JPS60141463A - Polishing device - Google Patents

Abstract

PURPOSE:To effect mirror polishing by rotating a polishing jig mounted to a head plate of a universal head and horizontally moving a slowly rotating work table. CONSTITUTION:A drive shaft 2 having a spherical lower end and a hollow upper end is inserted at the upper end thereof into a hollow portion at the lower end of a main shaft 1. The drive shaft 2 has at the middle portion thereof splines into which pawls of guide shoes 8 fixed to the lower end of the main shaft 1 are fitted to transmit rotational force from the main shaft 1 to the drive shaft 2. The spherical portion of the drive shaft 2 is held between a disc set plate 3 and a semispherical cavity at the central portion of a head plate 4 to which a polishing jig is mounted in such a manner as to be freely rotatable, inclined in a certain range of degrees with respect to the drive shaft 2. Moving shafts 13, 13' extend through a journal box 12 of a work table 11 for horizontally moving the work table 11 in the right and left directions. A polsihing jig is mounted to the main shaft 1 to polish a work placed on the work table 11.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a polishing machine for metals, hard fluoroplastics, etc., and is particularly suited for polishing nickel stampers for video discs, which require optical surface precision, and in particular for non-polishing. Polishing the lens transfer surface of spherical plastic lens molds,
The present invention relates to parts for a polishing Ffh machine for optically polishing an aspherical plastic lens itself.

Conventional optical polishing has been performed on other layers of glass lenses and prisms for a long time. However, these polishing methods are limited to flat and spherical surfaces.

In the field of optics, it has been desired for a long time how to polish aspherical surfaces, as well as the establishment of a measurement method. This is because the aspheric optical surface has extremely great advantages, such as the ability to easily correct spherical aberration, and it also allows for the application of new optical technology.

At the closest point in history, the range of optical applications for plastics has expanded, and for example, aspherical plastic lenses are being used for camera lenses, and hard plastics are being used for video disks, computer memory disks, etc. They are beginning to be used, and in order to manufacture them, it is desired to establish a new optical sacroiliac technology.

The actual situation of polishing in such fields is, for example, in the case of molds for molding aspherical plastic lenses and molds for disc molding.
The higher the precision required, the more difficult mechanical polishing becomes, and skilled workers with advanced polishing techniques must polish by hand, which takes a long time to complete, making it extremely inefficient and extremely time consuming. It has become expensive.

On the other hand, over the past few years, machine tools with dramatically improved machining accuracy have been developed, and a field called ultra-precision machines and machining has emerged. Super dense machining refers to, for example, suppressing the shape viscosity of a processed product to an error of 6 μm or less. The reasons why such high precision H% 4Jρ machining has been put into practical use are, firstly, that ultra-precision bearings such as empty@, nl+ bearings and hydrostatic oil bearings have been put into practical use, and secondly, Laser interferometers have come to be used to measure dimensions, shapes, etc., and thirdly, the quality of the cutting tools and grinding wheels used for machining is increasing. One example is the development of cutting and grinding tools made of bora gun (or cubic boron nitride), which is said to be the second hardest material.

Like this? ii. With O^R processing machines, it is possible to process materials such as metal and plastic deck into products with high dimensional and shape accuracy. Then, if optical surface precision is required, the required optical surface can be obtained by polishing the processed surface to a thickness of only a few μm.・ However, this type of polishing can be done mechanically for flat or spherical surfaces by applying the polishing technology for glass lenses or prisms as described above, but for aspherical surfaces or complex shapes, mechanical polishing is possible. The reality is that polishing of mold surfaces, which is often the case, can only be done by hand. Even in manual polishing, a handy polishing machine is used in part, but for example, a small polishing jig is moved linearly and reciprocatingly (vibrating) or rotated on a large workpiece. Finishing the entire surface of a workpiece to a high-precision optical surface is extremely difficult and requires skill.

For the first time, many aspects of the polishing mechanism are still academically unresolved, and even in the polishing of glass lenses, etc.
Many studies are still being conducted. The analysis of the stimulatory effects of metals and plastics is also an area that still needs to be actively worked on.

