JPS60231306A - Amorphous magnetooptical layer - Google Patents
Amorphous magnetooptical layerInfo
- Publication number
- JPS60231306A JPS60231306A JP8807684A JP8807684A JPS60231306A JP S60231306 A JPS60231306 A JP S60231306A JP 8807684 A JP8807684 A JP 8807684A JP 8807684 A JP8807684 A JP 8807684A JP S60231306 A JPS60231306 A JP S60231306A
- Authority
- JP
- Japan
- Prior art keywords
- amorphous
- magnetic
- layer
- magneto
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
技術分野
本発明はハードディスク、フロッピーディスク、ドキュ
メントファイル等に使用される光磁気記録媒体の磁気光
学層に関するものであり、特に磁気光学効果に優れた非
晶質磁気光学層に係るものである。Detailed Description of the Invention Technical Field The present invention relates to a magneto-optic layer of a magneto-optical recording medium used for hard disks, floppy disks, document files, etc., and in particular to an amorphous magneto-optic layer with excellent magneto-optic effects. This is related to.
従来技術
近年、半導体レーザー光により磁気記録を行う光磁気記
録媒体が高密度記録用として種々研死されている。特に
高密度記録用として使用されるためには磁性膜がその膜
面に垂直な方向に磁化容易軸を有することが必要とされ
る。従来、これら光磁気記録媒体に用いられる磁性膜と
してはGd−Co 、Gd−Fe 、 Tb−Fe 、
Gd−Tb−Fe 。BACKGROUND OF THE INVENTION In recent years, various types of magneto-optical recording media for performing magnetic recording using semiconductor laser light have been developed for use in high-density recording. In particular, in order to be used for high-density recording, a magnetic film is required to have an axis of easy magnetization in a direction perpendicular to the film surface. Conventionally, magnetic films used in these magneto-optical recording media include Gd-Co, Gd-Fe, Tb-Fe,
Gd-Tb-Fe.
Tb −Dy−Fe等の非晶質合金を用いたもの等が知
られているが、これら非晶質合金磁性体を用いた光磁気
記録媒体は記録感度が高く半導体レーザー光によって高
速度(周波数、ti、MH,において)で記録できると
いう利点はあるものの磁気光学効果が十分満足できるも
のではない問題点を有するものである。かかることから
Tb−F・−Coよりなる3元系非晶質磁性合金膜を用
いることによりカー回転角θKを大きくして磁気光学効
果を向上させることが提案されている。このような非晶
質合金磁性体を用いて光磁気記録媒体を作るには一般に
ガラス板のような基板上に前記磁性体を真空蒸着、スパ
ッタリング等の方法で付着させて磁性膜を形成している
。こうして得られる光磁気記録媒体への記録・再生は次
のようにして行われる。すなわち、記録は磁性膜のキュ
リ一温度または補償温度近傍における温度変化に対応し
た保磁力の急激な変化特性を利用して情報信号で変調さ
れたレーザー光を磁性膜に照射加熱して磁性膜表面磁化
の向きを反転させることにより行われる。また再生はこ
うして反転記録された磁性膜のカー回転角を読出すこと
により行われる。このように非晶質合金磁性体のように
光が透過しにくい場合の情報信号の記録・再生はカー効
果を利用するものである。Magneto-optical recording media using amorphous alloys such as Tb-Dy-Fe are known, but magneto-optical recording media using these amorphous alloy magnetic materials have high recording sensitivity and can be recorded at high speeds (frequency) using semiconductor laser light. , ti, MH,), but has the problem that the magneto-optical effect is not fully satisfactory. Therefore, it has been proposed to increase the Kerr rotation angle θK and improve the magneto-optic effect by using a ternary amorphous magnetic alloy film made of Tb-F.-Co. To make a magneto-optical recording medium using such an amorphous alloy magnetic material, the magnetic material is generally deposited on a substrate such as a glass plate by a method such as vacuum deposition or sputtering to form a magnetic film. There is. Recording and reproduction on the magneto-optical recording medium thus obtained is performed as follows. In other words, recording is performed by heating the magnetic film by irradiating a laser beam modulated with an information signal, taking advantage of the characteristics of the magnetic film's rapid change in coercive force in response to temperature changes near the Curie temperature or the compensation temperature. This is done by reversing the direction of magnetization. Further, reproduction is performed by reading out the Kerr rotation angle of the magnetic film recorded in this way. In this way, the Kerr effect is used to record and reproduce information signals in cases where light is difficult to pass through, such as in amorphous alloy magnetic materials.
