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JPS60171277A - 金属−セラミツクス接合体 - Google Patents

金属−セラミツクス接合体

Info

Publication number
JPS60171277A
JPS60171277A JP59027282A JP2728284A JPS60171277A JP S60171277 A JPS60171277 A JP S60171277A JP 59027282 A JP59027282 A JP 59027282A JP 2728284 A JP2728284 A JP 2728284A JP S60171277 A JPS60171277 A JP S60171277A
Authority
JP
Japan
Prior art keywords
metal
bonded body
body according
ceramic bonded
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59027282A
Other languages
English (en)
Other versions
JPH0362671B2 (ja
Inventor
俊一郎 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59027282A priority Critical patent/JPS60171277A/ja
Priority to KR1019850000734A priority patent/KR880000654B1/ko
Priority to EP85300971A priority patent/EP0153150B1/en
Priority to DE8585300971T priority patent/DE3572647D1/de
Priority to US06/702,311 priority patent/US4613549A/en
Publication of JPS60171277A publication Critical patent/JPS60171277A/ja
Publication of JPH0362671B2 publication Critical patent/JPH0362671B2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、金属−セラミックス接合体に関する。
〔発明の技術的背景及びその問題点〕
セラミックスを構造材料として用いる試みが近年性なわ
れている。このような場合、セラミックスを他の部材と
接合して用いなければならないことが多い。このような
セラミックスと他の部材との接合手段としては、接着剤
による接合、あるいはセラミックスをＭｏ−Ｍｎ等によ
りメタライズしたのちろう付けする接合等が行なわれて
いた。
しかしながら、接着剤による接合では、構造体として使
用可能な温度範囲が低く、また。
メタライズによる接合は、メタライズできるセラミック
スがアルミナ等に限られ窒化けい素等の構造材に適する
セラミックスにそのまま適用できないという離点があっ
た。
〔発明の目的〕
本発明は、前記事情に基づぎなされたもので、接合強度
の大なるシリコンセラミツガ金属との接合体を提供する
ものである。
〔発明の概要〕 本願発明は、シリコンセラミックスと金属とを、結晶質
相及び非結晶質相からなる酸化物層を介して接合してな
ることを特徴とする。
シリコンセラミックスは、焼結助剤を含有するがＹ！０
３等の希土類酸化物を含むものが好ましく更にＡ　ｌ　
ｔ　Ｏｓ、遷移金属系酸化物の焼結助剤及びアルカリ金
属、アルカリ土類金属。
遷移金属系の元素を含んでもよい。これらは組合せによ
っては金属との接合状態を改善する効果を奏すると考え
られる。酸化物層は主とし又αクリストバライト、Ｙ、
０３・２ｓｔｏ。
及びシリケートガラスで構成したものがよく。
なかでも非結晶質相としてシリケートガラスを主とする
もので構成したものが接合強度が大である。この場合、
金属は主として非結晶質相と接合した状態のものがよく
、更に接合状態は帯状またはおよび点状の状態のものが
。
金属とセラミックスの熱膨張差に基づく応力を緩和する
うえで好ましい。
金属と非結晶質相の接合は、金属またはおよび金属酸化
物と非結晶質相間の固溶、化合物生成および拡散による
。この場合金属と金属酸化物は共晶物であることが望ま
しい。このような接合状態を得るには金属としては銅ま
たは銅合金、なかでもタフピッチ銅が好ましい。
本発明の接合体を得るには、まずシリコンセラミックス
を大気中で１２００〜１４００　”Ｃで２０分〜２０時
間加熱して、シリコンセラミックスの表面に接合に供す
る層を形成する。
この場合、表面に生成する層をαクリストバライト、Ｙ
、０３　・２ＳｉＯ，及びシリケートガラスで構成する
。このなかで接合に大きく寄与すると思われるものはシ
リケートガラスであるが、Ｙ、０３・２ＳｉＯ，がリン
片状結晶でかつ結晶の（ｉｉｏ）面を表面に対してもは
ぼ平行に配向析出した状態で混在することも効果がある
。
こうし′Ｃ得られたシリコンセラミックスの表面層に金
属な当接して加熱処理する。例え埋する。この場合金属
とじ又は微量の酸素を含むものがよいが、そうでない場
合は加熱雰囲気に微量の酸素（数ｘ００ｐｐｍ）を含有
させることが有効である。
〔発明の実施例〕
Ｙ、０．　５％％（重量％）、ＡＩ！鵞　０３　４％Ａ
／Ｎ　３％、Ｔｉｅ、１．５％を含むＳｉ、Ｎ、の常圧
焼結体を大気中で１２００〜１４００℃で約１０時間加
熱し１表面に金属との結合に供する層を形成した。得ら
れた５ｒＢＮ４表面をＸ線回折により分析したところＳ
ｉ、Ｎ４の他にＹ、０３　・２　Ｓ　ｉ　Ｏ，、αクリ
ストバライト及びガラス相（シリケートガラス）が見出
された。
第１図に加熱温度によるガラス相量の変化を示す（曲線
Ａ）。なお、グラフ中ガラス量は任意単位で示すが、こ
の量は金属とセラミックスの接合層の体積に占めるガラ
ス相量に比例した量である。
こうして得られたＳｉ、Ｎ４にタフピッチ銅板体を当接
して不活性雰囲気中、１０７５℃で加熱する直接接合法
で銅板体を接合した。
以上により明らかなように、接合層にガラス相が存在す
ることにより接合強度は向上する。なお、加熱温度が余
り高くなると、結晶が粗大化し強度的には好ましくない
。セラミックスの加熱処理温度は１２５０°〜１３５０
℃の範囲でより好ましい接合強度を得ることかできる。
第１図に基づぎガラス量と接合強度の関係をプロットし
たものを第２図に示す。第２図からガラス量が接合強度
に寄与していることがうかがわれる。
接合強度の高いものについて接合面の観察を行なった。
接合面におい又、金属は主としてガラス相と接合してお
り、かつ帯状または点状の局部的接合を示している。
なお、接合部において、金属側は、銅酸化物と銅の共晶
物で構成されており、これらとセラミックス側のガラス
相との間で固溶したり化合物を生成したりあるいは拡散
することにより強固な接合がなされていることが確認さ
れた。
以上のように本願発明の金属−セラミックス接合体は、
信頼でとる接合状態を有するものである。
ナオ、シＩＪコンセラミックスとしては、Ｓｉ、Ｎ４．
ＳｉＣ，サイアロン等が適用できる。
【図面の簡単な説明】
第１図は、加熱温度による′ガラス層及び接合強度の変
化を示すグラフ、第２図はガラス相と接合強度との関係
を示すグラフである。