As a result of many years of research into removal polishing of minute portions of precision machined surfaces, the present inventor was able to conduct a certain degree of analysis of the polishing mechanism. The following four effects are mainly involved in micro part removal polishing.

(1) Scraping action (2) Pushing action (3) Welding action (4) Recombination action The above four actions differ greatly depending on the material of the surface to be polished. For example, the recombination effect (4) does not work on plastics, but works more strongly on metals with a crystalline structure than on amorphous metals, and is particularly effective at grain boundaries. It was also found that the melting action of (3) is more efficient when polishing plastics than metals.

In fibrillation work, one sharpening claw and a grinding liquid are interposed between the polishing jig and the polished surface of the workpiece, but at this time, the six parties: the polishing jig, the polishing blade, and the polished surface, I realized that I needed to give each one more consideration and action. When crystal structures with different hardness coexist, in general cell work, so-called tangerine skin (orange beer), which has minute irregularities at the grain boundaries, is used as raw material, but it is suitable for polishing jigs. We discovered that by applying a certain amount of pressure, a super-mirror surface can be obtained without causing orange peel, even for metals with such a eutectic multiphase structure.

More importantly, in the micro-polishing work targeted by the present invention, a new relationship was discovered between the relative motion applied to the above-mentioned 6-branch and the pressure applied to the polishing jig.

That is, conventionally, when considering automatic polishing, in order to increase polishing efficiency, the method of increasing the pressure applied to the polishing jig and increasing the relative movement as much as possible has been adopted. In this case, the polishing jig, polishing material, and polishing surface are rarely left in a free state, and in most cases, the polishing jig and polishing material are firmly fixed. In other words, a whetstone, a piece of sand,
This is a method of polishing with a WI[+ belt, polishing cloth, etc.

With such a polishing method, polishing efficiency can be improved, but precision polishing is difficult, and the shape accuracy of the polished surface is lost, resulting in a loss of optical value. The text itself has countless small scratches and the surface is soft, so K has its limits when used optically.

As a result of a detailed study of micro-polishing, the inventor of the present invention has determined whether it is a polishing jig or polishing. Note that the polishing surface and the polishing surface are in contact with each other but are free, and furthermore, the polishing n1 sheet ω
1. Grind the soil with the soil that has been captured to a certain extent and left to a certain extent free to elongate.
They discovered that by applying a relative parallel motion between the six members at a relatively slow speed, an extremely sharp sharpening tool 1 could be produced.

The polished surface becomes flattened little by little due to the interlocking movement of the surface. And what about abrasives? 〒41 with i7F polished surface
Due to one sudden attack or a collision between old comrades, it gradually collapses into smaller pieces. This makes polishing 511 even easier.
It becomes C. ω1 uniformly over the entire surface of the workpiece
For polishing, it is best to move the polishing grit and jig uniformly over the entire surface.

In such polishing, if the relative moving speed is increased, not only are deep scratches likely to occur on the polished surface, but also the amount of machining due to the grinding Kvc increases significantly, causing the shape of the polished surface to be distorted. It was also found that the accumulation of deep scratches gave the surface a tangerine-like appearance, making it impossible to print the final optical surface. Based on the above research results, the inventors of the present invention have succeeded in completing a precision polishing machine suitable for removing minute parts, as described below.

According to the polishing machine of the present invention, the surface of a plastic or metal workpiece can be shaped into a certain shape, not only on a flat or spherical surface, but also on an aspherical or conical surface, or even a complex three-dimensional curved surface such as a horse's saddle. If the size is within this range, it is possible to finish the optical surface with high precision.

To summarize the present invention, another layer is applied to the head plate of a rotating universal head that has been developed independently by using several polishing jigs of appropriate shapes and materials. In other words, the disk-shaped head plate itself, a presser plate, a drive shaft, two guide plates fixed to it, and a guide ball sandwiched between the guide plates.
A rotating universal head is constituted by a guide shaft connecting the guide pole and the head plate.1-
reactor. Rotational force from a motor or the like is transmitted from the main shaft to the drive shaft, from the drive shaft to the guide plate, and from the guide plate to the guide shaft. The polishing jig is rotated by the force transmitted to the head plate by the guide shaft, and the ωfM operation is performed.

