JPS6012189B2 - Processing equipment such as crystal resonators - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to processing equipment for lenses, crystal resonators, etc.

Until now, for example, there have been almost no examples of Furano Compex type crystal resonators that have been put into practical use, except for a few large resonators, due to the lack of suitable processing methods.

One polishing method for this type of crystal resonator is to manually polish the spherical surface by pressing the crystal piece against a spherical polishing plate with your fingers. However, since it is done manually, it is inefficient and causes an increase in costs. Uniform machining is difficult because force is applied with the fingertips, there is a risk of polishing one side of the material, and the cutting angle of the crystal blank is distorted, resulting in poor temperature characteristics. There is a drawback that it also invites the downside. In addition, when polishing a crystal resonator using a spherical lens polisher, the crystal pieces are bonded with adhesive, so the thickness of the adhesive layer is difficult to maintain and uneven polishing, that is, one-sided polishing, is likely to occur. It was difficult to check the thickness of the pieces.

Therefore, the present invention provides a processing device that can process a crystal oscillator and the like while swinging a processing plate having a spherical processing surface, and can prevent the workpiece from being processed partially and obtain accurate sphericity. It is something to do. Further, the present invention enables piezoelectric detection during processing of a workpiece such as a crystal oscillator, making it easy to measure the thickness of the workpiece. Further, the present invention provides a processing machine such as a polishing device that can be operated unmanned.

Therefore, to explain the specific structure of the present invention, in FIG. 1, frame plates 2 and 3 are mounted on a board 1 at a predetermined interval, and bearings 4 and 5 are fixed to the upper parts of the frame plates 2 and 3. However, an arm shaft 6 is loosely connected to the bearing 4, and an arm shaft 7 is inserted into the bearing 5.

A rocking body 8 is attached between the arm shafts 6 and 7, and is fixed to the arm shaft 6 with a key 9 and swings with the arm shaft 7. A bearing hem 0 passes through the bottom plate of the rocking body 8 and is fixed with nuts 11 and 12, and a shaft 13 is rotatably supported on the bearing IQ via bearing parts 14 and 15.
A processing plate, for example, a lap plate 16 for polishing, is screwed onto the upper threaded portion of the shaft 13, and a pulley 17 is attached to the lower end.
is pivoted with a nut 18. And wrap plate 16
A spherical machined surface 16a is formed on the surface 16a, and this spherical surface is centered at the intersection of the bag center line A-A of the wristbands 6 and 7 and the center line of the shaft 13 that supports the wrap plate 16, and the spherical surface is It is a spherical surface whose radius is the distance R from the processing surface 16a.The rotation driving means for the lapping plate 16 is a motor 19 attached to the oscillator 8 and a pulley pivoted to the drive shaft of the speed reduction mechanism 20, as shown in the second figure. It has a structure in which a belt 21a is stretched between the two pieces and the pulley 17. Also, the rocking means of the rocking body 8 includes the first,
2. As shown in FIG. 2, one end of a link 26 is connected to a shaft 25 protruding from the outer periphery of a rotary plate 24 which is rotated at a constant speed by a motor 22 and a reducer 23, and the other end of this link is connected to an arm shaft 6 with a nut 27. The other end of the link 28 and the pin 2
They are connected via 9. Next, a chuck means for chucking a workpiece and a rotation driving means for this means will be explained. In FIG. 1, a support column 30 is installed horizontally on the substrate 1, and an arm 31 is rotatably supported by a ratchet 32 at the upper end of the support column. Reference numeral 30a is a stepped portion that restricts the rotation angle of the arm 31.

A bearing 33 is inserted vertically into the tip of the arm 31, and insulation pushers 35, 35 are inserted by nuts 34, 34.
has been fixed through. Insulated push is not required if there is no piezoelectric detection. A rotary shaft 36 is rotatably inserted into the bearing 33, and is supported by a bearing portion 37 and a double nut 381 at a predetermined position. Rotating axis 3
The upper end of a rotating shaft 39 is screwed onto the lower end of the rotating shaft 39, and a chuck means 40 is provided at the lower end of the rotating shaft 39. rotating shaft 36,
The center line of 39 coincides with the center line of axis 13 mentioned above. A cavity 33a is provided in the center of the inner peripheral surface of the bearing 33, and hollow parts 33b and 31a, which fit into this cavity, are the bearing 3.
3 and arm 311 are drilled. Cavity part 33a
are hollow portions 36a that penetrate the inguinal portions of the rotating shafts 36 and 39;
It is being carried to 39a. The structure of the chuck means 40 attached to the lower end of the rotating shaft 39 is as shown in the fourth and fifth figures.
A suction port 39b of a hollow portion 39a is opened below the rotating shaft 39, and a shaft 41 is fixed below the suction port 39b, and the lower end is a hemispherical portion 39c.
2 is attached with a slight gap so that it can move up and down.
The cover unit 42 has an internal gap 42a, is prevented from being separated from the rotating shaft 39 by the shaft 41, and when in contact with the shaft 41 closes the suction port 39b as shown in the fifth figure. Reference numeral 43 denotes a chuck tool, which has a matching groove 43a formed on its lower surface for engaging the workpiece 44, and pongee holes 43b, 43b passing through from the matching groove 43a to the top surface of the chuck tool.