カー効果とは磁性体の表面で光が反射する際の偏光面の
回転fj4.象であり、&)極(polar)効果、b
)縦(1ong1tudinal )効果、C)横(t
ransverse )効果があり、特に非晶質合金磁
性体の場合にはaの極効果が用いられ、そのカー回転角
θKを利用して再生が行われる。従ってカー回転角θK
が少しでも大きくなればそれだけ磁気光学効果が増し、
再生特性が向上することになる。The Kerr effect is the rotation of the plane of polarization when light is reflected on the surface of a magnetic material fj4. elephant, &) polar effect, b
) vertical (1ong1tudinal) effect, C) horizontal (t
In particular, in the case of an amorphous alloy magnetic material, the polar effect of a is used, and reproduction is performed using the Kerr rotation angle θK. Therefore, Kerr rotation angle θK
If the value becomes even slightly larger, the magneto-optical effect increases accordingly.
This results in improved playback characteristics.
しかしながら、前述のTb −Fe−Coよりなる3元
系非晶質合金磁性体のカー回転角θにはその組成により
0,81もしくは0.33程度であり、光再生特性の向
上が望まれている現況にある。However, the Kerr rotation angle θ of the above-mentioned Tb-Fe-Co ternary amorphous alloy magnetic material is about 0.81 or 0.33 depending on its composition, and it is desired to improve the optical reproduction characteristics. The current situation is
目 的
本発明の目的は膜面に垂直な方向に磁化容易軸を有する
非晶質合金磁性体におけるカー回転角θKをより増大せ
しめ、それにより光再生特性を向上させた非晶質磁気光
学層を提供することにある。Purpose The purpose of the present invention is to further increase the Kerr rotation angle θK in an amorphous alloy magnetic material having an axis of easy magnetization perpendicular to the film surface, thereby improving optical reproduction characteristics. Our goal is to provide the following.
構成
本発明は膜面に垂直な方向に磁化容易軸を有するTb−
Fe−Co−M (ただし、MはSn 、 Bi 。Structure The present invention utilizes a Tb-
Fe-Co-M (M is Sn, Bi.
Nl 、 Cr 、 Cuのうちから選ばれる少くとも
1種)からなる非晶質磁気光学層である。なお、本発明
の磁気層は垂直磁気異方性を有することカー必要であり
、かつ高保磁力を有することか望ましく、この理由から
本発明磁気J−を構成する磁性体の組成式を
(Tbx (”x−yCGy )t−x )14Mzト
シテ表わした場合、0.1 <、 x≦O14、0,0
1≦y <、O−’ so、ooz≦2≦0.1である
ことが好ましい。This is an amorphous magneto-optical layer made of at least one material selected from Nl, Cr, and Cu. The magnetic layer of the present invention must have perpendicular magnetic anisotropy and preferably have a high coercive force. For this reason, the composition formula of the magnetic material constituting the magnetic layer of the present invention is (Tbx ( "x-yCGy)t-x)14Mz When expressed as 0.1 <, x≦O14, 0,0
It is preferable that 1≦y<, O-'so, ooz≦2≦0.1.
本発明非晶質磁気光学層は適宜の支持体上に真空蒸着、
スパッタリング、イオンシレーティング等の方法で膜厚
0.01−IItm程度に形成する。The amorphous magneto-optical layer of the present invention is vacuum deposited on a suitable support.