By using a universal spatula that plays such a role, polishing can be performed with an appropriately shaped polishing jig always in contact with the polishing surface of the workpiece so as to be parallel to the polishing surface of the workpiece.

A universal mechanism works for the inclination of the polishing surface. The slope followability of the universal mechanism using the Shikajimoto run meter is as follows:
The rotation speed is up to about 'f60 ORPM. The polishing rate according to the present invention is 3 [I Q RP
Since it is less than M, there is more than enough rotation followability on an inclined surface. Furthermore, changes in the height of the polishing surface of the workpiece can be accommodated by sliding the fitting portions of the hollow ends of the main shaft and the drive shaft. The polishing pressure can be adjusted by inserting appropriate compression springs into the inner walls of the two shafts, but if you want to adjust the polishing pressure more precisely, you can use the main shaft or rotary drive. It is sufficient to provide a pneumatic or hydraulic pressure adjustment function on the prime mover side.

The deflection angle of the head plate with respect to the main shaft axis of the universal mechanism on the main installation side is within 25 degrees at maximum.

Therefore, if the main shaft axis is swung at an angle of 80 degrees or less relative to the vertical direction, the polishing jig will be able to handle almost any three-dimensional curved surface, unless the curvature is extremely small. Polishing can be performed by making proper contact with the surface.

Furthermore, in order to uniformly polish the entire polishing surface of the workpiece, the present invention is devised so that the stage on which the workpiece is placed is rotated extremely slowly and can be moved freely in the horizontal direction. Depending on the shape of the workpiece, excellent mirror polishing can be achieved by simply moving the rotary stage horizontally without rotating it. However, if the polishing allowance (polishing allowance) becomes thicker than 10 μm'l, it has been found that the rotation and horizontal movement of the workpiece alone will cause subtle non-uniformity on the polished surface. To prevent this, K also applies to universal heads where polishing jigs are scattered.
It has been found that it is sufficient to provide a horizontal movement motion (almost only in one direction) that is completely unrelated to the horizontal movement and rotation of the workpiece.

The present invention will be explained in detail below with reference to the drawings.

FIG. 1 shows a cross section of the main shaft and universal head. The tapered upper end of the main shaft (1) in the figure is guided by a rotating scroll chuck or the like to apply rotational force to the main shaft.

It is convenient if the length of this part is made appropriately long because the height of the universal head can be adjusted according to the height of the workpiece. A drive shaft 2 has a spherical lower end and a hollow upper end, and the upper end is inserted into the hollow portion of the lower end of the main shaft.

A spline is cut into the inside of the drive shaft 18j, and a flange is provided on the spherical side of the spline for fixing the guide plate 5 to the drive shaft.

The pawl of the idle shoe 8, which is fixed to the lower end of the main shaft, is fitted into the spline, so that the drive shaft can slide up and down by the length of the spline without coming off the main shaft. The rotational force is transmitted from the main shaft to the drive shaft by the engagement between the pawl and the spline.

Because the drive shaft can slide up and down, the length of the hollow part of the main shaft is several centimeters longer than the length of the spline of the drive shaft, in addition to the length of the part where the main shaft and drive shaft fit together. Make it meter long. By doing this, even if a compression spring for increasing the polishing pressure is inserted into the hollow portions of the main shaft and the drive shaft, it is possible to provide sufficient margin for the slide stroke. If the fitting tolerance between the main shaft and drive shaft can be kept small, the air in the hollow parts of the two shafts will act as a spring, and when you want to lower the polishing pressure, as in Delastic Sharpener 1, the material :・The spring is uncomfortable.

3 is a holding plate that holds the spherical portion of the drive shaft, and 4 is a head plate that has the same role and is used to attach a polishing jig. Both are disc-shaped, with the spherical part of the drive shaft sandwiched between the hemispherical space in the center and held in place with screws and nuts at several places. However, the force of the presser foot is the same for both the center hemispherical space and the surrounding hemispherical space for the kite shaft, which will be described later.
A section traces each shaft and is cut out again.