Claims (1)

  1. 【特許請求の範囲】 （１）　シリコンセラミックスと金属とを、結晶質相及
    び非結晶質相からなる酸化物層を介して接合してなる金
    属−セラミッ身ス接合体。 （２）　シリコンセラミックスは焼結助剤として希土類
    酸化物を含む特許請求の範囲第１項に記載の金属−セラ
    ミックス接合体。 （３）酸化物層は、主としてαクリストバライト、Ｙ、
    ０３　・２Ｓｉ０２にラリケートガラスで構成してなる
    特許請求の範囲第２項に記載の金属パライトを主とする
    ものである特許請求の範囲第３項に記載の金属−セラミ
    ックス接合体。 （５）非結晶質相はシリケートガラスを主とするもので
    ある特許請求の範囲第３項に記載の金属−セラミックス
    接合体。 （６）金属は主として非結晶質相と接合してなる特許請
    求の範囲第１項に記載の金属−セラミックス接合体。 （７）金属と非結晶質相の接合は帯状またはおよび点状
    の局部的接合である特許請求の範囲第６項に記載の金属
    −セラミックス接合体。 （８）金属と非結晶質相の接合は金属またはおよび金属
    酸化物と非結晶質相聞の固溶、化合物生成および拡散に
    よるものである特許請求の範囲第６項に記載の金属−セ
    ラミックス接合体。 （９）金属と金属酸化物は共晶物である特許請求の範囲
    第８項に記載の金属−セラミックス接合体。 顛　金属は銅または銅合金である特許請求の範囲第１項
    に記載の金属−セラミックス接合体。
JP59027282A 1984-02-17 1984-02-17 金属−セラミツクス接合体 Granted JPS60171277A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP59027282A JPS60171277A (ja) 1984-02-17 1984-02-17 金属−セラミツクス接合体
KR1019850000734A KR880000654B1 (ko) 1984-02-17 1985-02-04 금속-세라믹접합체
EP85300971A EP0153150B1 (en) 1984-02-17 1985-02-14 Bonded metal-ceramics composite
DE8585300971T DE3572647D1 (en) 1984-02-17 1985-02-14 Bonded metal-ceramics composite
US06/702,311 US4613549A (en) 1984-02-17 1985-02-15 Bonded metal-ceramics composite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59027282A JPS60171277A (ja) 1984-02-17 1984-02-17 金属−セラミツクス接合体