A conical hole 43c is formed in the center of the upper surface of the chuck tool 43, and is joined to the hemispherical portion 39c at the lower end of the rotating shaft with a gap therebetween. Reference numerals 45 and 45 indicate drive pins provided on the chuck tool 43 and rotate the chuck tool 43 together with the rotating shaft 39 by engaging with the shaft 41.

Since there is a slight gap between the integral cover 42 and the rotating shaft 39, the upper surface of the chuck tool 43 and the lower surface of the integral cover 42 are always in close contact even if the chuck tool 43 is slightly bent. Also, the workpiece material 4
4 is not bonded to the chuck tool 43 with an adhesive or the like, but is adsorbed, so piezoelectricity can be easily detected when polishing a piezoelectric element such as a crystal piece. As shown in FIGS. 6 to 8, if a stopper pin 43d is embedded in the chuck tool 43 and a cutout side 44a is provided in the workpiece 44 to engage with the stopper pin 43d, "rotation between the chuck tool 43 and the workpiece 44" This prevents idling and is advantageous in piezoelectric detection.The hollow portions 3a and 33b constituting the depressurizing passage, the hollow portions 33a and 36a and 39a are arranged in the arm as shown in FIG. 3. Pass the lotus through the nozzle 46 protruding from the side of the turtle. Since this nozzle is connected to a pressure reduction or vacuum pump (not shown), the pressure in the inner gap 42a of the cover 42 is reduced, and the workpiece 44 is mounted. In the reduced pressure state, the chuck tool 43 maintains the state shown in FIG. 4. Next, the workpiece 44
The pressurizing means for pressing the spherical machined surface 6a will be described below.

An engaging protrusion 47 is attached to the tip of the arm 31. An L-shaped locking plate 49 is attached to one end of the cover plate 48 installed on the upper end surfaces of the frame plates 2 and 3. The engagement groove 49a of the locking plate 49 has the engagement protrusion 4.
7 is possible. A heavy twill 51 is joined to the small diameter portion of the engagement protrusion 47 . Next, the rotation driving means for the rotating shaft 36 that rotates the chuck means 40 will be explained.

A mounting plate 52 projects from the base end of the arm 31, and a motor 53 is mounted at the tip of the mounting plate 52.

The pulley 5 attached to the drive shaft 54 of the motor 53
5, pulleys 58 and 59 supported by bearings 56 and 57 shielded by the sides of the neck of the arm 3, and a pulley 601 attached to the upper end of the rotating shaft 36, as shown in the third figure. is winding. Next, the operation of the present invention will be explained.

In the state shown in FIG. 1, the arm 31 is swung clockwise about the shaft 32 and held there.

At this time, the chuck means 0' is in a state as shown in Figure 5. Iron matching groove 43 bored on the lower surface of chuck tool 43
The workpiece 44 is iron-coupled to the position shown in FIG.
2a is depressurized. Therefore, the workpiece 44 is suctioned by the small holes 43b, 43b formed in the chuck tool 43.Next, the arm 31 is swung counterclockwise, and the workpiece 44 is placed on the spherical processing surface 16a. and press the car key 51 against this spherical processed surface.The force that presses the workpiece 44 against the spherical processed surface 16a acts only in the direction of the engagement register 49a where the engagement protrusion 47 engages.Motor 199 22,
When the chuck 53 is driven, the lap blood 16 rotates and begins to swing, and the chuck means 40 holding the workpiece 44 also rotates. At this time, an abrasive or the like is being supplied to the spherical processed surface 16a. And the spherical processed surface 16a of the lap plate 16
Since the center of the spherical surface coincides with the center of oscillation of the oscillator 8, there is no risk that the workpiece 4M will be machined into pieces. Further, in the chuck tool 43, the conical hole 43a is pressed by the hemispherical part 39c at the lower end of the rotating shaft 39 with a degree of freedom, and there is a slight gap between the rotating shaft 39 and the cover unit 42. Even when the chuck tool 43 is inclined, the workpiece 44 uniformly contacts the spherical processing surface 16a over its entire circumference, so that no one piece of material is processed and processing is performed uniformly.

