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JPS60231123A - Spectrophotometer - Google Patents

Spectrophotometer

Info

Publication number
JPS60231123A
JPS60231123A JP8736184A JP8736184A JPS60231123A JP S60231123 A JPS60231123 A JP S60231123A JP 8736184 A JP8736184 A JP 8736184A JP 8736184 A JP8736184 A JP 8736184A JP S60231123 A JPS60231123 A JP S60231123A
Authority
JP
Japan
Prior art keywords
slit
cylinder
diffraction grating
spectrum image
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8736184A
Other languages
Japanese (ja)
Inventor
Hidehisa Nishigaki
西垣 日出久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP8736184A priority Critical patent/JPS60231123A/en
Publication of JPS60231123A publication Critical patent/JPS60231123A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/04Slit arrangements slit adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/20Rowland circle spectrometers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

PURPOSE:To enable high speed scanning, by reflecting the reflected light of a spectroscopic optical system forming a spectrum image curved in a circular arc shape by a reflective mirror and rotating a cylinder having a plurality of slits to perform scanning. CONSTITUTION:The luminous flux of a light source 1 passes through a specimen measuring part 2 and the inlet slit 3 of a spectrometer and the light reflected by a concave diffraction grating 4 is formed into a spectrum image (i) along a Rowland circle R. A flat mirror 12 is provided between the diffraction grating 4 and the spectrum image (i) on the Rowland circle to be originally formed and reflects the reflected light from the concave diffraction grating 4 to form a spectrum image I along a circular arc (r). This circular arc (r) is formed by folding back a part of the Rowland circle R along the straight line passing the surface of the mirror 12. A cylinder 5 has a plurality of slit grooves S and the light from the slit S of the slit cylinder 5 rotating to the direction shown by the arrow is scanned in the arrangement direction of a wavelength by the detector 6 outside the cylinder 5. By this method, the spectroscopic optical system enables high speed scanning in a stationary state.

Description

【発明の詳細な説明】 イ、産業上の利用分野 本発明は発光分析とか吸光分析等の分光分析を行うのに
適した分光光度計に関する。
DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a spectrophotometer suitable for performing spectroscopic analysis such as emission analysis or absorption analysis.

口・従来技術 従来分光光度計で波長走査を行うには回折格子或はプリ
ズム等の分光素子を動かしている。即ち分光器の入射ス
リット及び出射スリットを固定しておき、分光素子を動
かして分光素子によって形成されるスペクトル上の特定
波長部分が出射スリット上に位置するようにしている。
2. Prior Art In order to perform wavelength scanning with a conventional spectrophotometer, a spectroscopic element such as a diffraction grating or a prism is moved. That is, the entrance slit and the exit slit of the spectrometer are fixed, and the spectroscopic element is moved so that a specific wavelength portion on the spectrum formed by the spectroscopic element is located on the exit slit.

この場合、分光素子を駆動する機構の適当部分の位置に
よって出射スリット上に位置しているスペクトル光の波
長を知るのであるから、分光素子の駆動機構は高精度で
あることが要求され、高速運動には適さないし、出射光
の波長の再現性を得るためには分光素子の駆動は慎重に
行う必要があるので、高速の波長走査は困難である。こ
のため時間的に変化する現象の分光分析的追跡は困難で
あるか実際上不可能な場合が多い。
In this case, the wavelength of the spectral light located on the output slit is determined by the position of the appropriate part of the mechanism that drives the spectroscopic element, so the driving mechanism of the spectroscopic element is required to be highly accurate, and it must be able to move at high speed. In addition, high-speed wavelength scanning is difficult because it is necessary to drive the spectroscopic element carefully in order to obtain reproducibility of the wavelength of the emitted light. For this reason, spectroscopic tracking of time-varying phenomena is often difficult or practically impossible.

ハ・ 目 的 本発明は分光光度計で高速波長走査を可能にしようとす
るものである。
C. Purpose The present invention aims to enable high-speed wavelength scanning with a spectrophotometer.

二・ 構 成 円弧状に彎曲したスペクトル像を形成する分光光学系と
、上記スペクトル像に沿う円周を持った円筒面にその母
線方向に延びたスリットを1或は複数本透設した回転ス
リット筒とよりなり、このスリット筒を一方向に回転さ
せることにより、スベクトル像面をスリットによって走
査するようにしたことを特徴とする分光、大度計である
2. Configuration A spectroscopic optical system that forms a spectral image curved in an arc shape, and a rotating slit in which one or more slits extending in the generatrix direction are provided in a cylindrical surface with a circumference that follows the spectral image. This is a spectroscopy/diameter which consists of a tube and is characterized in that by rotating this slit tube in one direction, the svector image plane is scanned by the slit.

