrum position of body of rod is connected with the base through flexible hinge.
Optionally, the flexible hinge between the fulcrum of the rod body and the base is an arc hinge, and the hinge between the input end of the rod body and the output block is an arc hinge.
Optionally, the half-bridge type amplifying mechanism comprises a rigid rod, one end of the rigid rod is connected with the output end of the lever amplifying mechanism through an input flexible hinge, the other end of the rigid rod is connected with the end of the output beam through an output flexible hinge, and the input flexible hinge and the output flexible hinge are staggered.
Optionally, the input flexible hinge and the output flexible hinge are both straight beam hinges.
Optionally, the flexible hinges between the connecting rod and the input beam and the output block are arc hinges.
Optionally, the curved beam is a wavy sheet structure, and a through hole for the piezoelectric ceramic to pass through is arranged in the middle of the curved beam.
Optionally, the base adopts U type structure, including first base portion and be located second base portion and the third base portion of first base portion both sides, and the middle part and the piezoceramics of first base portion are fixed, and second base portion is connected with one of them lever amplification mechanism, and the third base portion is connected with another lever amplification mechanism.
In a second aspect, an embodiment of the present invention provides a parallel micro-nano positioning platform, provided with the flexible amplifying mechanism according to the first aspect.
The beneficial effects of the invention are as follows:
1. According to the flexible amplifying mechanism, the input beam is connected with the triangular amplifying mechanism and is provided with the curved beam, when parasitic displacement perpendicular to the output motion direction is generated, the parasitic displacement can be counteracted through deformation of the curved beam and the triangular amplifying mechanism, so that the piezoelectric ceramics are kept stable, the positioning precision of a system is ensured, meanwhile, the problem that the whole flexible amplifying mechanism heats due to motion inertia generated by the parasitic displacement of the piezoelectric ceramics is avoided, the service life of the whole flexible amplifying mechanism is prolonged, and the stability of the whole flexible amplifying mechanism is improved.
2. The flexible amplifying mechanism solves the parasitic displacement problem perpendicular to the output motion direction through the triangular amplifying mechanism and the curved beam, does not need to additionally arrange a flexible hinge connected with the output beam in series to perform decoupling treatment, reduces the volume of the whole positioning platform and improves the applicability of the positioning platform when being applied to the parallel micro-nano positioning platform.
3. According to the flexible amplifying mechanism, the output end of the piezoelectric ceramic is matched with the conical groove of the input beam through the ball head, so that component force which is vertical to the output motion direction and is caused by assembly errors of the piezoelectric ceramic can be effectively counteracted, and parasitic problems caused by the assembly errors are reduced.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.
FIG. 1 is a schematic view showing the overall structure of embodiment 1 of the present invention;
FIG. 2 is a front view showing the overall structure of embodiment 1 of the present invention;
FIG. 3 is a cross-sectional view showing the overall structure of embodiment 1 of the present invention;
the device comprises a base, a fixing hole, a pre-tightening screw threaded hole, an input beam, a conical groove, a first connecting rod, a second connecting rod, a first output block, a flexible hinge, a second output block, a curved beam, a rod body, a flexible hinge, a rigid rod, an input flexible hinge, an output flexible hinge and an output beam.
Detailed Description
Example 1
The embodiment provides a flexible amplifying mechanism, as shown in fig. 1-3, including a base 1, the base 1 adopts a U-shaped structure, including a first base portion and a second base portion and a third base portion respectively vertically disposed at two sides of the first base portion, and fixing holes 2 are respectively disposed on the first base portion, the second base portion and the third base portion, for fixedly mounting the whole flexible amplifying mechanism on a test platform or an experimental platform.
The middle part of the first base part is provided with a pre-tightening screw threaded hole 3, the first base part is fixed with one end of piezoelectric ceramics (not shown in the figure) through the pre-tightening screw threaded hole and the pre-tightening screw, and the piezoelectric ceramics is positioned in a space between the second base part and the third base part.
In this embodiment, the output movement direction of the piezoelectric ceramic is defined as the Y direction, and the direction perpendicular to the Y direction is defined as the X direction.
The output end of the piezoelectric ceramic is connected with the input beam 4, and can drive the input beam 4 to move.
In this embodiment, the length direction of the input beam 4 is perpendicular to the Y direction, and the center position of the input beam 4 is connected to the output end of the piezoelectric ceramic.