It is formed to a film thickness of about 0.01-IItm by sputtering, ion silating, or other methods.
スパッタリングにて磁性体の薄膜形成を行う場合には、
各磁性体成分を各個にあるいは組合わせてターゲットと
し、磁性体組成はターゲット表面の面積比でコントロー
ルするようにする。When forming a thin film of magnetic material by sputtering,
Each magnetic material component is used individually or in combination as a target, and the magnetic material composition is controlled by the area ratio of the target surface.
支持体としては、ガラス、プラスチック、セラミック等
が使用できる。また本発明非晶質磁気光学層と支持体と
の間、あるいは上面に保護層、断熱層、反射層等が任意
に設けられる。As the support, glass, plastic, ceramic, etc. can be used. Further, a protective layer, a heat insulating layer, a reflective layer, etc. may be optionally provided between the amorphous magneto-optical layer of the present invention and the support or on the upper surface.
効 果
このようにして得られるTb−Fe−Co−M(ただし
、MはSn 、 Bi 、 Ni 、 Or 、 Cu
のうちから選ばれる少くとも1m)からなる垂直磁化容
易軸を有する非晶質磁気光学層の回転角θKがMを含有
していないものに比べて太きいため、光再生時の光再生
特性が良好となり、S/N比が向上するとともに記録ビ
ット数も増大し、高密度記録再生可能な光磁気記録媒体
が得られることになる。Effect Tb-Fe-Co-M obtained in this way (M is Sn, Bi, Ni, Or, Cu
Since the rotation angle θK of the amorphous magneto-optic layer having a perpendicular easy axis of magnetization consisting of at least 1 m) is larger than that of a layer not containing M, the optical reproduction characteristics during optical reproduction are As a result, the S/N ratio improves and the number of recording bits increases, resulting in a magneto-optical recording medium capable of high-density recording and reproduction.
以下に実施例を示す。Examples are shown below.
5 一
実施例
スライドガラス支持体上にスパッタリング法によりTb
−F・−Co−Mからなる非晶質磁気光学層を形成した
。ターゲットはコンポジット法を用い、Fe6.。co
o、1合金円板上にTbおよびMのチップをのせて構成
し2、各組成比をターゲット表面ノ面積比でコントロー
ルしつつ膜を形成した。5 Example: Tb was deposited on a slide glass support by sputtering.
An amorphous magneto-optical layer made of -F.-Co-M was formed. The target was Fe6. . co
A film was formed by placing Tb and M chips on an alloy disk (2) and controlling each composition ratio by the area ratio of the target surface.
各磁性体膜の作成条件を次表に示す。The preparation conditions for each magnetic film are shown in the table below.
(以下余白)
6 −
各非晶質磁気光学層は保磁力Heの大きい補償組成付近
の(Fllo、9 C00J )0.8 Tbo、tも
しくは(Feo、s COo、t )o、yo Tbo
、ttの組成においてTbの一部なMで置換するという
形、すなわち(Fe1)、@ Coo、t )o、s(
TbI −x Mx )o、t * (Fe61g C
o6,1 )o、yo (Tbt−xMx)o、鵞t
もしくは(FeO,Q Cog、1 )o、tt ((
Tbo、uMoAa )rxMx)o、ttとし作製し
た。(Left below) 6 - Each amorphous magneto-optic layer has a compensation composition with a large coercive force He (Flo, 9 C00J )0.8 Tbo, t or (Feo, s COo, t ) o, yo Tbo
, in the composition of tt, Tb is partially replaced by M, i.e. (Fe1), @Coo,t )o, s(
TbI-xMx)o,t*(Fe61gC
o6, 1) o, yo (Tbt-xMx) o, goose t
or (FeO, Q Cog, 1 ) o, tt ((
Tbo, uMoAa)rxMx)o, and tt were prepared.
