JPS60222670A - gate valve - Google Patents
gate valveInfo
- Publication number
- JPS60222670A JPS60222670A JP6060985A JP6060985A JPS60222670A JP S60222670 A JPS60222670 A JP S60222670A JP 6060985 A JP6060985 A JP 6060985A JP 6060985 A JP6060985 A JP 6060985A JP S60222670 A JPS60222670 A JP S60222670A
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- shaft
- gate valve
- ring
- sealing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は１例えばドライエツチング装置に好適なゲート
バルブに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a gate valve suitable for, for example, a dry etching apparatus.
従来のこの種のゲートバルブは、開閉時にシャッタが０
リング等のシール材上を摺動していた。Conventional gate valves of this type have a shutter of 0 when opening and closing.
It was sliding on a sealing material such as a ring.
そのため、シール面が硬化したり傷がついたりして短期
間にシール材を交換する必要があった。As a result, the sealing surface becomes hardened or scratched, making it necessary to replace the sealing material within a short period of time.
未発明は、シャツタ開閉時はＯリングのシール材上を摺
動す乙ことな曵、シャッタが閉じた時のみシール材に密
着して流路なしゃ断できるゲートバルブを提供すること
を目的としたものである。The object of the invention is to provide a gate valve that slides on the sealing material of an O-ring when the shutter is opened and closed, and that can close the sealing material and cut off the flow path only when the shutter is closed. It is something.
この目的を達成するためには、シャッタの移動時とシー
ル材に密着する時の条件として、シャッタｌ’！常にシ
ール材に対して平行を保持すム必要がある。このため、
本発明はシャッタとシール材のすｈまに関係な炙平行を
保持するリンクを用いて、シャッタとシャッタをＷＩＡ
ＩＩ＋する軸を取付けたことを特徴とする。In order to achieve this purpose, the conditions for shutter l'! when the shutter moves and when it comes into close contact with the sealing material must be met. It is necessary to always keep it parallel to the sealing material. For this reason,
The present invention uses a link that maintains the parallelism related to the gap between the shutter and the sealing material, and connects the shutter to the WIA.
It is characterized by the installation of a shaft that corresponds to II+.
本発明の一実施例を第１．２図に示す。図は真空容器の
低真空室１ （大気圧になることもある）と高真空室１
１のしゃ断に用いた例である。低真空室１の側面には、
シャッタ２と密着してシールするＯリング８とシャッタ
２を閉めた時に所定の位置で止めるストッパ７が取付け
である。シャッタ２は軸４にピン５．リンク３おのおの
２組によす軸４に対し常に平行が保たれるように支持さ
れている。この状態では、シャッタ２は自重により下方
にピン５を中心にして旋回しようとするため、ばね６に
より支えられている。止め板９は０リング８とシャブタ
２が摺動しない程度のすｈｔにばねの力を止めて、シャ
ッタ２を所定の位置に保持しているものである。軸４は
大気中と低真空室１がリークすることなく、人力や油、
空圧シリンダ等により上下できるように、ベローフラン
ジ１Ｇでシールされている。An embodiment of the invention is shown in Figure 1.2. The figure shows low vacuum chamber 1 (sometimes at atmospheric pressure) and high vacuum chamber 1 of the vacuum container.
This is an example used for cutting off No. 1. On the side of low vacuum chamber 1,
The O-ring 8 that closely contacts and seals the shutter 2 and the stopper 7 that stops the shutter 2 at a predetermined position when the shutter 2 is closed are attached. The shutter 2 has a pin 5 on the shaft 4. Each link 3 is supported by two sets so as to remain parallel to the helical shaft 4 at all times. In this state, the shutter 2 tends to pivot downward around the pin 5 due to its own weight, and is therefore supported by the spring 6. The stop plate 9 holds the shutter 2 at a predetermined position by stopping the force of the spring to such an extent that the O-ring 8 and the shutter 2 do not slide. The shaft 4 is designed to prevent leakage between the atmosphere and the low vacuum chamber 1, and to prevent human power, oil,
It is sealed with a bellows flange 1G so that it can be raised and lowered by a pneumatic cylinder or the like.