In order to offset component force which is caused by assembly errors of piezoelectric ceramics and is perpendicular to the output motion direction, the parasitic problem caused by the assembly errors is reduced, a ball head is arranged at the output end of the piezoelectric ceramics, a conical groove 5 matched with the ball head is arranged at the middle position of the side surface of the input beam 4, which is close to the piezoelectric ceramics, the ball head is in contact with the groove surface of the conical groove 5, so that the positioning effect is achieved, the component force which is caused by the assembly of the piezoelectric ceramics and is in the vertical driving direction is effectively eliminated, the symmetrical output of the left side and the right side of the flexible amplifying mechanism is ensured, and the parasitic problem of the flexible amplifying mechanism in the X direction during the driving of the piezoelectric ceramics is effectively restrained.
The input beam 4 is connected with a triangle amplifying mechanism which is used as a first-stage displacement amplifying mechanism.
Specifically, the triangle amplifying mechanism includes a first link 6 and a second link 7.
One end of the first connecting rod 6 is connected with one end of the input beam 4 through a flexible hinge, and the other end is connected with the first output block 8 through a flexible hinge.
One end of the second connecting rod 7 is connected with the other end of the input beam 4 through a flexible hinge 9, and the other end is connected with a second output block 11 through a flexible hinge 10.
The first connecting rod 6 and the second connecting rod 7 are symmetrically arranged relative to the axis of the piezoelectric ceramic, the first output block 8 and the second output block 9 are symmetrically arranged relative to the axis of the piezoelectric ceramic, the first connecting rod 6 and the second connecting rod 7 are respectively in a set acute angle with the axis of the piezoelectric ceramic, and the end parts of the first connecting rod 6 and the second connecting rod 7, which are connected with the input beam 4, are closer to the piezoelectric ceramic, so that a triangular structure is formed.
Further, the flexible hinge between the first connecting rod 6 and the input beam 4 and the first output block 8 adopts an arc-shaped hinge, the flexible hinge between the second connecting rod 7 and the input beam 4 and the second output block 11 adopts an arc-shaped hinge, the arc-shaped hinge is sensitive to stretching displacement, a good displacement steering function is provided, and the joint is flexible in movement.
A curved beam 12 is arranged between the first output block 8 and the second output block 11, a through hole is arranged in the middle of the curved beam 12, and piezoelectric ceramics pass through the curved beam 12 through the through hole.
By arranging the curved beam 12, the influence of the motion inertia of the triangular amplifying mechanism is reduced to a certain extent while the output of the triangular amplifying mechanism is guided, and the symmetrical and stable output of the two ends of the triangular amplifying mechanism is ensured.
In this embodiment, the curved beam 12 adopts a wavy sheet structure, and can be deformed.
The first output block 8 is connected with a first lever amplifying mechanism, the second output block 11 is connected with a second lever amplifying mechanism, the first lever amplifying mechanism and the second lever amplifying mechanism are used as secondary displacement amplifying mechanisms, the first lever amplifying mechanism and the second lever amplifying mechanism are identical in structure and are symmetrically arranged relative to the axis of the piezoelectric ceramic, and the first lever amplifying mechanism is taken as an example for explanation:
the first lever amplifying mechanism comprises a rod body 13, the rod body 13 adopts an L-shaped structure, one end of the rod body 13 is connected with the first output block 8 through a flexible hinge 14 and is used as an input end, and the other end of the rod body is used as an output end and is connected with the first half-bridge amplifying mechanism.
Preferably, the flexible hinge 14 between the input end of the rod 13 and the first output block 8 adopts a circular arc hinge.
The fulcrum position of the rod 13 is connected with the second base part through a flexible hinge 15, and preferably, the flexible hinge 15 adopts an arc hinge.
The input end of the rod body of the second lever amplifying mechanism is connected with the second output block 11 through an arc hinge, the output end of the rod body is connected with the second half-bridge amplifying mechanism, and the fulcrum position of the rod body is connected with the third base part through an arc hinge.
The principle of lever amplification and triangle amplification is combined, the first output block 8 is connected with the output end of the rod body of the first lever amplification mechanism through the arc hinge, and the second output block 11 is connected with the input end of the rod body of the second lever amplification mechanism through the arc hinge, so that energy loss is reduced to a certain extent, namely displacement loss is smaller.