膜の評価は基板(支持体)側からHe−Noレーザー(
λ=633nm)を照射し、カー効果を用いてカー回転
角θにおよび保磁力Haをめた。Film evaluation was performed using a He-No laser (
λ=633 nm), and the Kerr rotation angle θ and coercive force Ha were determined using the Kerr effect.
それらの結果を第1図〜第1θ図に示す。これらの図よ
りX、すなわちMの量を増加させることによりHaは小
さくなるもののθには大きくなることがわかる。各実施
例ではTbの一部なMで置換したため、M量を増加させ
ると異方性に寄与しているTbの電が減り、Haが小さ
くなるためM量をそれ程増大できなかったが、(Feo
、e Coo、1)とTbの量の比を一定にしてM量を
増すようにすればHcの低下はある程度抑えられM量を
増大させることができる。The results are shown in Figs. 1 to 1θ. From these figures, it can be seen that by increasing the amount of X, that is, M, Ha becomes smaller, but θ becomes larger. In each example, a part of Tb was replaced with M, so when the amount of M was increased, the charge of Tb that contributed to the anisotropy was reduced, and Ha became smaller, so the amount of M could not be increased that much. Feo
, e Coo, 1) and by increasing the amount of M while keeping the ratio of the amount of Tb constant, the decrease in Hc can be suppressed to some extent and the amount of M can be increased.
ここで改めて各実施例における非晶質磁気光学層におい
て最もカー回転角θKが大きくなる場合のTb −Fe
−Co −M膜組成、カー回転角θにおよびM無含有の
場合とのθにの増加量をまとめて次表に示す。Here again, in each example, Tb-Fe when the Kerr rotation angle θK is the largest in the amorphous magneto-optic layer
The following table summarizes the -Co-M film composition, the Kerr rotation angle θ, and the increase in θ compared to the case without M.
(以下余白) 9−(Margin below) 9-
第1図〜第10図は実施例における各磁性体験中のMの
量を変えた場合のθにおよびHeの変化図である
11−
第3図
第5図
(i−1’O,(l Coo、+ )o7q (Tb+
−z Cux)o2+中のX第4図
(Fl!0.qcOo、+)o7q (Tb 1−c
Crr)o2+中のX第7図
第8図
特開昭GO−231306(6)
第9図
第10図Figures 1 to 10 are diagrams of changes in θ and He when the amount of M during each magnetic experience in the example is changed. Coo, + )o7q (Tb+
-z Cux)o2+
Crr) o2+
Claims (1)
−Co −M (ただしゝ、MはSn 、 B1 、
Ni。 Cr 、 Cuのうちから選ばれる少くとも1m)から
なる非晶質磁気光学層。[Claims] L Tb-Fe having an axis of easy magnetization in the direction perpendicular to the film surface
-Co -M (where M is Sn, B1,
Ni. an amorphous magneto-optical layer consisting of at least 1 m) selected from Cr and Cu;
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59088076A JPH0630300B2 (en) | 1984-05-01 | 1984-05-01 | Amorphous magneto-optical layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59088076A JPH0630300B2 (en) | 1984-05-01 | 1984-05-01 | Amorphous magneto-optical layer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60231306A true JPS60231306A (en) | 1985-11-16 |
JPH0630300B2 JPH0630300B2 (en) | 1994-04-20 |
Family
ID=13932768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59088076A Expired - Lifetime JPH0630300B2 (en) | 1984-05-01 | 1984-05-01 | Amorphous magneto-optical layer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0630300B2 (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6140012A (en) * | 1984-07-31 | 1986-02-26 | Oki Electric Ind Co Ltd | Material for photomagnetic recording |
JPS6184004A (en) * | 1984-10-01 | 1986-04-28 | Sumitomo Metal Mining Co Ltd | Photo-magnetic recording medium |
JPS61172237A (en) * | 1985-01-28 | 1986-08-02 | Kyocera Corp | Photoelectromagnetic recording element |
JPS61196448A (en) * | 1985-02-26 | 1986-08-30 | Kyocera Corp | magneto-optical recording element |