Thus, the two plates can rotate freely without slippage from the spherical part of the drive shaft, and can rotate kl in any direction at a constant angular rotation with respect to the axis of the drive shaft.
It can be tilted. At a certain distance from the center of the presser plate and head plate, there are at least two spherical cavities (up to 4 feed degrees), and in this part there is a cylindrical guide shaft with one end spherical. 60 Insert the spherical part. The cylindrical part of the guide shaft is sandwiched between the two idle plates 5 attached to the flanges of the drive shaft mentioned above, has one hole in the center, and rotates freely. The through hole is made to have a sufficient length so that it does not come off the guide ball as shown in the figure.

Thus, the head plate 4 is the light 1 of the drive shaft.
It is possible to continue rotating while maintaining a constant angle of inclination.

That is, if the polishing jig attached to the head plate has an appropriate shape, the surface of the polishing jig involved in polishing work can properly contact the polishing surface of the workpiece and rotate. When the head plate rotates at an angle with respect to the axis of the drive shaft, the guide shaft slides in the axial direction through the through hole of the guide ball, and the guide ball makes a meandering motion while moving the guide shaft. It conveys the rotational breakage to the

Reference numeral 9 in FIG. 1 is a guide pin 4 for the compression spring. The 10th screw hole is for a set screw (σ) for attaching a polishing jig.

&L 2 By explaining Figure 2a, Figure 2b, Figure 6, and Figure 4, you will be able to understand the overall picture of the present invention.

11 in Figures 2a and 2b is a rotary stage on which a workpiece is placed. The main shaft below the stage is fitted into thrust and radial bearings in a bearing box 12. Also, a Cheno sprocket is attached to the main shaft to rotate the stage. A small, high-torque, low-speed rotating motor 23 is attached to one corner of the 41h receiver box of the main shaft, and another chainsaw rocket i is fitted onto the main shaft of this motor.
A sprocket fitted to the main shaft of the previous stage is connected with a driving chino 24 to apply rotational force to the stage.

Moving shafts 13 and 13' for horizontally fixing the stage and horizontally moving the stage from side to side are passed through the bearing box of the main shaft of the stage. Of these, there is a thread cut into the 13' shaft, and this screw 11? : &' Fit one nut and fix the nut to the bearing box of the main shaft of the stage. By rotating the drive motor 14 of the shaft 13' in forward and reverse directions, the rotary transfer table can be moved left and right.

Figure 2a is a schematic view of the stage viewed from above, Figure 2b
The figure is a schematic view from the side. According to Fig. 2a, the two shafts supporting the bearing box surface of the main shaft of the stage, namely 13
It is clear how the positions 13' and 13' are arranged.

Of course, the support and movement axes 13 and 13' in the above description are not exclusive or essential in the manner illustrated in the present invention.

The gist of this part of the invention is to cause the rotary stage to move horizontally, and what corresponds to 13 and 13' is a sliding bearing, and the drive is carried out by a chevron. There is no problem even if it is a system using a pinion gear and a rack gear. This also applies to the subsequent explanations. In other words, for example, the method illustrated in this explanation is the only true method for moving the rotary stage back and forth, or for moving the polishing part according to claim 1 in the vertical and horizontal directions. It is not the object itself, but the very act of supporting and moving it, no matter how it is done, that is essential. Furthermore, a necessary condition for the present invention is that the abrasive component according to claim 1 is always used.

Now, in order to move the rotary stage back and forth in FIG.
6 and 16'.

A thread is cut on the shaft 16', and a nut fitted onto this thread is fixed to the movable bearing 15 on the shaft 16' side. By facing forward and rotating the shaft 16' drive motor 17 in forward and reverse directions, the rotary stage can be moved back and forth.

In this way, while rotating the stage, it can be moved from side to side and back and forth.

During sacroiliac work, the polishing jig is controlled by a timer or by computer control so that the length of time the polishing jig remains on the polishing surface is uniform over the entire surface of the polishing surface, or the motors 14 and 17 shown in FIGS. All you have to do is drive it.