次に動作について説明する。先ず、シャブタ２を閉じる
場合は、軸４を上昇するとシャッタ２も上方に平行移動
する。この時シャッタ２と０リング８間には、すきまを
取っているため両者が摺動することはない。軸４が上昇
してシャッタ２がストッパ７に当ると、シャッタ２は上
昇できず停止する。更に軸４を上昇すると、ピン５．リ
ンク３によりシャッタ２は水平方向に押しつけられ、０
リング８と密着して低真空室１と高真空室１１間をシー
ルする。第２図はシャッタが閉まった詩の状態を示す。Next, the operation will be explained. First, when closing the shutter 2, when the shaft 4 is raised, the shutter 2 also moves upward in parallel. At this time, there is a gap between the shutter 2 and the O-ring 8, so that the two do not slide. When the shaft 4 rises and the shutter 2 hits the stopper 7, the shutter 2 cannot rise and stops. When shaft 4 is further raised, pin 5. The shutter 2 is pressed horizontally by the link 3, and the
It is in close contact with the ring 8 to seal between the low vacuum chamber 1 and the high vacuum chamber 11. Figure 2 shows the poem with the shutter closed.
シャッタ２を開曵時は上述の逆動作となる。When the shutter 2 is opened, the above operation is reversed.
以上のように、本発明は平行リンクを使用することによ
り、シャッタと０リング間のすきまを安定した状態で保
持で齢、０リングを損傷することなくシールすることが
できるという効果がある。As described above, the present invention has the advantage that by using parallel links, the gap between the shutter and the O-ring can be maintained in a stable state, and the O-ring can be sealed without being damaged.
図は本発明の一実施例を示すもので、第１図はゲートバ
ルブのシャッタが移動する時の状態の断面図、第２図は
シャッタが閉じた時の状態の断面図である。
１ ・・・・・・低真空室、２・・・・・・シャッタ、
３・・・・・・リンク、４・・・・・・軸、５・・・・
・・ピン、６・・・・・・ばね、７・・・・・・ストッ
パ、８・・・・・・０リング、９・・・・・・止め板、
１０・・・才２Ｇ！］The drawings show an embodiment of the present invention; FIG. 1 is a cross-sectional view of the gate valve when the shutter is moved, and FIG. 2 is a cross-sectional view of the gate valve when the shutter is closed. 1...Low vacuum chamber, 2...Shutter,
3...Link, 4...Axis, 5...
...Pin, 6...Spring, 7...Stopper, 8...0 ring, 9...Stopping plate,
10 years old, 2G! ]
Claims (1)
、＃平行リンクの先端に前記軸と平行にシャッタを連結
し、ゲート上方に前記シャッタのストッパを設置し、前
記シャッタを支えるばねを前記シャッタが前記ゲート側
と摺動しないように前記軸に取付けたことを特徴とする
ゲートバルブ。1. Attach a parallel link upward to a shaft that moves up and down, connect a shutter to the tip of the parallel link parallel to the shaft, install a stopper for the shutter above the gate, and connect a spring that supports the shutter to the shutter. The gate valve is attached to the shaft so as not to slide on the gate side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6060985A JPS60222670A (en) | 1985-03-27 | 1985-03-27 | gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6060985A JPS60222670A (en) | 1985-03-27 | 1985-03-27 | gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60222670A true JPS60222670A (en) | 1985-11-07 |
Family
ID=13147169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6060985A Pending JPS60222670A (en) | 1985-03-27 | 1985-03-27 | gate valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60222670A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02229967A (en) * | 1989-03-03 | 1990-09-12 | Irie Koken Kk | Non-slide vacuum gate valve |