JPS62132254A (en) * | 1985-12-05 | 1987-06-15 | Hitachi Maxell Ltd | Photomagnetic recording medium |
DE3907877A1 (en) * | 1988-03-11 | 1989-11-02 | Fuji Electric Co Ltd | MAGNETO-OPTICAL RECORDING MATERIAL |
JPH02139737A (en) * | 1988-11-18 | 1990-05-29 | Fuji Photo Film Co Ltd | Magneto-optical recording medium |
US4950556A (en) * | 1987-10-26 | 1990-08-21 | Minnesota Mining And Manufacturing Company | Magneto-optic recording medium |
JPH0329135A (en) * | 1989-06-26 | 1991-02-07 | Fuji Photo Film Co Ltd | Magneto-optical recording medium |
EP0446784A2 (en) * | 1990-03-14 | 1991-09-18 | BASF Aktiengesellschaft | Magnetooptical data disk |
US5552237A (en) * | 1992-09-30 | 1996-09-03 | Tdk Corporation | Magnetooptical recording medium |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58165306A (en) * | 1982-03-26 | 1983-09-30 | Hitachi Ltd | Vertical magnetic recording medium |
JPS5961011A (en) * | 1982-09-30 | 1984-04-07 | Ricoh Co Ltd | Optical magnetic recording medium |
JPS6041205A (en) * | 1983-08-16 | 1985-03-04 | Oki Electric Ind Co Ltd | Magnetooptical recording material |
JPS60101740A (en) * | 1983-11-05 | 1985-06-05 | Canon Inc | Photomagnetic recording medium |
-
1984
- 1984-05-01 JP JP59088076A patent/JPH0630300B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58165306A (en) * | 1982-03-26 | 1983-09-30 | Hitachi Ltd | Vertical magnetic recording medium |
JPS5961011A (en) * | 1982-09-30 | 1984-04-07 | Ricoh Co Ltd | Optical magnetic recording medium |
JPS6041205A (en) * | 1983-08-16 | 1985-03-04 | Oki Electric Ind Co Ltd | Magnetooptical recording material |
JPS60101740A (en) * | 1983-11-05 | 1985-06-05 | Canon Inc | Photomagnetic recording medium |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6140012A (en) * | 1984-07-31 | 1986-02-26 | Oki Electric Ind Co Ltd | Material for photomagnetic recording |
JPS6184004A (en) * | 1984-10-01 | 1986-04-28 | Sumitomo Metal Mining Co Ltd | Photo-magnetic recording medium |
JPS61172237A (en) * | 1985-01-28 | 1986-08-02 | Kyocera Corp | Photoelectromagnetic recording element |
JPS61196448A (en) * | 1985-02-26 | 1986-08-30 | Kyocera Corp | magneto-optical recording element |
JPS62132254A (en) * | 1985-12-05 | 1987-06-15 | Hitachi Maxell Ltd | Photomagnetic recording medium |
US4950556A (en) * | 1987-10-26 | 1990-08-21 | Minnesota Mining And Manufacturing Company | Magneto-optic recording medium |
DE3907877A1 (en) * | 1988-03-11 | 1989-11-02 | Fuji Electric Co Ltd | MAGNETO-OPTICAL RECORDING MATERIAL |
JPH02139737A (en) * | 1988-11-18 | 1990-05-29 | Fuji Photo Film Co Ltd | Magneto-optical recording medium |
JPH0329135A (en) * | 1989-06-26 | 1991-02-07 | Fuji Photo Film Co Ltd | Magneto-optical recording medium |
EP0446784A2 (en) * | 1990-03-14 | 1991-09-18 | BASF Aktiengesellschaft | Magnetooptical data disk |
US5552237A (en) * | 1992-09-30 | 1996-09-03 | Tdk Corporation | Magnetooptical recording medium |
Also Published As
Publication number | Publication date |
---|---|
JPH0630300B2 (en) | 1994-04-20 |
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Legal Events
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EXPY | Cancellation because of completion of term |