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JPS5769655A - Electron beam device - Google Patents

Electron beam device

Info

Publication number
JPS5769655A
JPS5769655A JP55145005A JP14500580A JPS5769655A JP S5769655 A JPS5769655 A JP S5769655A JP 55145005 A JP55145005 A JP 55145005A JP 14500580 A JP14500580 A JP 14500580A JP S5769655 A JPS5769655 A JP S5769655A
Authority
JP
Japan
Prior art keywords
secondary electron
count
signal
photographying
control circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55145005A
Other languages
Japanese (ja)
Inventor
Masanori Nakanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP55145005A priority Critical patent/JPS5769655A/en
Publication of JPS5769655A publication Critical patent/JPS5769655A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To perform the clear photographying of X-ray image and secondary electron image displayed simultaneously on the screen, by providing the secondary electron signal to a cathode ray tube only during the predetermined period of the electron beam scanning thereby improving the excessive exposure of the secondary electron image. CONSTITUTION:The vertical scanning signal from a scan signal generating circuit 4 is provided through an amplifier 18 to a counter 21 while the vertical scanning time is counted and provided to a control circuit 22. The control circuit 22 will control the switching circuits 11, 23, 24 in accordance to the count. In other word when photographying the screen by a camera 25 fixed to a cathode ray tube 16, the control circuit 22 will turn off the switch 11 if the count of the counter 21 is 1 thus to stop the provision of the secondary electron detector 9 signal to the cathode ray tube 16. While when the count will reach to the determined value, the switches 23, 24 are turned off thus to stop the provision of the scanning signal to the deflection coils 19, 17. Consenquently the exposure is performed only one time during the period of predetermined count. Consequently the excessive exposure of the secondary electron image is improved and the clear photographying can be performed.
JP55145005A 1980-10-16 1980-10-16 Electron beam device Pending JPS5769655A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55145005A JPS5769655A (en) 1980-10-16 1980-10-16 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55145005A JPS5769655A (en) 1980-10-16 1980-10-16 Electron beam device

Publications (1)

Publication Number Publication Date
JPS5769655A true JPS5769655A (en) 1982-04-28

Family

ID=15375242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55145005A Pending JPS5769655A (en) 1980-10-16 1980-10-16 Electron beam device

Country Status (1)

Country Link
JP (1) JPS5769655A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60154444A (en) * 1984-01-23 1985-08-14 Hitachi Naka Seiki Kk Image pick-up device of scanning type electron microscope etc.
WO2010115873A1 (en) * 2009-04-06 2010-10-14 Bruker Nano Gmbh Detector, device, and method for the simultaneous, energy-dispersive recording of backscattered electrons and x-ray quanta
US8368020B2 (en) 2009-02-09 2013-02-05 Carl Zeiss Microscopy Gmbh Particle beam system
US8450215B2 (en) 2009-08-07 2013-05-28 Carl Zeiss Microscopy Gmbh Particle beam systems and methods

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60154444A (en) * 1984-01-23 1985-08-14 Hitachi Naka Seiki Kk Image pick-up device of scanning type electron microscope etc.
US8368020B2 (en) 2009-02-09 2013-02-05 Carl Zeiss Microscopy Gmbh Particle beam system
US8368019B2 (en) 2009-02-09 2013-02-05 Carl Zeiss Microscopy Gmbh Particle beam system
WO2010115873A1 (en) * 2009-04-06 2010-10-14 Bruker Nano Gmbh Detector, device, and method for the simultaneous, energy-dispersive recording of backscattered electrons and x-ray quanta
US8450215B2 (en) 2009-08-07 2013-05-28 Carl Zeiss Microscopy Gmbh Particle beam systems and methods

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