Reference numeral 18 in FIGS. 2a and 2b shows the entire polishing machine, and for convenience, only the main parts are schematically shown when the false first and melon polishing machine is viewed from the side.

Since the movement of the rotary stage has already been described, most of it will be omitted.

FIG. 4 schematically shows the polishing machine shown in FIG. 6 viewed from above, and the pace 18 of the polishing machine shown in FIGS. 2 and 6 is omitted.

In FIGS. 6 and 4, reference numeral 19 denotes a motor for imparting rotational motion to the polishing component according to claim 1, which is suspended from the slider 21 by a hanger bin 20. 22 is a speed reducer for controlling the rotational speed of the motor 19, and a scroll chuck 25 attached thereto grips the main shaft of the polishing part. As shown in FIG. 6, a polishing jig 26 is attached to the main shaft 1 of the part to be polished, and a workpiece placed on a stage 27 is polished. Figure 6 shows that the main shaft 1 of the polishing component is set so that it is perpendicular to Y, and that the universal mechanism of the polishing component is working against the inclination of the polishing surface of the workpiece. ing.

In the slider 21, the device for gripping the bunker bin 20 is rotatable in a vertical plane,
Hold the hanger bin at any angle and place it on the steady rest bin 2.
This allows you to stop at 8. By doing this, the operating range of the universal mechanism of polishing parts can be
It can be made substantially larger.

As for the swinging mechanism of the hanger bin, by using a pulse motor etc., the angle of the hanger bin, that is, the angle relative to the main shaft of the polishing part can be automatically changed at will even during polishing. .

This greatly expands the capabilities of the universal mechanism for polishing parts, and as already mentioned, the polishing jig 26 can be used on almost any three-dimensional curved surface, except for those with very small curvature. Polishing work can be performed with proper contact at all times.

The slider 21 can be moved left and right above the slider movement shaft 30 by a slider drive motor 29.

Furthermore, bearings 31 and 3 at both ends of this slider moving shaft 300
1' is supported by four pillars 32 and 32' (32
The slider moving shaft 30 is supported horizontally at the required height by the "4".
The book supports 32 and 32'(32') are connected to two front and rear sliding shafts 33 and 33' placed on the polishing machine base 18.
It is vertically fixed on front and rear bearings 34 and 34' which are fitted into the front and rear bearings 34 and 34'.

The slider moving shaft 30 and the front and rear sliding shafts 33 and 33' are perpendicular to each other.

32 of the four pillars 32 and 32'(32')
' is threaded over approximately half the length of its upper part, and by rotating this support in forward and reverse directions using the vertical motor 35, it can be fitted into the threaded part of the support and the shaft 300 for moving the slider. By the movement of a nut fixed to the bearing 31', the slider moving shaft 30'Y can be moved up and down while being kept horizontal. That is, as a result, it is possible to move the polishing part.

Further, the front and rear bearings 34 and 34' can be moved back and forth on the front and rear sliding shafts 33 and 33' by a moving motor 36. Overall, through these mechanisms,
As a result, the polishing part χ can be adjusted to any degree with any quotient.
Moreover, the rotation axis, that is, the main shaft, can be arranged at any angle.

Furthermore, some key points regarding the actual production are as follows.

In FIG. 1, it is preferable to use hard and durable tool steel for the main shaft 1 and drive shaft 20.

Also, guide shoe 8, guide ball 1, head plate 4
A relatively soft material such as brass or gunmetal, which has good anti-slip properties, is suitable for the material.

The rotary stage 11 in FIG. 2 needs to be made sturdy. The flatness of the stage is also important. It is also important to make the main shaft at the bottom of the stage strong. What is important in FIGS. 6 and 4 is that the entire slider 21 be made sturdy and accurate so that it does not wobble during the polishing operation.

However, in the grinding work according to the present invention, the power required for the whole grinding machine is extremely small, and even when grinding a large mold, it only requires about 500 W at most, so it is sufficient to take this into consideration when manufacturing the machine.