ホ、実施例 図は本発明の実施例を示す。第1図で1は光源、2は試
料測定部で=l、3は分光光学系の入射スリット、4は
凹面回折格子で、両者は一つのローランド円R上に配置
されている。凹面回折格子はローランド円の直径を曲率
半径とする円弧に彎曲しておシ、曲率中心がローランド
円R10点にある。従って入射スリット3から入射し、
回折格子4で反射回折された光はローランド円Rに沿っ
てスペクトル像を形成する。12は回折格子4と本来形
成されるべき上記スペクトル像1との間に配置された平
面鏡で、稍うつ向いて図では反射面を紙面の向うに向け
ている。回折光はこの鏡によって反射されて円弧rに沿
ってスペクトル像■を形成する。この円弧はローランド
円Rの一部を鏡12の面を通る直線!で折返したもので
ある。5はスリット筒で上記した円弧rに沿う円周を持
っており、その母線に沿ってスリット溝Sが透設しであ
る。6はこのスリット筒の外側にスペクトル保工と受光
面を対向させて配置した光検出器である。
E. Example diagrams show examples of the present invention. In FIG. 1, 1 is a light source, 2 is a sample measuring section =l, 3 is an entrance slit of a spectroscopic optical system, and 4 is a concave diffraction grating, both of which are arranged on one Rowland circle R. The concave diffraction grating is curved into an arc whose radius of curvature is the diameter of the Rowland circle, and the center of curvature is at the R10 point of the Rowland circle. Therefore, it enters from the entrance slit 3,
The light reflected and diffracted by the diffraction grating 4 forms a spectral image along the Rowland circle R. Reference numeral 12 denotes a plane mirror disposed between the diffraction grating 4 and the spectral image 1 to be originally formed, and is oriented slightly downward with its reflective surface facing away from the plane of the paper in the figure. The diffracted light is reflected by this mirror to form a spectral image (2) along the arc r. This arc is a straight line that passes through a part of the Roland circle R through the surface of the mirror 12! It was folded back. 5 is a slit cylinder having a circumference along the above-mentioned arc r, and a slit groove S is transparently provided along the generatrix thereof. Reference numeral 6 denotes a photodetector placed outside the slit tube with its spectrum detector and light-receiving surface facing each other.

上記スリット筒5を図矢印方向(反対方向でもよい)に
回転させると、スリット溝Sがスペクトル保工を波長の
配列方向に走査し、スリットSの移動につれて異る波長
の光が光検出器6に入射する。
When the slit tube 5 is rotated in the direction of the arrow in the figure (or in the opposite direction), the slit groove S scans the spectrum in the direction of the wavelength arrangement, and as the slit S moves, light of different wavelengths is transmitted to the photodetector 6. incident on .

第2図は上述実施例の側面図である。7はスリット筒5
を回転させるパルスモータであり、8はモータ7の回転
制御回路である。11はスリット位置検出用ホトカプラ
であシ、スリット筒5の縁にスリット溝Sに対応させて
突設した突起Pを検出し、その検出信号を受けてデータ
処理回路9がパルスモータ7の駆動パルスを計数し、こ
の計数データが波長の情報として用いられる。データ処
理回路はまたモータ7の駆動パルスをサンプリング信号
として光検出器6の出力をサンプリングし、上記波長情
報と共にメモリに記憶させる一方、CR1表示装置10
によってスペクトル像のプロファイルを表示する。
FIG. 2 is a side view of the above embodiment. 7 is slit tube 5
A pulse motor rotates the motor 7, and 8 is a rotation control circuit for the motor 7. Reference numeral 11 denotes a photocoupler for detecting the slit position, which detects a protrusion P protruding from the edge of the slit cylinder 5 in correspondence with the slit groove S, and upon receiving the detection signal, the data processing circuit 9 generates a drive pulse for the pulse motor 7. This counting data is used as wavelength information. The data processing circuit also samples the output of the photodetector 6 using the drive pulse of the motor 7 as a sampling signal, and stores it in the memory together with the wavelength information.
Display the spectral image profile.

第3図は本発明の他の実施例で、回折格子4に対して入
射スリンJ−3と出射スリットSとがオフプレーンの配
置(回折格子4の中心に立てた法線を含むローランド円
の面の上下に位置をずらせて入出射スリットが配置され
る)になっておシ、スリット筒5の中心はローランド円
と同軸になっている。
FIG. 3 shows another embodiment of the present invention, in which the entrance slit J-3 and the exit slit S are arranged off-plane with respect to the diffraction grating 4 (a Rowland circle including the normal to the center of the diffraction grating 4). The entrance and exit slits are arranged at different positions above and below the surface), and the center of the slit tube 5 is coaxial with the Rowland circle.