Publications (2)

Publication Number Publication Date
JPS60171277A true JPS60171277A (ja) 1985-09-04
JPH0362671B2 JPH0362671B2 (ja) 1991-09-26

Family

ID=12216711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59027282A Granted JPS60171277A (ja) 1984-02-17 1984-02-17 金属−セラミツクス接合体

Country Status (5)

Country Link
US (1) US4613549A (ja)
EP (1) EP0153150B1 (ja)
JP (1) JPS60171277A (ja)
KR (1) KR880000654B1 (ja)
DE (1) DE3572647D1 (ja)

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JPH0799739B2 (ja) * 1985-02-20 1995-10-25 三菱電機株式会社 金属薄膜の形成方法
DE3601794A1 (de) * 1986-01-22 1987-07-23 Georg Dr Ing Gliemeroth Temperaturwechselbestaendiger, keramischer werkstoff und verfahren zu seiner herstellung
US4764341A (en) * 1987-04-27 1988-08-16 International Business Machines Corporation Bonding of pure metal films to ceramics
US4880755A (en) * 1987-05-19 1989-11-14 Kennametal Inc. Sialon cutting tool composition
US4913936A (en) * 1987-05-19 1990-04-03 Kennametal Inc. Method of surface alloying sialon articles
US5013605A (en) * 1988-08-11 1991-05-07 Gritz David N Cordierite-type glass-ceramic with controlled coloration
DE3913362A1 (de) * 1989-04-22 1990-10-25 Forschungszentrum Juelich Gmbh Aus teilkoerpern unterschiedlicher waermeausdehnung bestehender verbundkoerper, verfahren zur herstellung desselben und dafuer geeignete halbzeuge
US5098494A (en) * 1989-05-23 1992-03-24 Mcnc Bonding of ceramic parts
US5096769A (en) * 1989-07-07 1992-03-17 Alsimag Technical Ceramics, Inc. Strengthened ceramic
US5500279A (en) * 1994-08-26 1996-03-19 Eastman Kodak Company Laminated metal structure and metod of making same
JPH0891951A (ja) * 1994-09-22 1996-04-09 Sumitomo Electric Ind Ltd アルミニウムと窒化ケイ素の接合体およびその製造方法
US5912066A (en) * 1996-03-27 1999-06-15 Kabushiki Kaisha Toshiba Silicon nitride circuit board and producing method therefor
JP2002087896A (ja) * 2000-09-12 2002-03-27 Mitsubishi Heavy Ind Ltd 自己修復性高耐熱耐酸化性皮膜及び積層体
JP3969987B2 (ja) * 2001-10-01 2007-09-05 Ｄｏｗａホールディングス株式会社 セラミックスと合金の接合体
JP3868854B2 (ja) * 2002-06-14 2007-01-17 Ｄｏｗａホールディングス株式会社 金属−セラミックス接合体およびその製造方法
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US8110469B2 (en) * 2005-08-30 2012-02-07 Micron Technology, Inc. Graded dielectric layers
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JPS593077A (ja) * 1982-06-29 1984-01-09 株式会社東芝 セラミツク部材と金属との接合方法

Also Published As

Publication number Publication date
EP0153150B1 (en) 1989-08-30
DE3572647D1 (en) 1989-10-05
EP0153150A3 (en) 1986-10-29
KR850005994A (ko) 1985-09-28
JPH0362671B2 (ja) 1991-09-26
EP0153150A2 (en) 1985-08-28
US4613549A (en) 1986-09-23
KR880000654B1 (ko) 1988-04-20

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