Tool steel is suitable for the material of the hanger pin 20.
This means that the operating stroke of the front and rear sliding movement can be short. This depends on the technical factors of the polishing operation, but it is sufficient to consider approximately 20 to 40 strokes.

6 refers to common knowledge, but the four pillars 32 and 32
'(32')'? : Regarding the mechanism used to move the slider up and down on the guide, if the guide hole for sliding into the support is not made accurately and firmly in the bearings 31 and 31', for example, the slider will not be on the axis for moving the slider. If the shaft is in a biased position and an unbalanced load is applied to the shaft, it will act like a brake and will not move up and down properly.

In order to make this happen, it is better to make the length of the guide hole that slides into the support longer, or to use the Alicia method instead of using a heavy force method, for example, to make the slide P.

Examples will be described below.

Example 1 The size of the polishing parts shown in Fig. 1 was changed to 200m/200m in total height.
It was set as IT1. Also, the diameter of the hetsu r plate is 80Tn/
Closed. (Figure 1 is the actual size) Pace of polishing machine'1-
That is, 18 in FIGS. 2a, 2b, 6, and 4 was set to 600 "4X 450"/. ω
The total height of the polishing machine was 650 m. In Figures 2a and 2b, the output of the motor for rotating the m stage is 5.3W, and the output of the motor 19 for rotating the polishing parts at the rotation speed is 30W.
The rotating direction is clockwise, that is, the polishing jig and polishing surface face each other and rotate in opposite directions. All other drive motors for each movement and sliding had an output of 30 W, and were variable at a maximum of 15 RPM using a speed reducer.

The mounting table is made of stainless steel, and the thickness of the table is 201''l/
I named it Q. In addition, the control system for the movement, sliding, and swinging of the main shaft of the polishing part during polishing work, that is, the swing angle is set by the set screw 28 incorporated in the slider 21 in Figs. 6 and 4, is Depending on the shape of the surface and the filter requirements required for the polished surface, either a timer and limit switch method or a microcomputer-based 0/1゛ram:+7 trawling method can be used. In reality, program control is only suitable for polishing extremely complex molds; for most other polishing operations, the method using timers and limit switches is easier and more efficient. f) ivy.

A mold for a video disc was polished to 46,600°/f1 using a diamond compound abrasive.
．． 200, /161.81]0. Bian 3,000.16
Polishing was performed in the order of 8.0 mouth O (1) (number is the NBS %TJ of the abrasive grain, and the compound manufacturer's number according to the grade).

Traditional manual polishing requires approximately one week of polishing time.
The average surface roughness was 0.05 μm and the shape accuracy was 0.2 μm (approximately for the middle 5D), but according to this polishing method, it was 10
Time, surface roughness average 0.005 ttm, 0 for each shape
．． 05 μm.

Example 2 The special surface of a video disk stamper 〇) was polished using the above-mentioned polishing machine a. The stamper is made of nickel, and the thickness of the stamper is approximately 200 μm. As in Example 1, use the power earmon dofun pound to get 600~/T6.
Polished to 8.000 in 6 hours. The polishing type is approximately 20μ
The average compatibility of the surface after m1 polishing was 0.017zn+, and the maximum compatibility was 0.26 μm.

Manual layering required approximately 5 days and inevitably caused orange peel.

Example 6 Using the above polishing machine, the curvature was approximately 120 m/m, the diameter was 40
1/ Concave polishing of the lens mold insert u? went. The result of polishing using Diamond P compound to a diameter of 14,000 was N = 1 in the Newtonian fringe test.
, the maximum value of surface roughness was 0.005 μm. With manual polishing, the limit is about N; 4 in about 4 days, but with this polishing, the above polishing can be done in 8 hours, and the results are the same for all polishing methods. I was able to get it.

Example 4 An aspheric lens for video projection made of cross-linked polymethyl methacrylate and having an aperture of approximately 150 m/m and a maximum wall thickness of approximately 65 m/m was polished using the above polishing machine.

Using a special ream-shaped cerium oxide as the abrasive material, the diamond bite surface is polished to an optical surface in 15 minutes by ultra-precision machining. Therefore, polishing is completed in approximately 30 minutes per lens. The desired results were obtained.