| JPH08128542A (en) * | 1994-10-31 | 1996-05-21 | Kishikawa Tokushu Valve Seisakusho:Kk | Gate valve |
| JP2006200709A (en) * | 2005-01-24 | 2006-08-03 | Kyocera Corp | Gate valve |
| WO2008138452A1 (en) * | 2007-05-16 | 2008-11-20 | Vat Holding Ag | Valve having a sealing member |
| JP2009008256A (en) * | 2007-06-08 | 2009-01-15 | Vat Holding Ag | Vacuum gate valve having limb element |
| WO2009080304A1 (en) * | 2007-12-20 | 2009-07-02 | Oerlikon Trading Ag, Trübbach | Gate valve for a vacuum chamber and vacuum chamber |
| RU2551097C1 (en) * | 2014-02-11 | 2015-05-20 | Научно-производственная фирма с ограниченной ответственностью "Экополимер" | Sluice gate |
| CN104864110A (en) * | 2014-02-21 | 2015-08-26 | 广东昭信半导体装备制造有限公司 | Vacuum gate valve |
| EP3239567A1 (en) * | 2016-04-27 | 2017-11-01 | VAT Holding AG | Gate valve with curved guideway |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4846924A (en) * | 1971-10-14 | 1973-07-04 |
-
1985
- 1985-03-27 JP JP6060985A patent/JPS60222670A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4846924A (en) * | 1971-10-14 | 1973-07-04 |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02229967A (en) * | 1989-03-03 | 1990-09-12 | Irie Koken Kk | Non-slide vacuum gate valve |
| JPH08128542A (en) * | 1994-10-31 | 1996-05-21 | Kishikawa Tokushu Valve Seisakusho:Kk | Gate valve |
| JP4642488B2 (en) * | 2005-01-24 | 2011-03-02 | 京セラ株式会社 | Gate valve |
| JP2006200709A (en) * | 2005-01-24 | 2006-08-03 | Kyocera Corp | Gate valve |
| WO2008138452A1 (en) * | 2007-05-16 | 2008-11-20 | Vat Holding Ag | Valve having a sealing member |
| US8002238B2 (en) | 2007-05-16 | 2011-08-23 | Vat Holding Ag | Valve having a sealing member |
| JP2010526974A (en) * | 2007-05-16 | 2010-08-05 | バット ホールディング アーゲー | valve |
| US7980529B2 (en) | 2007-06-08 | 2011-07-19 | Vat Holding Ag | Vacuum gate valve having a limb element |
| JP2009008256A (en) * | 2007-06-08 | 2009-01-15 | Vat Holding Ag | Vacuum gate valve having limb element |
| KR101454409B1 (en) * | 2007-06-08 | 2014-10-27 | 배트 홀딩 아게 | Vacuum gate valve with rim member |
| WO2009080304A1 (en) * | 2007-12-20 | 2009-07-02 | Oerlikon Trading Ag, Trübbach | Gate valve for a vacuum chamber and vacuum chamber |
| US8448918B2 (en) | 2007-12-20 | 2013-05-28 | Tel Solar Ag | Gate valve for a vacuum chamber and vacuum chamber |
| TWI447319B (en) * | 2007-12-20 | 2014-08-01 | Tel Solar Ag | Gate valve for a vacuum chamber and vacuum chamber |
| RU2551097C1 (en) * | 2014-02-11 | 2015-05-20 | Научно-производственная фирма с ограниченной ответственностью "Экополимер" | Sluice gate |
| CN104864110A (en) * | 2014-02-21 | 2015-08-26 | 广东昭信半导体装备制造有限公司 | Vacuum gate valve |
| EP3239567A1 (en) * | 2016-04-27 | 2017-11-01 | VAT Holding AG | Gate valve with curved guideway |
| WO2017186757A1 (en) * | 2016-04-27 | 2017-11-02 | Vat Holding Ag | Gate valve with curved guide |
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