JPS60154444A - Image pick-up device of scanning type electron microscope etc. - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Redundant Background] Scanning Arashiko! An image capturing device such as a mirror draws an image produced by an electron microscope on a CRT, and captures the image with a camera. However, one-permanent imaging devices such as scanning electron microscopes divide two different types of images formed by the same secondary electron image into 081 planes and form images in one image using a camera. It is easy and common practice to take a picture of 08
Displaying a secondary electron image on one divided surface and an X-ray image on the other is not possible because the scanning speeds of CR and T are different.

Therefore, it was not possible to capture a secondary electron image on one divided surface of a single photograph and an X-ray image on the other divided surface.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide an image photographing device such as a scanning electron microscope that can separately photograph images with different conditions, such as a secondary electron image or an X-ray image, on a single photograph. be. .

[Summary of Invention 2] In order to achieve such an object, the present invention provides an image capturing device such as a scanning electron microscope that takes a photograph of an image projected on an image plane of a CRT, which is equipped with a photographing area setting circuit. Then, the photographing area setting circuit is configured to take an image before setting the photographing area in the set area of the image surface and take a photograph.

[Embodiments of the invention]

FIG. 1 is a block diagram showing an embodiment of an image capturing apparatus such as a scanning electron microscope according to the present invention. In the figure, there is a scanning signal generator 1, and a signal from the scanning signal generator 1 is inputted to, for example, a cathode of a picture tube 2 via a display area moving circuit 6. On the other hand, the electron beam deflection coil 3
It is now entered into Furthermore, the photographing area setting circuit 4 is connected to the photographing command signal 7.
is input, and by switching the photographing area setting switch 5, the photographing area can be set to area A (for example, the left half area on the CRT) or area B (for example, the right half area on the CRT). It has become.

In such a configuration, the operation will be described below.

First, for example, a secondary electron image is captured on the cathode ray tube 2.

In this case, an image is formed over the entire image plane 8 as shown in FIG. A frame 9 is displayed in advance on this image surface,
Only the image C within this frame 9 will be the area that will be photographed later. Next, turn on the photographing area setting switch 5 to the A side. As a result, the image C captured on the cathode ray tube 2 is projected onto the area A on the image plane 8 of the same cathode ray tube 2, as shown in FIG. Then, based on the output of the photographing command signal 7, an image as large as the left half of the image plane of the cathode ray tube 2 is projected onto the left half of one photograph by a camera (not shown).

Thereafter, the photographing area setting switch 5 is turned off, and, for example, an xm image is photographed on the image plane 8 of the cathode ray tube 2. Even during imaging in this case, a frame 9 is displayed on the image plane 8, and the image captured within this frame 9 becomes the area to be displayed in the photograph. Then, turn on the shooting area setting switch 5 to the B side.
let As a result, the image C that had been captured on the cathode ray tube 2 is projected onto the area B on the image plane 8 of the same cathode ray tube 2 shown in FIG. Then, based on the output of the photographing command signal 7, the camera projects an image of the right half area 1B of the image plane of the cathode ray tube 2 onto the right half area of the photograph.

As a result, a secondary electron image and an X-ray image are superimposed on each of the left half region and right half region of the photograph.

In this way, the secondary electron image and the X-ray image can be captured separately on the CRT at their own scanning speeds.
Furthermore, if each of the above-mentioned images is sequentially photographed in a predetermined section of CB'I'' to be photographed, and a photograph is taken each time, two types of images under different photographing conditions can be photographed on one photograph. Different types of images with different scanning speeds such as secondary electron images and X-ray images, different types of images with different magnifications, different types of images with different tilt angles of the sample such as stereo images, etc. can be captured in a single photograph. If such photographs can be obtained, comparisons between these different types of images will be harmful, and the stereo viewing will be facilitated and photographs will be saved.

In the embodiment described above, a frame 9 is displayed on the screen imaged on the cathode ray tube 2 before the photographing area is set, and images are displayed even outside this frame, but images are displayed only within the frame 9. It goes without saying that the image may not be displayed outside the frame 9.

Further, although the image display before setting the photographing area and the image display after setting the photographing area are performed by the same cathode ray tube, it is possible to display the images on separate cathode ray tubes. do not have.

Furthermore, the division in the shooting area setting is described as two divisions, the right half and the left half of the image plane, but this division may be divided into four equal parts or any arbitrary shape. For example, when observing the area divided by a frame, It may be fitted in any position on the surface of the photographic cathode ray tube. It goes without saying that the entire surface of the observation cathode ray tube may be reduced in size during photographing, and a single composite photograph may be created from a large number of images.

〔Effect of the invention〕

As described above, according to the image photographing device such as a scanning electron microscope according to the present invention, it is possible to separately photograph images with different conditions, such as a secondary electron image or an X-ray image, on a single photograph. You will be able to do this.

[Brief explanation of drawings]

FIG. 1 is a configuration diagram showing an embodiment of an image capturing apparatus such as a scanning electron microscope according to the present invention, and FIGS. 2 and 3 are explanations showing the operation of the image capturing apparatus such as a scanning electron microscope according to the present invention. It is a diagram. 1...Scanning signal generator, 2...Cathode ray tube for photography,
3... Electron beam deflection coil, 4... Imaging area setting circuit, 5... Imaging area setting switch, 6... Display area moving circuit. Agent Patent Attorney Tatsuyuki Unuma

Claims (1)

[Claims] 1. Take a photo of the image projected on the CRT image □
A vertical photographing device such as a scanning electron microscope is equipped with a photographing area setting circuit, and the photographing area setting circuit is capable of capturing an image before setting the photographing area in a set area of the image surface to take a photograph. Features of scanning electron microscope fj
i Image capturing device such as a mirror.