In this 44% case, Suf0 ring was used for the fitting part of the main shaft and dry shaft of the ml parts.

According to Nuhonken Rekitsuki, it has been found that for workpieces made of the above-mentioned materials, if the '6ff ljr time is applied for 20 minutes or more, the shape precision t-C tends to be distorted.

Example 5 Upper t1] σ) A 4 mm diameter aspherical surface made of cross-linked polymethyl methacrylate was prepared using a universal machine polishing machine part with a diameter of 40 mm. Rensukedai) 1 capital city. With this lens, it was possible to narrow down the I91 beam of the Hθ-Ne radar to a spot intensity of 4 μm diameter.

[Brief explanation of the drawing]

Figure 1 is a cross-sectional view of the polishing part of the present invention, Figure 2a, Figure 2.
Figure b shows the part related to parts for a polishing machine of the present invention, excluding the polishing part and its peripheral equipment, Figure 2a shows a plan view, and Figure 2
Figure b is a side view, Figure 6 is a side view of the main part of the present invention, and Figure 4 is a plan view thereof. 1... Main shaft 4... Head plate 11... Work stand 26... Polishing jig 2T... Work agent Asamura Proceedings Amendment Group (Voluntary) February 7, 1980 To the Commissioner of the Patent Office 1, Indication of Case 1981 1'J#'FI Zo 1 No. 246682 No. 2,
Part 3 for polishing the name of the invention, Person making the amendment $1'1 Relationship with 1:'1 Applicant (1, Name, 2.19 Hikari Energy Applied Research Institute Co., Ltd. 4, Agent 5) , Supplement 11 Order F1 A] Month 11 6, Showa 6, Number of inventions increased by the supplement 7, Detailed explanation column of the invention in the subject specification of I1E Drawing 8, Contents of the hli correction As attached (1 ) "Plate stand 27" on page 20, line 20 of the specification is replaced with "
Corrected to ``Storage stand 11''. (2) Change “work” in the first line of page 21 to “work 27”.
” is corrected. (3) Change “Medium 650” in the 9th line of page 27 to [Diameter 5
Corrected to 0fiJ. (4) Figure 3 of the drawings will be corrected as shown in red ink on the attached drawings.

Claims (1)

[Claims] (1) A main shaft having a hollow shape at one end for being gripped by a rotating gripping tool such as a scroll chuck; 5.
, one end is hollow and the other end is spherical, and a spline of a certain length is cut in the middle part,
Insert the hollow side of the drive shaft having a flange into the spherical end of the spline, and insert a guy shoe with a claw that fits into the 77++ section into the groove of the spline of the drive shaft. The shoe is fixed to the medium protruding end of the main shaft to prevent it from coming off or rotating freely from the drive shaft or main shaft. It is sandwiched between two disc-shaped plates with a hemispherical space corresponding to the area, namely the presser plate and the head plate, and is fastened at several places with screws and nuts, and the spherical shape at the center of the two plates is At a certain distance from the space, there is a spherical space for two or more guide shafts, that is, a hemispherical space for each plate, in which one end is spherical, and the spherical part of the guide shaft is located at a certain distance from the space. The cylindrical other end of the guide shaft is sandwiched between two disc-shaped guide plates attached to the flange of the drive shaft, and penetrates through the center of the guide pole, which is free to rotate in any direction. The guide ball is set to pass through the hole, and the position of the guide ball on the guide plate corresponds to the position of the presser foot or the spherical space for the guide shaft on the head plate. Thus, the polishing part can be rotated by rotation of the main shaft while maintaining a constant angle with respect to the horizontal plane within a constant angle range with respect to the surface of the head plate or the axis of the main shaft. . (2. A polishing component according to claim 1, in which a rotary stage on which an object to be polished is placed at a certain distance is movable in a horizontal plane while rotating. (3) In the polishing component according to claim 1, the main shaft axis can be moved at an angle of less than 80 degrees with respect to the vertical direction, and can be moved in the horizontal and vertical directions. Polishing parts made of