上述実施例はシングルビーム方式の装置であるが、試料
測定部をダブルビーム方式の構成にし、三光束の切換え
周期をスリット筒による波長走査の時間に比し充分短か
くしておけば、ダブルビーム方式でも本発明が実施でき
ることは云うまでもない。
Although the above embodiment is a single-beam type device, if the sample measuring section is configured as a double-beam type and the switching period of the three beams is made sufficiently short compared to the wavelength scanning time by the slit tube, the double-beam type can also be used. It goes without saying that the present invention can be practiced.

へ・効果 本発明分光光度計は上述したような構成で、スリットを
設けた円筒をスリット像面に沿わせて回転させることで
波長走査を行い、分光光学系は静止したま\であるので
、高速走査が可能となシ、しかも波長再現性は従来と変
らないから、変化の速い現象の分光的追跡が容易可能と
なる。
Effects The spectrophotometer of the present invention has the above-described configuration, and performs wavelength scanning by rotating a cylinder provided with a slit along the slit image plane, and the spectroscopic optical system remains stationary. Since high-speed scanning is possible and the wavelength reproducibility remains the same as before, it becomes easy to spectroscopically track rapidly changing phenomena.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例装置の平面略図、第2図は同
実施例の側面図、第3図は本発明の他の実施例の斜視図
である。 1・・・光源、2・・・試料測定部、3・・・入射スリ
ット、4・・・凹面回折格子、5・・・スリット筒、6
・・・光検出器、7・・・スリット筒を回転させるモー
タ、8・・・モータ駆動制御回路、9・・・データ処理
回路、1o・・・CRT表示装置、11・・・ホトカプ
ラ、12・・・表面鏡、S・・・スリット溝、R・・・
ローランド円、P・・・スリット筒5に設けられた位置
検出用突起。 代理人 弁理士 縣 浩 介
FIG. 1 is a schematic plan view of an apparatus according to an embodiment of the invention, FIG. 2 is a side view of the same embodiment, and FIG. 3 is a perspective view of another embodiment of the invention. DESCRIPTION OF SYMBOLS 1...Light source, 2...Sample measurement part, 3...Incidence slit, 4...Concave diffraction grating, 5...Slit cylinder, 6
... Photodetector, 7... Motor for rotating the slit tube, 8... Motor drive control circuit, 9... Data processing circuit, 1o... CRT display device, 11... Photocoupler, 12 ...Surface mirror, S...Slit groove, R...
Roland circle, P...Protrusion for position detection provided on the slit tube 5. Agent Patent Attorney Kosuke Agata

Claims (1)

【特許請求の範囲】[Claims] 円弧状に彎曲したスペクトル像を形成する分光するスリ
ット筒とよシなシ、このスリット筒を回転させることに
よシスベクトル像面をスリットによシ走査するようにし
たことを特徴とする分光光度計。
A spectrophotometer characterized by having a slit tube for spectroscopy that forms a spectral image curved in an arc, and by rotating the slit tube, the cis vector image surface is scanned by the slit. Total.
JP8736184A 1984-04-30 1984-04-30 Spectrophotometer Pending JPS60231123A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8736184A JPS60231123A (en) 1984-04-30 1984-04-30 Spectrophotometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8736184A JPS60231123A (en) 1984-04-30 1984-04-30 Spectrophotometer

Publications (1)

Publication Number Publication Date
JPS60231123A true JPS60231123A (en) 1985-11-16

Family

ID=13912747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8736184A Pending JPS60231123A (en) 1984-04-30 1984-04-30 Spectrophotometer

Country Status (1)

Country Link
JP (1) JPS60231123A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100620A (en) * 1984-10-24 1986-05-19 Union Giken:Kk Multi-wavelength spectrophotometer
US7209230B2 (en) 2004-06-18 2007-04-24 Luckoff Display Corporation Hand-held spectra-reflectometer
US7233394B2 (en) 2005-06-20 2007-06-19 Luckoff Display Corporation Compact spectrometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100620A (en) * 1984-10-24 1986-05-19 Union Giken:Kk Multi-wavelength spectrophotometer
US7209230B2 (en) 2004-06-18 2007-04-24 Luckoff Display Corporation Hand-held spectra-reflectometer
US7233394B2 (en) 2005-06-20 2007-06-19 Luckoff Display Corporation Compact spectrometer

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