Since the circumferential speed near the center of the spherical processing surface 16a is low and processing is slow, the processing time can be shortened by excluding the center part of the swinging motion of the oscillator 8. After the machining is completed, first the motor 19,
By stopping the operation of 22, 53, the lap blood 16
The rotation and swinging motion of the chuck means 40 are stopped, and the arm 31 is lifted to stop the vacuum pump.

Therefore, since no reduced pressure is applied to the chuck means 40, the chuck odor 43 can be removed, and the chuck tool 43 can be removed.
When the cover 42 is removed, the cover 42 moves downward under its own weight as shown in FIG. 5, and closes the suction port 39b. The workpiece 44 can then be easily removed from the chuck tool 43. In this embodiment, processing of a planoconvex type crystal resonator has been described, but the processing apparatus of the present invention is also capable of polishing a biconvex type and a beveling type crystal resonator.

When polishing a bicombex type crystal resonator, prepare a chuck tool with a spherical groove surface on the workpiece, and place the workpiece that has been polished on one side upside down into this chuck tool. All you have to do is join them together and polish the other side. Note that it is sufficient to rotate either one of the wrapped blood 16 and the chuck means 40.

As described above, according to the present invention, since the processing plate is oscillated during processing, it is possible to process the workpiece with accurate sphericity, and it is also possible to completely prevent the processing of one piece of meat, and the temperature characteristics are good and the quality is stable. It is possible to mass produce crystal oscillators. Furthermore, since the processing plate uses its entire processing surface uniformly,
There is no uneven wear and a long life can be achieved. By pressing the center part of the chuck means, the workpiece is uniformly joined to the spherical processing surface over the entire circumference, so that one-sided processing can be more completely prevented.

If both the processing plate and the chuck means are rotated at the same time, the processing time can be significantly reduced.

When the pressing force of the pressurizing means is based on the gravity of the weight, the pressing force of the weight is static and stable compared to when using a spring or the like.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, and FIG. 1 is a cross-sectional view.
Fig. 2 is a left side view, Fig. 3 is a plan view, Fig. 4 is a cross-sectional view of the chuck means with the material to be polished mounted, Fig. 5 is a cross-sectional view of the same as above when the workpiece is not in machining operation, and Fig. 6 is Bottom view of chuck tool,
FIG. 7 is a cross-sectional view taken along the skin line of the plate shown in FIG. 6, and FIG. 8 is an enlarged front view of the workpiece. 2, 3...Frame body, 8...Rocking body, stove 6...
... Processing plate, 16a... Spherical processing surface, 17...
Pulley, amount 9...Motor, 21...Pulley 22...Motor, 24...Rotating plate ~ 26, 28...
Link, 38...Arm, 36, 39...Rotating shaft, 39c...Semispherical portion 48...Chuck means, 43...Chuck tool, 43c...Conical hole, 4
7... Engaging protrusion, turtle 9... Locking plate, 49a
......Engagement groove, 51...Wheel weight, 53...Motor, 65, 60...Pulley. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 ? Diagram Groove Diagram

Claims (1)

[Scope of Claims] 1. A support, a rocking body that is rockably supported by the support and swings during processing, and a processing plate disposed on the rocking body.
A spherical processing surface formed on the processing plate, a chuck means for the workpiece, a pressure means for pressurizing a central portion of the chuck means to uniformly press the workpiece against the spherical processing surface, and the processing plate. and said chuck means during machining, and said swinging means for said swinging body, said spherical machining surface being located between said swinging center of said swinging body and said chuck means and said processing plate. A processing device for a crystal resonator, etc., which has a spherical surface whose center is the intersection with the center line and whose radius is the distance between this intersection and the spherical processing surface. 2. A processing apparatus for a crystal resonator or the like according to claim 1, characterized in that both the processing plate and the chuck means are provided with rotational drive means. 3. A processing device for a crystal resonator or the like according to claim 1, wherein the pressurizing means is based on the gravity of a weight.