The movement direction of the input end and the output end can be changed through the first lever amplifying mechanism and the second lever amplifying mechanism, and meanwhile, the amplifying ratio of the two lever amplifying mechanisms can be adjusted by changing the position of the circular arc hinge between the rod body and the base.
The first half-bridge type amplifying mechanism and the second half-bridge type amplifying mechanism are identical in structure and are symmetrically arranged relative to the axis of the piezoelectric ceramic to serve as a third-stage displacement amplifying mechanism.
In this embodiment, adopt tertiary displacement amplification mechanism, can use less piezoceramics to produce great displacement, can realize bigger ratio of amplification under same volume state, whole structure adopts symmetrical structure moreover, has effectively avoided traditional drive arrangement both sides structure output asymmetric problem.
The first half-bridge amplifying mechanism and the second half-bridge amplifying mechanism have the same structure, and the first half-bridge amplifying mechanism is taken as an example for explanation:
the first half bridge type amplifying mechanism comprises a rigid rod 16, one end of the rigid rod 16 is connected with the output end of the rod body of the first lever amplifying mechanism through an input flexible hinge 17, and the other end of the rigid rod 16 is connected with one end of an output beam 19 through an output flexible hinge 18.
Preferably, the input flexible hinge 17 and the output flexible hinge 18 are both straight beam hinges, and the torsion sensitivity characteristic of the straight beam hinges is utilized, so that better guiding and stable output are provided.
The input flexible hinge of the second half-bridge type amplifying mechanism is connected with the output end of the rod body of the second lever amplifying mechanism, and the output flexible hinge of the second half-bridge type amplifying mechanism is connected with the other end of the output beam 19.
In this embodiment, the input flexible hinges 17 and the input flexible hinges 18 are staggered, and along the axis direction of the piezoelectric ceramic, when the output flexible hinges 18 are closer to the input beam 4, the movement direction of the output beam 19 is the same as the movement direction of the input beam 4, and when the input flexible hinges 17 are closer to the input beam 4, the movement direction of the output beam 19 is opposite to the movement direction of the input beam 4.
The whole flexible amplifying mechanism of the embodiment is processed in an electric spark cutting mode to be an integrated model, and assembly errors are effectively avoided.
The working principle of the embodiment is that the output end of the piezoelectric ceramic drives the input beam 4 to generate displacement, the triangular amplifying mechanism is used for carrying out primary displacement amplification, the two output blocks drive the rod body input ends of the two lever amplifying mechanisms to move, the two lever amplifying mechanisms are used for carrying out secondary displacement amplification, the two lever amplifying mechanisms drive the output beam 19 to move through the two half-bridge amplifying mechanisms, and the three-level displacement amplification is realized through the two half-bridge amplifying mechanisms.
Example 2
The embodiment provides a parallel micro-nano positioning platform, which is provided with the flexible amplifying mechanism in the embodiment 1, wherein the output motion directions of the two flexible amplifying mechanisms are mutually perpendicular, and the output beams of the two flexible amplifying mechanisms are connected with a rotor.
The rest of the structure of the positioning platform is known in the art and will not be described in detail here.
The flexible amplifying mechanism and the micro-nano positioning platform can offset the parasitic displacement through the deformation of the curved beam 12 and the triangular amplifying mechanism when the parasitic displacement perpendicular to the output motion direction is generated, so that the piezoelectric ceramic is kept stable, the positioning precision of the system is ensured, meanwhile, the problem that the whole flexible amplifying mechanism heats due to the motion inertia generated by the parasitic displacement of the piezoelectric ceramic is avoided, the service life of the whole flexible amplifying mechanism is prolonged, the stability of the whole flexible amplifying mechanism is improved, meanwhile, the parasitic displacement perpendicular to the output motion direction is solved through the triangular amplifying mechanism and the curved beam 12, the decoupling treatment is not required to be carried out by additionally arranging a flexible hinge connected with the output beam in series, and the volume of the whole positioning platform is reduced and the applicability of the positioning platform is improved when the flexible micro-nano positioning platform is applied to the parallel micro-nano positioning platform.
The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (10)
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| CN202410035787.9A CN117914179A (en) | 2024-01-09 | 2024-01-09 | Flexible amplifying mechanism and parallel micro-nano positioning platform |
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| CN202410035787.9A CN117914179A (en) | 2024-01-09 | 2024-01-09 | Flexible amplifying mechanism and parallel micro-nano positioning platform |
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